CN101067560B - 位置测量装置 - Google Patents

位置测量装置 Download PDF

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Publication number
CN101067560B
CN101067560B CN2007101023284A CN200710102328A CN101067560B CN 101067560 B CN101067560 B CN 101067560B CN 2007101023284 A CN2007101023284 A CN 2007101023284A CN 200710102328 A CN200710102328 A CN 200710102328A CN 101067560 B CN101067560 B CN 101067560B
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CN
China
Prior art keywords
measurement device
light source
carrier substrate
scanning
detector means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2007101023284A
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English (en)
Chinese (zh)
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CN101067560A (zh
Inventor
U·本纳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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Publication of CN101067560A publication Critical patent/CN101067560A/zh
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Publication of CN101067560B publication Critical patent/CN101067560B/zh
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN2007101023284A 2006-05-05 2007-04-30 位置测量装置 Expired - Fee Related CN101067560B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006021017A DE102006021017A1 (de) 2006-05-05 2006-05-05 Positionsmesseinrichtung
DE102006021017.4 2006-05-05

Publications (2)

Publication Number Publication Date
CN101067560A CN101067560A (zh) 2007-11-07
CN101067560B true CN101067560B (zh) 2011-08-03

Family

ID=38288545

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007101023284A Expired - Fee Related CN101067560B (zh) 2006-05-05 2007-04-30 位置测量装置

Country Status (6)

Country Link
US (1) US7473886B2 (enExample)
EP (1) EP1852684B1 (enExample)
JP (1) JP4982242B2 (enExample)
CN (1) CN101067560B (enExample)
DE (1) DE102006021017A1 (enExample)
ES (1) ES2389734T3 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006021017A1 (de) * 2006-05-05 2007-11-08 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102007028943A1 (de) 2007-06-22 2008-12-24 Dr. Johannes Heidenhain Gmbh Abtasteinheit für eine optische Positionsmesseinrichtung
DE102008025870A1 (de) * 2008-05-31 2009-12-03 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102009001262A1 (de) * 2009-03-02 2010-09-09 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102010028725B4 (de) 2010-05-07 2023-05-25 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP2013534319A (ja) * 2010-08-19 2013-09-02 エレスタ・リレイズ・ゲーエムベーハー 位置測定デバイス
JP6032010B2 (ja) * 2010-10-12 2016-11-24 株式会社ニコン エンコーダ、駆動装置及びロボット装置
US9383229B2 (en) 2010-10-31 2016-07-05 Avego Technologies General Ip (Singapore) Pte. Ltd. Optical reflective encoder with multi-faceted flat-faced lens
DE102011007459B4 (de) 2011-04-15 2023-05-11 Dr. Johannes Heidenhain Gmbh Optische Längenmesseinrichtung
DE102011082570A1 (de) * 2011-09-13 2013-03-14 Dr. Johannes Heidenhain Gmbh Rotatorische Positionsmesseinrichtung
CN102325233A (zh) * 2011-10-10 2012-01-18 朱杰 带有多扫描阵列的接触式图像传感器
EP3009806B1 (de) * 2014-10-14 2016-12-14 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung mit Vorrichtung zur Kompensation von Fehlern durch thermische Dilatation eines Massstabes
DE102015219810A1 (de) * 2015-10-13 2017-04-13 Dr. Johannes Heidenhain Gmbh X-Y-Tisch mit einer Positionsmesseinrichtung
TW201741618A (zh) * 2016-05-23 2017-12-01 國立交通大學 光學感測裝置
GB201916662D0 (en) * 2019-11-15 2020-01-01 Renishaw Plc Encoder apparatus
GB201916641D0 (en) 2019-11-15 2020-01-01 Renishaw Plc Position measurement device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1256755A (zh) * 1998-03-09 2000-06-14 Otm技术有限公司 光学平移测量

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5317149A (en) * 1992-11-12 1994-05-31 Hewlett-Packard Company Optical encoder with encapsulated electrooptics
US6424407B1 (en) * 1998-03-09 2002-07-23 Otm Technologies Ltd. Optical translation measurement
JP4812189B2 (ja) * 2001-06-15 2011-11-09 オリンパス株式会社 光学式検出装置
US6723980B2 (en) * 2001-07-16 2004-04-20 Wai-Hon Lee Position sensor with grating to detect moving object with periodic pattern
JP4658452B2 (ja) * 2003-02-07 2011-03-23 オリンパス株式会社 光学式エンコーダ
JP4021382B2 (ja) * 2003-07-28 2007-12-12 オリンパス株式会社 光学式エンコーダ及びその製造方法並びに光学レンズモジュール
US20070120048A1 (en) * 2005-11-25 2007-05-31 Lum Chee F Reflective encoder module
DE102006021017A1 (de) * 2006-05-05 2007-11-08 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1256755A (zh) * 1998-03-09 2000-06-14 Otm技术有限公司 光学平移测量

Also Published As

Publication number Publication date
US7473886B2 (en) 2009-01-06
EP1852684A1 (de) 2007-11-07
JP4982242B2 (ja) 2012-07-25
EP1852684B1 (de) 2012-08-15
ES2389734T3 (es) 2012-10-31
DE102006021017A1 (de) 2007-11-08
JP2007298522A (ja) 2007-11-15
CN101067560A (zh) 2007-11-07
US20070262250A1 (en) 2007-11-15

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Granted publication date: 20110803