JP4863065B2 - Wiring board inspection method - Google Patents

Wiring board inspection method Download PDF

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JP4863065B2
JP4863065B2 JP2006233568A JP2006233568A JP4863065B2 JP 4863065 B2 JP4863065 B2 JP 4863065B2 JP 2006233568 A JP2006233568 A JP 2006233568A JP 2006233568 A JP2006233568 A JP 2006233568A JP 4863065 B2 JP4863065 B2 JP 4863065B2
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ivh
wiring board
diameter
laser
land
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JP2008060224A (en
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光泰 石原
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Resonac Corp
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Hitachi Chemical Co Ltd
Showa Denko Materials Co Ltd
Resonac Corp
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Description

本発明は、配線板の検査方法に関するものである。   The present invention relates to a wiring board inspection method.

従来多層プリント配線板のコンフォーマル加工法により形成された各内層の回路導体に達するIVHは、加工物の厚み、ガラスクロス等の繊維の粗密度、樹脂材質、レーザー強度などにより均一にレーザー孔明け加工することが難しく、断面を観察する等、その基板を破壊しないと樽形状のIVHを検出することが困難であった。   The IVH that reaches the circuit conductors of each inner layer formed by the conformal processing method of conventional multilayer printed wiring boards is uniformly laser drilled by the thickness of the workpiece, the coarse density of fibers such as glass cloth, the resin material, and the laser strength. It is difficult to process, and it is difficult to detect barrel-shaped IVH unless the substrate is destroyed, such as by observing a cross section.

従来のレーザー孔明け加工では、その一例として、特許文献1に開示されている多層プリント配線板の製造方法がある。
これは、樹脂付き銅箔を積層しながら多段に重ねたIVHを形成するビルドアップ法による多層プリント配線板の製造方法であって、多層プリント配線板の下方からの透過光を認識できる基準マークを第1IVH用のボトムランドに設け、基準マークから透過光を検出することにより第2IVHの合わせ位置決めをする多層プリント配線板の製造方法である。
特開2004−146427号公報。
As an example of conventional laser drilling, there is a method for manufacturing a multilayer printed wiring board disclosed in Patent Document 1.
This is a method of manufacturing a multilayer printed wiring board by the build-up method that forms IVH stacked in multiple stages while laminating resin-coated copper foil, and a reference mark that can recognize transmitted light from below the multilayer printed wiring board. This is a method for manufacturing a multilayer printed wiring board, which is provided on the first land for the first IVH and detects the transmitted light from the reference mark, thereby aligning and positioning the second IVH.
JP 2004-146427 A.

プリント配線板の外層から各段の内層の回路導体に達するIVHのレーザー孔明け加工では、外層から各段の内層までの厚みは、各段の絶縁層の厚み、各段の内層の回路導体厚み、及び、樹脂材質が異なり、また、ガラスクロス等の繊維の粗密度が孔明け位置によって異なり、レーザー強度、レーザー加工ショット数を、作業前の数孔による確認テストによりレーザー加工条件を設定する必要があった。   In IVH laser drilling from the outer layer of the printed wiring board to the inner-layer circuit conductor of each step, the thickness from the outer layer to the inner layer of each step is the thickness of the insulating layer of each step, the thickness of the inner-layer circuit conductor of each step Also, the resin material is different, the coarse density of fibers such as glass cloth is different depending on the drilling position, and it is necessary to set the laser processing conditions by confirming the laser intensity and the number of shots of laser processing with several holes before work was there.

但し、レーザー孔明け加工後に万が一樽形状のIVHがあった場合は、それを判別する術がなく、樽形状であるがために、そのIVHは後工程である銅めっき前処理及び銅めっき工程において、IVH内の液循環が悪くなることによる接続信頼性の低下若しくは接続断線を引き起こす原因となっている。   However, in the unlikely event that there is a barrel-shaped IVH after laser drilling, there is no way to distinguish it, and because it is barrel-shaped, the IVH is a copper plating pretreatment and copper plating step that are the subsequent steps This causes a decrease in connection reliability or a disconnection due to poor liquid circulation in IVH.

