JP2006109664A - Xy robot and component-mounting apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an XY robot and a component-mounting apparatus, capable of a compact structure and high-speed driving of a moving object. <P>SOLUTION: This XY robot includes X-axis drive sections 6c, 6d for moving the moving object in a X-axis direction, and Y-axis drive sections 6a, 6b for moving the X-axis drive sections in a Y-axis direction. At least one of the X-axis drive sections 6c, 6d and the Y-axis drive sections 6a, 6b are constituted of a shaft-type linear motor, provided with coil sections 30, 34 which include a plurality of coils having through holes in the center thereof, and which are arranged with the plurality of coils so as to form shaft insert holes by arranging the through holes of the coils in a straight line; and columnar sleeve shafts 20, 32 which include a plurality of magnetic poles of permanent magnets, so that their same poles face each other, and which are arranged movably relative to the coil sections in the shaft inserts holes of the coil portions in the axial direction. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an XY robot using a shaft type linear motor in which a movable shaft moves linearly, and a component mounting apparatus using the XY robot.

  In recent years, there has been a strong demand from the market for electronic devices that incorporate electronic circuits formed by mounting electronic components on a circuit board as a plurality of components, for miniaturization, higher functionality, and lower cost. Yes.

  Such an electronic circuit is held on a stage in a component mounting apparatus having a head portion provided with a nozzle for sucking and holding a component and an XY robot capable of freely moving the head portion in the XY2 direction. The circuit board is manufactured by moving the head part to the mounting position of the circuit board by the XY robot and mounting the plurality of components by the nozzle of the head part. In such a component mounting apparatus, the XY robot includes a moving body that is connected to the head unit and moves the head unit, and a driving unit that extends in the moving direction of the moving body and guides the moving body. This is a configuration in which the sections cross each other in the XY directions. As a specific example of the drive unit, as disclosed in Patent Document 1 (Japanese Patent Application Laid-Open No. 11-289194), a ball screw is rotationally driven by a servo motor and a moving body is fitted to the ball screw. A screw nut is used, a linear guide is used as the guide portion, and a ball screw nut as a moving body is moved along the guide.

  However, it is difficult to increase the speed of the driving unit configured as described above due to the rotational noise of the ball screw and the limitation on the rotational speed of the ball screw. In addition, when the driving unit having the above-described configuration is used, one driving unit in each of the XY directions is used, and the guide unit of one driving unit is connected to a moving body of another driving unit, the head is It is not possible to cope with the factors of shortening the life such as the inclination of the ball screw nut due to the vibration of the part and the concentrated load on the guide block, further speeding up and high precision positioning.

  In addition, in the case of a double-axis drive configuration in which the guide unit of one drive unit is connected and supported by two other drive units, the other drive unit has a positional deviation of both axes with respect to the other drive unit. There is a problem that the twist of the guide part and the overlap stroke when a plurality of one drive part are arranged cannot be secured. Moreover, it becomes a factor of the cost increase accompanying both axes.

Further, as a drive source using a linear motor having a rectangular cross section as the drive unit, for example, disclosed in Patent Document 2 (Japanese Patent Laid-Open No. 5-41596), Patent Document 3 (Japanese Patent Laid-Open No. 2001-309634), and the like. Has been. According to this configuration, it is possible to solve the problem of rotational noise and speeding up when a ball screw is used as the drive unit.
JP 11-289194 A Japanese Patent Laid-Open No. 5-41596 JP 2001-309634 A

  However, as shown in FIG. 14, the above linear motors are all linear motors having a rectangular cross section, and a back yoke is required, and a magnet 202 is moved to move the coil 203 that moves the slider 210. Since only one surface can be used for output, there is a problem that the mass becomes large, and if high output is to be obtained, heat is greatly generated and the accuracy is affected. In particular, in a linear motor in which both ends of the guide portion are supported in the double-axis drive configuration, the mass of the linear motor is the load for the double-axis drive. When a linear motor having a solid rectangular cross section is employed for this linear motor, a large load is applied to the two-axis drive, so that it is difficult to drive the entire apparatus at high speed.

  Therefore, a technical problem to be solved by the present invention is to provide an XY robot that can be compactly configured and can drive a moving object at high speed, and a component mounting apparatus using the XY robot.

  In order to solve the above technical problem, the present invention provides an XY robot having the following configuration.

According to the first aspect of the present invention, the first moving body that moves the moving object in the X-axis direction and the first moving body that extends along the moving direction of the first moving body and guides the first moving body. An X-axis drive unit provided with a first guide unit,
A second moving body connected to the X-axis driving section and moving the X-axis driving section in the Y-axis direction; and extending along a moving direction of the second moving body and the second moving body. Two Y-axis drive units including a second guide unit for guiding, the Y-axis drive unit configured so that the second guide units are arranged in parallel with each other;
An XY robot including a drive signal supply unit configured to supply a drive signal for driving the first and second moving bodies to the X-axis drive unit and the Y-axis drive unit;
At least one of the X-axis drive unit and the Y-axis drive unit is
The first and second coils have a plurality of coils having a through hole in the center, and the plurality of coils are arranged so that the through holes of the coil are arranged linearly to form a shaft insertion hole. A coil section as a moving body;
The magnetic poles of a plurality of permanent magnets are arranged so that the same poles face each other, and are arranged in the shaft insertion hole of the coil portion so as to be movable relative to the coil portion in the axial direction, the first and second A cylindrical shaft as a guide part of
It has a shaft type linear motor with
The drive signal supply unit provides an XY robot, characterized in that a drive current is supplied to a coil unit of the shaft type linear motor.

  In the above configuration, the X-axis drive unit includes a first moving body and a first guide unit, and moves a moving object connected to the first moving body in the X-axis direction. The Y-axis drive unit includes a second moving body and a second guide unit, and moves the X-axis drive unit connected to the second moving body in the Y-axis direction. Two Y-axis drive units are provided in parallel. The shaft-type linear motor used for at least one of the X-axis drive unit and the Y-axis drive unit is such that the guide unit is configured by a cylindrical shaft, and a coil unit as a moving body is inserted into the shaft. It is the linear motor of the structure which has. The shaft-type linear motor includes a plurality of permanent magnet magnetic poles on the shaft itself so that the same poles face each other.

  According to a second aspect of the present invention, the drive signal supply unit supplies the same drive current to each of the coil units of two shaft type linear motors respectively provided in the Y-axis drive unit. An XY robot according to the first aspect is provided.

According to a third aspect of the present invention, the Y-axis drive unit includes a coil unit in which the second moving unit is inserted into each of two shafts of the shaft-type linear motor,
Two X-axis drive units are provided, and both ends of the first guide unit are connected to the other second coil units of the Y-axis drive unit, respectively. An XY robot according to a second aspect is provided.

  According to a fourth aspect of the present invention, the shaft-type linear motor is characterized in that the coil portion includes a bearing portion that guides the shaft so as not to be shaken in a direction intersecting the axis of the shaft. An XY robot according to any one of the first to third aspects is provided.

  In the fourth aspect of the present invention, for example, the bearing portion is desirably provided at both ends of the plurality of coils, and the sensor unit is preferably provided in the immediate vicinity of the bearing portion.

According to a fifth aspect of the present invention, a plurality of the shaft type linear motors are further arranged at predetermined intervals in the axial direction of the shaft so as to face the side surfaces of the shaft, and each of them is a magnetic field of the permanent magnet. A plurality of magnetic pole detection sensors that detect the strength and output a magnetic field strength signal according to the strength;
A coil position detection unit that receives a plurality of magnetic field strength signals output from the plurality of magnetic pole detection sensors, and detects a relative position of the coil unit and the shaft based on the plurality of magnetic field strength signals. An XY robot according to any one of the first to fourth aspects is provided.

  According to the sixth aspect of the present invention, the coil position detector has two of the magnetic pole detection sensors, and when one of the magnetic pole detection sensors detects a substantially maximum or substantially minimum magnetic field strength, An XY robot according to a fifth aspect is provided in which the other magnetic pole detection sensor is disposed at a position where a magnetic field strength of substantially zero is detected.

According to a seventh aspect of the present invention, the shaft-type linear motor is
The magnetic pole detection sensor is configured as a sensor unit,
A plurality of the sensor units are provided at equal intervals on substantially the same circumference having a center on the central axis of the shaft insertion hole of the coil portion and existing on a plane orthogonal to the central axis,
The coil position detection unit corrects the output from the plurality of sensor units according to the shift in the direction intersecting the axis of the shaft based on the plurality of magnetic field strength signals respectively output from the plurality of sensor units. An XY robot according to a sixth aspect for detecting the position of the movable shaft is provided.

According to an eighth aspect of the present invention, the shaft-type linear motor is
A moving amount of the movable shaft corresponding to the length between the magnetic poles of the plurality of permanent magnets is stored in the coil position detecting unit, and the fifth to fifth corrections are performed to correct the position of the movable shaft when detecting the position of the movable shaft. An XY robot according to any one of the seven aspects is provided.

According to a ninth aspect of the present invention, the X-axis drive unit is
An X-axis frame connected to a moving body of the two Y-axis drive units;
The XY robot according to the first aspect, further comprising an X-axis linear guide provided on the X-axis frame in parallel with the shaft serving as the first guide unit and guiding movement of the coil unit as the first moving body. provide.

According to the tenth aspect of the present invention, the moving object coupled to any one of the XY robots of the first to ninth aspects is
A nozzle device having a spline shaft and a nozzle connected to the spline shaft and capable of holding a component by suction, and a spline that is fitted to the spline shaft and is slidable and rotatable, and connected to a rotational drive source Provided is a component mounting apparatus that is a component mounting head having a nut and a nozzle moving device that moves the nozzle device.

According to an eleventh aspect of the present invention, the nozzle moving device comprises:
A stator having a plurality of coils having a through hole in the center, and the plurality of coils arranged so that the through holes of the coil are linearly arranged to form an axis insertion hole;
A cylindrical movable shaft provided with magnetic poles of a plurality of permanent magnets so that the same poles face each other, and arranged to be movable in the axial direction in the shaft insertion hole of the stator and connected to the spline shaft,
Opposite to the side surface of the movable shaft, a plurality of them are arranged at predetermined intervals in the axial direction of the movable shaft, and each detects the magnetic field strength of the permanent magnet and outputs a magnetic field strength signal corresponding to the strength. A plurality of magnetic pole detection sensors for output;
A movable shaft position detector configured to receive a plurality of magnetic field strength signals respectively output from the plurality of magnetic pole detection sensors and detect a position of the movable shaft with respect to the stator based on the plurality of magnetic field strength signals. A component mounting apparatus according to a tenth aspect is provided.

  According to a twelfth aspect of the present invention, there is provided the component mounting apparatus according to the eleventh aspect, wherein the movable shaft position detecting portion of the nozzle moving device is disposed between the coil and the spline nut. .

  According to a thirteenth aspect of the present invention, in the component mounting head, the movable shaft and the spline shaft are configured to be hollow and integrally connected, and the suction path communicates from the upper portion of the movable shaft to the nozzle portion. A component mounting apparatus according to an eleventh or twelfth aspect is provided.

According to a fourteenth aspect of the present invention, the component mounting head is a multiple component mounting head having a plurality of the nozzle devices,
A plurality of the nozzle moving devices are provided corresponding to the respective nozzle devices,
The stator of each of the nozzle moving devices provides the component mounting apparatus according to any one of the eleventh to thirteenth aspects, which is disposed in the housing of the component mounting head as an integrally disposed stator block. .

  According to the first aspect and the tenth aspect of the present invention, the X-axis drive unit and the Y-axis drive unit are provided with shaft-type linear motors, so that the X-axis drive unit and the Y-axis drive unit are configured to be lightweight. In addition, the problem of noise can be solved, heat generation is small, and accuracy can be ensured.

  According to the second aspect of the present invention, two shafts are provided by supplying the same drive current from one drive signal supply to the coil portions of the two shaft type linear motors respectively provided in the two Y-axis drive units. The movement of the linear motor can be completely synchronized, and problems such as twisting of the X-axis drive unit can be prevented.

  According to the third aspect of the present invention, the magnet attached to the shaft of one shaft-type linear motor can be shared as the Y-axis drive unit for driving the two X-axis drive units. The drive control can also be driven independently by the drive current supplied to each second moving body.

  According to the fourth aspect of the present invention, since the movable shaft is guided by the bearing portion so as not to cross the axis, the change in the distance between the coil portion and the shaft is suppressed as much as possible, and the output of the sensor unit The position detection accuracy can be improved by reducing the influence on the position.

  According to the fifth aspect of the present invention, two magnetic pole sensors are provided at positions where the magnetic field detection strength has a constant phase difference, and calculation processing can be performed in position detection during the magnetic field period of the coil section. Particularly preferably, as in the sixth aspect, when one magnetic pole detection sensor detects a substantially maximum or substantially minimum magnetic field strength, the other magnetic pole detection sensor detects a substantially zero magnetic field strength. Since the phase is shifted by π / 2 with respect to the magnetic field cycle of the shaft, calculation processing is performed as an in-circle angle using Cartesian coordinates in position detection during the magnetic field cycle. Can do. Therefore, position detection within the magnetic field cycle can be easily and accurately performed.

  According to the seventh aspect of the present invention, a plurality of sensor units are provided on substantially the same circumference having a center on the central axis of the shaft insertion hole of the coil portion and existing on a plane orthogonal to the central axis. Therefore, even if the shaft deviates from the shaft insertion hole or there is a difference in the size of the magnetic poles in the rotational direction position, the total distance of the distance between each sensor unit and the shaft changes significantly. There is no. That is, when the shaft is shifted so as to approach one of the sensor units, the shaft is moved away from the other sensor unit, so that the total output of both sensor units is canceled out. Therefore, by correcting the outputs based on the outputs of the plurality of sensor units, it is possible to reduce the influence on the position detection due to the shaft displacement. Specifically, as the output correction, for example, the position of the movable shaft can be detected based on a value obtained by averaging the output values of the magnetic pole detection sensors from the respective sensor units.

  Note that the three sensor units provided on substantially the same circumference are arranged at equal intervals, so that the output of each sensor unit is canceled even if the drive shaft is displaced in any direction. By doing so, the position can be suitably detected. Further, when a plurality of sensor units provided on substantially the same circumference are not arranged at equal intervals, the position can be detected by performing correction according to the position.

  According to the eighth aspect of the present invention, it is possible to improve the accuracy of shaft position detection by storing the periodic length of the magnetic field repeated for each of the plurality of permanent magnets in the coil position detector. That is, in the shaft type linear motor according to the present embodiment, since the position of the shaft is detected from the position in the magnetic field cycle, it is possible to detect the relative position between the shaft and the coil unit with higher accuracy by storing information on the magnetic field cycle length. It can be performed. In particular, when the dimensions of the permanent magnets are slightly different, and as a result, there are variations in the length of the magnetic field period, the influence of the variations on the position accuracy can be reduced.

  According to the eleventh aspect of the present invention, the shaft type linear motor having the above configuration has little influence on the position detection even when it rotates with respect to the axis of the movable shaft. Therefore, it can be suitably used for a mounting head that needs to rotate the movable shaft. Further, the mounting head can be reduced in size by using a small linear motor using a magnetic field of a driving permanent magnet for the movable shaft as a mechanism for detecting the height position of the nozzle portion. Since the mounting head needs to move up and down in the direction of the movable axis, the nozzle provided at the tip of the mounting head can be rotated around the axis of the movable axis and held in a movable manner in the axial direction. It is preferable to use a nut.

  According to the twelfth aspect of the present invention, the mounting head can be configured most compactly by providing the shaft type linear motor, the sensor unit, the spline shaft, and the nozzle portion in this order from the top.

  According to the thirteenth aspect of the present invention, the movable shaft and the spline shaft are configured to be hollow, and the nozzle suction is performed from the upper part of the shaft. A compact mounting head can be realized.

  According to the fourteenth aspect of the present invention, a plurality of independent stators are configured, for example, as stator blocks that are integrally disposed so as to be parallel to the axial direction, and are disposed in the housing, whereby the mounting head is It can be configured more compactly.

