JP4838372B2 - Actuator unit - Google Patents

Description

  The present invention relates to an actuator unit including a plurality of actuators.

  In recent years, with the downsizing and high functionality of electronic devices and the like, there is a demand for downsizing and high integration of substrates and the like mounted on these electronic devices. For manufacturing this type of electronic device, for example, a component transfer apparatus as shown in Patent Document 1 is used. The component transfer device has a multi-axis linear motor (actuator unit) formed by integrally combining a plurality of single-axis linear motors (actuators). Move horizontally on the table. Each single-axis linear motor of the multi-axis linear motor reciprocates the movable part (rod) in the vertical direction to handle the electronic component.

JP 2009-171662 A

However, the conventional actuator unit has the following problems.
The multi-axis linear motor of the component transfer device described above has a configuration in which a plurality of single-axis linear motors are integrally combined, and the inter-axis pitch between these single-axis linear motors is fixed. Therefore, it has been necessary to sequentially move the multi-axis linear motor in accordance with the respective work positions at the time of picking up and releasing the electronic components in each single-axis linear motor. That is, the work of one single-axis linear motor needs to be completed after completion of the work of one single-axis linear motor, and the work is not efficient.
Further, this type of component transfer apparatus has been required to be further downsized.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide an actuator unit that can efficiently perform work and that can be configured compactly.

In order to achieve the above object, the present invention proposes the following means.
That is, the present invention is an actuator unit including a plurality of actuators each having a rod and a support body that supports the rod so as to be relatively movable along the axial direction thereof. A plurality of second actuators are arranged close to each other in parallel to form a second layer, and the first and second layers are arranged in the axial direction of the first actuator. The first actuator is disposed so as to be stacked in a thickness direction orthogonal to the axial direction of the second actuator, and the axial direction of the first actuator and the axial direction of the second actuator extend so as to intersect each other when viewed from the thickness direction. The rod of the first actuator and the support body of the second actuator are connected in a one-to-one relationship.

  According to the actuator unit of the present invention, the plurality of first actuators are arranged in parallel close to each other in the first layer, and the plurality of second actuators are arranged in parallel close to each other in the second layer. The axial directions of the first and second actuators extend in different directions. That is, when viewed from the thickness direction in which the first and second layers are stacked, the first actuator and the second actuator overlap with each other and are arranged in a grid, for example.

  Since the rods of the first actuators and the support bodies of the second actuators are connected on a one-to-one basis, the rods of the first actuators move (extend or contract), whereby each second actuator It can be moved independently along the axial direction of the rod. Thereby, since the second actuators can change the inter-axis pitch, for example, one second actuator extends and contracts the rod without waiting for the completion of the work of the other second actuator, Can work independently.

Therefore, unlike the prior art, there is no need to sequentially move the entire actuator unit in accordance with the respective work status of each actuator. Therefore, work can be performed efficiently and productivity is improved.
Moreover, according to the structure of this invention, 1st actuators and 2nd actuators can be reliably arrange | positioned closely. Therefore, the apparatus can be configured compactly.

  According to the actuator unit of the present invention, work can be performed efficiently and the apparatus can be configured compactly.

It is a plane sectional view showing a schematic structure of an actuator unit concerning one embodiment of the present invention. It is a figure which expands and shows the A section of FIG. It is a front sectional view showing a schematic configuration of an actuator unit according to an embodiment of the present invention. It is a sectional side view showing a schematic structure of an actuator unit concerning one embodiment of the present invention. The block diagram of the position detection system in one Embodiment of this invention. The perspective view of a linear motor (partial sectional view is shown). The perspective view which shows the coil unit hold | maintained at the coil holder. The figure which shows the positional relationship of the magnet and coil of a linear motor. The perspective view which shows the principle of a magnetic sensor. The side view which shows the magnetic sensor attached to an end case. The side view which shows the bush attached to an end case. The block diagram of a position detection circuit.

  The actuator unit 100 according to the present embodiment includes, for example, an electronic component such as an IC handler that conveys an electronic component made of an IC to a tester for performance inspection in a final process of semiconductor manufacturing, or a surface mounter that mounts the electronic component on a substrate. Used as a transport device.

  As shown in FIGS. 1 to 4, the actuator unit 100 includes a plurality of actuators 40 and 50. The actuators 40 and 50 include a rod and a forcer (support) that supports the rod so as to be relatively movable along the axial direction thereof. Specifically, the rods of the actuators 40 and 50 have magnets, and the forcer has a coil surrounding the rods, and the rod is reciprocated with respect to the forcer by obtaining thrust by the magnetic field of the magnet and the current flowing through the coils. The linear motor 11 is configured, and the linear motor 11 is a so-called rod type linear motor. The configuration of the linear motor 11 will be described later.

  The actuator unit 100 has a rectangular flat plate-like base material 60. The base material 60 extends in the horizontal direction indicated by reference numerals X and Y in FIGS. 1 to 4 and extends in the Y direction. Is formed. The base material 60 is supported by a transport mechanism (not shown) and can be moved in the XY direction by the transport mechanism.

  A plurality of first actuators 40 extending along the Y direction are arranged on one surface of the base material 60 facing the thickness direction (Z direction). Specifically, the first actuator 40 extends the axial direction of the rod 41 along the Y direction, and the rod 41 is supported by a forcer 42 fixed to the base member 60 and against the forcer 42. Reciprocate in the Y direction. These first actuators 40 have the same length and are arranged close to each other in parallel in the X direction to form a first hierarchy indicated by reference numeral F <b> 1 in FIGS. 3 and 4.

  As shown in FIGS. 1 and 2, the first actuators 40 are respectively disposed on both sides of a virtual line V passing through the center in the Y direction of the substrate 60 and extending along the X direction. Specifically, the first actuators 40A to 40D are arranged in parallel on one side (the lower side in FIG. 1) of the virtual line V in the base material 60, and the first side on the other side (the upper side in FIG. 1) of the virtual line V. Actuators 40E to 40H are arranged in parallel.

  On the one side of the base material 60, the first actuator 40A is disposed at one end in the X direction (the right end in FIG. 1) farthest from the virtual line V. Further, the first actuator 40D is disposed closest to the virtual line V at the other end in the X direction on the one side (the left end in FIG. 1). In addition, the first actuator 40B and the first actuator 40C are arranged at equal intervals in this order between the first actuator 40A and the first actuator 40D, and head from the first actuator 40A to the first actuator 40D. Are arranged in a stepwise manner toward the virtual line V.

  In addition, on the other side of the substrate 60, the first actuators 40E to 40H are arranged symmetrically with respect to the virtual line V in this order with respect to the first actuators 40A to 40D.

  In addition, a pair of first support bases 61 each having a substantially rectangular parallelepiped shape protruding from the one surface extend in the Y direction at both ends in the X direction on one surface of the base material 60. On one surface of the first support base 61 (surface facing away from the base material 60 side), a pair of rails (orbitals) 62A and 62B extending in the Y direction approach each other in parallel with a gap in the X direction. Has been placed. These rails 62A and 62B have the same length, and are arranged so as to be shifted from each other in the Y direction. Specifically, the center in the Y direction of the rail 62A at the one end of the first support base 61 is located on the one side from the virtual line V, and the center of the rail 62B at the other end is from the virtual line V. Is also located on the other side.

  In addition, a plurality of sliders (moving bodies) 63A and 63B are disposed on the rails 62A and 62B so as to be relatively movable in the Y direction with respect to the rails 62A and 62B, thereby constituting a linear motion guide. In the present embodiment, four sliders 63A are provided on the rail 62A, and four sliders 63B are provided on the rail 62B. Specifically, in the first support base 61, the slider 63A and the slider 63B are arranged in a staggered pattern in a plan view.

  A plurality of second actuators 50 extending along the X direction are disposed on the opposite side of the first actuator 40 from the substrate 60 side along the Z direction. Specifically, the second actuator 50 extends the axial direction of the rod 51 along the X direction. The rod 51 is supported by the forcer 52 and reciprocates in the X direction with respect to the forcer 52.

  In the present embodiment, as the second actuator 50, second actuators 50A to 50H that are connected one-to-one in this order corresponding to the first actuators 40A to 40H are provided. These second actuators 50 have the same length, and their positions along the X direction are set to be substantially the same. The second actuators 50 are arranged close to each other in parallel in the Y direction to form a second hierarchy indicated by reference numeral F2 in FIGS.

  In FIG. 1, among these second actuators 50, the second actuators 50 </ b> A to 50 </ b> D are disposed on the one side of the virtual line V, and the second actuators 50 </ b> E to 50 </ b> H are disposed on the other side of the virtual line V. In detail, on the one side, the second actuator 50A is arranged furthest away from the virtual line V, the second actuator 50D is arranged closest to the virtual line V, and the second actuators 50A and 50D are connected to each other. Between them, the second actuators 50B and 50C are arranged in this order.