本発明は、破壊検査をすることなく、多数のIVHから効率的に樽形状であるIVHを判別する検査方法を提供するものである。   This invention provides the inspection method which discriminate | determines IVH which is a barrel shape efficiently from many IVH, without performing a destructive inspection.

本発明は、以下の工程(a)〜(c)により行われる配線板の検査方法である。
(a)一方が解放され他方が有底であり層間の電気接続を行うIVHと、このIVH周囲に配置されるランドとを有した配線板を撮影した画像から、上記IVH最大内径を得る工程。
(b)前記撮影した画像から上記IVHランド径を得る工程。
(c)工程(a)により得られたIVH最大内径と、工程(b)により得られたランド径とを比較し、IVH最大内径が、ランド径よりも大きい場合にフラグをたてる工程。
The present invention is a wiring board inspection method performed by the following steps (a) to (c).
(A) A step of obtaining the above-mentioned maximum IVH inner diameter from an image obtained by photographing a wiring board having IVH in which one is released and the other is bottomed and performs electrical connection between layers and lands arranged around the IVH.
(B) A step of obtaining the IVH land diameter from the photographed image.
(C) A step of comparing the maximum IVH inner diameter obtained in the step (a) with the land diameter obtained in the step (b) and setting a flag when the IVH maximum inner diameter is larger than the land diameter.

本発明の配線板の検査方法では、樽形状のIVHを多数のIVHの中から、配線板を破壊することなく判別し、接続信頼性の低下若しくは接続断線を引き起こす原因となっているIVHを有する不良製品の流出を防ぐことができる。   In the method for inspecting a wiring board according to the present invention, a barrel-shaped IVH is discriminated from a large number of IVHs without destroying the wiring board, and has an IVH that causes a decrease in connection reliability or a connection breakage. The outflow of defective products can be prevented.

また、製品基板とは別の捨て枠部分にダミーのIVH及びランドを設けてやれば、製品にIVHと同心円上の丸ランドがなくとも製品基板のIVH樽形状の度合いをある程度把握することができる。   Further, if dummy IVH and land are provided in a discard frame portion different from the product substrate, the degree of IVH barrel shape of the product substrate can be grasped to some extent even if the product does not have a round land concentric with IVH.

また、捨て枠部分にダミーのIVH及びランド各々の径を任意に設ければ、基板を破壊することなく、よりIVH樽形状の度合い毎の発生率を知ることが可能であり、IVH樽形状の度合いの基準を設けて、より高品質なIVH形状を有する製品を選別することも可能とある。   In addition, if the diameter of each of the dummy IVH and land is arbitrarily provided in the discarded frame portion, it is possible to know the occurrence rate for each degree of the IVH barrel shape without destroying the substrate. It is also possible to select a product having a higher quality IVH shape by setting a standard of degree.

また、実際のレーザー孔明け加工前におけるレーザー加工条件を設定するテストの際、従来は断面観察により基板を破壊して断面形状を観察し、樽形状の度合いを観察していたが、本発明を用いれば基板を破壊することなく高作業効率で多数のIVHの樽形状の程度を知ることができ、効率的にレーザー孔明け加工条件を設定することができる。   In the test for setting the laser processing conditions before the actual laser drilling, the substrate was conventionally destroyed by observing the cross section by observing the cross section, and the degree of the barrel shape was observed. If used, the degree of barrel shape of a large number of IVHs can be known with high work efficiency without destroying the substrate, and laser drilling conditions can be set efficiently.

本発明にて述べるIVHとは、一方が解放され他方が有底であり、導体によって2層以上の層間の電気接続を行う穴を意味する。
図1を用いてより具体的に述べると、絶縁層1の底部に配置された導体層2が、IVHの底部となり、絶縁層1の上部に配置した導体層3と、先に述べた導体層2とを、めっき層4により電気的に接続することで、IVH5を形成している。
The IVH described in the present invention means a hole in which one side is opened and the other side is bottomed, and electrical connection is made between two or more layers by a conductor.
More specifically with reference to FIG. 1, the conductor layer 2 arranged at the bottom of the insulating layer 1 becomes the bottom of the IVH, and the conductor layer 3 arranged at the top of the insulating layer 1 and the conductor layer described above. 2 are electrically connected by the plating layer 4 to form IVH5.

