JP4844722B2 - カーボンナノチューブの固着方法 - Google Patents
カーボンナノチューブの固着方法 Download PDFInfo
- Publication number
- JP4844722B2 JP4844722B2 JP2006079459A JP2006079459A JP4844722B2 JP 4844722 B2 JP4844722 B2 JP 4844722B2 JP 2006079459 A JP2006079459 A JP 2006079459A JP 2006079459 A JP2006079459 A JP 2006079459A JP 4844722 B2 JP4844722 B2 JP 4844722B2
- Authority
- JP
- Japan
- Prior art keywords
- cnt
- substrate
- electron beam
- electron
- irradiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Carbon And Carbon Compounds (AREA)
- Cold Cathode And The Manufacture (AREA)
Description
11 CNT膜基板を用いた電子放出用カソード
20 真空チャンバー
21 電子加速用電源
22 CNT膜基板ホルダー(アノード)
Claims (2)
- 基板上に配置された電子放出特性を持つ複数のカーボンナノチューブからなる炭素膜に、別途設置した電子銃からエネルギー10keV以上20keV以下で単位面積当たりの全照射電荷量0.1mC/mm2以上50mC/mm2以下の電子線を照射することを特徴とする、カーボンナノチューブの固着方法。
- 前記電子銃の電子放出部にカーボンナノチューブを含む炭素膜カソードを用いることを特徴とする請求項1記載のカーボンナノチューブの固着方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006079459A JP4844722B2 (ja) | 2006-03-22 | 2006-03-22 | カーボンナノチューブの固着方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006079459A JP4844722B2 (ja) | 2006-03-22 | 2006-03-22 | カーボンナノチューブの固着方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007257950A JP2007257950A (ja) | 2007-10-04 |
JP4844722B2 true JP4844722B2 (ja) | 2011-12-28 |
Family
ID=38631973
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006079459A Expired - Fee Related JP4844722B2 (ja) | 2006-03-22 | 2006-03-22 | カーボンナノチューブの固着方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4844722B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5182237B2 (ja) * | 2009-06-29 | 2013-04-17 | Jfeエンジニアリング株式会社 | 電子源電極の製造方法 |
KR101356820B1 (ko) * | 2010-06-17 | 2014-01-28 | 서울대학교산학협력단 | 전도성 나노구조물 및 이의 성형 방법 및 이를 이용하는 전계 방출 에미터의 제조 방법 |
JP5876657B2 (ja) * | 2011-03-08 | 2016-03-02 | 国立大学法人 筑波大学 | カーボンナノ構造体の加工方法ならびに製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6283812B1 (en) * | 1999-01-25 | 2001-09-04 | Agere Systems Guardian Corp. | Process for fabricating article comprising aligned truncated carbon nanotubes |
JP3852287B2 (ja) * | 2001-01-15 | 2006-11-29 | 富士ゼロックス株式会社 | 走査型プローブ顕微鏡 |
US20030090190A1 (en) * | 2001-06-14 | 2003-05-15 | Hyperion Catalysis International, Inc. | Field emission devices using modified carbon nanotubes |
JP2003077388A (ja) * | 2001-09-05 | 2003-03-14 | Canon Inc | 電子放出素子の製造方法及び画像形成装置 |
JP2004058194A (ja) * | 2002-07-26 | 2004-02-26 | Fujikura Ltd | カーボンナノチューブの加工法 |
JP4029289B2 (ja) * | 2003-08-12 | 2008-01-09 | 株式会社日立製作所 | 導電性針の製造方法及びその方法により製造された導電性針 |
JP2006012551A (ja) * | 2004-06-24 | 2006-01-12 | Jfe Engineering Kk | 電子放出素子とその作製方法及びそれを装着した装置 |
-
2006
- 2006-03-22 JP JP2006079459A patent/JP4844722B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2007257950A (ja) | 2007-10-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3832402B2 (ja) | カーボンナノチューブを有する電子源とそれを用いた電子顕微鏡および電子線描画装置 | |
US6903500B2 (en) | Field emitter device comprising carbon nanotube having protective membrane | |
JP5491035B2 (ja) | 電界放出型電子源の製造方法 | |
JP5099756B2 (ja) | 電子線発生装置およびその制御方法 | |
JP2001180920A (ja) | ナノチューブの加工方法及び電界放出型冷陰極の製造方法並びに表示装置の製造方法 | |
JP6468821B2 (ja) | X線発生管、x線発生装置およびx線撮影システム | |
JP5491036B2 (ja) | 電界放出型電子源及びその製造方法 | |
US20100193687A1 (en) | Field emission type electron gun comprising single fibrous carbon electron emitter and operating method for the same | |
WO2010150438A1 (ja) | 電子放出体およびx線放射装置 | |
US20050212440A1 (en) | Field emission gun and electron beam instruments | |
JP4844722B2 (ja) | カーボンナノチューブの固着方法 | |
JP3982558B2 (ja) | カーボンナノチューブを有する電子源とそれを用いた電子顕微鏡および電子線描画装置 | |
US6806629B2 (en) | Amorphous diamond materials and associated methods for the use and manufacture thereof | |
Park et al. | X-ray images obtained from cold cathodes using carbon nanotubes coated with gallium-doped zinc oxide thin films | |
US8314539B2 (en) | Field electron emitter including nucleic acid-coated carbon nanotube and method of manufacturing the same | |
US8421327B2 (en) | Emitter having carbon nanotubes | |
US6940218B2 (en) | Doped field-emitter | |
CN113380597B (zh) | 一种基于碳纳米管的微焦点场发射电子源及其制备方法 | |
JP2009026710A (ja) | 電界放出型電子銃およびそれを用いた電子線応用装置 | |
KR101065604B1 (ko) | X-선관을 위한 탄소나노튜브 기반 음극부의 결합 구조 | |
Hong et al. | Fabrication of miniature carbon nanotube electron beam module for x-ray tube application | |
Seelaboyina et al. | Recent progress of carbon nanotube field emitters and their application | |
JPH11106208A (ja) | カーボンナノチューブの回収方法 | |
JP2006019200A (ja) | 電界放射電子源 | |
Lee | Performance of Point-Typed Carbon Nanotube Field Emitters |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080806 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20101213 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110616 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110728 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110914 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110927 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141021 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4844722 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |