JP5008014B2 - ワイヤクランピング用のワイヤボンディング装置及び方法、ボールの自動的形成方法、並びにワイヤボンディング部 - Google Patents
ワイヤクランピング用のワイヤボンディング装置及び方法、ボールの自動的形成方法、並びにワイヤボンディング部 Download PDFInfo
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- JP5008014B2 JP5008014B2 JP2004372150A JP2004372150A JP5008014B2 JP 5008014 B2 JP5008014 B2 JP 5008014B2 JP 2004372150 A JP2004372150 A JP 2004372150A JP 2004372150 A JP2004372150 A JP 2004372150A JP 5008014 B2 JP5008014 B2 JP 5008014B2
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
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- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Wire Bonding (AREA)
Description
112 プリボンディングステージ
120 配線基板
122 基板パット
122a ダミー基板パット
124 半導体チップ
126 電極パット
130 ワイヤボンディング部
131 トランスデューサー
132 キャピラリ
133 ワイヤクランプ
134 ドライバー
135 専用制御機
136 通信ボード
137 ホストコンピューター
138 WBMS
139 ワイヤスプール
140 エアテンション部
141 ワイヤ
146 ワイヤテール
149 ボール
150 ワイヤボンディング装置
244 補助クランプ
245 センサー
Claims (27)
- 少なくとも一つ以上の半導体チップを有する少なくとも一つ以上の配線基板を移送する移送レールと
前記半導体チップと配線基板をワイヤで電気的に接続するワイヤボンディング部と、を有し、
前記ワイヤボンディング部は、ワイヤを受容するキャピラリを有するトランスデューサーと、
前記キャピラリと一緒に移動するワイヤクランプと、
前記トランスデューサーでの電気の流れをチェックするワイヤボンディング・モニタリングシステムと、
前記ワイヤボンディング・モニタリングシステムにて、ワイヤボンディングが行なわれる間に、前記トランスデューサーに電流を流して該電流の流れをチェックするとともに、前記ワイヤが切断された場合は、前記トランスデューサーに流れる電流値の変化を感知し、その電流値の変化により検出されるワイヤ断線信号に基づき、前記断線されたワイヤを固定する専用制御機と、を有し、
さらに、前記移送レールに設置され、前記断線されたワイヤの端を切断するプリボンディングステージ、を有することを特徴とするワイヤボンディング装置。 - 前記プリボンディングステージは、前記移送レールが設置された方向に所定の長さで設置されることを特徴とする請求項1に記載のワイヤボンディング装置。
- 前記ワイヤボンディング部は、ワイヤスプールと前記移送レールの間に配置され、前記ワイヤを固定する補助クランプも有することを特徴とする請求項1に記載のワイヤボンディング装置。
- 前記補助クランプは、前記キャピラリの下向きにワイヤを引き出し一対のローラであることを特徴とする請求項3に記載のワイヤボンディング装置。
- 前記補助クランプは、前記ワイヤクランプと交代でワイヤを固定し、前記トランスデューサーの上下移動でワイヤを前記キャピラリの下向きに引き出し固定板のセットであることを特徴とする請求項3に記載のワイヤボンディング装置。
- 前記トランスデューサーは、上端が前記補助クランプの下端に接近するように第1方向に移動し、前記ワイヤクランプの下端が前記補助クランプの上端に接近するように第1方向の逆方向である第2方向に移動することを特徴とする請求項5に記載のワイヤボンディング装置。
- 前記キャピラリの下端から引き出されるワイヤのワイヤテールに形成されるボールの位置を測定するために、前記キャピラリの下方に設置されたセンサーをさらに有することを特徴とする請求項3に記載のワイヤボンディング装置。
- ワイヤボンディング・モニタリングシステムにて、ワイヤボンディングが行なわれる間に、トランスデューサーに電流を流して該電流の流れをチェックするとともに、ワイヤが切断された場合は、前記トランスデューサーに流れる電流値の変化を感知し、その電流値の変化により検出されるワイヤ断線信号に基づき、ワイヤクランプを閉じて断線されたワイヤを、該ワイヤがキャピラリの外に離脱する前にクランピングする段階と、
ワイヤテールを形成する特定の位置にワイヤを移動させる段階と、
前記ワイヤクランプを開けて前記キャピラリの下端に所定の長さのワイヤを引き出す段階と、
前記引き出されたワイヤを、ワイヤテールを形成する特定の位置にフリーワイヤボンディングする段階と
前記ワイヤテールに高電圧放電を加えてボールを形成する段階と、を有することを特徴とするボールの自動的形成方法。 - 前記ワイヤクランプによって固定された前記ワイヤの端は、前記キャピラリの中に位置することを特徴とする請求項8に記載のボールの自動的形成方法。
- 前記ワイヤテールを形成する特定の位置は、プリボンディングステージであることを特徴とする請求項8に記載のボールの自動的形成方法。
- 前記ワイヤテールを形成する特定の位置は、配線基板のダミー基板パットであることを特徴とする請求項8に記載のボールの自動的形成方法。
- 前記ワイヤを特定の位置に移動させる段階は、
前記トランスデューサーを前記配線基板上から前記特定の位置に移動させる段階と、
前記トランスデューサーを前記特定の位置の上端面に移動させる段階と、を有することを特徴とする請求項8に記載のボールの自動的形成方法。 - 前記ワイヤ引き出しの段階は、
前記トランスデューサーに超音波振動を加えて前記キャピラリの下向きに前記ワイヤを引き出す段階と、
開いた前記ワイヤクランプを閉じる段階と、を有することを特徴とする請求項12に記載のボールの自動的形成方法。 - 前記ワイヤ引き出し段階は、
所定の高さで前記トランスデューサーが上昇し、前記キャピラリの下向きに前記ワイヤを引き出す段階と、
前記ワイヤクランプを閉じる段階と、
ボールを形成する位置に前記トランスデューサーが下降する段階と、を有することを特徴とする請求項12に記載のボールの自動的形成方法。 - 前記ワイヤクランプ及び前記キャピラリの間に配置される補助クランプにより前記ワイヤを固定することをさらに有する請求項12に記載のボールの自動的形成方法。
- 前記補助クランプは、一対のローラで、
前記ワイヤ引き出しの段階は、
前記一対のローラが前記ワイヤを固定した後、前記ワイヤクランプを開く段階と、
前記ローラの回転により前記ワイヤを前記キャピラリの下向きに引き出す段階と、
前記ワイヤクランプを閉じてワイヤを固定した後、前記ローラを開く段階と、を有することを特徴とする請求項15に記載のボールの自動的形成方法。 - 前記補助クランプは一対の固定板で、
前記ワイヤ引き出しの段階は、
前記補助クランプによりワイヤをクランピングした後、前記ワイヤクランプを開く段階と、
所定の高さに前記トランスデューサーが上昇し、前記キャピラリの下向きに所定の長さのワイヤを引き出す段階と、
前記ワイヤクランプを閉じてワイヤを固定した後、閉じた前記補助クランプを開く段階と、
ボールを形成する位置に前記トランスデューサーが下降する段階と、を有することを特徴とする請求項15に記載のボールの自動的形成方法。 - 前記ワイヤ引き出し段階の後、前記キャピラリの下向きに所定の長さのワイヤが引き出されたか否かを検出する段階をさらに有することを特徴とする請求項8に記載のボールの自動的形成方法。
- 前記検出の段階は、
前記トランスデューサーが前記特定の位置に下降する段階と、
前記引き出されたワイヤと前記特定の位置との接触有無による前記トランスデューサーでの電気の流れをモニタリングしてワイヤを検出する段階と、を有することを特徴とする請求項18に記載のボールの自動的形成方法。 - 前記検出の段階は、
前記ワイヤで高電圧放電を加える段階と、
前記トランスデューサーでの電気の流れをモニタリングしてワイヤを検出する段階と、を有することを特徴とする請求項18に記載のボールの自動的形成方法。 - 前記フリーワイヤボンディングは、ウェッジ・ボンディングであることを特徴とする請求項8に記載のボールの自動的形成方法。
- 前記フリーワイヤボンディングは、ボールボンディングであることを特徴とする請求項8に記載のボールの自動的形成方法。
- 前記ワイヤを前記特定の位置から配線基板に移動する段階と、
半導体チップ及び前記配線基板をつなぐ1回のワイヤボンディングをする段階と、
ワイヤボンディングされた部分のオフセットの有無を検査する段階と、をさらに有することを特徴とする請求項8に記載のボールの自動的形成方法。 - 半導体チップと基板を電気的に接続するワイヤが内部のワイヤ引き出しの方向に通過するように受容するキャピラリを有するトランスデューサーと、
前記ワイヤ引き出し方向に前記キャピラリの上方に位置するワイヤクランプと、
前記トランスデューサーでの電気の流れをモニタリングしてワイヤ断線を示す電気の流れの変化を感知し、ワイヤ断線信号を発生するワイヤボンディング・モニタリングシステムと、
前記ワイヤボンディング・モニタリングシステムにて、ワイヤボンディングが行なわれる間に、前記トランスデューサーに電流を流して該電流の流れをチェックするとともに、前記ワイヤが切断された場合は、前記トランスデューサーに流れる電流値の変化を感知し、その電流値の変化により検出されるワイヤ断線信号に基づき、前記断線されたワイヤを固定する専用制御機と、を有することを特徴とするワイヤボンディング装置。 - トランスデューサーを振動させてキャピラリの下端にワイヤを引き出す段階と、
前記トランスデューサーでの電気の流れをモニタリングする段階と、
ワイヤ断線を示す電気の流れの変化を感知し、ワイヤの断線信号を発生させる段階と、を有するワイヤ固定方法において、
システムは前記ワイヤの断線信号を発生させ、その信号を、ワイヤクランプを制御する専用制御機に伝送し、
前記専用制御機では、ワイヤボンディングが行なわれる間に、前記トランスデューサーに電流を流して該電流の流れをチェックするとともに、前記ワイヤが切断された場合は、前記トランスデューサーに流れる電流値の変化を感知し、その電流値の変化により検出されるワイヤ断線信号に基づき、前記断線されたワイヤを、該ワイヤが前記キャピラリの外に離脱する前に固定することを特徴とするワイヤボンディング工程のワイヤを固定する方法。 - 請求項8の方法により、ワイヤ断線信号に基づき、断線されたワイヤをキャピラリの外に離脱する前にクランピングし、ワイヤテールを形成する特定の位置に該ワイヤを移動させ、前記ワイヤクランプを開けて前記キャピラリの下端に所定の長さの該ワイヤを引き出し、該引き出されたワイヤを、ワイヤテールを形成する特定の位置にフリーワイヤボンディングするとともに、該ワイヤテールに高電圧放電を加えてボールを自動形成することを特徴とするワイヤボンディング装置。
- 請求項25の方法により、ワイヤボンディング工程で断線されたワイヤを、該ワイヤがキャピラリの外に離脱する前にワイヤクランプで固定することを特徴とするワイヤボンディング装置。
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