JP4991004B2 - Conveying apparatus and vacuum processing apparatus - Google Patents

Description

The present invention includes a transport device for the substrate, and relates to a vacuum processing equipment.

  In a manufacturing process of a large FPD (Flat Panel Display), various vacuum processing apparatuses for performing film forming processing and heat processing on a substrate are used. In the vacuum processing apparatus, a vacuum space corresponding to the size of the substrate is required. Therefore, as the substrate size increases, a great amount of time is consumed to form the vacuum space. Therefore, conventionally, in order to reduce the formation frequency of the vacuum space, a vacuum processing apparatus has been proposed in which each of the plurality of processing chambers is configured as a vacuum space that can communicate with each other.

The vacuum processing apparatus described in Patent Document 1 includes a plurality of processing chambers connected along one row direction, a pair of transfer paths that extend through the process chambers in the row direction, and one transfer path ( A transport chamber for transporting the transport tray in the forward path to the other transport path (return path). In this vacuum processing apparatus, after the transport tray is moved forward on the forward path, the transport tray on the forward path is transported to the return path, and the transport tray is moved back on the return path. Thereby, the vacuum processing apparatus described in Patent Document 1 can execute different processing steps in order in a plurality of communicated vacuum spaces.
JP 2007-39157 A

  4 (a) to 4 (d) and FIGS. 5 (a) to 5 (d) are diagrams each schematically showing a transfer process of the vacuum processing apparatus described in Patent Document 1. FIG. In the transfer chamber 50, a lifting mechanism 52 that raises and lowers the transfer tray 51, a holding mechanism 53 that holds the transfer tray 51 in a non-contact manner on the transfer path, and a slide between the forward path R <b> 1 and the return path R <b> 2. A slide mechanism 54 is provided.

  4A, first, a transport tray 51 that supports a substrate in a standing state is carried into the transport chamber 50 along the forward path R1. The transfer chamber 50 stabilizes the substrate position in the transfer process by synchronizing the lifting and lowering operation of the transfer tray 51 and the holding operation of the transfer tray 51 as described below.

  That is, in FIG. 4B, when the transport tray 51 is carried in, the lifting mechanism 52 and the holding mechanism 53 hold the transport tray 51 while maintaining the distance between the transport tray 51 and the holding magnet 53a. The magnet 53a is once raised, and the transport tray 51 is separated from the forward path R1. When the transport tray 51 is separated from the forward path R1, as shown in FIG. 4C, the slide mechanism 54 slides the tray stage 54f and arranges the hooks 54a below the projecting pieces 51a provided on the transport tray 51. To do.

  In FIG. 4D, when the hook 54a is disposed below the projecting piece 51a, the lifting mechanism 52 and the holding mechanism 53 maintain the distance between the transport tray 51 and the holding magnet 53a, and the transport tray. 51 and the holding magnet 53a are once lowered. The transport tray 51 is suspended from the tray stage 54f by the engagement between the protruding piece 51a and the hook 54a.

  In FIG. 5A, when the transport tray 51 is suspended from the tray stage 54f, the holding mechanism 53 sufficiently separates the holding magnet 53a from the transport tray 51 to release the restraint (holding) of the transport tray 51. To do. When the restraint of the transport tray 51 is released, as shown in FIG. 5B, the slide mechanism 54 slides the tray stage 54f to place the transport tray 51 above the return path R2.

  In FIG. 5C, when the transport tray 51 is disposed above the return path R2, the elevating mechanism 52 is raised again, and the holding mechanism 53 lowers the holding magnet 53a again, so that the transport tray 51 is moved along the return path R2. It is held again on the lifting mechanism 52 above. When the transport tray 51 is held again, as shown in FIG. 5D, the elevating mechanism 52 and the holding mechanism 53 maintain the distance between the transport tray 51 and the holding magnet 53a while maintaining the transport tray 51. And the holding magnet 53a are lifted to release the engagement between the protruding piece 51a and the hook 54a.

  Accordingly, the transfer chamber 50 can improve the stability of the substrate position when the transfer tray 51 is lifted and lowered by synchronizing the lift of the transfer tray 51 and the lift of the holding magnet 53a. Further, the transfer chamber 50 can improve the stability of the substrate position between the transfer paths by engaging the protruding pieces 51a and the hooks 54a.

