JP4865309B2 - インクジェット記録ヘッド用基板の製造方法 - Google Patents

インクジェット記録ヘッド用基板の製造方法 Download PDF

Info

Publication number
JP4865309B2
JP4865309B2 JP2005344366A JP2005344366A JP4865309B2 JP 4865309 B2 JP4865309 B2 JP 4865309B2 JP 2005344366 A JP2005344366 A JP 2005344366A JP 2005344366 A JP2005344366 A JP 2005344366A JP 4865309 B2 JP4865309 B2 JP 4865309B2
Authority
JP
Japan
Prior art keywords
substrate
ink
ink jet
recording head
jet recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005344366A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007144878A (ja
JP2007144878A5 (enExample
Inventor
照夫 尾崎
一郎 斉藤
賢二 小野
智 伊部
稔康 坂井
宇 横山
和昭 柴田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US10/561,058 priority Critical patent/US7252521B2/en
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2005344366A priority patent/JP4865309B2/ja
Priority to US11/561,058 priority patent/US7857429B2/en
Publication of JP2007144878A publication Critical patent/JP2007144878A/ja
Publication of JP2007144878A5 publication Critical patent/JP2007144878A5/ja
Priority to US12/943,329 priority patent/US8079675B2/en
Application granted granted Critical
Publication of JP4865309B2 publication Critical patent/JP4865309B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2005344366A 2003-07-25 2005-11-29 インクジェット記録ヘッド用基板の製造方法 Expired - Fee Related JP4865309B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US10/561,058 US7252521B2 (en) 2003-07-25 2004-07-26 Injector/ejector and shelf structure grounded to card frame ground
JP2005344366A JP4865309B2 (ja) 2005-11-29 2005-11-29 インクジェット記録ヘッド用基板の製造方法
US11/561,058 US7857429B2 (en) 2005-11-29 2006-11-17 Ink jet recording head and manufacturing method of ink jet recording head
US12/943,329 US8079675B2 (en) 2005-11-29 2010-11-10 Ink jet recording head and manufacturing method of ink jet recording head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005344366A JP4865309B2 (ja) 2005-11-29 2005-11-29 インクジェット記録ヘッド用基板の製造方法

Publications (3)

Publication Number Publication Date
JP2007144878A JP2007144878A (ja) 2007-06-14
JP2007144878A5 JP2007144878A5 (enExample) 2010-07-08
JP4865309B2 true JP4865309B2 (ja) 2012-02-01

Family

ID=38110286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005344366A Expired - Fee Related JP4865309B2 (ja) 2003-07-25 2005-11-29 インクジェット記録ヘッド用基板の製造方法

Country Status (2)

Country Link
US (2) US7857429B2 (enExample)
JP (1) JP4865309B2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007105801A1 (ja) * 2006-03-10 2007-09-20 Canon Kabushiki Kaisha 液体吐出ヘッド基体、その基体を用いた液体吐出ヘッドおよびそれらの製造方法
JP4506773B2 (ja) * 2007-03-28 2010-07-21 ブラザー工業株式会社 基板両面間の電気接続方法
US8152279B2 (en) * 2008-06-18 2012-04-10 Canon Kabushiki Kaisha Liquid ejection head having substrate with nickel-containing layer
JP2010000632A (ja) * 2008-06-18 2010-01-07 Canon Inc インクジェットヘッド用基板および該基板を具えるインクジェットヘッド
JP5393275B2 (ja) * 2008-06-24 2014-01-22 キヤノン株式会社 液体吐出ヘッド
US8241540B2 (en) * 2008-10-29 2012-08-14 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head
JP5578859B2 (ja) * 2010-01-14 2014-08-27 キヤノン株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法
JP5679688B2 (ja) 2010-03-31 2015-03-04 キヤノン株式会社 液体吐出ヘッド及びその製造方法
JP6095315B2 (ja) * 2012-10-02 2017-03-15 キヤノン株式会社 液体吐出ヘッドの製造方法
JP5972139B2 (ja) 2012-10-10 2016-08-17 キヤノン株式会社 液体吐出ヘッドの製造方法及び液体吐出ヘッド
JP2015080918A (ja) 2013-10-23 2015-04-27 キヤノン株式会社 液体吐出ヘッドおよび該液体吐出ヘッドの製造方法
JP6202987B2 (ja) * 2013-10-30 2017-09-27 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
JP6566709B2 (ja) * 2015-05-07 2019-08-28 キヤノン株式会社 インクジェット記録ヘッド用基板
JP7166851B2 (ja) 2018-09-07 2022-11-08 キヤノン株式会社 液体吐出ヘッドおよび液体吐出ヘッドの製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1127227A (en) * 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
JPS57102366A (en) * 1980-12-18 1982-06-25 Canon Inc Ink jet head
KR960021538A (ko) * 1994-12-29 1996-07-18 김용현 전해연마법을 사용한 발열방식의 잉크젯 프린트 헤드 및 그 제작방법
JP4617145B2 (ja) * 2003-12-16 2011-01-19 キヤノン株式会社 液体吐出ヘッド用基板の製造方法
JP4480132B2 (ja) * 2004-02-18 2010-06-16 キヤノン株式会社 液体吐出用ヘッドの製造方法

Also Published As

Publication number Publication date
US20070120902A1 (en) 2007-05-31
JP2007144878A (ja) 2007-06-14
US8079675B2 (en) 2011-12-20
US20110056079A1 (en) 2011-03-10
US7857429B2 (en) 2010-12-28

Similar Documents

Publication Publication Date Title
US6365058B1 (en) Method of manufacturing a fluid ejection device with a fluid channel therethrough
JP3619036B2 (ja) インクジェット記録ヘッドの製造方法
JP5143274B2 (ja) インクジェットヘッドおよびその製造方法
JP4865309B2 (ja) インクジェット記録ヘッド用基板の製造方法
JP2005178364A (ja) インクジェット記録ヘッドの製造方法、インクジェット記録ヘッドおよびインクジェットカートリッジ
JP5224771B2 (ja) 記録ヘッド基板の製造方法
JP2009061669A (ja) インクジェット記録ヘッド用基板の製造方法、インクジェット記録ヘッド及びその製造方法
US8191998B2 (en) Liquid ejecting head
JP2008179039A (ja) 液体吐出ヘッド及び液体吐出ヘッドの製造方法
US6776915B2 (en) Method of manufacturing a fluid ejection device with a fluid channel therethrough
JP2009178906A (ja) インクジェット記録ヘッドの製造方法
JP5335396B2 (ja) インクジェット記録ヘッドの製造方法
JP2008126420A (ja) インクジェット記録ヘッドおよびその作製方法
US9393781B2 (en) Liquid-discharging head and method of producing the same
JP4671330B2 (ja) インクジェット記録ヘッドの製造方法
US7735961B2 (en) Liquid discharge head and method of producing the same
KR100499150B1 (ko) 잉크젯 프린트헤드 및 그 제조방법
JP2005144782A (ja) インクジェット記録ヘッドの製造方法。
KR100519765B1 (ko) 잉크젯 프린트헤드 및 그 제조방법
JP2007230127A (ja) インクジェット記録ヘッド用基体の製造方法
JP4974751B2 (ja) インクジェットヘッドおよびその製造方法
JP2010253685A (ja) インクジェット記録ヘッド及びその製造方法
JP2010280069A (ja) 液体吐出ヘッドおよびその製造方法
JP2006198884A (ja) インクジェット吐出ヘッド用基板
JP5063390B2 (ja) インクジェット記録ヘッドの製造方法

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20081118

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100521

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110519

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110629

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110829

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20111108

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20111110

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20141118

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20141118

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees