JP4910033B2 - プローブ装置 - Google Patents
プローブ装置 Download PDFInfo
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- JP4910033B2 JP4910033B2 JP2009255158A JP2009255158A JP4910033B2 JP 4910033 B2 JP4910033 B2 JP 4910033B2 JP 2009255158 A JP2009255158 A JP 2009255158A JP 2009255158 A JP2009255158 A JP 2009255158A JP 4910033 B2 JP4910033 B2 JP 4910033B2
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- probe
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Description
Claims (3)
- 載置台が設けられたプローブ検査室と、
収納容器から取出した被検査基板を前記プローブ検査室内の載置台上へ搬送する搬送機構を有するローダ室とを備え、
前記載置台に載置された被検査基板上の電極パッドと、プローブカードのプローブとを接触させて、前記被検査基板の被検査チップの電気的特性を測定するプローブ装置において、
前記プローブ検査室を、前記ローダ室の長手方向に沿って平行に、隣接して複数配設するとともに、
隣接する前記プローブ検査室同士を仕切る筺体の側面と前記ローダ室側に位置する前記筺体の前面との交差部に、角を面取りするように、前記側面と前記前面とを接続する傾斜面部を配設し、
前記前面から前記傾斜面部に回り込んで開口する、屈曲又は湾曲した形状の搬入出口を設けたことを特徴とするプローブ装置。 - 前記搬入出口と同様に屈曲又は湾曲した形状とされ、当該搬入出口を開閉するシャッタ部材を設けたことを特徴とする請求項1に記載のプローブ装置。
- 前記シャッタ部材は、エアシリンダによって開閉されることを特徴とする請求項2に記載のプローブ装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009255158A JP4910033B2 (ja) | 2009-11-06 | 2009-11-06 | プローブ装置 |
CN201010532051.0A CN102116835B (zh) | 2009-11-06 | 2010-10-27 | 探测装置以及衬底运送方法 |
KR1020100105873A KR101147787B1 (ko) | 2009-11-06 | 2010-10-28 | 프로브 장치 및 기판 반송 방법 |
US12/939,323 US8726748B2 (en) | 2009-11-06 | 2010-11-04 | Probe apparatus and substrate transfer method |
TW099138043A TWI412767B (zh) | 2009-11-06 | 2010-11-05 | Probe device and substrate transfer method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2009255158A JP4910033B2 (ja) | 2009-11-06 | 2009-11-06 | プローブ装置 |
Publications (2)
Publication Number | Publication Date |
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JP2011100883A JP2011100883A (ja) | 2011-05-19 |
JP4910033B2 true JP4910033B2 (ja) | 2012-04-04 |
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ID=44191836
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2009255158A Active JP4910033B2 (ja) | 2009-11-06 | 2009-11-06 | プローブ装置 |
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JP (1) | JP4910033B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11454664B2 (en) | 2017-06-21 | 2022-09-27 | Tokyo Electron Limited | Testing system |
CN117897803A (zh) | 2022-12-07 | 2024-04-16 | 株式会社荏原制作所 | 搬运装置及基板处理装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07307372A (ja) * | 1994-05-12 | 1995-11-21 | Kokusai Electric Co Ltd | 半導体製造装置のカセット授受装置 |
JP2001203167A (ja) * | 2000-01-20 | 2001-07-27 | Hitachi Kokusai Electric Inc | 半導体製造装置 |
JP4961894B2 (ja) * | 2006-08-25 | 2012-06-27 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及び記憶媒体 |
JP5120018B2 (ja) * | 2007-05-15 | 2013-01-16 | 東京エレクトロン株式会社 | プローブ装置 |
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- 2009-11-06 JP JP2009255158A patent/JP4910033B2/ja active Active
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Publication number | Publication date |
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JP2011100883A (ja) | 2011-05-19 |
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