  On the other side, the second actuator 50E is arranged farthest from the imaginary line V, the second actuator 50H is arranged closest to the imaginary line V, and between the second actuators 50E and 50H. In addition, the second actuators 50F and 50G are arranged in this order.

  The first level F1 constituted by the first actuator 40 and the second level F2 constituted by the second actuator 50 are the axial direction (Y direction) of the rod 41 of the first actuator 40 and the second actuator on the substrate 60. It arrange | positions so that it may laminate | stack in the thickness direction (Z direction) orthogonal to the axial direction (X direction) of 50 rods 51. FIG. In the present embodiment, the axial direction of the first actuator 40 and the axial direction of the second actuator 50 extend along the horizontal direction, and are arranged orthogonal to each other when viewed from the thickness direction.

  The forcer 52 of the second actuator 50 is fixedly supported by a second support base 64 having a lower surface (surface facing the base material 60 side) having a rectangular plate shape. The second support base 64 extends in the horizontal direction and extends in the X direction, and the entire length thereof is set longer than the width of the base material 60 in the X direction. In addition, the width along the Y direction of the second support base 64 is set to be substantially the same as or slightly larger than the width of the forcer 52.

  In addition, a pair of sliders 63A and 63A are connected to the lower surface (the surface facing the base material 60) of the second support base 64 of the second actuators 50A, 50C, 50F, and 50H so as to be separated from each other in the X direction. . A pair of sliders 63B and 63B are connected to the lower surface of the second support base 64 of the second actuators 50B, 50D, 50E, and 50G so as to be separated from each other in the X direction. And the tip of the rod 41 of the first actuators 40A to 40H is connected to the second support base 64 integrated with the forcer 52 of the second actuators 50A to 50H in this order in a one-to-one relationship.

  Specifically, in FIG. 2, for example, when focusing on the first actuators 40A and 40B and the second actuators 50A and 50B that are adjacent to each other, the first actuator 40B is a second one in which the adjacent first actuators 40A are connected. It arrange | positions so that it may overlap with the base material 60 side along the Z direction of the actuator 50A.

  An external device mounting portion 65 is connected to the tip of the rod 51 of the second actuator 50. In the present embodiment, an external device mounting portion 65 is provided at the other end along the X direction of the rod 51. As the external device mounting portion 65, for example, a suction nozzle for handling an electronic component or the like, a probe for laser processing, or the like can be used. In the present embodiment, the external device mounting portion 65 is set to perform work in the Z direction.

In the actuator unit 100 of the present embodiment, a position detection system using the linear motor 11 is configured.
FIG. 5 shows a linear motor position detection system according to an embodiment of the present invention. This position detection system interpolates a linear motor 11, a magnetic sensor 12 that detects the position of the rod 1 of the linear motor 11 (rods 41 and 51 in FIGS. 1 to 4), and a signal output from the magnetic sensor 12. A position detection circuit 13 for processing. The position signal output by the position detection circuit 13 is output to the driver 14 of the linear motor 11. The driver 14 includes a power converter such as a PWM inverter (PWM: Pulse Width Modulation) that supplies power in a form suitable for controlling the linear motor 11, a signal from the position detection circuit 13, and a signal from a host computer. A controller for controlling the power converter according to the command is incorporated. The magnetic sensor 12 and the position detection circuit 13 are connected by an encoder cable 15. The coil of the linear motor 11 and the power converter of the driver are connected by a power cable 16.

  FIG. 6 is a perspective view (partially sectional view) of the linear motor 11. The linear motor 11 is a rod-type linear motor in which the rod 1 moves in the axial direction with respect to the forcer 2 (forcers 42 and 52 in FIGS. 1 to 4). For example, a chip-shaped electronic component or the like is attached to the tip of the rod 1 and used to mount the electronic component at a predetermined position on the substrate.

  A plurality of coils 4 are stacked in the forcer 2. End cases 9 are attached to both end faces of the forcer 2. A bush 8 that is a bearing for guiding the linear motion of the rod 1 is attached to the end case 9. One of these end cases 9 is a position detection head.

