JP4927383B2 - 真空処理装置 - Google Patents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B30/00—Production of single crystals or homogeneous polycrystalline material with defined structure characterised by the action of electric or magnetic fields, wave energy or other specific physical conditions
- C30B30/04—Production of single crystals or homogeneous polycrystalline material with defined structure characterised by the action of electric or magnetic fields, wave energy or other specific physical conditions using magnetic fields
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
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- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05B—LOCKS; ACCESSORIES THEREFOR; HANDCUFFS
- E05B51/00—Operating or controlling locks or other fastening devices by other non-mechanical means
- E05B51/02—Operating or controlling locks or other fastening devices by other non-mechanical means by pneumatic or hydraulic means
-
- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05B—LOCKS; ACCESSORIES THEREFOR; HANDCUFFS
- E05B51/00—Operating or controlling locks or other fastening devices by other non-mechanical means
- E05B51/02—Operating or controlling locks or other fastening devices by other non-mechanical means by pneumatic or hydraulic means
- E05B51/023—Operating or controlling locks or other fastening devices by other non-mechanical means by pneumatic or hydraulic means actuated in response to external pressure, blast or explosion
-
- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05B—LOCKS; ACCESSORIES THEREFOR; HANDCUFFS
- E05B65/00—Locks or fastenings for special use
- E05B65/001—Locks or fastenings for special use for gas- or watertight wings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3447—Collimators, shutters, apertures
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Plasma Technology (AREA)
Description
・遠距離電場のためのコイル
・シェブロン(Chevron)の構成および形状
・電極(補助陽極)
・扉閉鎖部。
DE10018143が最も近い先行技術として見なされ、該文献はこれにて本願の一体の部分であると宣言される。上記文献においては、DLC層と、さまざまな加熱、エッチングおよびコーティングの工程からなるプロセスと、対応のDLC層を析出するための装置とが記載されている。本発明の真空装置においては、とりわけ同じおよび類似のDLC層を析出すること、あるいは前処理および工作物上の対応の層の析出のための対応の各プロセスを実行できることが図られる。
(b) たとえば直流電圧低電圧アークを使用して、電子照射、放射加熱および/またはイオン照射により基板表面を加熱および/またはクリーニングする、
(c) たとえばスパッタリングまたは陰極アークプロセスによって、固着層をプラズマ支援で蒸着させる、
(d) 固着層成分をプラズマ支援で蒸着(PVDプロセス)させるのと同時にガス相から炭素を析出(CVDプロセス)することによって固着層に遷移層を設ける、
(e) ガス相から炭素をプラズマ支援で析出することによって遷移層上にダイヤモンド類似の炭素層を設ける。
DE10018143に従い製造可能な新規の層システムにおける決定的な諸利点にもかかわらず、このコーティング方法およびそこに記載の装置にはなお改良の余地がある。
室の上部領域および下部領域において、プラズマ制御のためのヘルムホルツコイル対に類するマグネットコイルが取付けられることがある。しかしながら、これによって、側方での装入および排出過程、あるいは点検整備を目的とした接近が妨げられることになり、そのため上記装置は通常床上装入式として実施され、これに対応した高さの製造場および接近部を設けることが求められる。接近性の観点からコイルの直径を小さくすると、これは磁場の均質性に対して不利な結果をもたらすことになる。
(1) 絶縁性または低導電率の層の製造時におけるターゲットおよび/または補助電極のためのクリーニングの手間の回避、ならびに新規のターゲット/シャッタ構成によるプロセスの安全性および層品質の向上。
る。
以下、この発明について、図1〜9を用いてより詳細に説明する。
シェブロンの背面に、網目サイズが1mmの格子を取付けることができる。
るいは不均一な処理結果を回避することができる。たとえば、コイル電流を反転させることによって、装置の高さ全体にわたって基板に対して完全に均質な加熱が実現可能であり、こうして過熱または臨界プロセス状態が効果的に回避可能である。さらに、このような措置によって、寸法の異なるコイルの場合でも、クラップコイルによるものと同様にコーティング領域にわたる均質な加熱レートおよびエッチング除去が達成可能であった。また、DLCプロセス中の層厚分布も、平均値から+/−10%の範囲内であった。