本発明にて述べるランドとは、IVHの開放面又は有底面に形成され、IVHの周壁と電気的に接続された導体を意味する。
図2を用いてより具体的に述べると、IVH5の直径よりも大きくした導体部分が、ランド6であり、基本的に、ランド径はIVH径よりも大きくなる。
また、図2にて説明したものは、IVH5及びランド6が、上面視円形であり同心円状になっているが、本発明はこれに限定されるものでなく、IVHとランドとが、その形状を相似形となし、軸心を同一とするものであれば、三角形、四角形等の多角形状、楕円形等の曲線形状とすることができる。
The land described in the present invention means a conductor formed on the open or bottomed surface of IVH and electrically connected to the peripheral wall of IVH.
More specifically with reference to FIG. 2, the conductor portion larger than the diameter of IVH5 is the land 6, and basically the land diameter is larger than the IVH diameter.
In addition, in the example described with reference to FIG. 2, the IVH 5 and the land 6 are circular in a top view and are concentric, but the present invention is not limited to this, and the IVH and the land have their shapes. Can be formed into a polygonal shape such as a triangle or a quadrangle, or a curved shape such as an ellipse.

本発明にて述べるIVHの最大内径とは、IVHの底面からIVHの開放端迄の間で、その径が最大となる部分の径を意味する。
図3を用いてより具体的に述べると、図3に示すIVH5は、その開放端部径7が最大ではなく、より深い部分に最大内径8が存在する。
The maximum inner diameter of the IVH described in the present invention means the diameter of the portion where the diameter is maximum from the bottom surface of the IVH to the open end of the IVH.
More specifically with reference to FIG. 3, the IVH 5 shown in FIG. 3 does not have a maximum open end diameter 7 but a maximum internal diameter 8 in a deeper portion.

本発明にて述べる画像撮影とは、IVHの最大内径を透視できるX線撮影等によりそのIVH画像を認識し、さらにそのIVHの最大内径を自動測長まで行うことをいう。   The image photographing described in the present invention means that the IVH image is recognized by X-ray photography or the like through which the maximum inner diameter of the IVH can be seen through, and further the automatic inner measurement of the maximum inner diameter of the IVH is performed.

本発明にて述べる画像比較とは、図4に示すように、X線透過等で認識したIVH最大内径(A)と、ランド径(B)とを各々測長し、この(A)と(B)との長さを比較することを意味する。比較は、(A)の長さが(B)の長さを超えた場合にNGとする。
図4に示すものでは、ナンバー1から3までの3回の測定を行い、それを画面上に表示させており、ナンバー1にのみNGの判定をしている。そして、NGの判定をした際には、フラグを立てて、表示、音、機器の停止等により告知を行う。
本発明では、多層プリント配線板の層間を接続するIVHのコンフォーマルレーザー孔明け加工方法においては、導体ランドを形成しそのレーザー穴あけ方向から観察すると、導体ランドとIVH壁面がほぼ同心円状にあり、そのふたつの径の大きさの差は、IVHの樽形状の程度により変化することを利用する。
In the image comparison described in the present invention, as shown in FIG. 4, the IVH maximum inner diameter (A) recognized by X-ray transmission or the like and the land diameter (B) are respectively measured, and (A) and ( It means comparing the length with B). The comparison is NG when the length of (A) exceeds the length of (B).
In the example shown in FIG. 4, three measurements from number 1 to number 3 are performed and displayed on the screen. Only number 1 is judged as NG. When NG is determined, a flag is set and notification is given by display, sound, device stoppage, and the like.
In the present invention, in the IVH conformal laser drilling method for connecting the layers of the multilayer printed wiring board, when the conductor land is formed and observed from the laser drilling direction, the conductor land and the IVH wall surface are substantially concentric. The difference in the size of the two diameters is used to change depending on the degree of the IVH barrel shape.

