JP4881062B2 - 積層圧電素子、その製造方法および振動波駆動装置 - Google Patents

積層圧電素子、その製造方法および振動波駆動装置 Download PDF

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Publication number
JP4881062B2
JP4881062B2 JP2006135598A JP2006135598A JP4881062B2 JP 4881062 B2 JP4881062 B2 JP 4881062B2 JP 2006135598 A JP2006135598 A JP 2006135598A JP 2006135598 A JP2006135598 A JP 2006135598A JP 4881062 B2 JP4881062 B2 JP 4881062B2
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Japan
Prior art keywords
piezoelectric
piezoelectric element
electrode
electrode layer
layer
Prior art date
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Expired - Fee Related
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JP2006135598A
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English (en)
Japanese (ja)
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JP2007306775A5 (https=
JP2007306775A (ja
Inventor
裕 丸山
海史 大橋
貴之 月本
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2006135598A priority Critical patent/JP4881062B2/ja
Priority to US11/748,701 priority patent/US7531948B2/en
Publication of JP2007306775A publication Critical patent/JP2007306775A/ja
Priority to US12/417,220 priority patent/US8371005B2/en
Publication of JP2007306775A5 publication Critical patent/JP2007306775A5/ja
Application granted granted Critical
Publication of JP4881062B2 publication Critical patent/JP4881062B2/ja
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/0015—Driving devices, e.g. vibrators using only bending modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/106—Langevin motors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/506—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a cylindrical shape and having stacking in the radial direction, e.g. coaxial or spiral type rolls
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2006135598A 2006-05-15 2006-05-15 積層圧電素子、その製造方法および振動波駆動装置 Expired - Fee Related JP4881062B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2006135598A JP4881062B2 (ja) 2006-05-15 2006-05-15 積層圧電素子、その製造方法および振動波駆動装置
US11/748,701 US7531948B2 (en) 2006-05-15 2007-05-15 Stacked piezoelectric element, manufacturing method thereof and vibration wave driving apparatus
US12/417,220 US8371005B2 (en) 2006-05-15 2009-04-02 Stacked piezoelectric element, manufacturing method thereof and vibration wave driving apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006135598A JP4881062B2 (ja) 2006-05-15 2006-05-15 積層圧電素子、その製造方法および振動波駆動装置

Publications (3)

Publication Number Publication Date
JP2007306775A JP2007306775A (ja) 2007-11-22
JP2007306775A5 JP2007306775A5 (https=) 2011-01-13
JP4881062B2 true JP4881062B2 (ja) 2012-02-22

Family

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JP2006135598A Expired - Fee Related JP4881062B2 (ja) 2006-05-15 2006-05-15 積層圧電素子、その製造方法および振動波駆動装置

Country Status (2)

Country Link
US (2) US7531948B2 (https=)
JP (1) JP4881062B2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180055436A (ko) * 2016-11-17 2018-05-25 한국과학기술원 전단형 압전 액츄에이터

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KR20060112870A (ko) * 2005-04-28 2006-11-02 삼성전자주식회사 압전 소자 및 이를 갖는 프린터 헤드
JP4956929B2 (ja) * 2005-07-25 2012-06-20 富士ゼロックス株式会社 アクチュエータ、液滴吐出ヘッド、液滴吐出装置、及びアクチュエータ製造方法
US7732998B2 (en) * 2006-08-03 2010-06-08 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Telescoping cylindrical piezoelectric fiber composite actuator assemblies
DE102008042864A1 (de) 2008-10-15 2010-04-22 Robert Bosch Gmbh Piezoelektrischer Aktor
DE102008042863A1 (de) 2008-10-15 2010-04-22 Robert Bosch Gmbh Piezoelektrischer Aktor
JP6046416B2 (ja) 2011-08-23 2016-12-14 日本碍子株式会社 ハニカム構造体の製造方法
US9390676B2 (en) * 2011-09-21 2016-07-12 International Business Machines Corporation Tactile presentation of information
JP5932402B2 (ja) * 2012-03-07 2016-06-08 キヤノン株式会社 振動波駆動装置
JP5963603B2 (ja) 2012-08-03 2016-08-03 オリンパス株式会社 超音波振動デバイス、超音波振動デバイスの製造方法および超音波医療装置
TW201545828A (zh) * 2014-06-10 2015-12-16 Ya-Yang Yan 一種放電加工切割線及該放電加工切割線之製造方法
US11248692B2 (en) * 2016-03-11 2022-02-15 Deere & Company Composite gears and methods of manufacturing such gears

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US3102216A (en) * 1959-12-23 1963-08-27 Western Electric Co Metallized capacitor
JP2961545B2 (ja) * 1988-12-12 1999-10-12 株式会社トーキン 圧電楕円運動振動子
JP2837722B2 (ja) * 1990-01-30 1998-12-16 日本無線株式会社 圧電型超音波振動子
JPH0698568A (ja) * 1991-07-08 1994-04-08 Piezo Tec Kk 単相可逆回転型電歪公転子モータ
JP3313782B2 (ja) 1992-10-06 2002-08-12 キヤノン株式会社 積層圧電素子及びその製造方法並びに分極方法、及び振動波駆動装置、振動波駆動装置を備えた機器
JP3311034B2 (ja) 1992-08-25 2002-08-05 キヤノン株式会社 積層圧電素子、積層圧電素子の製造方法、振動波駆動装置及び振動波駆動装置を備えた機器
JP3432321B2 (ja) 1995-01-31 2003-08-04 太平洋セメント株式会社 積層セラミックス圧電体素子
JP2001160637A (ja) * 1999-09-20 2001-06-12 Denso Corp 圧電素子および圧電素子の製造方法
JP3397753B2 (ja) * 1999-09-30 2003-04-21 ティーディーケイ株式会社 積層型圧電素子およびその製造方法
JP2001135873A (ja) * 1999-11-08 2001-05-18 Minolta Co Ltd 圧電変換素子
JP2001352768A (ja) * 2000-06-05 2001-12-21 Canon Inc 積層電気−機械エネルギー変換素子および振動波駆動装置
JP2003009555A (ja) * 2001-06-25 2003-01-10 Canon Inc 積層電気−機械エネルギー変換素子および振動波駆動装置
JP2003033055A (ja) * 2001-07-09 2003-01-31 Minolta Co Ltd 圧電変換素子及びそれを使用した装置
JP4422973B2 (ja) * 2002-08-27 2010-03-03 京セラ株式会社 積層圧電体、アクチュエータ及び印刷ヘッド

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180055436A (ko) * 2016-11-17 2018-05-25 한국과학기술원 전단형 압전 액츄에이터
KR101871974B1 (ko) * 2016-11-17 2018-08-02 한국과학기술원 전단형 압전 액츄에이터

Also Published As

Publication number Publication date
US20090199381A1 (en) 2009-08-13
JP2007306775A (ja) 2007-11-22
US7531948B2 (en) 2009-05-12
US8371005B2 (en) 2013-02-12
US20070262679A1 (en) 2007-11-15

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