JP4958278B2 - 検査装置 - Google Patents

検査装置 Download PDF

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Publication number
JP4958278B2
JP4958278B2 JP2007063613A JP2007063613A JP4958278B2 JP 4958278 B2 JP4958278 B2 JP 4958278B2 JP 2007063613 A JP2007063613 A JP 2007063613A JP 2007063613 A JP2007063613 A JP 2007063613A JP 4958278 B2 JP4958278 B2 JP 4958278B2
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JP
Japan
Prior art keywords
electromagnetic wave
unit
transmission path
detection unit
specimen
Prior art date
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Expired - Fee Related
Application number
JP2007063613A
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English (en)
Japanese (ja)
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JP2008224436A5 (https=
JP2008224436A (ja
Inventor
信太郎 笠井
健明 井辻
敏彦 尾内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
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Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2007063613A priority Critical patent/JP4958278B2/ja
Priority to US12/046,907 priority patent/US7795588B2/en
Publication of JP2008224436A publication Critical patent/JP2008224436A/ja
Publication of JP2008224436A5 publication Critical patent/JP2008224436A5/ja
Application granted granted Critical
Publication of JP4958278B2 publication Critical patent/JP4958278B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Toxicology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2007063613A 2007-03-13 2007-03-13 検査装置 Expired - Fee Related JP4958278B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007063613A JP4958278B2 (ja) 2007-03-13 2007-03-13 検査装置
US12/046,907 US7795588B2 (en) 2007-03-13 2008-03-12 Inspection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007063613A JP4958278B2 (ja) 2007-03-13 2007-03-13 検査装置

Publications (3)

Publication Number Publication Date
JP2008224436A JP2008224436A (ja) 2008-09-25
JP2008224436A5 JP2008224436A5 (https=) 2010-10-07
JP4958278B2 true JP4958278B2 (ja) 2012-06-20

Family

ID=39761716

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007063613A Expired - Fee Related JP4958278B2 (ja) 2007-03-13 2007-03-13 検査装置

Country Status (2)

Country Link
US (1) US7795588B2 (https=)
JP (1) JP4958278B2 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4975000B2 (ja) * 2007-12-07 2012-07-11 キヤノン株式会社 電磁波発生素子、電磁波集積素子、及び電磁波検出装置
JP5240828B2 (ja) * 2008-05-13 2013-07-17 ルネサスエレクトロニクス株式会社 半導体パッケージ基板の設計方法
JP5178398B2 (ja) * 2008-08-27 2013-04-10 キヤノン株式会社 光伝導素子
GB2488515B (en) * 2011-02-11 2015-05-20 Teraview Ltd A test system
US9759693B2 (en) * 2012-12-20 2017-09-12 International Business Machines Corporation Method of simulating the absorption of plane waves using FEM software tools

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2132043C (en) * 1993-09-17 1999-03-23 Toshihiko Ouchi Method and apparatus for frequency modulating a semiconductor laser, and an optical communication system using the same
JP3244976B2 (ja) * 1994-12-05 2002-01-07 キヤノン株式会社 半導体レーザの駆動方法及び半導体レーザ装置及び光通信方法及びノード及び光通信システム
JPH11168262A (ja) * 1997-09-30 1999-06-22 Canon Inc 面型光デバイス、その製造方法、および表示装置
CA2404434A1 (en) * 2000-04-06 2001-10-18 Rensselaer Polytechnic Institute Terahertz transceivers and methods for emission and detection of terahertz pulses using such transceivers
JP4164423B2 (ja) * 2003-08-29 2008-10-15 キヤノン株式会社 センシング部とポインティングデバイスとを含み構成される装置
JP4250070B2 (ja) * 2003-12-11 2009-04-08 日立電線株式会社 光センサ
JP4785392B2 (ja) * 2004-03-26 2011-10-05 キヤノン株式会社 テラヘルツ電磁波の発生素子の製造方法
JP4546326B2 (ja) * 2004-07-30 2010-09-15 キヤノン株式会社 センシング装置
WO2006046745A1 (en) * 2004-10-29 2006-05-04 Canon Kabushiki Kaisha Sensor for analyzing or identifying property of object, sensing apparatus using same, and sensing method
JP4636917B2 (ja) * 2005-03-28 2011-02-23 キヤノン株式会社 検体保持用のデバイス、それを用いた検体検出装置及び検体検出方法
JP4955966B2 (ja) * 2005-09-05 2012-06-20 キヤノン株式会社 導波路、それを用いた装置及び検出方法
JP5196779B2 (ja) * 2006-03-17 2013-05-15 キヤノン株式会社 光伝導素子及びセンサ装置
US7473898B2 (en) * 2006-05-17 2009-01-06 The Boeing Company Cryogenic terahertz spectroscopy

Also Published As

Publication number Publication date
US20080224071A1 (en) 2008-09-18
US7795588B2 (en) 2010-09-14
JP2008224436A (ja) 2008-09-25

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