また、レーザー強度やレーザー加工ショット数等の加工条件は、材質、厚み毎に設定する。コンフォーマル加工法の場合、レーザー強度やショット数が大きい程加工面側のマスクとなる銅が突き出した樽形状になっていく。
つまり、コンフォーマル法でレーザー加工をしたIVHに導体ランドを任意の径で形成し、このIVH最大径とランド径の大きさをX線等を用いて比較して、IVH樽形状の程度あるいはレーザー強度やレーザーショット数、レーザー照射時間の過剰度が判定できる検査方法である。
Further, processing conditions such as laser intensity and the number of laser processing shots are set for each material and thickness. In the case of the conformal processing method, the larger the laser intensity or the number of shots, the more the barrel shape protrudes from the copper that becomes the mask on the processing surface side.
In other words, the conductor land is formed with an arbitrary diameter on the IVH laser-processed by the conformal method, and the IVH maximum diameter and the land diameter are compared using X-rays or the like, and the degree of IVH barrel shape or laser This inspection method can determine the intensity, the number of laser shots, and the excess of the laser irradiation time.

また、ランド径よりIVH径のほうが明らかに大きいときは、X線等を用いなくとも図5に示すように孔9ができ、IVH形状が樽形状のものと判別できる。   Further, when the IVH diameter is clearly larger than the land diameter, a hole 9 can be formed as shown in FIG.

以下、図6、図7を参照して本発明のプリント配線板のレーザー加工方法を説明する。
図6に示すように、プリント配線板のレーザー加工方法として、ガラスエポキシ材11の両面に銅箔を張り合わせ、この銅張積層板は、エッチングすることにより、両面に内層の回路導体12、13を設けたコア材15となる。
Hereinafter, the laser processing method of the printed wiring board according to the present invention will be described with reference to FIGS.
As shown in FIG. 6, as a laser processing method of a printed wiring board, copper foil is laminated on both surfaces of a glass epoxy material 11, and this copper clad laminate is etched to form inner circuit conductors 12 and 13 on both surfaces. It becomes the provided core material 15.

次に図7に示すように、内層の回路導体12、13を設けたコア材15の両面に銅箔17を樹脂16を介して高温プレス成形により積層する。
銅箔17の表面は、IVHとする箇所を選択し、エッチング加工により銅を除去する。銅を除去した後は、除去した部分にレーザを照射し、樹脂16に穴を設けるが、その際に残存銅がレーザマスクとなる。
Next, as shown in FIG. 7, a copper foil 17 is laminated on both surfaces of the core material 15 provided with the inner-layer circuit conductors 12 and 13 through a resin 16 by high-temperature press molding.
The surface of the copper foil 17 selects a portion to be IVH and removes copper by etching. After removing the copper, the removed portion is irradiated with a laser to provide a hole in the resin 16, and the remaining copper becomes a laser mask at that time.

その次に、図8に示すように、銅箔17を除去し樹脂16が露出している部分へ炭酸ガスレーザー(レーザー加工条件:周波数1000Hz、パルス幅10〜30μsec)を照射して、樹脂16を燃焼分解して除去することにより直径0.06〜0.20mmのバイアホール25、26を形成した。   Next, as shown in FIG. 8, the carbon foil 17 is removed and the portion where the resin 16 is exposed is irradiated with a carbon dioxide laser (laser processing conditions: frequency 1000 Hz, pulse width 10 to 30 μsec). The via holes 25 and 26 having a diameter of 0.06 to 0.20 mm were formed by removing them by combustion decomposition.

