JP4899455B2 - 光電式エンコーダ - Google Patents

光電式エンコーダ Download PDF

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Publication number
JP4899455B2
JP4899455B2 JP2005357658A JP2005357658A JP4899455B2 JP 4899455 B2 JP4899455 B2 JP 4899455B2 JP 2005357658 A JP2005357658 A JP 2005357658A JP 2005357658 A JP2005357658 A JP 2005357658A JP 4899455 B2 JP4899455 B2 JP 4899455B2
Authority
JP
Japan
Prior art keywords
grating
light
photoelectric encoder
illumination light
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005357658A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006343314A (ja
JP2006343314A5 (enExample
Inventor
亨 今井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP2005357658A priority Critical patent/JP4899455B2/ja
Priority to PCT/JP2005/022876 priority patent/WO2006064801A1/ja
Priority to EP12167432.9A priority patent/EP2489989B1/en
Priority to EP05816701.6A priority patent/EP1826535B1/en
Priority to US11/598,733 priority patent/US7332709B2/en
Publication of JP2006343314A publication Critical patent/JP2006343314A/ja
Publication of JP2006343314A5 publication Critical patent/JP2006343314A5/ja
Application granted granted Critical
Publication of JP4899455B2 publication Critical patent/JP4899455B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/2448—Correction of gain, threshold, offset or phase control
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP2005357658A 2004-12-13 2005-12-12 光電式エンコーダ Expired - Fee Related JP4899455B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2005357658A JP4899455B2 (ja) 2004-12-13 2005-12-12 光電式エンコーダ
PCT/JP2005/022876 WO2006064801A1 (ja) 2004-12-13 2005-12-13 光電式エンコーダ
EP12167432.9A EP2489989B1 (en) 2004-12-13 2005-12-13 Photoelectronic encoder
EP05816701.6A EP1826535B1 (en) 2004-12-13 2005-12-13 Photoelectric encoder
US11/598,733 US7332709B2 (en) 2004-12-13 2006-11-14 Photoelectric encoder

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2004360089 2004-12-13
JP2004360089 2004-12-13
JP2005137591 2005-05-10
JP2005137591 2005-05-10
JP2005357658A JP4899455B2 (ja) 2004-12-13 2005-12-12 光電式エンコーダ

Publications (3)

Publication Number Publication Date
JP2006343314A JP2006343314A (ja) 2006-12-21
JP2006343314A5 JP2006343314A5 (enExample) 2011-05-06
JP4899455B2 true JP4899455B2 (ja) 2012-03-21

Family

ID=36587856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005357658A Expired - Fee Related JP4899455B2 (ja) 2004-12-13 2005-12-12 光電式エンコーダ

Country Status (3)

Country Link
EP (2) EP2489989B1 (enExample)
JP (1) JP4899455B2 (enExample)
WO (1) WO2006064801A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007315919A (ja) * 2006-05-25 2007-12-06 Sendai Nikon:Kk エンコーダ
JP4924879B2 (ja) * 2006-11-14 2012-04-25 株式会社ニコン エンコーダ
JP4962773B2 (ja) 2007-02-05 2012-06-27 株式会社ニコン エンコーダ
EP2202492A4 (en) * 2007-10-05 2014-12-31 Nikon Corp CODER
CN102197286B (zh) * 2008-10-23 2014-09-03 株式会社尼康 编码器
EP3527949A1 (en) * 2018-02-19 2019-08-21 OCE Holding B.V. Position measurement device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2003492A1 (de) * 1970-01-27 1971-08-12 Leitz Ernst Gmbh Messverfahren fuer Schrittgeber zum Messen von Laengen oder Winkeln sowie Anordnungen zur Durchfuehrung dieses Messverfahrens
JPS57203905A (en) * 1981-06-10 1982-12-14 Nec Corp Optical position detector
JP3210111B2 (ja) * 1992-12-24 2001-09-17 キヤノン株式会社 変位検出装置
US6005667A (en) * 1996-07-23 1999-12-21 Canon Kabushiki Kaisha Optical displacement measurement apparatus and information recording apparatus
US6639686B1 (en) * 2000-04-13 2003-10-28 Nanowave, Inc. Method of and apparatus for real-time continual nanometer scale position measurement by beam probing as by laser beams and the like of atomic and other undulating surfaces such as gratings or the like relatively moving with respect to the probing beams
JP2002243503A (ja) * 2001-02-13 2002-08-28 Nikon Corp 光学式エンコーダ

Also Published As

Publication number Publication date
EP2489989A2 (en) 2012-08-22
JP2006343314A (ja) 2006-12-21
EP2489989B1 (en) 2017-11-15
WO2006064801A1 (ja) 2006-06-22
EP2489989A3 (en) 2015-08-12
EP1826535A4 (en) 2011-06-22
EP1826535A1 (en) 2007-08-29
EP1826535B1 (en) 2016-02-24

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