ES2389734T3 - Dispositivo de medición de posición - Google Patents
Dispositivo de medición de posición Download PDFInfo
- Publication number
- ES2389734T3 ES2389734T3 ES07007787T ES07007787T ES2389734T3 ES 2389734 T3 ES2389734 T3 ES 2389734T3 ES 07007787 T ES07007787 T ES 07007787T ES 07007787 T ES07007787 T ES 07007787T ES 2389734 T3 ES2389734 T3 ES 2389734T3
- Authority
- ES
- Spain
- Prior art keywords
- measuring device
- position measuring
- light source
- carrier substrate
- materialized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001514 detection method Methods 0.000 claims abstract description 77
- 230000003287 optical effect Effects 0.000 claims abstract description 57
- 238000005259 measurement Methods 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims description 59
- 230000005540 biological transmission Effects 0.000 claims description 26
- 238000006073 displacement reaction Methods 0.000 claims description 8
- 230000005855 radiation Effects 0.000 claims description 6
- 239000005357 flat glass Substances 0.000 claims description 2
- 230000000737 periodic effect Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102006021017A DE102006021017A1 (de) | 2006-05-05 | 2006-05-05 | Positionsmesseinrichtung |
| DE102006021017 | 2006-05-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES2389734T3 true ES2389734T3 (es) | 2012-10-31 |
Family
ID=38288545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES07007787T Active ES2389734T3 (es) | 2006-05-05 | 2007-04-17 | Dispositivo de medición de posición |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7473886B2 (enExample) |
| EP (1) | EP1852684B1 (enExample) |
| JP (1) | JP4982242B2 (enExample) |
| CN (1) | CN101067560B (enExample) |
| DE (1) | DE102006021017A1 (enExample) |
| ES (1) | ES2389734T3 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006021017A1 (de) * | 2006-05-05 | 2007-11-08 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| DE102007028943A1 (de) | 2007-06-22 | 2008-12-24 | Dr. Johannes Heidenhain Gmbh | Abtasteinheit für eine optische Positionsmesseinrichtung |
| DE102008025870A1 (de) * | 2008-05-31 | 2009-12-03 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| DE102009001262A1 (de) * | 2009-03-02 | 2010-09-09 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| DE102010028725B4 (de) | 2010-05-07 | 2023-05-25 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| JP2013534319A (ja) * | 2010-08-19 | 2013-09-02 | エレスタ・リレイズ・ゲーエムベーハー | 位置測定デバイス |
| JP6032010B2 (ja) * | 2010-10-12 | 2016-11-24 | 株式会社ニコン | エンコーダ、駆動装置及びロボット装置 |
| US9383229B2 (en) | 2010-10-31 | 2016-07-05 | Avego Technologies General Ip (Singapore) Pte. Ltd. | Optical reflective encoder with multi-faceted flat-faced lens |
| DE102011007459B4 (de) | 2011-04-15 | 2023-05-11 | Dr. Johannes Heidenhain Gmbh | Optische Längenmesseinrichtung |
| DE102011082570A1 (de) * | 2011-09-13 | 2013-03-14 | Dr. Johannes Heidenhain Gmbh | Rotatorische Positionsmesseinrichtung |
| CN102325233A (zh) * | 2011-10-10 | 2012-01-18 | 朱杰 | 带有多扫描阵列的接触式图像传感器 |
| EP3009806B1 (de) * | 2014-10-14 | 2016-12-14 | Dr. Johannes Heidenhain GmbH | Positionsmesseinrichtung mit Vorrichtung zur Kompensation von Fehlern durch thermische Dilatation eines Massstabes |
| DE102015219810A1 (de) * | 2015-10-13 | 2017-04-13 | Dr. Johannes Heidenhain Gmbh | X-Y-Tisch mit einer Positionsmesseinrichtung |
| TW201741618A (zh) * | 2016-05-23 | 2017-12-01 | 國立交通大學 | 光學感測裝置 |
| GB201916662D0 (en) * | 2019-11-15 | 2020-01-01 | Renishaw Plc | Encoder apparatus |
| GB201916641D0 (en) | 2019-11-15 | 2020-01-01 | Renishaw Plc | Position measurement device |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5317149A (en) * | 1992-11-12 | 1994-05-31 | Hewlett-Packard Company | Optical encoder with encapsulated electrooptics |
| WO1999046603A1 (en) * | 1998-03-09 | 1999-09-16 | Otm Technologies, Ltd. | Optical translation measurement |
| US6424407B1 (en) * | 1998-03-09 | 2002-07-23 | Otm Technologies Ltd. | Optical translation measurement |
| JP4812189B2 (ja) * | 2001-06-15 | 2011-11-09 | オリンパス株式会社 | 光学式検出装置 |
| US6723980B2 (en) * | 2001-07-16 | 2004-04-20 | Wai-Hon Lee | Position sensor with grating to detect moving object with periodic pattern |
| JP4658452B2 (ja) * | 2003-02-07 | 2011-03-23 | オリンパス株式会社 | 光学式エンコーダ |
| JP4021382B2 (ja) * | 2003-07-28 | 2007-12-12 | オリンパス株式会社 | 光学式エンコーダ及びその製造方法並びに光学レンズモジュール |
| US20070120048A1 (en) * | 2005-11-25 | 2007-05-31 | Lum Chee F | Reflective encoder module |
| DE102006021017A1 (de) * | 2006-05-05 | 2007-11-08 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
-
2006
- 2006-05-05 DE DE102006021017A patent/DE102006021017A1/de not_active Withdrawn
-
2007
- 2007-04-17 ES ES07007787T patent/ES2389734T3/es active Active
- 2007-04-17 EP EP07007787A patent/EP1852684B1/de not_active Not-in-force
- 2007-04-30 CN CN2007101023284A patent/CN101067560B/zh not_active Expired - Fee Related
- 2007-05-02 JP JP2007121437A patent/JP4982242B2/ja not_active Expired - Fee Related
- 2007-05-07 US US11/801,057 patent/US7473886B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN101067560B (zh) | 2011-08-03 |
| US7473886B2 (en) | 2009-01-06 |
| EP1852684A1 (de) | 2007-11-07 |
| JP4982242B2 (ja) | 2012-07-25 |
| EP1852684B1 (de) | 2012-08-15 |
| DE102006021017A1 (de) | 2007-11-08 |
| JP2007298522A (ja) | 2007-11-15 |
| CN101067560A (zh) | 2007-11-07 |
| US20070262250A1 (en) | 2007-11-15 |
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