JP5003782B2 - 圧電振動片、圧電振動子および加速度センサ - Google Patents
圧電振動片、圧電振動子および加速度センサ Download PDFInfo
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- JP5003782B2 JP5003782B2 JP2010071582A JP2010071582A JP5003782B2 JP 5003782 B2 JP5003782 B2 JP 5003782B2 JP 2010071582 A JP2010071582 A JP 2010071582A JP 2010071582 A JP2010071582 A JP 2010071582A JP 5003782 B2 JP5003782 B2 JP 5003782B2
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- JP
- Japan
- Prior art keywords
- plane
- groove
- vibrating arm
- vibrating piece
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010071582A JP5003782B2 (ja) | 2010-03-26 | 2010-03-26 | 圧電振動片、圧電振動子および加速度センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010071582A JP5003782B2 (ja) | 2010-03-26 | 2010-03-26 | 圧電振動片、圧電振動子および加速度センサ |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007285890A Division JP4539708B2 (ja) | 2007-11-02 | 2007-11-02 | 圧電振動片、圧電振動子および加速度センサ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010200334A JP2010200334A (ja) | 2010-09-09 |
| JP2010200334A5 JP2010200334A5 (enExample) | 2010-12-09 |
| JP5003782B2 true JP5003782B2 (ja) | 2012-08-15 |
Family
ID=42824496
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010071582A Expired - Fee Related JP5003782B2 (ja) | 2010-03-26 | 2010-03-26 | 圧電振動片、圧電振動子および加速度センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5003782B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110615402B (zh) * | 2018-06-19 | 2022-12-06 | 中国科学院声学研究所 | 一种简支悬臂梁结构mems压电矢量水听器及制备方法 |
| WO2025047588A1 (ja) * | 2023-08-31 | 2025-03-06 | 株式会社大真空 | 音叉型圧電振動片および音叉型圧電振動子 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4281348B2 (ja) * | 2002-12-17 | 2009-06-17 | セイコーエプソン株式会社 | 圧電振動片と圧電振動片を利用した圧電デバイス、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器 |
| JP3941736B2 (ja) * | 2003-05-22 | 2007-07-04 | セイコーエプソン株式会社 | 水晶振動片とその製造方法及び水晶振動片を利用した水晶デバイス、ならびに水晶デバイスを利用した携帯電話装置および水晶デバイスを利用した電子機器 |
| JP2005151423A (ja) * | 2003-11-19 | 2005-06-09 | Seiko Epson Corp | 圧電振動片と圧電デバイスおよびこれらの製造方法、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器 |
| JP2006086726A (ja) * | 2004-09-15 | 2006-03-30 | Seiko Epson Corp | 圧電振動片と圧電デバイスおよび圧電デバイスの製造方法 |
| JP2007243435A (ja) * | 2006-03-07 | 2007-09-20 | Daishinku Corp | 圧電振動片、圧電振動片の周波数調整方法 |
-
2010
- 2010-03-26 JP JP2010071582A patent/JP5003782B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010200334A (ja) | 2010-09-09 |
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