JP5031459B2 - 粗微移動装置及びそれを備えた液体供給装置 - Google Patents

粗微移動装置及びそれを備えた液体供給装置 Download PDF

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Publication number
JP5031459B2
JP5031459B2 JP2007169293A JP2007169293A JP5031459B2 JP 5031459 B2 JP5031459 B2 JP 5031459B2 JP 2007169293 A JP2007169293 A JP 2007169293A JP 2007169293 A JP2007169293 A JP 2007169293A JP 5031459 B2 JP5031459 B2 JP 5031459B2
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JP
Japan
Prior art keywords
moving body
coarse
fine movement
moving
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007169293A
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English (en)
Japanese (ja)
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JP2009006433A5 (enExample
JP2009006433A (ja
Inventor
誠一 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2007169293A priority Critical patent/JP5031459B2/ja
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to PCT/JP2008/057771 priority patent/WO2009001611A1/ja
Priority to KR1020097003085A priority patent/KR101057104B1/ko
Priority to CN2008800006621A priority patent/CN101541472B/zh
Priority to US12/377,210 priority patent/US8049454B2/en
Priority to TW097115529A priority patent/TWI376580B/zh
Publication of JP2009006433A publication Critical patent/JP2009006433A/ja
Publication of JP2009006433A5 publication Critical patent/JP2009006433A5/ja
Application granted granted Critical
Publication of JP5031459B2 publication Critical patent/JP5031459B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/601—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism a single sliding pair followed parallelly by a single sliding pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • G—PHYSICS
    • G12—INSTRUMENT DETAILS
    • G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18568—Reciprocating or oscillating to or from alternating rotary
    • Y10T74/18576—Reciprocating or oscillating to or from alternating rotary including screw and nut

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Coating Apparatus (AREA)
  • Details Of Measuring And Other Instruments (AREA)
JP2007169293A 2007-06-27 2007-06-27 粗微移動装置及びそれを備えた液体供給装置 Expired - Fee Related JP5031459B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2007169293A JP5031459B2 (ja) 2007-06-27 2007-06-27 粗微移動装置及びそれを備えた液体供給装置
KR1020097003085A KR101057104B1 (ko) 2007-06-27 2008-04-22 비정밀/정밀 이동 장치 및 이를 포함하는 액체 공급 장치
CN2008800006621A CN101541472B (zh) 2007-06-27 2008-04-22 粗微移动装置
US12/377,210 US8049454B2 (en) 2007-06-27 2008-04-22 Rough and fine movement device, and liquid supply device incorporating the same
PCT/JP2008/057771 WO2009001611A1 (ja) 2007-06-27 2008-04-22 粗微移動装置及びそれを備えた液体供給装置
TW097115529A TWI376580B (en) 2007-06-27 2008-04-28 Rough-fine movement device and liquid supply apparatus including the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007169293A JP5031459B2 (ja) 2007-06-27 2007-06-27 粗微移動装置及びそれを備えた液体供給装置

Publications (3)

Publication Number Publication Date
JP2009006433A JP2009006433A (ja) 2009-01-15
JP2009006433A5 JP2009006433A5 (enExample) 2009-04-09
JP5031459B2 true JP5031459B2 (ja) 2012-09-19

Family

ID=40185434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007169293A Expired - Fee Related JP5031459B2 (ja) 2007-06-27 2007-06-27 粗微移動装置及びそれを備えた液体供給装置

Country Status (6)

Country Link
US (1) US8049454B2 (enExample)
JP (1) JP5031459B2 (enExample)
KR (1) KR101057104B1 (enExample)
CN (1) CN101541472B (enExample)
TW (1) TWI376580B (enExample)
WO (1) WO2009001611A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102540455B (zh) * 2010-12-30 2014-09-17 上海微电子装备有限公司 一种微动马达机构及其驱动方法
CN103350352B (zh) * 2013-07-16 2016-09-07 苏州怡信光电科技有限公司 用于精密件加工的高速数控机床
WO2015087411A1 (ja) * 2013-12-11 2015-06-18 住友化学株式会社 加工装置および加工方法
CN110573263B (zh) * 2017-04-21 2021-12-14 诺信公司 分配系统
DE102018200551A1 (de) * 2018-01-15 2019-07-18 Festool Gmbh Bearbeitungsvorrichtung

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5485678A (en) 1977-12-20 1979-07-07 Canon Inc High accuracy alignment method for air bearing guide system xy stage
FR2586853B1 (fr) 1985-08-30 1988-07-29 Suisse Electronique Microtech Dispositif de micropositionnement
JPH0566592A (ja) 1991-09-10 1993-03-19 Canon Inc 電子写真感光体、該電子写真感光体を備えた電子写真装置並びにフアクシミリ
JPH0566592U (ja) * 1992-02-20 1993-09-03 ブラザー工業株式会社 粗微動装置
JPH07128467A (ja) * 1993-11-02 1995-05-19 Canon Inc 微動駆動担体
JPH07241743A (ja) * 1994-03-08 1995-09-19 Chichibu Onoda Cement Corp 超精密微動装置
JPH07270559A (ja) * 1994-03-31 1995-10-20 Chichibu Onoda Cement Corp 密封式超精密微動装置
JP3688904B2 (ja) * 1998-09-07 2005-08-31 光洋精工株式会社 球面軸受
JP3619791B2 (ja) 2001-06-26 2005-02-16 株式会社 日立インダストリイズ ペースト塗布機
JP2003288839A (ja) * 2002-03-28 2003-10-10 Canon Inc 液体塗布装置及び液体塗布方法、描画装置及び描画方法
DE102004020990B4 (de) 2004-04-23 2008-05-21 Schott Ag Vorrichtung und Verfahren zur Erzeugung von Mikrostrukturen
EP1764183B1 (de) 2004-04-23 2009-04-01 Schott AG Vorrichtung und Verfahren zur Erzeugung von Mikrostrukturen
CN103439863B (zh) * 2004-06-09 2016-01-06 株式会社尼康 曝光装置、曝光方法、元件制造方法及维护方法
CN1716456A (zh) * 2005-04-28 2006-01-04 武汉理工大学 纳米级定位精度一维位移工作台
JP2007136417A (ja) * 2005-11-22 2007-06-07 Ulvac Japan Ltd 塗布装置
KR100688378B1 (ko) 2005-12-08 2007-03-02 주식회사 세스코 이송테이블의 미세조정 장치

Also Published As

Publication number Publication date
KR20090064528A (ko) 2009-06-19
TW200907616A (en) 2009-02-16
JP2009006433A (ja) 2009-01-15
WO2009001611A1 (ja) 2008-12-31
KR101057104B1 (ko) 2011-08-16
TWI376580B (en) 2012-11-11
US8049454B2 (en) 2011-11-01
US20100175490A1 (en) 2010-07-15
CN101541472A (zh) 2009-09-23
CN101541472B (zh) 2011-06-22

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