CN101541472B - 粗微移动装置 - Google Patents

粗微移动装置 Download PDF

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Publication number
CN101541472B
CN101541472B CN2008800006621A CN200880000662A CN101541472B CN 101541472 B CN101541472 B CN 101541472B CN 2008800006621 A CN2008800006621 A CN 2008800006621A CN 200880000662 A CN200880000662 A CN 200880000662A CN 101541472 B CN101541472 B CN 101541472B
Authority
CN
China
Prior art keywords
moving body
coarse
fine movement
contact
driving mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2008800006621A
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English (en)
Chinese (zh)
Other versions
CN101541472A (zh
Inventor
佐藤诚一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of CN101541472A publication Critical patent/CN101541472A/zh
Application granted granted Critical
Publication of CN101541472B publication Critical patent/CN101541472B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/601—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism a single sliding pair followed parallelly by a single sliding pair
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • G—PHYSICS
    • G12—INSTRUMENT DETAILS
    • G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18568—Reciprocating or oscillating to or from alternating rotary
    • Y10T74/18576—Reciprocating or oscillating to or from alternating rotary including screw and nut

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Coating Apparatus (AREA)
  • Details Of Measuring And Other Instruments (AREA)
CN2008800006621A 2007-06-27 2008-04-22 粗微移动装置 Expired - Fee Related CN101541472B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007169293A JP5031459B2 (ja) 2007-06-27 2007-06-27 粗微移動装置及びそれを備えた液体供給装置
JP169293/2007 2007-06-27
PCT/JP2008/057771 WO2009001611A1 (ja) 2007-06-27 2008-04-22 粗微移動装置及びそれを備えた液体供給装置

Publications (2)

Publication Number Publication Date
CN101541472A CN101541472A (zh) 2009-09-23
CN101541472B true CN101541472B (zh) 2011-06-22

Family

ID=40185434

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008800006621A Expired - Fee Related CN101541472B (zh) 2007-06-27 2008-04-22 粗微移动装置

Country Status (6)

Country Link
US (1) US8049454B2 (enExample)
JP (1) JP5031459B2 (enExample)
KR (1) KR101057104B1 (enExample)
CN (1) CN101541472B (enExample)
TW (1) TWI376580B (enExample)
WO (1) WO2009001611A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102540455B (zh) * 2010-12-30 2014-09-17 上海微电子装备有限公司 一种微动马达机构及其驱动方法
CN103350352B (zh) * 2013-07-16 2016-09-07 苏州怡信光电科技有限公司 用于精密件加工的高速数控机床
WO2015087411A1 (ja) * 2013-12-11 2015-06-18 住友化学株式会社 加工装置および加工方法
US11433418B2 (en) 2017-04-21 2022-09-06 Nordson Corporation Dispensing system
DE102018200551A1 (de) * 2018-01-15 2019-07-18 Festool Gmbh Bearbeitungsvorrichtung

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1716456A (zh) * 2005-04-28 2006-01-04 武汉理工大学 纳米级定位精度一维位移工作台
CN1946514A (zh) * 2004-04-23 2007-04-11 肖特股份公司 用于形成微结构的装置和方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5485678A (en) 1977-12-20 1979-07-07 Canon Inc High accuracy alignment method for air bearing guide system xy stage
FR2586853B1 (fr) 1985-08-30 1988-07-29 Suisse Electronique Microtech Dispositif de micropositionnement
JPH0566592A (ja) 1991-09-10 1993-03-19 Canon Inc 電子写真感光体、該電子写真感光体を備えた電子写真装置並びにフアクシミリ
JPH0566592U (ja) * 1992-02-20 1993-09-03 ブラザー工業株式会社 粗微動装置
JPH07128467A (ja) 1993-11-02 1995-05-19 Canon Inc 微動駆動担体
JPH07241743A (ja) 1994-03-08 1995-09-19 Chichibu Onoda Cement Corp 超精密微動装置
JPH07270559A (ja) 1994-03-31 1995-10-20 Chichibu Onoda Cement Corp 密封式超精密微動装置
JP3688904B2 (ja) * 1998-09-07 2005-08-31 光洋精工株式会社 球面軸受
JP3619791B2 (ja) * 2001-06-26 2005-02-16 株式会社 日立インダストリイズ ペースト塗布機
JP2003288839A (ja) 2002-03-28 2003-10-10 Canon Inc 液体塗布装置及び液体塗布方法、描画装置及び描画方法
JP5079496B2 (ja) 2004-04-23 2012-11-21 ショット アクチエンゲゼルシャフト 微細構造を形成するための装置および方法
WO2005122218A1 (ja) * 2004-06-09 2005-12-22 Nikon Corporation 露光装置及びデバイス製造方法
JP2007136417A (ja) * 2005-11-22 2007-06-07 Ulvac Japan Ltd 塗布装置
KR100688378B1 (ko) 2005-12-08 2007-03-02 주식회사 세스코 이송테이블의 미세조정 장치

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1946514A (zh) * 2004-04-23 2007-04-11 肖特股份公司 用于形成微结构的装置和方法
CN1716456A (zh) * 2005-04-28 2006-01-04 武汉理工大学 纳米级定位精度一维位移工作台

Also Published As

Publication number Publication date
JP5031459B2 (ja) 2012-09-19
JP2009006433A (ja) 2009-01-15
TWI376580B (en) 2012-11-11
US20100175490A1 (en) 2010-07-15
KR101057104B1 (ko) 2011-08-16
KR20090064528A (ko) 2009-06-19
TW200907616A (en) 2009-02-16
CN101541472A (zh) 2009-09-23
US8049454B2 (en) 2011-11-01
WO2009001611A1 (ja) 2008-12-31

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GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110622