  However, since the hook 54a fixed to the tray stage 54f and the protruding piece 51a of the transport tray 51 are engaged each time the substrate is transported in the transport process of Patent Document 1, the tray stage 54f is moved several times. Must be raised and lowered. As a result, in the substrate transfer process, it takes a lot of time to raise and lower the transfer tray 51 a plurality of times, and the throughput of the substrate processing is greatly impaired. Note that this problem is not limited to the transport apparatus disclosed in Patent Document 1, and similarly occurs in other conventional transport apparatuses that require the tray for transporting the substrate to be raised and lowered multiple times.

  Moreover, in the conveyance apparatus of patent document 1, the hook 54a is previously fixed to the position which engages with the protrusion 51a on the slide mechanism 54 (FIG. 4a). For this reason, when the transport tray 51 is transported to the transport chamber 50, a space for moving the slide mechanism 54 is required so that the transport tray 51 and the hook 54a do not come into contact with each other, and the volume of the apparatus increases. It was. Further, in this case, it is necessary to move the hook 54a on the conveyance path in order to raise and lower the conveyance tray 51 after the conveyance tray 51 is carried in, and there is a problem that the number of conveyance steps increases and the throughput is impaired. . Furthermore, since the lifting mechanism 52 for raising and lowering the transport tray 51 and the slide mechanism 54 for sliding the transport tray 51 are separately provided on the left and right of the forward path R1, there is a problem that the volume of the apparatus becomes large.

The present invention provides a vacuum processing apparatus having a conveying device及beauty said conveying device to improve throughput in the transport process of the substrate without increasing the size of the device.
One aspect of the present invention is a transfer device for transferring a substrate. The transport apparatus includes a transport tray that transports the substrate between the first transport path and the second transport path while supporting the substrate in an upright state, a tray stage that can support the transport tray, A lift mechanism that raises the tray stage to disengage the transport tray from the transport paths, lowers the tray stage and places the transport tray on the transport paths, and the lift mechanism includes the first and first lift mechanisms. A slide mechanism that moves between the two transport paths, and the lift mechanism locks the transport tray to the tray stage in conjunction with the raising of the tray stage, and interlocks with the lowering of the tray stage. A lock mechanism for releasing the lock state of the transport tray is included.

  Another aspect of the present invention is a vacuum processing apparatus. The vacuum processing apparatus is installed on a transport tray that supports the substrate in an upright state, first and second transport paths in which the transport tray can move, and the first and second transport paths, A vacuum processing chamber for processing the substrate supported by a transfer tray under vacuum, and the first and second transfer paths are connected to the vacuum processing chamber and the transfer tray is connected to the substrate. A transfer chamber used for transferring the substrate between the first transfer path and the second transfer path while supporting the transfer tray in a standing state, and the transfer chamber includes the transfer tray. A lift stage that raises the tray stage to disengage the transport tray from the transport paths, and lowers the tray stage to place the transport tray on the transport paths; The lift mechanism A slide mechanism that moves between the first and second transport paths, the lift mechanism locking the transport tray to the tray stage in conjunction with the ascent of the tray stage, and lowering the tray stage And a locking mechanism that releases the locked state of the transport tray in conjunction with the movement.

The perspective view which shows typically the whole vacuum processing apparatus. The side view which shows a traverse apparatus. (A)-(d) is a figure which shows the conveyance process using a traverse apparatus, respectively. (A)-(d) is a figure which shows the conveyance process using the traverse apparatus of a prior art example, respectively. (A)-(d) is a figure which shows the conveyance process using the traverse apparatus of a prior art example, respectively.

Explanation of symbols

  R1: Outward path as an example of a transport path, R2: Return path as an example of a transport path, S: Substrate, 10: Vacuum processing apparatus, 13: First processing chamber as an example of a vacuum processing chamber, 14: Vacuum processing chamber Second processing chamber, which is an example, 15: transfer chamber, 17: transfer tray, 17a: convex portion as an engaged portion, 30: traverse device as a transfer device, 31: slide mechanism, 32: lift mechanism, 37: A hook as an example of an engaging portion, 38: a tray stage, 39: a link member as an example of a link.

  Hereinafter, a transport apparatus according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view schematically showing a vacuum processing apparatus 10 provided with a transfer device 30. In FIG. 1, a vacuum processing apparatus 10 is divided into a detachable chamber 11, a load / unload chamber (hereinafter simply referred to as an LL chamber 12), a first processing chamber 13, a second processing chamber 14, and a transfer chamber 15. They are connected via a valve 16.

  The vacuum processing apparatus 10 includes a first transfer path extending from the attachment / detachment chamber 11 toward the transfer chamber 15 (hereinafter simply referred to as an outward path R <b> 1), and a second transfer extending from the transfer chamber 15 toward the attachment / detachment chamber 11. A route (hereinafter simply referred to as a return route R2) is provided. In the present embodiment, the forward path R1 and the return path R2 are parallel to each other.

  In the forward path R1 and the return path R2, a plurality of transport trays 17 are each transported by a rack and pinion mechanism. Each of the transport trays 17 is preferably formed in a rectangular frame shape surrounding the outer edge of the substrate S. In this case, for example, the transport tray 17 is provided in a rack 18 provided on the lower side thereof, and in the forward path R1 and the return path R2. The distributed pinions 19 engage with each other, and each pinion 19 rotates to be conveyed along the forward path R1 and the return path R2.

  On both the left and right sides (the front side and the rear side in the transport direction) of each transport tray 17, convex portions 17a are provided as engaged portions. Each convex portion 17a is used to lock the transport tray 17 to the tray stage 38 (see FIG. 2) in the transport process of the transport tray 17. In addition, a tray magnet 21 is disposed above each transport tray 17. Each of the first processing chamber 13, the second processing chamber 14, and the transfer chamber 15 is provided with a holding device 22 that magnetically acts on the tray magnet 21 of the transfer tray 17. The tray magnet 21 of the transport tray 17 acts with the holding magnet of each holding device 22 in the process of transporting the transport tray 17 to restrain the transport tray 17 in a non-contact manner above each transport path.

  In the present embodiment, the transport direction of the transport tray 17 in the forward path R1 is referred to as the X direction. Also, the direction perpendicular to the horizontal plane is defined as the Z direction, and the direction perpendicular to the X direction and the Z direction and from the forward path R1 toward the return path R2 is referred to as the Y direction.

  The detachable chamber 11 attaches the unprocessed substrate S, which is input from the outside, to the transfer tray 17, and carries the substrate S upright to the LL chamber 12. The detachable chamber 11 removes the processed substrate S attached to the transport tray 17 from the transport tray 17 and carries it out of the vacuum processing apparatus 10. The attachment / detachment chamber 11 performs attachment / detachment of the substrate S under atmospheric pressure.

  The LL chamber 12 is set to atmospheric pressure, the transport tray 17 is carried from the detachable chamber 11 along the forward path R1, and then the interior is decompressed, whereby the transport tray 17 is first processed along the forward path R1. Carry out to chamber 13. The LL chamber 12 depressurizes the chamber, carries the transfer tray 17 from the first processing chamber 13 along the return path R2, and then releases the chamber to the atmosphere, thereby moving the transfer tray 17 to the return path R2. Along and is carried out to the detachable chamber 11.

  The first processing chamber 13 carries the transport tray 17 from the LL chamber 12 along the forward path R1 and restrains the transport tray 17 on the forward path R1 by a magnetic action by the holding device 22. The first processing chamber 13 performs various processes such as a film forming process and a heating process on the substrate S attached to the transport tray 17, and then releases the restraint by the holding device 22, and moves the transport tray 17 to the forward path R1. Are carried out to the second processing chamber 14.

  The first processing chamber 13 carries the transport tray 17 from the second processing chamber 14 along the return path R2 and restrains the transport tray 17 on the return path R2 by the magnetic action of the holding device 22. The first processing chamber 13 performs various processes such as a film forming process and a heating process on the substrate S attached to the transport tray 17, and then releases the restraint by the holding device 22, and moves the transport tray 17 to the return path R2. Along the LL chamber 12. The first processing chamber 13 carries in and out the transfer tray 17 under reduced pressure.

  The second processing chamber 14 carries the transport tray 17 from the first processing chamber 13 along the forward path R <b> 1 and restrains the transport tray 17 on the forward path R <b> 1 by a magnetic action by the holding device 22. The second processing chamber 14 performs various processes such as a film forming process and a heating process on the substrate S attached to the transport tray 17, and then releases the restraint by the holding device 22 so that the transport tray 17 is moved to the forward path R1. Along the transfer chamber 15.

  The second processing chamber 14 carries the transport tray 17 from the transport chamber 15 along the return path R2 and restrains the transport tray 17 on the return path R2 by the magnetic action of the holding device 22. The second processing chamber 14 performs various processes such as a film forming process and a heating process on the substrate S attached to the transport tray 17, and then releases the restraint by the holding device 22, and moves the transport tray 17 to the return path R2. Are carried out to the first processing chamber 13. The second processing chamber 14 carries in and out the transfer tray 17 under reduced pressure.

  A pair of traverse devices 30 as a transport device are mounted on both sides of the transport chamber 15 in the X direction (front and rear sides in the transport direction). The transfer chamber 15 carries the transfer tray 17 from the second processing chamber 14 along the forward path R1 and temporarily restrains the transfer tray 17 on the forward path R1 by a magnetic action by the holding device 22. The transport chamber 15 transports the transport tray 17 from the forward path R1 to the return path R2 by a transport process using the traverse device 30 while releasing the magnetic restraint of the transport tray 17 on the forward path R1. The transfer chamber 15 carries the transfer tray 17 placed on the return path R2 to the second processing chamber 14 along the return path R2.

  The transfer chamber 15 transfers the transfer tray 17 from the forward path R1 to the return path R2 under reduced pressure. Further, the transfer chamber 15 locks the transfer tray 17 to the tray stage 38 (see FIG. 2) by the lock function of the traverse device 30 while the transfer tray 17 is transferred from the forward path R1 to the return path R2.

  FIG. 2 is a diagram schematically showing the traverse device 30 (only one is shown), and FIGS. 3A to 3D are process diagrams each showing a transport process using the traverse device 30. In FIG. 2, the traverse device 30 includes a slide mechanism 31 and a lift mechanism 32.

  The slide mechanism 31 includes a slide motor M1 and a transmission unit 33 connected to the drive shaft of the slide motor M1. A guide rail 33a extending in the Y direction is provided above the transmission portion 33, and a lift mechanism 32 is attached to the guide rail 33a. The transmission unit 33 receives the driving force of the slide motor M1 by a power transmission shaft such as a spline shaft, and converts the driving force of the slide motor M1 into a moving force of the lift mechanism 32.

  When the slide motor M1 rotates forward, the slide mechanism 31 moves the lift mechanism 32 in the Y direction by the driving force of the slide motor M1 (moves from the two-dot chain line position in FIG. 2 to the solid line position). Further, when the slide motor M1 rotates in the reverse direction, the slide mechanism 31 moves the lift mechanism 32 in the anti-Y direction by the driving force of the slide motor M1 (from the solid line position in FIG. 2 to the two-dot chain line position).

  In the present embodiment, the position of the lift mechanism 32 when the tray stage 38 is above or below the forward path R1 when viewed from the X direction is referred to as the forward path position. Further, the position of the lift mechanism 32 when the tray stage 38 is above or below the return path R2 when viewed from the X direction is referred to as a return path position. The slide mechanism 31 moves the lift mechanism 32 between the forward path position and the backward path position.

  The lift mechanism 32 includes a lift motor M2 and a transmission unit 35 connected to the drive shaft of the lift motor M2. A support arm 36 extending in the Z direction is provided on the end portion side in the Y direction of the transmission portion 35, and a guide rail 35 a extending in the Z direction is provided on the end portion side in the Y direction of the support arm 36. . A tray stage 38 capable of reciprocating along the Z direction is attached to the guide rail 35a. The transmission unit 35 receives the driving force of the lift motor M2 by a power transmission shaft such as a spline shaft, and converts the driving force of the lift motor M2 into the moving force of the tray stage 38.

  When the lift motor M2 rotates forward, the lift mechanism 32 moves the tray stage 38 in the Z direction by the driving force of the lift motor M2 (moves from the solid line position in FIG. 2 to the two-dot chain line position). Further, when the lift motor M2 rotates in the reverse direction, the lift mechanism 32 moves the tray stage 38 in the anti-Z direction by the driving force of the lift motor M2 (moves from the two-dot chain line position in FIG. 2 to the solid line position).

  In the present embodiment, the position of the tray stage 38 when the tray stage 38 is below the forward path R1 or the return path R2 in the Z direction is referred to as a standby position. Further, the position of the tray stage 38 when the tray stage 38 is above the forward path R1 or the return path R2 in the Z direction is referred to as a separation position (a position at which the conveyance tray 17 is separated from the conveyance paths R1 and R2). The lift mechanism 32 moves the tray stage 38 between the standby position and the separation position.