  The rod 1 is made of a nonmagnetic material such as stainless steel, and has a hollow space like a pipe. A plurality of cylindrical magnets 3 (segment magnets) are stacked in the hollow space of the rod 1 so that the same poles face each other. That is, the N pole and the N pole are laminated so that the S pole and the S pole face each other. A pole shoe 7 (magnetic pole block) made of a magnetic material such as iron is interposed between the magnets 3. The rod 1 penetrates through the stacked coils 4 and is supported by the forcer 2 so as to be movable in the axial direction.

  As shown in FIG. 7, the coil 4 is a copper wire wound in a spiral shape and is held by a coil holder 5. Since it is necessary to insulate adjacent coils 4, ring-shaped resin spacers 5 a are interposed between the coils 4. A printed circuit board 6 is provided on the coil holder 5. A winding end 4 a of the coil 4 is connected to the printed circuit board 6.

  In this embodiment, the forcer 2 is formed integrally with the coil 4 by insert molding in which the coil 4 and the coil holder 5 are set in a mold and molten resin or special ceramics is injected into the mold. As shown in FIG. 6, the forcer 2 is formed with a plurality of fins 2 a in order to improve the heat dissipation of the coil 4. The coil 4 held by the coil holder 5 is housed in the aluminum forcer 2, the gap between the coil 4 and the forcer 2 is filled with an adhesive, and the coil 4 and the coil holder 5 are fixed to the forcer 2. May be.

  FIG. 8 shows the positional relationship between the magnet 3 and the coil 4 of the linear motor. The three coils 4 form a set of three-phase coils composed of U, V, and W phases. A coil unit is configured by combining a plurality of sets of three-phase coils. When a three-phase current having a phase difference of 120 ° is applied to a plurality of coils divided into three phases of U, V, and W phases, a moving magnetic field that moves in the axial direction of the coil 4 is generated. The rod 1 obtains a thrust by the moving magnetic field and performs a linear motion relative to the coil 4 in synchronization with the speed of the moving magnetic field.

  As shown in FIG. 6, a magnetic sensor 12 for detecting the position of the rod 1 is attached to one end case 9 that is a magnetic sensor housing case. The magnetic sensor 12 is arranged with a predetermined clearance from the rod 1 and detects a change in the magnetic field direction (magnetic vector direction) of the rod 1 caused by the linear motion of the rod 1.

  As shown in FIG. 9, the magnetic sensor 12 includes a magnetic thin film metal composed of Si or a glass substrate 21 and an alloy composed mainly of a ferromagnetic metal such as Ni or Fe formed thereon. A resistance element 22 is included. The magnetic sensor 12 is called an AMR (Anisotropic-Magnetro-Resistance) sensor (anisotropic magnetoresistive element) because the resistance value changes in a specific magnetic field direction.

  FIG. 10 shows the magnetic sensor 12 attached to the end case 9. The end case 9 is provided with a magnetic sensor housing portion 26 formed of a space for housing the magnetic sensor 12. After arranging the magnetic sensor 12 in the magnetic sensor housing portion 26, the periphery of the magnetic sensor 12 is filled with a filler 27. Thereby, the magnetic sensor 12 is fixed to the end case 9. The magnetic sensor 12 has a temperature characteristic, and its output changes with changes in temperature. In order to reduce the influence of heat received from the coil 4, a material having a lower thermal conductivity than the forcer 2 is used for the end case 9 and the filler 27. For example, epoxy resin is used for the forcer 2, and polyphenylene sulfide (PPS) is used for the end case 9 and the filler 27.

  FIG. 11 shows a bush 8 which is a bearing attached to the end case 9. By providing the end case 9 with a bearing function, it is possible to prevent the gap between the rod 1 and the magnetic sensor 12 from fluctuating.

  FIG. 12 shows a configuration diagram of the position detection circuit 13. The sine wave signal and the cosine wave signal output from the magnetic sensor 12 are taken into the position detection circuit 13. The position detection circuit 13 which is an interpolation circuit (interpolator) applies digital interpolation processing to a sine wave signal and a cosine wave signal having a phase difference of 90 °, and outputs high-resolution phase angle data. The pitch between the magnetic poles of the rod 1 is, for example, on the order of several tens of mm, which is much larger than the order of several hundred μm of the magnetic encoder. When diverting the rod 1 as a magnetic scale, it is necessary to subdivide the sine wave signal and cosine wave signal output from the magnetic sensor 12 to increase the resolution. Changes in the sine wave signal and the cosine wave signal output from the magnetic sensor 12 have a great influence on the position detection circuit with increased resolution. For this reason, it is desired that changes in the sine wave signal and the cosine wave signal output from the magnetic sensor 12 are small.