そして、図9に示すように、無電解銅めっき及び電解銅めっき処理をして外層の回路導体と内層の回路導体を接続するバイアホール25、26の周壁にめっき導体27を施しIVH28、29を形成する。
その後、外層銅箔(外層導体)をエッチングすることにより、所定の外層の回路導体22、23を設ける。
Then, as shown in FIG. 9, electroless copper plating and electrolytic copper plating are performed, and plated conductors 27 are applied to the peripheral walls of the via holes 25 and 26 connecting the outer layer circuit conductor and the inner layer circuit conductor, and IVHs 28 and 29 are formed. Form.
Thereafter, the outer layer copper foil (outer layer conductor) is etched to provide predetermined outer layer circuit conductors 22 and 23.

次に、図10を用いて本発明のプリント配線板のレーザー加工方法の1実施例を説明する。
図10の断面図は、上記の図8においてレーザー孔明け加工における上面側のバイアホール25部分を加工する際の拡大した断面図を示すものである。
この銅箔17を除去し、樹脂16が露出した部分へ炭酸ガスレーザーを照射して、樹脂16を燃焼分解して除去する。
Next, an embodiment of a laser processing method for a printed wiring board according to the present invention will be described with reference to FIG.
The cross-sectional view of FIG. 10 shows an enlarged cross-sectional view when processing the via hole 25 portion on the upper surface side in the laser drilling process in FIG.
The copper foil 17 is removed, the carbon dioxide laser is irradiated to the exposed portion of the resin 16, and the resin 16 is removed by combustion decomposition.

図10に示すように、銅箔17を除去し樹脂16が露出した部分へ炭酸ガスレーザー(レーザー加工条件:周波数1000Hz、パルス幅10〜30μsec、ビーム径φ0.2mm)を2回〜4回ショット(照射)して、厚み0.2mm(今回の例)の樹脂16を内層の回路導体12の近くまで燃焼分解して除去する。   As shown in FIG. 10, a carbon dioxide laser (laser processing conditions: frequency 1000 Hz, pulse width 10 to 30 μsec, beam diameter φ 0.2 mm) is shot 2 to 4 times to the portion where the copper foil 17 is removed and the resin 16 is exposed. (Irradiation), and the resin 16 having a thickness of 0.2 mm (in this example) is removed by combustion decomposition to the vicinity of the inner-layer circuit conductor 12.

次に図10に示すように、内層の回路導体12の一部分が露出するまでレーザー照射を続ける。この時点ではIVHはまだ樽形状にならない。   Next, as shown in FIG. 10, laser irradiation is continued until a part of the inner-layer circuit conductor 12 is exposed. At this point, the IVH is not yet barrel-shaped.

内層の回路導体12が露出してから先は、この回路導体12を溶解分解することになる。しかし、内層の回路導体12の加工時は溶解分解や燃焼分解がされにくく、レーザービームは金属導体で反射・拡散する。そして、この時点から先は過剰なレーザー照射をすると図11に示すようにバイアホール底面の周囲やバイアホール壁面の樹脂16がどんどん燃焼分解されていく。   After the inner layer circuit conductor 12 is exposed, the circuit conductor 12 is dissolved and decomposed. However, during processing of the inner-layer circuit conductor 12, dissolution and combustion decomposition is difficult, and the laser beam is reflected and diffused by the metal conductor. If excessive laser irradiation is performed from this point onward, as shown in FIG. 11, the resin 16 around the bottom surface of the via hole and the wall surface of the via hole is gradually burned and decomposed.

つまり、内層の回路導体12の一部分が露出する時点から先の過剰レーザー照射エネルギー分が、IVHの樽形状を発生させる原因である。   That is, the excess laser irradiation energy from the time when a part of the inner-layer circuit conductor 12 is exposed is the cause of the IVH barrel shape.

本発明のプリント配線板のレーザー加工方法により形成されたIVHを説明する断面図である。It is sectional drawing explaining IVH formed by the laser processing method of the printed wiring board of this invention. 本発明のプリント配線板のレーザー加工方法により形成されたIVHとそのランドを説明する面視図と断面図である。It is the surface view and sectional drawing explaining IVH and its land which were formed by the laser processing method of the printed wiring board of the present invention. 本発明のプリント配線板のレーザー加工方法により形成されたIVH最大内径を説明する面視図と断面図である。It is the surface view and sectional drawing explaining the IVH maximum internal diameter formed by the laser processing method of the printed wiring board of this invention. 本発明のプリント配線板のレーザー加工方法により形成されたIVH内径とそのランド径を比較するのに必要な設備の簡略図である。It is a simplified diagram of the equipment required to compare the IVH inner diameter formed by the laser processing method of the printed wiring board of the present invention and its land diameter. 本発明のプリント配線板のレーザー加工方法により形成されたIVH内径とそのランド径を比較してフラグを立てるべき樽状IVH(NG検出)の例を説明した図である。It is the figure explaining the example of barrel IVH (NG detection) which should raise a flag by comparing the IVH internal diameter formed with the laser processing method of the printed wiring board of the present invention, and the land diameter. 本発明のプリント配線板のレーザー加工方法を説明する前工程の断面図である。It is sectional drawing of the front process explaining the laser processing method of the printed wiring board of this invention. 本発明のプリント配線板のレーザー加工方法を説明する前工程の断面図である。It is sectional drawing of the front process explaining the laser processing method of the printed wiring board of this invention. 本発明のプリント配線板のレーザー加工方法を説明する前工程の断面図である。It is sectional drawing of the front process explaining the laser processing method of the printed wiring board of this invention. 本発明のプリント配線板のレーザー加工方法を説明する後工程の断面図である。It is sectional drawing of the post process explaining the laser processing method of the printed wiring board of this invention. 本発明のレーザー孔明けでバイアホール加工を説明する拡大図である。It is an enlarged view explaining via hole processing by laser drilling of the present invention. 樽形状IVHになる場合の例を説明する断面図である。It is sectional drawing explaining the example in the case of becoming barrel shape IVH.

符号の説明Explanation of symbols

1…絶縁層、2…導体層、3…導体層、4…めっき層、5…IVH、6…ランド、7…開放端部径、8…最大内径、9…孔、11…ガラスエポキシ材、12,13…内層の回路導体、15…コア材、16…樹脂、17…銅箔、22,23…外層の回路導体、25,26…バイアホール、27…めっき導体、28,29…IVH。

DESCRIPTION OF SYMBOLS 1 ... Insulating layer, 2 ... Conductor layer, 3 ... Conductor layer, 4 ... Plating layer, 5 ... IVH, 6 ... Land, 7 ... Open end diameter, 8 ... Maximum inner diameter, 9 ... Hole, 11 ... Glass epoxy material, 12, 13 ... inner layer circuit conductor, 15 ... core material, 16 ... resin, 17 ... copper foil, 22, 23 ... outer layer circuit conductor, 25, 26 ... via hole, 27 ... plated conductor, 28, 29 ... IVH.

Claims (1)

以下の工程(a)〜(c)により行われる配線板の検査方法。
(a)一方が解放され他方が有底であり層間の電気接続を行うIVHと、このIVH周囲に配置されるランドとを有した配線板を撮影した画像から、上記IVH最大内径を得る工程。
(b)前記撮影した画像から上記IVHランド径を得る工程。
(c)工程(a)により得られたIVH最大内径と、工程(b)により得られたランド径とを比較し、IVH最大内径が、ランド径よりも大きい場合にフラグをたてる工程。
A wiring board inspection method performed by the following steps (a) to (c).
(A) A step of obtaining the above-mentioned maximum IVH inner diameter from an image obtained by photographing a wiring board having IVH in which one is released and the other is bottomed and performs electrical connection between layers and lands arranged around the IVH.
(B) A step of obtaining the IVH land diameter from the photographed image.
(C) A step of comparing the maximum IVH inner diameter obtained in the step (a) with the land diameter obtained in the step (b) and setting a flag when the IVH maximum inner diameter is larger than the land diameter.
JP2006233568A 2006-08-30 2006-08-30 Wiring board inspection method Expired - Fee Related JP4863065B2 (en)

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