部35とともに動かされる。こうして、軸32′まわりで2つの接続されたレバー32,33の回転運動のみによってすべての機能が作動させられ得るという利点が得られる。引張りアーム33は、代替的には固定式にレバー32に固定されてもよく、その場合、鉤部35は、たとえば、扉38あるいは閂部39に対して作用する傾斜平面の形態で構成される。
階の爆発保護が可能となる。
Claims (5)
- 工作物を処理するための真空処理装置(1)であって、低電圧アーク放電装置が中に配置された真空化可能な処理室(10)と、少なくとも1つの閉鎖可能な装入・排出開口部と、前記処理室の側壁に取付けられた少なくとも1つのコーティング源と、遠距離磁場を形成するための磁場生成装置と、工作物を受けるための少なくとも1つの工作物担体とを備える、真空処理装置において、
さらにターゲット・シャッタ構成(8,8′)が設けられ、前記ターゲット・シャッタ構成においては、覆われた状態でシャッタ(8)とターゲット(12)との間隔が10〜35mmの間であり、こうして一方では前記ターゲットの背後でマグネトロンまたは陰極のスパーク放電の点火および動作が可能となり、他方ではターゲット(8)へのバイアス供給をオフにした際に副プラズマの点火が防止されることを特徴とする、真空処理装置。 - 前記アーク放電装置の陽極は、電極ヘッド(23)および冷却可能な電極シェル(24)を有し、前記電極ヘッド(23)が、加熱の際に冷却される前記電極シェル(24)と押付け着座をなすように、前記電極シェル(24)内に固定されかつそのような材料から作製されることを特徴とする、請求項1に記載の真空処理装置。
- さらに、少なくとも1つのポンプ嵌め管(5)を前記処理室(10)から光学的に分離するためのシェブロン構成が設けられ、前記シェブロン構成が、ポンプ嵌め管(5)とシェブロン(9)との間に、前記ポンプ嵌め管よりも大きい横断面を有するシェブロン室(17)を含むことを特徴とする、請求項1に記載の真空処理装置。
- 前記磁場生成装置が、遠距離磁場を生成するためのコイルを含み、コイル体(21)が前記真空処理装置(1)の外部で固定され、前記コイルが、少なくとも1つの部分体(20,20′)を有するコイル(19)として実施されることを特徴とする、請求項1に記載の真空処理装置。
- 前記装入・排出開口部に扉閉鎖部が設けられ、前記扉閉鎖部が、一定の大きさの押付け圧力を調節するための手段(29〜40)を有しており、調節可能な過剰圧力の際に扉が過剰圧力を抜くために制御されて開くように実質的に前記手段が配置可能であることを特徴とする、請求項1に記載の真空処理装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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CH01866/04 | 2004-11-12 | ||
CH01866/04A CH697552B1 (de) | 2004-11-12 | 2004-11-12 | Vakuumbehandlungsanlage. |
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JP2006138017A JP2006138017A (ja) | 2006-06-01 |
JP4927383B2 true JP4927383B2 (ja) | 2012-05-09 |
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US (1) | US7905991B2 (ja) |
JP (1) | JP4927383B2 (ja) |
CH (1) | CH697552B1 (ja) |
DE (1) | DE102005050358B4 (ja) |
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DE102008062332A1 (de) | 2008-12-15 | 2010-06-17 | Gühring Ohg | Vorrichtung zur Oberflächenbehandlung und/oder -beschichtung von Substratkomponenten |
BR112012012002B1 (pt) * | 2009-11-20 | 2020-11-10 | Oerlikon Surface Solutions Ag, Pfäffikon | câmara de tratamento a vácuo com disposição de bobina para estabelecimento de um campo magnético e instalação de tratamento a vácuo |
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USD702043S1 (en) | 2012-08-23 | 2014-04-08 | Jewell Llc | Handbag organizer insert |
EP2868768B1 (en) | 2013-10-29 | 2021-06-16 | Oerlikon Surface Solutions AG, Pfäffikon | Shutter system |
CN108456867A (zh) * | 2018-06-22 | 2018-08-28 | 广东腾胜真空技术工程有限公司 | 配置辅助阳极的低温沉积设备 |
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-
2004
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2005
- 2005-10-20 DE DE102005050358A patent/DE102005050358B4/de active Active
- 2005-11-10 US US11/272,216 patent/US7905991B2/en active Active
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JP2006138017A (ja) | 2006-06-01 |
DE102005050358A1 (de) | 2006-08-17 |
US20060102077A1 (en) | 2006-05-18 |
CH697552B1 (de) | 2008-11-28 |
US7905991B2 (en) | 2011-03-15 |
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