  Each of the sine wave signal and the cosine wave signal having a 90 ° phase difference is input to the A / D converter 30. The A / D converter 30 samples the sine wave signal and the cosine wave signal into the digital data DA and DB at a predetermined cycle.

  As described above, according to the actuator unit 100 according to the present embodiment, the plurality of first actuators 40 are arranged close to each other in parallel to the first hierarchy F1, and the plurality of second actuators 50 are arranged in the second hierarchy F2. The first and second actuators 40 and 50 are arranged in parallel and close to each other, and the axial directions of the first and second actuators 40 and 50 extend in different directions. That is, when viewed from the thickness direction in which the first and second layers F1 and F2 are stacked, the first actuator 40 and the second actuator 50 overlap each other and are arranged in a substantially lattice shape.

  Since the rod 41 of the first actuator 40 and the forcer 52 of the second actuator 50 are connected in a one-to-one relationship, the rod 41 of each first actuator 40 reciprocates (that is, expands or contracts with respect to the forcer 42). By contracting, each of the second actuators 50 can be moved independently along the axial direction of the rod 41. As a result, the second actuators 50 can change the pitch between the axes, so that one second actuator 50 can expand and contract the rod 51 without waiting for the completion of the work of the other second actuator 50. Work independently.

Therefore, unlike the prior art, there is no need to sequentially move the entire actuator unit in accordance with the respective work status of each actuator. Therefore, work can be performed efficiently and productivity is improved.
Further, according to the configuration of the present embodiment, the first actuators 40 and the second actuators 50 can be reliably disposed close to each other. Therefore, the actuator unit 100 can be configured compactly.

  In addition, since the first and second actuators 40 and 50 are configured using the linear motor 11, the entire actuator unit 100 can be reliably downsized. Further, by using the linear motor 11, the reciprocating movement of the rods 41 and 51 with respect to the forcers 42 and 52 is performed with high accuracy, so that the accuracy of work is sufficiently ensured.

  Further, the movement of the rod 41 of the first actuator 40 moves the second actuator 50 connected to the rod 41 in the Y direction of the horizontal direction. And the rod 51 of this 2nd actuator 50 moves to the X direction orthogonal to the Y direction among horizontal directions, and the external apparatus attachment part 65 works with respect to an electronic component etc. As a result, the work range in which the external device mounting portion 65 disposed at the tip of the rod 51 of the second actuator 50 performs work can be set relatively freely in the horizontal plane, and the work range is sufficiently secured. .

  Further, since the forcer 52 of the second actuator 50 is supported by the pair of first support bases 61 and 61 that are separated in the X direction on the base material 60, the second actuator 50 is swung along the Y direction. It is difficult to move stably. Therefore, the accuracy of the operation of the external device mounting portion 65 of the second actuator 50 is sufficiently ensured.

  Further, the rails 62A and 62B are arranged close to each other in parallel on the first support base 61, and the sliders 63A and 63B are arranged in a staggered manner, whereby the second actuators 50 can be arranged close to each other. . Thereby, the pitch between the axes of the second actuators 50 can be further reduced, and the movement range of the second actuators 50 in the Y direction is expanded. Further, the actuator unit 100 can be further downsized.

  The present invention is not limited to the embodiment described above, and various modifications can be made without departing from the spirit of the present invention.

  For example, in the above-described embodiment, the first and second actuators 40 and 50 are configured using the linear motor 11, but the present invention is not limited to this. That is, one of the first and second actuators 40 and 50 may be configured using the linear motor 11. Alternatively, instead of using the linear motor 11 for the first and second actuators 40 and 50, a linear actuator that converts the rotational motion of the drive motor into a linear motion and outputs it, an air cylinder, or the like may be used.

  In addition, the axial direction of the first actuator 40 and the axial direction of the second actuator 50 extend along the horizontal direction and are arranged orthogonal to each other when viewed from the thickness direction. It is not limited to. That is, the axial direction of the first actuator 40 and the axial direction of the second actuator 50 may be arranged so as to intersect with each other, and are not limited to being orthogonal. However, in order to sufficiently ensure the accuracy of the operation, the angle formed by the axial direction of the first actuator 40 and the axial direction of the second actuator 50 is within a range of 80 ° to 100 ° when viewed from the thickness direction. It is preferable to set to.

