JP5007753B2 - 位置センサ - Google Patents
位置センサ Download PDFInfo
- Publication number
- JP5007753B2 JP5007753B2 JP2010091107A JP2010091107A JP5007753B2 JP 5007753 B2 JP5007753 B2 JP 5007753B2 JP 2010091107 A JP2010091107 A JP 2010091107A JP 2010091107 A JP2010091107 A JP 2010091107A JP 5007753 B2 JP5007753 B2 JP 5007753B2
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- JP
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- Prior art keywords
- sensor
- coil array
- coil
- detection circuit
- output
- Prior art date
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- 238000001514 detection method Methods 0.000 claims description 39
- 238000003491 array Methods 0.000 claims description 23
- 238000009499 grossing Methods 0.000 claims description 19
- 238000004364 calculation method Methods 0.000 description 14
- 238000012937 correction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000006870 function Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 239000000284 extract Substances 0.000 description 2
- 238000013213 extrapolation Methods 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000013528 artificial neural network Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/24495—Error correction using previous values
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Optical Transform (AREA)
Description
前記複数のセンサ部は各々コイルアレイから成り、
複数のコイルアレイを駆動する共通の駆動電源と、
コイルアレイの出力を位置に変換する検出回路と、
前記検出回路を複数のコイルアレイ間で兼用するように、複数のコイルアレイの出力を選択的に検出回路に入力するスイッチとを設けて、
複数のセンサ部が共に位置を出力する区間において、スイッチの切り替えにより、複数のコイルアレイからの出力を交互に共通の検出回路で位置に変換するようにすると共に、
前記区間の入口から出口まで、位置センサの出力が連続的に変化するように、前記区間では、各センサ部からの出力に基づく位置を組合せて位置センサの出力とするスムージング部を設けたことを特徴とする。
b・sinα・cosωt に相当する信号を出力する。このためには例えば ωt でπ/2 分、信号を遅延させ、さらに正負を反転させる。加算器21は演算増幅器18からの
b・cosα・sinωt と位相シフター20からの b・sinα・cosωt の信号を加算し、加法定理により b・sin(ωt+α) に相当する信号を出力する。
(1) 一対のコイルから共に信号が得られる重複区間で、位置センサからの出力が不連続に変化しない。このため位置センサの信号を制御に用いるサーボシステムなどに過大な負担が加わらない。
(2) D=DL−(DL−DR)×X/L1 として位置センサの出力を求めると、簡単な演算で位置を求めることができ、しかも重複区間全体に誤差を分散できる。
(3) 検出回路を共用すると、コスト的に有利であるのみでなく、検出回路のばらつきによる誤差が生じない。
(4) 予測演算部により現在位置を予測すると、検出回路を共用するため、同時には左右の指示値が得られないとの問題を解消できる。またほぼ任意の時点で現在の指示値を予測できる。さらに重複区間以外でも、コイルアレイを駆動する交流周期にかかわらず、指示値を出力できる。
4 交流電源回路
6 検出回路
8 スムージング部
10,11 信号線
12 タイマ
13 テーブル
14 D/Aコンバータ
16 スイッチ
18,19 演算増幅器
20 位相シフター
21 加算器
22 カウンタ
30 オフセット補正部
31 メモリ
32 予測演算部
m1,m2 磁気マーク
L,R コイルアレイ
C1-1〜C3-4 コイル
D 指示値
t 時刻
P1,P2 コイルアレイの出力
L1 重複部の長さ
X 重複部内の相対座標
Claims (2)
- 位置を求めるための複数のセンサ部を備え、用いるセンサ部を切り替えながら移動体の位置を出力する位置センサにおいて、
前記複数のセンサ部は各々コイルアレイから成り、
複数のコイルアレイを駆動する共通の駆動電源と、
コイルアレイの出力を位置に変換する検出回路と、
前記検出回路を複数のコイルアレイ間で兼用するように、複数のコイルアレイの出力を選択的に検出回路に入力するスイッチとを設けて、
複数のセンサ部が共に位置を出力する区間において、スイッチの切り替えにより、複数のコイルアレイからの出力を交互に共通の検出回路で位置に変換するようにすると共に、
前記区間の入口から出口まで、位置センサの出力が連続的に変化するように、前記区間では、各センサ部からの出力に基づく位置を組合せて位置センサの出力とするスムージング部を設けたことを特徴とする、位置センサ。 - 前記区間において、各コイルアレイからの出力に基づく位置を外挿することにより、コイルアレイ毎の仮の現在位置を求めるための手段を設けて、前記スムージング部では、コイルアレイ毎の仮の現在位置を組合せて、位置センサの出力とすることを特徴とする、請求項1の位置センサ。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010091107A JP5007753B2 (ja) | 2010-04-12 | 2010-04-12 | 位置センサ |
CN201110080184.3A CN102235883B (zh) | 2010-04-12 | 2011-03-25 | 位置传感器及位置检测方法 |
KR1020110027795A KR101420118B1 (ko) | 2010-04-12 | 2011-03-28 | 위치 센서와 위치 검출 방법 |
SG2011021672A SG175500A1 (en) | 2010-04-12 | 2011-03-28 | Position detector and position detection method |
EP11161184.4A EP2378241B1 (en) | 2010-04-12 | 2011-04-05 | Position detector and position detection method |
US13/080,920 US8854034B2 (en) | 2010-04-12 | 2011-04-06 | Position detector and position detection method |
TW100112392A TWI493308B (zh) | 2010-04-12 | 2011-04-11 | 位置感測器及位置檢測方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010091107A JP5007753B2 (ja) | 2010-04-12 | 2010-04-12 | 位置センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011220874A JP2011220874A (ja) | 2011-11-04 |
JP5007753B2 true JP5007753B2 (ja) | 2012-08-22 |
Family
ID=44314204
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010091107A Active JP5007753B2 (ja) | 2010-04-12 | 2010-04-12 | 位置センサ |
