JP4928073B2 - 有機elパネルの製造方法および有機elパネル - Google Patents
有機elパネルの製造方法および有機elパネル Download PDFInfo
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- JP4928073B2 JP4928073B2 JP2004332013A JP2004332013A JP4928073B2 JP 4928073 B2 JP4928073 B2 JP 4928073B2 JP 2004332013 A JP2004332013 A JP 2004332013A JP 2004332013 A JP2004332013 A JP 2004332013A JP 4928073 B2 JP4928073 B2 JP 4928073B2
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- mask
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- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000011368 organic material Substances 0.000 claims description 26
- 239000000463 material Substances 0.000 claims description 14
- 238000000151 deposition Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- 239000003086 colorant Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 9
- 239000011295 pitch Substances 0.000 description 8
- 239000000758 substrate Substances 0.000 description 6
- 239000010410 layer Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Description
図2は、実施形態で用いる蒸着マスクセットである。この実施形態では、マスクセットは、サブマスクA(図2(A))、サブマスクB(図2(B))の2つから構成されている。そして、このサブマスクA、Bを用いて、従来と同じ画素数を蒸着する。
上記実施形態のサブマスクを用いると、同色画素の蒸着をする際、サブマスクAで蒸着するある色の有機EL素子と、サブマスクBで蒸着する同色の有機EL素子は、互いに特性が異なるように形成することが可能である。
Claims (2)
- 画素毎に有機材料を塗り分けて蒸着形成することで、異なる発光色の画素を形成したフルカラーの有機ELパネルを製造する方法であって、
少なくとも1色で発光するための有機材料を蒸着する工程において、
第1マスクを利用して、この第1マスクの開口部に対応する第1群の画素に1つの色で発光するための有機材料を蒸着する第1工程と、
第2マスクを利用して、前記第1マスクを用いてまだ蒸着されていない画素である、第2マスクの開口部に対応する第2群の画素に前記1つの色と同一の色で発光するための有機材料を蒸着する第2工程と、
を含み、
前記第1マスクを用いた第1工程と、前記第2マスクを用いた第2工程において、同一色で発光するが、異なる有機材料を蒸着し、
前記第1マスクを用いた第1工程と、前記第2マスクを用いた第2工程において、蒸着する異なる有機材料は、発光効率の特性が異なるが同色の画素を形成する材料であり、前記第1マスクと前記第2マスクを用いて、特性の異なる同色の素子を、一つのパネルに形成する
ことを特徴とする有機ELパネルの製造方法。 - 請求項1に記載の方法によって、製造された有機ELパネル。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004332013A JP4928073B2 (ja) | 2004-11-16 | 2004-11-16 | 有機elパネルの製造方法および有機elパネル |
US11/270,072 US7573192B2 (en) | 2004-11-16 | 2005-11-09 | Organic EL panel manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004332013A JP4928073B2 (ja) | 2004-11-16 | 2004-11-16 | 有機elパネルの製造方法および有機elパネル |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006147182A JP2006147182A (ja) | 2006-06-08 |
JP4928073B2 true JP4928073B2 (ja) | 2012-05-09 |
Family
ID=36573439
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004332013A Active JP4928073B2 (ja) | 2004-11-16 | 2004-11-16 | 有機elパネルの製造方法および有機elパネル |
Country Status (2)
Country | Link |
---|---|
US (1) | US7573192B2 (ja) |
JP (1) | JP4928073B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9450212B2 (en) | 2014-12-03 | 2016-09-20 | Samsung Display Co., Ltd. | Manufacturing method of organic light emitting diode display |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100739309B1 (ko) * | 2006-10-13 | 2007-07-12 | 삼성에스디아이 주식회사 | 박막 증착용 마스크 및 이를 이용한 유기 전계발광표시장치 |
