JP5016870B2 - 微小流路の製造方法 - Google Patents

微小流路の製造方法 Download PDF

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Publication number
JP5016870B2
JP5016870B2 JP2006220558A JP2006220558A JP5016870B2 JP 5016870 B2 JP5016870 B2 JP 5016870B2 JP 2006220558 A JP2006220558 A JP 2006220558A JP 2006220558 A JP2006220558 A JP 2006220558A JP 5016870 B2 JP5016870 B2 JP 5016870B2
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substrate
cured product
liquid
manufacturing
cured
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Japanese (ja)
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JP2008044045A5 (https=
JP2008044045A (ja
Inventor
護 塚田
隆博 江崎
進 安田
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Canon Inc
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Canon Inc
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  • Physical Or Chemical Processes And Apparatus (AREA)
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JP2006220558A 2006-08-11 2006-08-11 微小流路の製造方法 Expired - Fee Related JP5016870B2 (ja)

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JP2006220558A JP5016870B2 (ja) 2006-08-11 2006-08-11 微小流路の製造方法

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JP2006220558A JP5016870B2 (ja) 2006-08-11 2006-08-11 微小流路の製造方法

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JP2008044045A JP2008044045A (ja) 2008-02-28
JP2008044045A5 JP2008044045A5 (https=) 2009-08-20
JP5016870B2 true JP5016870B2 (ja) 2012-09-05

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JP2006220558A Expired - Fee Related JP5016870B2 (ja) 2006-08-11 2006-08-11 微小流路の製造方法

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5503239B2 (ja) * 2009-09-25 2014-05-28 株式会社朝日Ｆｒ研究所 シリンジ用ガスケットに摺動性被膜を形成する方法、摺動性被膜が形成されたシリンジ用ガスケット、及びプレフィルドシリンジ
JP6721454B2 (ja) * 2016-08-10 2020-07-15 シチズン時計株式会社 時計用部品

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4533256B2 (ja) * 2004-06-28 2010-09-01 キヤノン株式会社 微細構造体の製造方法および液体吐出ヘッドの製造方法
JP2006189292A (ja) * 2005-01-05 2006-07-20 Ulvac Japan Ltd マイクロ流路デバイス及びその製造方法

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