  Hereinafter, a component mounting apparatus according to an embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 shows an overall schematic perspective view of the component mounting apparatus 101 according to the first embodiment of the present invention. The component mounting apparatus 101 includes a loader 1 that carries the circuit board 2 into the component mounting apparatus 101, an unloader that can carry out the circuit board 2 on which the components are mounted from the component mounting apparatus 101, and a component that is mounted on the circuit board 2. In the meantime, a first substrate transport and holding device 3 including a pair of support rail portions that transport and hold the circuit board 2 carried from the loader 1 is provided. In FIG. 1, the circuit board is loaded on the loader 1 and the circuit board 2-0 is carried into the component mounting apparatus 101. The circuit board is loaded on the first board transporting and holding apparatus 3, and the circuit board 2-1. 5 shows a state in which components are mounted and a state in which the circuit board 2-3 on which the components are mounted is being unloaded from the component mounting apparatus 101. In the following description, when a circuit board is shown regardless of position, it is shown as “circuit board 2”, and when a circuit board located at a specific position is shown, It shall be shown as “Substrate 2-0, 2-1, 2-2, or 2-3”.

  Further, the mounting apparatus main body 101 is arranged at the end portion on the near side in the Y-axis direction in the figure, which is the near side with respect to the worker in the component mounting work area, and a plurality of components to be mounted on the circuit board 2 are continuously arranged at the component takeout position. A component supply unit having a plurality of component supply cassettes 80 to be sequentially supplied, and a component supply unit 8C which is disposed in the vicinity of the component supply unit 8B and stores components to be mounted on the circuit board 2 on a tray. The components supplied from the respective component supply cassettes 80 in the component supply units 8A and 8B are, for example, mainly miniaturized chip components, while the components supplied from the component supply unit 8C include, for example, These are IC parts typified by IC chips and irregular parts such as connectors.

  Further, the mounting apparatus main body 101 sucks and mounts the mounting portion to which the component supply units 8A and 8B for supplying the component 2 are attached and the components supplied from the component supply units 8A, 8B and 8C on the circuit board 2. The first head unit 4 and the nozzle unit 39 disposed on the side near the center of the component mounting work area near the component supply unit 8A and provided at the tip of each suction nozzle device 10 in the first head unit 4 are provided. A recognition camera 9 that is an example of an imaging device that captures the suction posture of the sucked and held component and a control unit 100 are provided.

  The first head unit 4 is configured to be movable by an XY robot 5 that is positioned at predetermined positions in the X-axis direction and the Y-axis direction, which are two orthogonal directions in the component mounting work area that is the upper surface of the component mounting apparatus 101. ing. The first head portion is equipped with a plurality of, for example, twelve, detachable nozzle portions 39 for sucking and holding the components in a releasable manner. The first head unit 4 can be moved two-dimensionally in the component mounting work area by the XY robot 5. For example, component supply is performed to suck and hold components supplied from the component supply units 8A, 8B, and 8C. In order to mount the components on the circuit board 2-1 held by the first substrate transfer holding device 3, the first substrate transfer holding device 3, and if necessary, the head portion 4. In order to replace the equipped nozzle part 39, it can be moved above the nozzle station 7 or the like. The nozzle station 7 accommodates a plurality of types of nozzle units 39 that are arranged in the vicinity of the component supply unit 8A in the component mounting work area and are suitable for a plurality of types of components.

  Further, the component mounting apparatus 101 shown in FIG. 1 receives the circuit board 2-1 transferred from the first board transfer holding device 3, and also includes a second board transfer holding device 13 including a pair of support rail portions that hold and hold the circuit board 2-1. A plurality of, for example, twelve, for example, twelve suction nozzle devices 10 that are part of a component holding member that holds and releasably holds the second head unit 14 in the X-axis direction and the Y-axis direction. The XY robot 5 that is positioned at a predetermined position is disposed in the vicinity of the component supply unit 18A and accommodates a plurality of types of nozzle units 39 suitable for a plurality of types of components, and is installed in the head unit 14 as necessary. The nozzle station 17 to be exchanged with the nozzle portion 39, and the circuit board 2- The component supply units 18A and 18B having a plurality of component supply cassettes 80 that continuously supply the components 23 to be mounted one by one to the component supply position 81 one by one, are arranged in the vicinity of the component supply unit 18B, and the circuit A component supply unit 18C for storing tray components in which components to be mounted on the substrate 2 are stored and held in a tray shape, and is disposed on the side near the center of the component mounting work area in the vicinity of the component supply unit 18A, and the second head unit Each of the recognition nozzles 19 captures the suction posture of the component 23 sucked by the fourteen nozzle portions 39. Further, load cells 12 for measuring the load when the nozzle portions 39 of the first head portion and the second head portion 14 are in contact with each other and adjusting the height of the nozzle portion 39 are provided at two locations.