Country Status (7)
Country | Link |
---|---|
US (1) | US8854034B2 (ja) |
EP (1) | EP2378241B1 (ja) |
JP (1) | JP5007753B2 (ja) |
KR (1) | KR101420118B1 (ja) |
CN (1) | CN102235883B (ja) |
SG (1) | SG175500A1 (ja) |
TW (1) | TWI493308B (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4835960B2 (ja) | 2009-04-24 | 2011-12-14 | 村田機械株式会社 | 移動体システム |
JP5333537B2 (ja) * | 2011-07-22 | 2013-11-06 | 村田機械株式会社 | 移動体システムと移動体の走行制御方法 |
JP6377335B2 (ja) * | 2013-10-28 | 2018-08-22 | 日本電産サンキョー株式会社 | 検出装置におけるデータ検出方法および検出装置 |
US11185954B2 (en) | 2017-11-30 | 2021-11-30 | Canon Kabushiki Kaisha | Transport system, transport method, and article manufacturing method |
EP3706297A1 (de) * | 2019-03-07 | 2020-09-09 | B&R Industrial Automation GmbH | Verfahren zum steuern eines langstatorlinearmotors |
CN114067546B (zh) * | 2020-07-29 | 2023-04-18 | 深圳绿米联创科技有限公司 | 位置检测方法、装置及电子设备 |
JP7455694B2 (ja) | 2020-07-29 | 2024-03-26 | 株式会社Fuji | 移動体の制御方法及び移動体制御システム |
CA3189288A1 (en) * | 2020-08-12 | 2022-02-17 | Selskabet Af 6. April 2010 Aps | Suspension of electromagnetic receiver coil |
KR102293015B1 (ko) | 2021-03-24 | 2021-08-24 | 주식회사 비카누스 | 공간 정보 기반의 경로 데이터 및 센서 데이터 매칭 시스템 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
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DE3325353A1 (de) * | 1983-07-14 | 1985-01-24 | Honeywell Gmbh | Positionssensor |
JP2648181B2 (ja) * | 1988-08-31 | 1997-08-27 | オ−クマ株式会社 | リニアエンコーダ |
US5311116A (en) * | 1992-04-02 | 1994-05-10 | Electronic Development, Inc. | Multi-channel electromagnetically transparent voltage waveform monitor link |
JP4043793B2 (ja) * | 2002-01-31 | 2008-02-06 | オークマ株式会社 | 移動装置 |
US6910657B2 (en) * | 2003-05-30 | 2005-06-28 | Raytheon Company | System and method for locating a target and guiding a vehicle toward the target |
JP4027345B2 (ja) | 2004-05-24 | 2007-12-26 | ファナック株式会社 | 光学式エンコーダ |
US7432497B2 (en) * | 2005-09-29 | 2008-10-07 | Mitutoyo Corporation | Absolute linear encoder |
GB2432063B (en) * | 2005-11-01 | 2009-09-09 | Zetex Semiconductors Plc | A multiplexer |
JP4214533B2 (ja) * | 2006-08-10 | 2009-01-28 | 村田機械株式会社 | 移動体システム |
US20080113102A1 (en) * | 2006-11-13 | 2008-05-15 | Takashi Arai | Agents for the surface treatment of zinc or zinc alloy products |
JP4217918B2 (ja) * | 2006-11-28 | 2009-02-04 | 村田機械株式会社 | 移動体システム |
JP2008140144A (ja) * | 2006-12-01 | 2008-06-19 | Murata Mach Ltd | 走行台車とそのシステム |
US7902817B2 (en) * | 2007-03-26 | 2011-03-08 | General Electric Company | Electromagnetic tracking method and system |
JP4868159B2 (ja) * | 2007-06-19 | 2012-02-01 | 村田機械株式会社 | リニアスケール |
JP2009014454A (ja) * | 2007-07-03 | 2009-01-22 | Tokai Rika Co Ltd | 位置検出装置 |
US8279401B2 (en) * | 2008-04-25 | 2012-10-02 | Asml Netherlands B.V. | Position control system, a lithographic apparatus and a method for controlling a position of a movable object |
JP4438882B2 (ja) * | 2008-05-12 | 2010-03-24 | 村田機械株式会社 | 移動体システム |
-
2010
- 2010-04-12 JP JP2010091107A patent/JP5007753B2/ja active Active
-
2011
- 2011-03-25 CN CN201110080184.3A patent/CN102235883B/zh active Active
- 2011-03-28 KR KR1020110027795A patent/KR101420118B1/ko active IP Right Grant
- 2011-03-28 SG SG2011021672A patent/SG175500A1/en unknown
- 2011-04-05 EP EP11161184.4A patent/EP2378241B1/en active Active
- 2011-04-06 US US13/080,920 patent/US8854034B2/en active Active
- 2011-04-11 TW TW100112392A patent/TWI493308B/zh active
Also Published As
Publication number | Publication date |
---|---|
EP2378241A1 (en) | 2011-10-19 |
TWI493308B (zh) | 2015-07-21 |
KR101420118B1 (ko) | 2014-07-16 |
KR20110114442A (ko) | 2011-10-19 |
TW201144960A (en) | 2011-12-16 |
JP2011220874A (ja) | 2011-11-04 |
US8854034B2 (en) | 2014-10-07 |
US20110248707A1 (en) | 2011-10-13 |
EP2378241B1 (en) | 2016-08-31 |
CN102235883B (zh) | 2015-09-09 |
SG175500A1 (en) | 2011-11-28 |
CN102235883A (zh) | 2011-11-09 |
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