  A base end of a belt-like hook 37 is supported at the distal end (near the upper end) of the support arm 36 in the lift mechanism 32 so as to be rotatable about a rotation shaft 36a extending in the X direction. A notch 37 a that can be engaged with the convex portion 17 a of the transport tray 17 is formed at the tip of the hook 37. In the state where the transport tray 17 is positioned above the tray stage 38, the hook 37 is positioned so that the notch 37a and the convex portion 17a are separated from each other, and the position where the notch 37a and the convex portion 17a are engaged (see FIG. 2). The transport tray 17 is locked to the tray stage 38 in a state where the notch 37a and the convex portion 17a are engaged. Further, the locked state of the transport tray 17 is released in a state where the notch 37a and the convex portion 17a are separated from each other.

  In the present embodiment, the position of the hook 37 where the notch 37a and the convex portion 17a are engaged is referred to as a lock position. Further, the position of the hook 37 where the notch 37a and the convex portion 17a are separated, and the position where the hook 37 is separated from the movement trajectory of the transport tray 17 is referred to as a release position. The solid line position of the hook 37 in FIG. 2 indicates a position between the lock position and the release position.

  A rod-shaped link member 39 extending in the anti-Z direction is supported at the tip of the hook 37 so as to be rotatable about an axis C1 extending in the X direction. The lower end of the link member 39 is rotatably supported by the upper end of the tray stage 38 around the axis C2 extending in the X direction. When the tray stage 38 rises, the link member 39 transmits the upward movement of the tray stage 38 to the hook 37 and rotates the hook 37 clockwise. Further, when the tray stage 38 descends, the link member 39 transmits the downward movement of the tray stage 38 to the hook 37 and rotates the hook 37 counterclockwise.

  More specifically, when the transport tray 17 is positioned above the tray stage 38 and the tray stage 38 moves upward from the standby position to the disengagement position, the hook 37 is interlocked with the rise of the tray stage 38 via the link member 39. To move from the release position to the lock position. That is, when the tray stage 38 is raised, the transport tray 17 is locked to the tray stage 38. On the contrary, when the transport tray 17 is placed on the tray stage 38 and the tray stage 38 moves downward from the disengagement position to the standby position, the hook 37 is interlocked with the lowering of the tray stage 38 via the link member 39. Move from the locked position to the released position. That is, when the tray stage 38 is lowered, the locked state of the transport tray 17 is released.

In the present embodiment, the hook 37 and the link member 39 constitute a lock mechanism.
FIGS. 3A to 3D are diagrams illustrating a transport process of the substrate S using the traverse apparatus 30. FIG. First, inside the transfer chamber 15, as shown in FIG. 3A, the tray stage 38 is disposed at the position of the forward path R1 (hereinafter simply referred to as the initial position). Further, the hook 37 is disposed at the release position and is separated from the movement locus of the transport tray 17.

  From this state, when the transport tray 17 is carried into the transport chamber 15 from the second processing chamber 14, the traverse device 30 drives the lift mechanism 32 to move the tray stage 38 as shown in FIG. Move upward from the initial position to the release position (in the direction of the arrow). As a result, the transport tray 17 is placed on the tray stage 38 and is separated from the forward path R1.

  At this time, the holding device 22 continues to maintain the distance between the holding magnet MG and the tray magnet 21 by raising the holding magnet MG as much as the tray stage 38 is raised. As a result, the holding device 22 continues to magnetically restrain the transport tray 17 above the forward path R1. Moreover, the lift mechanism 32 moves the hook 37 from the release position to the lock position in conjunction with the raising of the tray stage 38. That is, the traverse device 30 locks the transport tray 17 to the tray stage 38 while detaching the transport tray 17 from the forward path R1.

  When the transport tray 17 is locked to the tray stage 38, the holding device 22 further raises the holding magnet MG as shown in FIG. 3 (c), so that the distance between the holding magnet MG and the tray magnet 21 is increased. Separate them sufficiently. As a result, the holding device 22 releases the magnetic restraint on the transport tray 17. When the restraint of the transport tray 17 is released, the traverse device 30 drives the slide mechanism 31 and moves the lift mechanism 32 from the forward path position to the backward path position (in the direction of the arrow). As a result, the tray stage 38 is disposed immediately above the return path R2.

  During this time, the transport tray 17 is not subjected to magnetic restraint by the holding device 22, but is mechanically restrained by the lock mechanism of the traverse device 30, so that the relative position with respect to the tray stage 38 is maintained. As a result, the transport tray 17 is transported from immediately above the forward path R1 to just above the return path R2 without causing a positional shift from the tray stage 38.

  When the lift mechanism 32 reaches the return path position, the traverse device 30 drives the lift mechanism 32 to move the tray stage 38 downward from the release position to the initial position (in the direction of the arrow) as shown in FIG. Let As a result, the transport tray 17 is placed from the tray stage 38 onto the return path R2.

