JP4855170B2 - 電子顕微鏡装置 - Google Patents

電子顕微鏡装置 Download PDF

Info

Publication number
JP4855170B2
JP4855170B2 JP2006206210A JP2006206210A JP4855170B2 JP 4855170 B2 JP4855170 B2 JP 4855170B2 JP 2006206210 A JP2006206210 A JP 2006206210A JP 2006206210 A JP2006206210 A JP 2006206210A JP 4855170 B2 JP4855170 B2 JP 4855170B2
Authority
JP
Japan
Prior art keywords
frame
electron microscope
positioning
main body
gantry housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006206210A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008034231A5 (cg-RX-API-DMAC7.html
JP2008034231A (ja
Inventor
満 大沼
邦康 中村
浩一郎 齋藤
博実 稲田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Technologies Corp filed Critical Hitachi High Technologies Corp
Priority to JP2006206210A priority Critical patent/JP4855170B2/ja
Publication of JP2008034231A publication Critical patent/JP2008034231A/ja
Publication of JP2008034231A5 publication Critical patent/JP2008034231A5/ja
Application granted granted Critical
Publication of JP4855170B2 publication Critical patent/JP4855170B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

JP2006206210A 2006-07-28 2006-07-28 電子顕微鏡装置 Expired - Fee Related JP4855170B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006206210A JP4855170B2 (ja) 2006-07-28 2006-07-28 電子顕微鏡装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006206210A JP4855170B2 (ja) 2006-07-28 2006-07-28 電子顕微鏡装置

Publications (3)

Publication Number Publication Date
JP2008034231A JP2008034231A (ja) 2008-02-14
JP2008034231A5 JP2008034231A5 (cg-RX-API-DMAC7.html) 2009-09-10
JP4855170B2 true JP4855170B2 (ja) 2012-01-18

Family

ID=39123432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006206210A Expired - Fee Related JP4855170B2 (ja) 2006-07-28 2006-07-28 電子顕微鏡装置

Country Status (1)

Country Link
JP (1) JP4855170B2 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4600990A1 (en) * 2024-02-07 2025-08-13 Jeol Ltd. Charged particle beam system

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0790217B2 (ja) * 1991-05-20 1995-10-04 チュラルテック株式会社 浄水器
JP5372787B2 (ja) * 2010-01-14 2013-12-18 株式会社日立ハイテクノロジーズ 電子顕微鏡
KR101914231B1 (ko) * 2012-05-30 2018-11-02 삼성디스플레이 주식회사 주사 전자 현미경을 이용한 검사 시스템
JP6118169B2 (ja) * 2013-04-25 2017-04-19 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP6353646B2 (ja) * 2013-11-07 2018-07-04 株式会社日立ハイテクノロジーズ 荷電粒子線装置及び当該装置を用いた試料の観察方法
JP6535811B2 (ja) * 2016-04-13 2019-06-26 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6383756A (ja) * 1986-09-29 1988-04-14 Matsushita Electric Ind Co Ltd 現像装置
JPH08184529A (ja) * 1995-01-04 1996-07-16 Rohm Co Ltd 光半導体の発光検査装置
JP3652795B2 (ja) * 1996-07-05 2005-05-25 三菱重工業株式会社 電子ビーム真空容器
JP4184462B2 (ja) * 1997-11-21 2008-11-19 株式会社日立製作所 電子顕微鏡装置
JP4598255B2 (ja) * 2000-10-06 2010-12-15 オリンパス株式会社 クリーンカバー
JP2006079870A (ja) * 2004-09-08 2006-03-23 Hitachi High-Technologies Corp 荷電粒子線装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4600990A1 (en) * 2024-02-07 2025-08-13 Jeol Ltd. Charged particle beam system

Also Published As

Publication number Publication date
JP2008034231A (ja) 2008-02-14

Similar Documents

Publication Publication Date Title
JP4855170B2 (ja) 電子顕微鏡装置
JP3251098B2 (ja) 環境制御囲い付きプローブステーションおよび環境制御囲いを用いたプローブ試験方法
JP2018072140A (ja) 環境試験装置
KR20110129427A (ko) 하전입자 리소그래피 장치 및 진공 챔버에 진공을 발생시키는 방법
JP2001084934A (ja) 絞り支持装置
US20190195928A1 (en) Device for making emc test measurements
JP6654086B2 (ja) カメラ設置治具及び試験装置
JP2008298705A (ja) ガスクロマトグラフ
KR101480148B1 (ko) 광학 측정 장치
JPH05113382A (ja) 複合環境試験装置
CN217332814U (zh) 一种绝缘电阻测试仪校准装置
CN108956629B (zh) 一种基板检测设备
JP2006024420A (ja) フィラメント交換機構
CN220455193U (zh) 薄膜缺陷视觉检测设备
KR20180036817A (ko) 도어트림의 이음 시험용 지그 및 이를 이용한 도어트림의 이음 시험방법
CN221575471U (zh) 测试设备
US10416231B2 (en) Electronic component transport apparatus and electronic component inspection apparatus
JPH0140064Y2 (cg-RX-API-DMAC7.html)
CN218956999U (zh) 一种烟草图像获取装置的光源设备和烟草图像获取装置
US20250355039A1 (en) Panel inspection device
JPS5991332A (ja) 複合環境試験装置
CN213583703U (zh) 半导体处理设备
KR101311415B1 (ko) 전자 및 기계 부품 성능 검사 장치
KR0182489B1 (ko) 노즐조립체 테스트장치의 셧오프 도어 테스트 지그
JPH0579932B2 (cg-RX-API-DMAC7.html)

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090722

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090722

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110819

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20111018

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20111026

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20141104

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4855170

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees