JP4845692B2 - 液体吐出ヘッドの製造方法 - Google Patents

液体吐出ヘッドの製造方法 Download PDF

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Publication number
JP4845692B2
JP4845692B2 JP2006320248A JP2006320248A JP4845692B2 JP 4845692 B2 JP4845692 B2 JP 4845692B2 JP 2006320248 A JP2006320248 A JP 2006320248A JP 2006320248 A JP2006320248 A JP 2006320248A JP 4845692 B2 JP4845692 B2 JP 4845692B2
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Japan
Prior art keywords
photosensitive material
material layer
positive photosensitive
light
forming
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Expired - Fee Related
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JP2006320248A
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Japanese (ja)
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JP2007176162A5 (cg-RX-API-DMAC7.html
JP2007176162A (ja
Inventor
勇 堀内
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Canon Inc
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Canon Inc
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Priority to JP2006320248A priority Critical patent/JP4845692B2/ja
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Publication of JP2007176162A5 publication Critical patent/JP2007176162A5/ja
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Publication of JP4845692B2 publication Critical patent/JP4845692B2/ja
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JP2006320248A 2005-12-02 2006-11-28 液体吐出ヘッドの製造方法 Expired - Fee Related JP4845692B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006320248A JP4845692B2 (ja) 2005-12-02 2006-11-28 液体吐出ヘッドの製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005349487 2005-12-02
JP2005349487 2005-12-02
JP2006320248A JP4845692B2 (ja) 2005-12-02 2006-11-28 液体吐出ヘッドの製造方法

Publications (3)

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JP2007176162A JP2007176162A (ja) 2007-07-12
JP2007176162A5 JP2007176162A5 (cg-RX-API-DMAC7.html) 2010-01-14
JP4845692B2 true JP4845692B2 (ja) 2011-12-28

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JP2006320248A Expired - Fee Related JP4845692B2 (ja) 2005-12-02 2006-11-28 液体吐出ヘッドの製造方法

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JP (1) JP4845692B2 (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5159336B2 (ja) * 2008-01-25 2013-03-06 キヤノン株式会社 インクジェット記録ヘッドおよびその製造方法
JP5495954B2 (ja) * 2010-05-31 2014-05-21 キヤノン株式会社 微細パターンの製造方法
JP5701119B2 (ja) * 2011-03-23 2015-04-15 キヤノン株式会社 液体吐出ヘッドの製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000318167A (ja) * 1999-05-07 2000-11-21 Canon Inc インクジェット記録ヘッド及びその製造方法
JP4532785B2 (ja) * 2001-07-11 2010-08-25 キヤノン株式会社 構造体の製造方法、および液体吐出ヘッドの製造方法

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Publication number Publication date
JP2007176162A (ja) 2007-07-12

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