JP5037241B2 - 半導体装置の製造方法及び半導体装置の製造装置 - Google Patents
半導体装置の製造方法及び半導体装置の製造装置 Download PDFInfo
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- JP5037241B2 JP5037241B2 JP2007175888A JP2007175888A JP5037241B2 JP 5037241 B2 JP5037241 B2 JP 5037241B2 JP 2007175888 A JP2007175888 A JP 2007175888A JP 2007175888 A JP2007175888 A JP 2007175888A JP 5037241 B2 JP5037241 B2 JP 5037241B2
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- semiconductor wafer
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- 239000004065 semiconductor Substances 0.000 title claims description 190
- 238000004519 manufacturing process Methods 0.000 title claims description 37
- 235000012431 wafers Nutrition 0.000 claims description 166
- 239000000126 substance Substances 0.000 claims description 84
- 238000012545 processing Methods 0.000 claims description 63
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 37
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 32
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 29
- 230000008569 process Effects 0.000 claims description 19
- 239000007788 liquid Substances 0.000 claims description 14
- 239000002253 acid Substances 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 150000007513 acids Chemical class 0.000 claims 2
- 239000010408 film Substances 0.000 description 100
- 239000002245 particle Substances 0.000 description 50
- 239000000243 solution Substances 0.000 description 43
- 238000007689 inspection Methods 0.000 description 25
- 238000012993 chemical processing Methods 0.000 description 18
- 238000012546 transfer Methods 0.000 description 17
- 238000010586 diagram Methods 0.000 description 12
- 239000000758 substrate Substances 0.000 description 12
- 239000007864 aqueous solution Substances 0.000 description 11
- 238000003672 processing method Methods 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 9
- 238000005468 ion implantation Methods 0.000 description 9
- 238000001035 drying Methods 0.000 description 6
- 239000008155 medical solution Substances 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 230000032258 transport Effects 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 239000008119 colloidal silica Substances 0.000 description 5
- 238000009826 distribution Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 239000011259 mixed solution Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000010129 solution processing Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40117—Multistep manufacturing processes for data storage electrodes the electrodes comprising a charge-trapping insulator
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/792—Field effect transistors with field effect produced by an insulated gate with charge trapping gate insulator, e.g. MNOS-memory transistors
- H01L29/7923—Programmable transistors with more than two possible different levels of programmation
Description
12a、12b 酸化シリコン膜
20a トンネル酸化膜
20b 酸化膜
40 表面
42 裏面
50 半導体ウエハ
52 薬液槽
62 薬液
Claims (11)
- 半導体ウエハの半導体素子を形成すべき面である表面及び該表面の反対の面である裏面に絶縁膜を形成する工程と、
前記半導体ウエハを1枚ずつ処理する枚葉処理装置を用い、処理対象の前記半導体ウエハの前記裏面に選択的に第1薬液を供給することにより、前記裏面に形成された前記絶縁膜を除去する工程と、
複数の前記半導体ウエハを、前記裏面に形成された前記絶縁膜を除去した後に、第2薬液に同時に浸漬させることにより、前記表面に形成された前記絶縁膜を除去する工程と、を有することを特徴とする半導体装置の製造方法。 - 前記絶縁膜は、酸化シリコン及び窒化シリコンの少なくとも一方を含むことを特徴とする請求項1記載の半導体装置の製造方法。
- 前記絶縁膜は酸化シリコン膜であることを特徴とする請求項1記載の半導体装置の製造方法。
- 前記第1薬液及び前記第2薬液は、酸であることを特徴とする請求項1または2記載の半導体装置の製造方法。
- 前記第1薬液及び前記第2薬液は弗酸を含むことを特徴とする請求項3記載の半導体装置の製造方法。
- 前記裏面に形成された前記絶縁膜を除去する工程の前に、前記半導体ウエハの前記表面にイオン注入する工程を有することを特徴とする請求項1から5のいずれか一項記載の半導体装置の製造方法。
- 前記裏面に形成された前記絶縁膜を除去する工程の前に、前記裏面が半導体製造装置のチャックに接触する工程を有することを特徴とする請求項1から5のいずれか一項記載の半導体装置の製造方法。
- 前記絶縁膜を形成する工程は、トンネル酸化膜を形成する工程であることを特徴とする請求項1から5のいずれか一項記載の半導体装置の製造方法。
- 半導体ウエハの半導体素子を形成すべき面である表面の反対の面である裏面に選択的に第1薬液を供給することにより、前記裏面に形成された第1絶縁膜を除去する第1処理部と、
第2薬液に複数の前記半導体ウエハを浸漬させることにより、前記表面に形成された第2絶縁膜を除去する第2処理部と、
複数の前記半導体ウエハを1枚ずつ前記第1処理部で処理させ、その後前記複数の半導体ウエハを同時に前記第2処理部で処理させる制御部と、を具備する半導体装置の製造装置。 - 前記第1薬液及び前記第2薬液は、酸であることを特徴とする請求項9記載の半導体装置の製造装置。
- 前記第1薬液及び前記第2薬液は弗酸を含むことを特徴とする請求項9記載の半導体装置の製造装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007175888A JP5037241B2 (ja) | 2007-07-04 | 2007-07-04 | 半導体装置の製造方法及び半導体装置の製造装置 |
US12/166,290 US9263249B2 (en) | 2007-07-04 | 2008-07-01 | Method and apparatus for manufacturing semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007175888A JP5037241B2 (ja) | 2007-07-04 | 2007-07-04 | 半導体装置の製造方法及び半導体装置の製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009016515A JP2009016515A (ja) | 2009-01-22 |
JP5037241B2 true JP5037241B2 (ja) | 2012-09-26 |
Family
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JP2007175888A Expired - Fee Related JP5037241B2 (ja) | 2007-07-04 | 2007-07-04 | 半導体装置の製造方法及び半導体装置の製造装置 |
Country Status (2)
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US (1) | US9263249B2 (ja) |
JP (1) | JP5037241B2 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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US10632857B2 (en) | 2016-08-17 | 2020-04-28 | Shape Corp. | Battery support and protection structure for a vehicle |
EP3566253B1 (en) | 2017-01-04 | 2022-12-28 | Shape Corp. | Battery support structure for a vehicle |
WO2018213306A1 (en) | 2017-05-16 | 2018-11-22 | Shape Corp. | Vehicle battery tray having tub-based component |
WO2018213383A1 (en) | 2017-05-16 | 2018-11-22 | Shape Corp. | Vehicle battery tray with integrated battery retention and support features |
US10483510B2 (en) | 2017-05-16 | 2019-11-19 | Shape Corp. | Polarized battery tray for a vehicle |
US11088412B2 (en) | 2017-09-13 | 2021-08-10 | Shape Corp. | Vehicle battery tray with tubular peripheral wall |
WO2019071013A1 (en) | 2017-10-04 | 2019-04-11 | Shape Corp. | BATTERY SUPPORT BOTTOM ASSEMBLY FOR ELECTRIC VEHICLES |
EP3759761A4 (en) | 2018-03-01 | 2021-09-08 | Shape Corp. | COOLING SYSTEM INTEGRATED IN VEHICLE BATTERY COMPARTMENT |
US11688910B2 (en) | 2018-03-15 | 2023-06-27 | Shape Corp. | Vehicle battery tray having tub-based component |
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US5296385A (en) * | 1991-12-31 | 1994-03-22 | Texas Instruments Incorporated | Conditioning of semiconductor wafers for uniform and repeatable rapid thermal processing |
WO1995004372A1 (en) * | 1993-07-30 | 1995-02-09 | Semitool, Inc. | Methods for processing semiconductors to reduce surface particles |
JPH0927469A (ja) * | 1995-07-13 | 1997-01-28 | Fujitsu Ltd | 半導体装置の製造方法 |
US5879576A (en) * | 1996-05-07 | 1999-03-09 | Hitachi Electronics Engineering Co., Ltd. | Method and apparatus for processing substrates |
US6002202A (en) * | 1996-07-19 | 1999-12-14 | The Regents Of The University Of California | Rigid thin windows for vacuum applications |
JP3192620B2 (ja) * | 1996-10-24 | 2001-07-30 | キヤノン株式会社 | 電子装置の製造方法 |
JP3120425B2 (ja) * | 1998-05-25 | 2000-12-25 | 旭サナック株式会社 | レジスト剥離方法及び装置 |
JP2001176833A (ja) * | 1999-12-14 | 2001-06-29 | Tokyo Electron Ltd | 基板処理装置 |
JP3945561B2 (ja) * | 2000-06-30 | 2007-07-18 | 日本電子株式会社 | 引出電極の作製方法 |
US6875284B2 (en) * | 2002-01-23 | 2005-04-05 | Semitool, Inc. | Side-specific cleaning method and apparatus |
JP4123861B2 (ja) * | 2002-08-06 | 2008-07-23 | 株式会社Sumco | 半導体基板の製造方法 |
JP3924551B2 (ja) * | 2003-05-30 | 2007-06-06 | アプライド マテリアルズ インコーポレイテッド | Soiウェハ製造方法 |
US7122484B2 (en) * | 2004-04-28 | 2006-10-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Process for removing organic materials during formation of a metal interconnect |
KR100604051B1 (ko) * | 2004-06-30 | 2006-07-24 | 동부일렉트로닉스 주식회사 | 게이트 산화막의 전세정방법 |
US7448395B2 (en) * | 2004-07-19 | 2008-11-11 | Texas Instruments Incorporated | Process method to facilitate silicidation |
US7432177B2 (en) * | 2005-06-15 | 2008-10-07 | Applied Materials, Inc. | Post-ion implant cleaning for silicon on insulator substrate preparation |
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2007
- 2007-07-04 JP JP2007175888A patent/JP5037241B2/ja not_active Expired - Fee Related
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- 2008-07-01 US US12/166,290 patent/US9263249B2/en active Active
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Publication number | Publication date |
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US20090011600A1 (en) | 2009-01-08 |
US9263249B2 (en) | 2016-02-16 |
JP2009016515A (ja) | 2009-01-22 |
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