  At this time, the holding device 22 lowers the holding magnet MG, thereby reducing the distance between the holding magnet MG and the tray magnet 21, and magnetically restrains the transport tray 17 above the return path R2. The lift mechanism 32 moves the hook 37 from the lock position to the release position in conjunction with the lowering of the tray stage 38. That is, the traverse device 30 releases the locked state of the transport tray 17 while placing the transport tray 17 on the return path R2.

  When the transport tray 17 is placed on the return path R2, the traverse device 30 drives the slide mechanism 31 to move the lift mechanism 32 from the return path position to the initial position. As a result, the tray stage 38 is transported from the return path R2 to the forward path R1. Thereafter, similarly, every time the transport tray 17 is loaded from the second processing chamber 14, the transport chamber 15 drives the holding device 22 and the traverse device 30 to transport the transport tray 17 on the forward path R1 to the return path R2. .

The conveyance apparatus 30 (vacuum processing apparatus 10) of the above embodiment has the following advantages.
(1) The traverse device 30 is configured to selectively place and remove the transport tray 17 with respect to the transport paths R1 and R2 by lowering and raising the tray stage 38, and the lift mechanism 32 to the transport path R1. , R2 and a slide mechanism 31 that moves between R2. The lift mechanism 32 locks the transport tray 17 to the tray stage 38 in conjunction with the raising of the tray stage 38, and releases the locked state of the transport tray 17 in conjunction with the lowering of the tray stage 38 (one implementation). The example has a hook 37 and a link member 39).

  Therefore, the traverse device 30 can lift the tray stage 38 only once, disengage the transport tray 17 from the forward path R1, and lock the transport tray 17 to the tray stage 38. Further, the traverse device 30 can release the locked state of the transport tray 17 and can place the transport tray 17 on the return path R2 only by lowering the tray stage 38 once. In other words, the movement of the conveyance tray 17 necessary for locking the conveyance tray 17 to the tray stage 38 is only lifted once, and the conveyance tray necessary for releasing the lock between the conveyance tray 17 and the tray stage 38. The movement of 17 is only one descent. As a result, the traverse device 30 can improve the throughput because the number of times of raising and lowering the tray stage 38 and hence the conveyance tray 17 in the conveyance process can be minimized. In addition, since the lock mechanism (37, 39) is driven in conjunction with the raising and lowering of the tray stage 38, space saving of the lock mechanism can be achieved compared to the case where a drive source for the lock mechanism is separately provided. As a result, the apparatus 30 can be reduced in size.

  (2) The hook 37 engages with the convex portion 17a of the conveyance tray 17 to lock the conveyance tray 17, and the hook 37 releases the locked state of the conveyance tray 17 by separating from the convex portion 17a. It is rotated between a release position separated from the movement locus of 17. Further, the link member 39 is connected between the tray stage 38 and the hook 37, transmits the rising and lowering of the tray stage 38 to the hook 37, and moves the hook 37 to the lock position and the release position.

  Therefore, in the traverse device 30, the vertical movement of the tray stage 38 is converted into the rotation of the hook 37 via the link member 39. As a result, the traverse device 30 can lock the transport tray 17 simply by removing the transport tray 17 from the forward path R1, and can release the locked state of the transport tray 17 simply by placing the transport tray 17 on the return path R2. Therefore, the traverse device 30 can improve the throughput because the number of times of raising and lowering the tray stage 38 in the conveyance process can be minimized. Further, when the hook 37 moves to the release position and the lock with the transport tray 17 is released, the hook 37 is detached from the movement trajectory of the transport tray 17. As a result, the tray stage 38 can be placed in the standby position on the forward path R1 in advance. This is because the movement of the transport tray 17 is not hindered by the tray stage 38 and the hook 37 when the tray stage 38 is in the standby position. From this, the movement space of the lift mechanism 32 for retracting the tray stage 38 from the forward path R1 can be reduced. As a result, the transfer chamber 15 and the vacuum processing apparatus 10 can be reduced in size.

  (3) Since the lock mechanism (37, 39) converts the vertical movement of the tray stage 38 into the rotation of the hook 37, the vertical movement of the tray stage 38 is simply used as the vertical movement of the hook 37. The displacement range of the hook 37 (notch 37a) can be expanded. Therefore, the traverse device 30 can expand the application range related to the size and shape of the transport tray 17 and, consequently, the size and shape of the substrate S.

  (4) The hook 37 is not fixed to the slide mechanism 31 and rotates in conjunction with the vertical movement of the tray stage 38. Therefore, when the transport tray 17 is transported between the substrate processing chamber 14 and the transport chamber 15, it is not necessary to move the slide mechanism 31 in order to avoid contact between the hook 37 and the transport tray 17. Therefore, since the space in which the slide mechanism 31 moves can be reduced, the apparatus can be reduced in size.

  (5) The transport tray 17 can be directly carried onto the tray stage 38 waiting at the position of the transport path (outward path R1). For this reason, it is not necessary to move the tray stage 38 on the forward path R1 after the substrate S is loaded. For this reason, the tact time in the conveyance process can be shortened and the throughput can be improved.

(6) Since the lift mechanism 32 is provided in the upper part of the slide mechanism 31, the space in the transfer chamber 15 can be reduced, and the apparatus can be downsized.
(7) Since the vacuum processing apparatus 10 is equipped with the traverse device 30 in the transfer chamber 15, the number of times of raising and lowering the tray stage 38 (transfer tray 17) in the transfer process can be minimized, and as a result, a series related to the substrate S. Throughput can be improved in this processing step.

In addition, you may implement the said embodiment in the following aspects.
The hook 37 may be configured to move up and down in response to the vertical movement of the tray stage 38. That is, the hook 37 is interlocked with the vertical movement of the tray stage 38 between the lock position for locking the transport tray 17 and the release position for releasing the lock state of the transport tray 17 (for example, up and down along the support arm 36). B) It may be configured to move. In this case, it is preferable that the hook 37 is retracted from the movement locus of the transport tray 17 at the same time or after the hook 37 is moved downward.

  -Instead of the convex part 17a, the to-be-attached part is good also as a recessed part which the conveyance tray 17 has, for example. That is, the engaged portion for locking the transport tray 17 to the tray stage 38 by engaging with the hook 37 and releasing the locked state of the transport tray 17 by separating from the hook 37 is known to those skilled in the art. Any configuration can be adopted.

  In the above embodiment, the notch 37 a of the hook 37 and the convex portion 17 a of the transfer tray 17 are engaged, whereby the transfer tray 17 is locked to the tray stage 38. Not limited to this, the lock mechanism may be a magnet mechanism. As an example, the notches 37a and the protrusions 17a may be changed to magnets. In this case, the transport tray 17 is locked to the tray stage 38 due to the proximity of the N pole provided on the hook 37 and the S pole provided on the transport tray 17. That is, those skilled in the art can use various locking mechanisms for locking the transport tray 17 to the tray stage 38 in conjunction with the raising of the tray stage 38 and releasing the locked state of the transport tray 17 in conjunction with the lowering of the tray stage 38. The configuration of can be adopted.

  The lock mechanism may be configured only by the hook 37 (that is, the link member 39 may be omitted). In this case, the hook 37 is positioned at a release position (a position away from the movement trajectory of the transport tray 17) before the tray stage 38 is lifted, and the hook 37 can be moved to the lock position after the tray stage 38 is lifted. That's fine.

  In the above embodiment, the transport path is configured by the forward path R1 and the return path R2, and the forward path R1 and the return path R2 are provided in parallel to each other. For example, there may be three or more conveyance paths, and a configuration in which the conveyance paths intersect each other may be used.

  The transport path in the above embodiment uses a rack and pinion mechanism, but the transport path is a roller transport type, a conveyor transport type, or a rail on which a transport tray with wheels runs on a rail fixed to the bottom of the vacuum processing chamber. It may be a transport mechanism, and is not limited to these transport methods.

  The height of the initial position and the disengagement position of the tray stage 38 in the above embodiment, the placement position of the transport tray 17 by the tray stage 38, and the engagement position of the transport tray 17 are the vacuum processing in which the transport tray 17 is carried in and out. It can be arbitrarily changed between the lowermost side and the uppermost side of the chamber 10. These positions may be positions where the transport tray 17 can be transported from one transport path to another transport path by the transport process of the traverse device 30. However, the initial position of the tray stage 38 is desirably set so that the upper surface of the tray stage 38 (the surface that supports the lower surface of the transport tray 17) is lower than the upper surfaces of the transport paths R1 and R2. In this way, even when the transport tray 17 is transported from the second processing chamber 14 to the transport chamber 15, the movement of the transport tray 17 is not hindered by the tray stage 38. For this reason, the moving distance of the tray stage 38 from the forward path R1 to the return path R2 can be minimized. However, this initial position does not limit the present invention. For example, even if it is necessary to move the tray stage 38 downward to retract from the movement trajectory of the transport tray 17, the number of times the transport tray 17 is moved up and down does not increase.

  In the above embodiment, the two transport paths are constituted by the forward path R1 and the return path R2. Not limited to this, each of the two transport paths may be used for both the forward path and the return path of the transport tray 17. In this case, for example, when the transport tray 17 is transferred from one transport path to another transport path, the traverse device 30 stands by the tray stage 38 on the other transport path and is in the other transport path. The structure which moves the conveyance tray 17 to this one conveyance path again may be sufficient.

  In the above embodiment, the plurality of transport paths are configured by one forward path R1 and one return path R2, but the present invention is not limited thereto, and the plurality of transport paths are configured by a plurality of forward paths R1 and a plurality of return paths R2. May be.

Claims (12)

A transfer device for transferring a substrate,
A transport tray for transporting the substrate between the first transport path and the second transport path while supporting the substrate in an upright state;
A tray stage capable of supporting the transport tray;
A lift mechanism that raises the tray stage to disengage the transport tray from the transport paths, and lowers the tray stage to place the transport tray on the transport paths;
A slide mechanism for moving the lift mechanism between the first and second transport paths,
The lift mechanism is
A transport apparatus comprising: a lock mechanism for locking the transport tray to the tray stage in conjunction with the raising of the tray stage and releasing the locked state of the transport tray in conjunction with the lowering of the tray stage. In the conveyance apparatus described in Claim 1,
The transport device, wherein the tray stage is selectively disposed on the first transport path and the second transport path. In the conveyance apparatus described in Claim 1,
The transport device, wherein the tray stage is supported by the lift mechanism so as to be movable up and down. The conveying device according to claim 3 further includes:
A transport apparatus comprising: a link that connects the lock mechanism and the tray stage and operates the lock mechanism in conjunction with the vertical movement of the tray stage. In the conveying apparatus described in Claim 4,
When the tray stage descends until the transport tray is placed on each transport path, the link moves the lock mechanism to a position deviating from the movement trajectory of the transport tray. In the conveyance apparatus as described in any one of Claims 1-3,
The locking mechanism is
A lock position for locking the transport tray to the tray stage by engaging with the engaged portion of the transport tray, and a release position for releasing the locked state of the transport tray by separating from the engaged portion. A conveying device comprising an engaging portion that moves between the two. In the conveyance apparatus described in Claim 6,
The conveying device is characterized in that the engaging portion is rotatably supported by the lift mechanism so as to be selectively located at the lock position and the release position. In the conveying apparatus described in Claim 7,
The lift mechanism includes a support arm that rotatably supports the engaging portion,
The transport device, wherein the tray stage is supported by the support arm so as to be movable up and down. In the conveying apparatus according to claim 8,
The locking mechanism is
A hook that functions as the engagement portion;
A link that is connected between the tray stage and the hook, and transmits the rising and lowering of the tray stage to the hook to selectively move the hook to the lock position and the release position. A conveying device characterized by the above. In the conveying apparatus according to claim 9,
The hook rotates between the lock position and the release position,
The link is characterized in that the link converts the vertical movement of the tray stage into rotation of the hook. It is a conveying apparatus as described in any one of Claims 1-10,
The transport apparatus according to claim 1, wherein the lift mechanism is provided on an upper portion of the slide mechanism. A vacuum processing apparatus,
A transport tray that supports the substrate in an upright state;
First and second transport paths in which the transport tray is movable;
A vacuum processing chamber which is installed on the first and second transport paths and which processes the substrate supported by the transport tray under vacuum;
The first transport path and the second transport path are installed on the first and second transport paths and connected to the vacuum processing chamber, and the transport tray supports the substrate in a standing state. A transfer chamber used for transferring the substrate to and from the transfer path, and
The transfer chamber is
A tray stage capable of supporting the transport tray;
A lift mechanism that raises the tray stage to disengage the transport tray from the transport paths, and lowers the tray stage to place the transport tray on the transport paths;
A slide mechanism for moving the lift mechanism between the first and second transport paths,
The lift mechanism is
A vacuum processing apparatus comprising: a lock mechanism that locks the transport tray to the tray stage in conjunction with the raising of the tray stage and releases the locked state of the transport tray in conjunction with the lowering of the tray stage. .

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