JP4879760B2 - マイクロスイッチング素子およびマイクロスイッチング素子製造方法 - Google Patents

マイクロスイッチング素子およびマイクロスイッチング素子製造方法 Download PDF

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Publication number
JP4879760B2
JP4879760B2 JP2007009360A JP2007009360A JP4879760B2 JP 4879760 B2 JP4879760 B2 JP 4879760B2 JP 2007009360 A JP2007009360 A JP 2007009360A JP 2007009360 A JP2007009360 A JP 2007009360A JP 4879760 B2 JP4879760 B2 JP 4879760B2
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JP
Japan
Prior art keywords
contact
movable
fixed
electrode
contact electrode
Prior art date
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Expired - Fee Related
Application number
JP2007009360A
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English (en)
Japanese (ja)
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JP2008177043A (ja
Inventor
トエン アン グエン
忠司 中谷
知史 上田
遊 米澤
直之 三島
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Fujitsu Ltd
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Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2007009360A priority Critical patent/JP4879760B2/ja
Priority to KR1020080002588A priority patent/KR100967771B1/ko
Priority to US12/007,630 priority patent/US7755459B2/en
Priority to CN200810001293XA priority patent/CN101226856B/zh
Publication of JP2008177043A publication Critical patent/JP2008177043A/ja
Application granted granted Critical
Publication of JP4879760B2 publication Critical patent/JP4879760B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H61/04—Electrothermal relays wherein the thermally-sensitive member is only heated directly
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H01H2057/006—Micromechanical piezoelectric relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49105—Switch making

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  • Micromachines (AREA)
  • Manufacture Of Switches (AREA)
JP2007009360A 2007-01-18 2007-01-18 マイクロスイッチング素子およびマイクロスイッチング素子製造方法 Expired - Fee Related JP4879760B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007009360A JP4879760B2 (ja) 2007-01-18 2007-01-18 マイクロスイッチング素子およびマイクロスイッチング素子製造方法
KR1020080002588A KR100967771B1 (ko) 2007-01-18 2008-01-09 마이크로스위칭 소자 및 마이크로스위칭 소자 제조 방법
US12/007,630 US7755459B2 (en) 2007-01-18 2008-01-14 Micro-switching device and method of manufacturing the same
CN200810001293XA CN101226856B (zh) 2007-01-18 2008-01-17 微开关器件及其制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007009360A JP4879760B2 (ja) 2007-01-18 2007-01-18 マイクロスイッチング素子およびマイクロスイッチング素子製造方法

Publications (2)

Publication Number Publication Date
JP2008177043A JP2008177043A (ja) 2008-07-31
JP4879760B2 true JP4879760B2 (ja) 2012-02-22

Family

ID=39640657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007009360A Expired - Fee Related JP4879760B2 (ja) 2007-01-18 2007-01-18 マイクロスイッチング素子およびマイクロスイッチング素子製造方法

Country Status (4)

Country Link
US (1) US7755459B2 (ko)
JP (1) JP4879760B2 (ko)
KR (1) KR100967771B1 (ko)
CN (1) CN101226856B (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101719434B (zh) * 2009-12-08 2012-05-23 北京大学 一种微机械加速度锁存开关
CN101719575B (zh) * 2010-01-13 2012-08-29 上海交通大学 电热驱动的面内双稳态射频微开关
US8576029B2 (en) * 2010-06-17 2013-11-05 General Electric Company MEMS switching array having a substrate arranged to conduct switching current
JP5803615B2 (ja) 2011-11-29 2015-11-04 富士通株式会社 電子デバイスとその製造方法
US9748048B2 (en) 2014-04-25 2017-08-29 Analog Devices Global MEMS switch
CN104037027B (zh) * 2014-06-26 2016-02-03 电子科技大学 一种mems电容开关
JP2016059191A (ja) * 2014-09-11 2016-04-21 ソニー株式会社 静電型デバイス
CN104992879A (zh) * 2015-07-29 2015-10-21 东南大学 一种基于体硅材料的外力驱动mems开关及其制作方法
WO2017134518A1 (en) 2016-02-04 2017-08-10 Analog Devices Global Active opening mems switch device
EP3979291A1 (de) * 2020-09-30 2022-04-06 Siemens Aktiengesellschaft Elektronikmodul und anlage
DE102022209390A1 (de) 2022-09-09 2024-03-28 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Relais mit einem elektrischen Bezugspotential

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3119255B2 (ja) 1998-12-22 2000-12-18 日本電気株式会社 マイクロマシンスイッチおよびその製造方法
JP3449334B2 (ja) 1998-12-22 2003-09-22 日本電気株式会社 マイクロマシンスイッチおよびその製造方法
KR100513715B1 (ko) * 2000-12-20 2005-09-07 삼성전자주식회사 마이크로 스위칭 소자
KR100419233B1 (ko) 2002-03-11 2004-02-21 삼성전자주식회사 멤스소자 및 그의 제작방법
US6657525B1 (en) 2002-05-31 2003-12-02 Northrop Grumman Corporation Microelectromechanical RF switch
KR100513723B1 (ko) 2002-11-18 2005-09-08 삼성전자주식회사 Ｍｅｍｓ스위치
JP4447940B2 (ja) * 2004-02-27 2010-04-07 富士通株式会社 マイクロスイッチング素子製造方法およびマイクロスイッチング素子
JP2005251549A (ja) 2004-03-04 2005-09-15 Nikon Corp マイクロスイッチ及びマイクロスイッチの駆動方法
JP2005302711A (ja) 2004-03-15 2005-10-27 Matsushita Electric Ind Co Ltd アクチュエータおよびその制御方法およびこれを用いたスイッチ
JP4414263B2 (ja) * 2004-03-31 2010-02-10 富士通株式会社 マイクロスイッチング素子およびマイクロスイッチング素子製造方法
JP4417861B2 (ja) * 2005-01-31 2010-02-17 富士通株式会社 マイクロスイッチング素子
US7633213B2 (en) 2005-03-15 2009-12-15 Panasonic Corporation Actuator, switch using the actuator, and method of controlling the actuator
JP4504237B2 (ja) * 2005-03-18 2010-07-14 富士通株式会社 ウエットエッチング方法、マイクロ可動素子製造方法、およびマイクロ可動素子
JP2006331756A (ja) * 2005-05-25 2006-12-07 Hitachi Ltd 内燃機関始動装置及びそれに用いられる開閉装置
JP4739173B2 (ja) * 2006-12-07 2011-08-03 富士通株式会社 マイクロスイッチング素子

Also Published As

Publication number Publication date
US20080174390A1 (en) 2008-07-24
US7755459B2 (en) 2010-07-13
JP2008177043A (ja) 2008-07-31
CN101226856A (zh) 2008-07-23
KR100967771B1 (ko) 2010-07-05
KR20080068548A (ko) 2008-07-23
CN101226856B (zh) 2012-05-09

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