JP4982242B2 - 位置測定装置 - Google Patents

位置測定装置 Download PDF

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Publication number
JP4982242B2
JP4982242B2 JP2007121437A JP2007121437A JP4982242B2 JP 4982242 B2 JP4982242 B2 JP 4982242B2 JP 2007121437 A JP2007121437 A JP 2007121437A JP 2007121437 A JP2007121437 A JP 2007121437A JP 4982242 B2 JP4982242 B2 JP 4982242B2
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JP
Japan
Prior art keywords
light source
measuring device
detection
scanning
optical
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Expired - Fee Related
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JP2007121437A
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English (en)
Japanese (ja)
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JP2007298522A5 (enExample
JP2007298522A (ja
Inventor
ウルリヒ・ベンナー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of JP2007298522A publication Critical patent/JP2007298522A/ja
Publication of JP2007298522A5 publication Critical patent/JP2007298522A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2007121437A 2006-05-05 2007-05-02 位置測定装置 Expired - Fee Related JP4982242B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006021017A DE102006021017A1 (de) 2006-05-05 2006-05-05 Positionsmesseinrichtung
DE102006021017.4 2006-05-05

Publications (3)

Publication Number Publication Date
JP2007298522A JP2007298522A (ja) 2007-11-15
JP2007298522A5 JP2007298522A5 (enExample) 2010-05-20
JP4982242B2 true JP4982242B2 (ja) 2012-07-25

Family

ID=38288545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007121437A Expired - Fee Related JP4982242B2 (ja) 2006-05-05 2007-05-02 位置測定装置

Country Status (6)

Country Link
US (1) US7473886B2 (enExample)
EP (1) EP1852684B1 (enExample)
JP (1) JP4982242B2 (enExample)
CN (1) CN101067560B (enExample)
DE (1) DE102006021017A1 (enExample)
ES (1) ES2389734T3 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006021017A1 (de) * 2006-05-05 2007-11-08 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102007028943A1 (de) 2007-06-22 2008-12-24 Dr. Johannes Heidenhain Gmbh Abtasteinheit für eine optische Positionsmesseinrichtung
DE102008025870A1 (de) * 2008-05-31 2009-12-03 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102009001262A1 (de) * 2009-03-02 2010-09-09 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102010028725B4 (de) 2010-05-07 2023-05-25 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP2013534319A (ja) * 2010-08-19 2013-09-02 エレスタ・リレイズ・ゲーエムベーハー 位置測定デバイス
JP6032010B2 (ja) * 2010-10-12 2016-11-24 株式会社ニコン エンコーダ、駆動装置及びロボット装置
US9383229B2 (en) 2010-10-31 2016-07-05 Avego Technologies General Ip (Singapore) Pte. Ltd. Optical reflective encoder with multi-faceted flat-faced lens
DE102011007459B4 (de) 2011-04-15 2023-05-11 Dr. Johannes Heidenhain Gmbh Optische Längenmesseinrichtung
DE102011082570A1 (de) * 2011-09-13 2013-03-14 Dr. Johannes Heidenhain Gmbh Rotatorische Positionsmesseinrichtung
CN102325233A (zh) * 2011-10-10 2012-01-18 朱杰 带有多扫描阵列的接触式图像传感器
EP3009806B1 (de) * 2014-10-14 2016-12-14 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung mit Vorrichtung zur Kompensation von Fehlern durch thermische Dilatation eines Massstabes
DE102015219810A1 (de) * 2015-10-13 2017-04-13 Dr. Johannes Heidenhain Gmbh X-Y-Tisch mit einer Positionsmesseinrichtung
TW201741618A (zh) * 2016-05-23 2017-12-01 國立交通大學 光學感測裝置
GB201916662D0 (en) * 2019-11-15 2020-01-01 Renishaw Plc Encoder apparatus
GB201916641D0 (en) 2019-11-15 2020-01-01 Renishaw Plc Position measurement device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5317149A (en) * 1992-11-12 1994-05-31 Hewlett-Packard Company Optical encoder with encapsulated electrooptics
WO1999046603A1 (en) * 1998-03-09 1999-09-16 Otm Technologies, Ltd. Optical translation measurement
US6424407B1 (en) * 1998-03-09 2002-07-23 Otm Technologies Ltd. Optical translation measurement
JP4812189B2 (ja) * 2001-06-15 2011-11-09 オリンパス株式会社 光学式検出装置
US6723980B2 (en) * 2001-07-16 2004-04-20 Wai-Hon Lee Position sensor with grating to detect moving object with periodic pattern
JP4658452B2 (ja) * 2003-02-07 2011-03-23 オリンパス株式会社 光学式エンコーダ
JP4021382B2 (ja) * 2003-07-28 2007-12-12 オリンパス株式会社 光学式エンコーダ及びその製造方法並びに光学レンズモジュール
US20070120048A1 (en) * 2005-11-25 2007-05-31 Lum Chee F Reflective encoder module
DE102006021017A1 (de) * 2006-05-05 2007-11-08 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung

Also Published As

Publication number Publication date
CN101067560B (zh) 2011-08-03
US7473886B2 (en) 2009-01-06
EP1852684A1 (de) 2007-11-07
EP1852684B1 (de) 2012-08-15
ES2389734T3 (es) 2012-10-31
DE102006021017A1 (de) 2007-11-08
JP2007298522A (ja) 2007-11-15
CN101067560A (zh) 2007-11-07
US20070262250A1 (en) 2007-11-15

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