JP5029126B2 - 三塩化ホウ素製造用ホウ酸担持活性炭及びその製法 - Google Patents
三塩化ホウ素製造用ホウ酸担持活性炭及びその製法 Download PDFInfo
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- JP5029126B2 JP5029126B2 JP2007120585A JP2007120585A JP5029126B2 JP 5029126 B2 JP5029126 B2 JP 5029126B2 JP 2007120585 A JP2007120585 A JP 2007120585A JP 2007120585 A JP2007120585 A JP 2007120585A JP 5029126 B2 JP5029126 B2 JP 5029126B2
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- JP
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- Prior art keywords
- boric acid
- activated carbon
- boron trichloride
- production
- supported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims description 64
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 title claims description 19
- 238000004519 manufacturing process Methods 0.000 title description 10
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical class OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 claims description 22
- 239000004327 boric acid Substances 0.000 claims description 16
- 239000007864 aqueous solution Substances 0.000 claims description 11
- 238000001035 drying Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Landscapes
- Carbon And Carbon Compounds (AREA)
Description
グラスライニングの容器に水1125Ｌを加えて80℃まで加熱した後、ホウ酸375kgを加えて完全に溶解させて25質量％のホウ酸水溶液を得た。次いで、当該ホウ酸水溶液に活性炭（クラレケミカル社製；４ＧＳ）920kgを加え、活性炭にホウ酸を担持させた後、200℃で水を除去して乾燥させ、ホウ酸の担持割合が28％である三塩化ホウ素製造用ホウ酸担持活性炭1277gを得た。
Claims (1)
- 飽和ホウ酸水溶液に活性炭を加えてホウ酸を担持させ、次いで、水分を除去して１８０℃〜２００℃で乾燥させた高純度三塩化ホウ素製造用ホウ酸担持活性炭。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007120585A JP5029126B2 (ja) | 2007-05-01 | 2007-05-01 | 三塩化ホウ素製造用ホウ酸担持活性炭及びその製法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007120585A JP5029126B2 (ja) | 2007-05-01 | 2007-05-01 | 三塩化ホウ素製造用ホウ酸担持活性炭及びその製法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012070516A Division JP5500195B2 (ja) | 2012-03-27 | 2012-03-27 | 三塩化ホウ素製造用ホウ酸担持活性炭及びその製法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008273794A JP2008273794A (ja) | 2008-11-13 |
| JP5029126B2 true JP5029126B2 (ja) | 2012-09-19 |
Family
ID=40052271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007120585A Active JP5029126B2 (ja) | 2007-05-01 | 2007-05-01 | 三塩化ホウ素製造用ホウ酸担持活性炭及びその製法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5029126B2 (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010111550A (ja) * | 2008-11-07 | 2010-05-20 | Ube Ind Ltd | 高純度三塩化ホウ素及びその製造方法 |
| JP5617956B2 (ja) * | 2013-04-30 | 2014-11-05 | 宇部興産株式会社 | 高純度三塩化ホウ素の製造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5857368B2 (ja) * | 1980-02-13 | 1983-12-20 | 宇部興産株式会社 | 三塩化ホウ素の製造方法 |
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2007
- 2007-05-01 JP JP2007120585A patent/JP5029126B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008273794A (ja) | 2008-11-13 |
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