JP4860175B2 - 配線の作製方法、半導体装置の作製方法 - Google Patents

配線の作製方法、半導体装置の作製方法 Download PDF

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Publication number
JP4860175B2
JP4860175B2 JP2005130163A JP2005130163A JP4860175B2 JP 4860175 B2 JP4860175 B2 JP 4860175B2 JP 2005130163 A JP2005130163 A JP 2005130163A JP 2005130163 A JP2005130163 A JP 2005130163A JP 4860175 B2 JP4860175 B2 JP 4860175B2
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conductive layer
mask pattern
etching
layer
condition
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JP2005130163A
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Japanese (ja)
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JP2005340800A (ja
JP2005340800A5 (enExample
Inventor
慎也 笹川
悟 岡本
滋春 物江
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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Publication of JP2005340800A5 publication Critical patent/JP2005340800A5/ja
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  • Electroluminescent Light Sources (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Thin Film Transistor (AREA)
JP2005130163A 2004-04-28 2005-04-27 配線の作製方法、半導体装置の作製方法 Expired - Fee Related JP4860175B2 (ja)

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JP2005130163A JP4860175B2 (ja) 2004-04-28 2005-04-27 配線の作製方法、半導体装置の作製方法

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JP2004134535 2004-04-28
JP2004134535 2004-04-28
JP2005130163A JP4860175B2 (ja) 2004-04-28 2005-04-27 配線の作製方法、半導体装置の作製方法

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JP2005340800A JP2005340800A (ja) 2005-12-08
JP2005340800A5 JP2005340800A5 (enExample) 2008-04-17
JP4860175B2 true JP4860175B2 (ja) 2012-01-25

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5656036B2 (ja) * 2013-03-28 2015-01-21 Toto株式会社 複合構造物
JP6326312B2 (ja) * 2014-07-14 2018-05-16 株式会社ジャパンディスプレイ 表示装置
US20180096853A1 (en) * 2015-04-16 2018-04-05 Japan Advanced Institute Of Science And Technology Method of producing etching mask, etching mask precursor, and oxide layer, and method of manufacturing thin film transistor
JP6744395B2 (ja) * 2016-03-14 2020-08-19 国立大学法人北陸先端科学技術大学院大学 積層体、エッチングマスク、積層体の製造方法、及びエッチングマスクの製造方法、並びに薄膜トランジスタの製造方法
JP6885024B2 (ja) * 2016-11-17 2021-06-09 大日本印刷株式会社 透明電極

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2585267B2 (ja) * 1987-05-08 1997-02-26 株式会社東芝 液晶表示装置
JPH0661195A (ja) * 1992-08-06 1994-03-04 Toshiba Corp 半導体装置の製造方法
JP3164756B2 (ja) * 1995-08-30 2001-05-08 京セラ株式会社 多層薄膜回路の形成方法
JP4301628B2 (ja) * 1999-04-23 2009-07-22 三菱電機株式会社 ドライエッチング方法

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