JP4923555B2 - 樹脂フィルムおよび光配線の製造方法 - Google Patents

樹脂フィルムおよび光配線の製造方法 Download PDF

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Publication number
JP4923555B2
JP4923555B2 JP2005362932A JP2005362932A JP4923555B2 JP 4923555 B2 JP4923555 B2 JP 4923555B2 JP 2005362932 A JP2005362932 A JP 2005362932A JP 2005362932 A JP2005362932 A JP 2005362932A JP 4923555 B2 JP4923555 B2 JP 4923555B2
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resin
film
serving
core
width direction
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JP2006221145A5 (enExample
JP2006221145A (ja
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俊一 長田
敏央 野中
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Toray Industries Inc
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Toray Industries Inc
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JP2005362932A 2005-01-17 2005-12-16 樹脂フィルムおよび光配線の製造方法 Expired - Fee Related JP4923555B2 (ja)

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JP2005362932A JP4923555B2 (ja) 2005-01-17 2005-12-16 樹脂フィルムおよび光配線の製造方法

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JP2005008736 2005-01-17
JP2005008736 2005-01-17
JP2005362932A JP4923555B2 (ja) 2005-01-17 2005-12-16 樹脂フィルムおよび光配線の製造方法

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JP2006221145A JP2006221145A (ja) 2006-08-24
JP2006221145A5 JP2006221145A5 (enExample) 2008-12-25
JP4923555B2 true JP4923555B2 (ja) 2012-04-25

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2008032724A1 (ja) * 2006-09-14 2010-01-28 東レ株式会社 光導波路フィルム
JP5665162B2 (ja) * 2008-03-07 2015-02-04 東レ株式会社 光導波路フィルムおよびその製造方法
US9199403B2 (en) 2008-03-14 2015-12-01 Toray Industries, Inc. Laminated film
JP5597938B2 (ja) * 2009-05-26 2014-10-01 東レ株式会社 フィルム成型用ダイ
CN120491296B (zh) * 2025-05-15 2026-07-17 北京纳析光电科技有限公司 一种刻蚀工艺光刻转盘设计的转盘式扫描共聚焦系统

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03140906A (ja) * 1989-10-26 1991-06-14 Nok Corp 光導波路
JPH08300435A (ja) * 1995-05-02 1996-11-19 Mitsubishi Rayon Co Ltd 複合樹脂シートの製造装置及びシートの製造方法

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JP2006221145A (ja) 2006-08-24

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