JP4965970B2 - 担持体にスケールを固定するための方法、そのために形成されたスケールならびにこのスケールを備えた担持体 - Google Patents

担持体にスケールを固定するための方法、そのために形成されたスケールならびにこのスケールを備えた担持体 Download PDF

Info

Publication number
JP4965970B2
JP4965970B2 JP2006298575A JP2006298575A JP4965970B2 JP 4965970 B2 JP4965970 B2 JP 4965970B2 JP 2006298575 A JP2006298575 A JP 2006298575A JP 2006298575 A JP2006298575 A JP 2006298575A JP 4965970 B2 JP4965970 B2 JP 4965970B2
Authority
JP
Japan
Prior art keywords
scale
carrier
bonding
ridges
adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2006298575A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007127649A5 (cg-RX-API-DMAC7.html
JP2007127649A (ja
Inventor
ヴォルフガング・ホルツアプフェル
イェルク・ドレシャー
ペーター・シュペックバッハー
ヨーゼフ・ヴァイトマン
ヴォルフガング・プーハー
キリアン・バウアー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE200510053088 external-priority patent/DE102005053088A1/de
Priority claimed from DE200610017708 external-priority patent/DE102006017708A1/de
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of JP2007127649A publication Critical patent/JP2007127649A/ja
Publication of JP2007127649A5 publication Critical patent/JP2007127649A5/ja
Application granted granted Critical
Publication of JP4965970B2 publication Critical patent/JP4965970B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2006298575A 2005-11-04 2006-11-02 担持体にスケールを固定するための方法、そのために形成されたスケールならびにこのスケールを備えた担持体 Active JP4965970B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102005053088.5 2005-11-04
DE200510053088 DE102005053088A1 (de) 2005-11-04 2005-11-04 Verfahren zum Befestigen eines Maßstabs an einen Träger sowie Maßstab und Träger mit diesem Maßstab
DE102006017708.8 2006-04-15
DE200610017708 DE102006017708A1 (de) 2006-04-15 2006-04-15 Verfahren zum Befestigen eines Maßstabs an einen Träger sowie Träger mit diesem Maßstab

Publications (3)

Publication Number Publication Date
JP2007127649A JP2007127649A (ja) 2007-05-24
JP2007127649A5 JP2007127649A5 (cg-RX-API-DMAC7.html) 2009-11-26
JP4965970B2 true JP4965970B2 (ja) 2012-07-04

Family

ID=37722726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006298575A Active JP4965970B2 (ja) 2005-11-04 2006-11-02 担持体にスケールを固定するための方法、そのために形成されたスケールならびにこのスケールを備えた担持体

Country Status (3)

Country Link
EP (1) EP1783463B1 (cg-RX-API-DMAC7.html)
JP (1) JP4965970B2 (cg-RX-API-DMAC7.html)
ES (1) ES2535851T3 (cg-RX-API-DMAC7.html)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5162800B2 (ja) * 2009-03-24 2013-03-13 株式会社ミツトヨ リニアスケール
DE102009002142A1 (de) * 2009-04-02 2010-10-07 Dr. Johannes Heidenhain Gmbh Anordnung mit einem an einem Träger befestigten Maßstab und Verfahren zum Halten eines Maßstabs an einem Träger
DE102009047120A1 (de) 2009-11-25 2011-05-26 Dr. Johannes Heidenhain Gmbh Anordnung mit einem an einem Träger befestigten Maßstab
ES2615116T3 (es) * 2014-11-19 2017-06-05 Dr. Johannes Heidenhain Gmbh Disposición con una escala de medición fijada en un soporte
DE102016201088A1 (de) 2016-01-26 2017-07-27 Dr. Johannes Heidenhain Gmbh Verfahren zum Bearbeiten einer Maßverkörperung
US11491737B2 (en) * 2018-09-25 2022-11-08 Raytheon Company Robust method for bonding optical materials
JP7221433B1 (ja) 2022-02-03 2023-02-13 株式会社光学技研 光学素子及び光学素子の製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08145609A (ja) * 1994-11-21 1996-06-07 Sony Magnescale Inc 位置検出装置
JPH08247791A (ja) * 1995-03-09 1996-09-27 Olympus Optical Co Ltd 光学式マイクロリニアエンコーダ
US5669997A (en) * 1995-07-13 1997-09-23 Hughes Danbury Optical Systems, Inc. Method of bonding optical members together
JPH1090576A (ja) * 1996-09-17 1998-04-10 Fuji Photo Film Co Ltd 光学部材の固定構造
DE19755482A1 (de) * 1997-12-13 1999-06-17 Zeiss Carl Fa Verbundener Körper
JP3517185B2 (ja) * 2000-07-19 2004-04-05 株式会社ミツトヨ スケール部材、その製造方法及びそれを用いた変位計
DE10153147A1 (de) * 2001-10-27 2003-05-08 Zeiss Carl Verfahren zum Aufbringen eines Maßstabes auf einen Träger

Also Published As

Publication number Publication date
ES2535851T3 (es) 2015-05-18
EP1783463B1 (de) 2015-04-15
JP2007127649A (ja) 2007-05-24
EP1783463A1 (de) 2007-05-09

Similar Documents

Publication Publication Date Title
JP2014006268A (ja) 光学干渉方式の圧力センサ
JP4965970B2 (ja) 担持体にスケールを固定するための方法、そのために形成されたスケールならびにこのスケールを備えた担持体
JP5436658B2 (ja) キャリアに固定されたスケールを有する装置及びスケールをキャリアに保持する方法
JP5579024B2 (ja) 保持体に固定された物差しを備える配列装置
EP1078227B1 (en) An optically addressed sensing system
TW202129310A (zh) 將附件連接至光學元件之主體的方法與光學元件
CN101416031A (zh) 用于使刻度尺保持在载体上的方法以及具有载体和刻度尺的装置
US7707739B2 (en) Method for attaching a scale to a carrier, a scale, and carrier having a scale
JP2011028239A (ja) 接合光学素子
JP2011027862A (ja) 接合光学素子
US12379533B2 (en) Grating part and manufacturing method thereof
US6099193A (en) Composite body
US6227754B1 (en) Composite body
JP5653691B2 (ja) ペリクル枠体及びペリクル
US9007686B2 (en) Diffractive element with a high degree of wavefront flatness
JP2000035369A (ja) 圧力センサおよびその製造方法
TW403914B (en) A positioning table
CN1959540B (zh) 将标尺固定在支架上的方法、标尺和具有这种标尺的支架
JP3836401B2 (ja) 光学装置
CA2296090C (en) Pressure sensor and a method of manufacturing the same
JP5653690B2 (ja) ペリクル用枠体及びペリクル
JP2552187B2 (ja) 高精度接着方法
JP5163041B2 (ja) 光学素子固定装置及びその製造方法
JPH09325082A (ja) 半導体圧力変換器
JP5646357B2 (ja) 基準尺

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20091007

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20091007

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20100517

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110927

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20111101

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120228

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120330

R150 Certificate of patent or registration of utility model

Ref document number: 4965970

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150406

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250