  In the above-described embodiment, the external device attachment portion 65 is provided at the other end of the second actuator 50. However, the present invention is not limited to this, and the external device attachment portion 65 is provided at the one end. It may be provided.

  In the above-described embodiment, for example, a suction nozzle for handling an electronic component or the like, a probe for laser processing, or the like is used as the external device mounting portion 65, and the external device mounting portion 65 is set to perform work in the Z direction. However, the present invention is not limited to this. That is, as the external device attachment portion 65, for example, another actuator that extends the axial direction of the rod along the thickness direction may be further provided. Further, the external device mounting portion 65 may be configured to perform work in the X direction or the like other than the Z direction. In this way, it is possible to respond to various requests.

  In the above-described embodiment, the first actuators 40A to 40D and the first actuators 40E to 40H are arranged on the base member 60 in line symmetry with the virtual line V interposed therebetween. Instead of being arranged, the virtual line V may be arranged asymmetrically.

  In addition, the first actuators 40A to 40D (40E to 40H) are arranged so as to approach the virtual line V step by step from the first actuator 40A (40E) to the first actuator 40D (40H). However, the present invention is not limited to this. That is, for example, the first actuator 40B (40F) and the first actuator 40C (40G) may be arranged interchangeably, or other arrangements may be employed. Moreover, you may mutually replace arrangement | positioning of 2nd actuator 50A-50H connected with these 1st actuators 40A-40H.

  Moreover, although the base material 60 of the actuator unit 100 has comprised the rectangular flat plate shape, it is not limited to this. That is, the base material 60 may be formed with unevenness on the one surface. Further, in this case, the first actuator 40 may be disposed in either the concave portion or the convex portion on the one surface.

  In the above-described embodiment, the rods 41 and 51 of the first and second actuators 40 and 50 are extended so as to be orthogonal to each other along the horizontal direction. However, the present invention is not limited to this. . That is, for example, the rod 41 of the first actuator 40 may extend along the horizontal direction (Y direction), and the rod 51 of the second actuator 50 may extend along the vertical direction (X direction). In this case, the movement of the rod 41 of the first actuator 40 causes the second actuator 50 connected to the rod 41 to move in the horizontal direction. Then, when the rod 51 of the second actuator 50 moves in the vertical direction, the external device mounting portion 65 provided at the tip of the rod 51 is processed with respect to the electronic component or the like disposed in the X direction. It is possible to perform operations such as measurement and handling. In this case, the thickness direction (Z direction) is set in the horizontal direction.

DESCRIPTION OF SYMBOLS 1, 41, 51 ... Rod, 2, 42, 52 ... Forcer (support body), 3 ... Magnet, 4 ... Coil, 11 ... Linear motor, 40 ... 1st actuator (actuator), 50 ... 2nd actuator (actuator) 65: External device mounting portion, 100: Actuator unit, F1: First layer, F2: Second layer, X: Axial direction of second actuator, Y: Axial direction of first actuator, Z: Thickness direction

Claims (5)

An actuator unit comprising a plurality of actuators having a rod and a support body that supports the rod so as to be relatively movable along the axial direction thereof,
Among these actuators, a plurality of first actuators are arranged close to each other in parallel to form a first layer, and a plurality of second actuators are arranged close to each other in parallel to form a second layer, The second layer is arranged so as to be laminated in the thickness direction perpendicular to the axial direction of the first actuator and the axial direction of the second actuator,
The axial direction of the first actuator and the axial direction of the second actuator extend so as to intersect each other when viewed from the thickness direction,
An actuator unit, wherein the rod of the first actuator and the support of the second actuator are connected one-to-one. The actuator unit according to claim 1,
In the first and second actuators, the rod has a magnet, the support has a coil surrounding the rod, and the rod is moved to the support by a magnetic field of the magnet and a current flowing through the coil. An actuator unit characterized by using a linear motor that reciprocates. The actuator unit according to claim 1 or 2,
The rods of the first and second actuators extend so as to be perpendicular to each other and along the horizontal direction. The actuator unit according to claim 1 or 2,
The rod of the first actuator extends along a horizontal direction, and the rod of the second actuator extends along a vertical direction. The actuator unit according to any one of claims 1 to 4,
An actuator unit characterized in that an external device mounting portion is provided at the tip of the rod of the second actuator.

Images