JP2008225101A (ja) * | 2007-03-13 | 2008-09-25 | Fujifilm Corp | 表示装置 |
KR101453877B1 (ko) * | 2008-08-04 | 2014-10-23 | 삼성디스플레이 주식회사 | 유기 el 소자의 발광층을 증착하는 방법, 상기 증착방법을 포함하는 유기 el 소자의 제조 방법, 및 상기제조 방법에 의해 제조된 유기 el 소자 |
JP5153598B2 (ja) * | 2008-12-08 | 2013-02-27 | 富士フイルム株式会社 | カラーフィルタの製造方法 |
JP2010272300A (ja) * | 2009-05-20 | 2010-12-02 | Canon Inc | 有機el表示装置の製造方法 |
JP5486951B2 (ja) * | 2010-02-12 | 2014-05-07 | 株式会社アルバック | 蒸着マスク、蒸着装置、薄膜形成方法 |
KR20120124224A (ko) | 2011-05-03 | 2012-11-13 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 |
CN104330954B (zh) * | 2014-08-25 | 2016-06-01 | 京东方科技集团股份有限公司 | 掩膜版、掩膜版组、像素的制作方法及像素结构 |
US9349922B2 (en) | 2014-08-25 | 2016-05-24 | Boe Technology Group Co., Ltd. | Mask, mask group, manufacturing method of pixels and pixel structure |
JP6514495B2 (ja) * | 2014-12-03 | 2019-05-15 | 株式会社ジャパンディスプレイ | 画像表示装置 |
KR102615639B1 (ko) | 2016-09-26 | 2023-12-20 | 삼성디스플레이 주식회사 | 유기 발광 디스플레이 장치, 이를 제조하기 위한 마스크, 및 이의 제조 방법 |
CN109055892B (zh) * | 2018-07-27 | 2020-01-10 | 云谷(固安)科技有限公司 | 掩膜板及蒸镀装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3077688B1 (ja) * | 1999-02-12 | 2000-08-14 | 日本電気株式会社 | 有機薄膜elパネルとその製造方法 |
JP3687953B2 (ja) * | 2000-02-22 | 2005-08-24 | 東北パイオニア株式会社 | 有機エレクトロルミネセンス表示パネル及びその製造方法 |
JP2002231449A (ja) * | 2001-02-05 | 2002-08-16 | Tohoku Pioneer Corp | 有機elディスプレイ及びその製造方法 |
JP2003231961A (ja) * | 2002-02-12 | 2003-08-19 | Seiko Epson Corp | マスク、電気光学装置及び有機el装置の製造方法、有機el装置の製造装置並びに電子機器 |
US6911961B2 (en) * | 2002-10-11 | 2005-06-28 | Eastman Kodak Company | Method of designing an OLED display with lifetime optimized primaries |
JP2004311319A (ja) * | 2003-04-10 | 2004-11-04 | Sony Corp | 成膜用マスク装置並びにこれを用いた薄膜デバイスの製造方法 |
JP4651918B2 (ja) * | 2003-05-21 | 2011-03-16 | 東北パイオニア株式会社 | 有機elパネルの製造方法 |
TWI258721B (en) * | 2004-08-10 | 2006-07-21 | Ind Tech Res Inst | Full-color organic electroluminescence device |
WO2006027830A1 (ja) * | 2004-09-08 | 2006-03-16 | Toray Industries, Inc. | 有機電界発光装置およびその製造方法 |
-
2004
- 2004-11-16 JP JP2004332013A patent/JP4928073B2/ja active Active
-
2005
- 2005-11-09 US US11/270,072 patent/US7573192B2/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9450212B2 (en) | 2014-12-03 | 2016-09-20 | Samsung Display Co., Ltd. | Manufacturing method of organic light emitting diode display |
Also Published As
Publication number | Publication date |
---|---|
US7573192B2 (en) | 2009-08-11 |
US20060119252A1 (en) | 2006-06-08 |
JP2006147182A (ja) | 2006-06-08 |
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