  As described above, the component mounting apparatus 101 has two component mounting work areas arranged on the upper surface of the mounting apparatus base 16, and the first substrate transfer holding apparatus 3 and the second substrate transfer holding apparatus 13 have the same structure. It is possible to perform component mounting operations simultaneously and individually on the respective circuit boards 2 held respectively.

  FIG. 2 shows a schematic perspective view of an XY robot used in the component mounting apparatus of FIG. In FIG. 2, the description of the first head portion 4 is omitted. As shown in FIG. 2, the XY robot 5 supports the first head unit 4 and the second head unit 14 so as to be movable in the X-axis direction shown in the drawing, and moves the first head unit 4 in the X-axis direction. A first X-axis drive unit 6c for driving, a second X-axis drive unit 6d for supporting the second head unit 14 so as to be movable in the X-axis direction and driving the second head unit 14 in the X-axis direction; The first X-axis drive unit 6c and the second X-axis drive unit 6d are installed in the vicinity of the respective end portions in the X-axis direction on the mounting apparatus base 16 and supported by the respective end portions, and Are provided with first and second Y-axis drive units 6a and 6b for driving movement of the X-axis drive units 6c and 6d in the Y-axis direction shown in the figure.

  The first and second Y-axis drive units 6a and 6b can drive the first X-axis drive unit 6c and the second X-axis drive unit 6d independently of movement in the Y-axis direction. That is, the first X-axis drive unit 6c and the two Y-axis drive units 6a and 6b allow the first head unit 4 to move above the component mounting area on the front side in the figure independently of the second head unit 14 in the X direction. On the other hand, the second head unit 14 is located above the component mounting area on the back side in the figure by the second X-axis drive unit 6d and the two Y-axis drive units 6a and 6b. Are movable in the X-axis direction or the Y-axis direction independently of the first head portion 4. In this case, the respective X-axis drive units 6c and 6d are limited in the range of movement in the Y-axis direction, thereby preventing the occurrence of a collision with each other.

  The X-axis drive unit and the Y-axis drive unit are configured to be able to move the first head unit 4 and the second head unit 14 in the XY directions using a linear motor as a drive source. Details of this configuration will be described later.

  Further, as shown in FIG. 1, the component mounting apparatus 101 can perform comprehensive control while associating operations with each other, such as board loading / unloading, component holding, component recognition, and component mounting operations. A mounting control apparatus 100 is provided. The mounting control apparatus 100 includes a component supply unit 8A, 8B, 18A, and 18B, a component supply cassette 80, a first head unit 4 and a second head unit 14, recognition cameras 9 and 19, and a first substrate transport and holding device 3. The second substrate transport and holding device 13, the XY robot 5, the loader 1, and the unloader 11 are connected. In addition, the mounting control apparatus 100 includes a database unit and a memory unit, which will be described and illustrated later. In this database unit, component information relating to the shape, height, etc. according to the type of component is stored. The library, the board information related to the shape according to the type of the circuit board, the shape and nozzle position information of each type of nozzle part 39 corresponding to the type of component, are stored in advance so that they can be taken out. In the memory unit, NC data which is a mounting program such as which parts are mounted in which order and in which order, an array program such as which parts are arranged in which part supply member, or the arranged arrangement information, which will be described later The information about the component holdable range to be performed, the information of the board transfer position in each board transfer holding device, and the like are stored so as to be removable. In the mounting control apparatus 100, whether each of the above-described information is stored in the database unit or the memory unit can take various forms depending on the actual state of component mounting.

  Next, the configuration of the XY robot 5 will be described with reference to FIGS. 3A and 3B. As described above, the XY robot 5 moves the first head unit 4 and the second head unit 14 in the XY directions by the linear motor. 3A is a cross-sectional view taken along the line III-III in FIG. 3B is a side view of the X-axis drive unit of FIG. 3A.

  As shown in FIG. 2, each of the Y-axis drive units 6a and 6b has a configuration in which a Y-axis linear motor shaft 20 and a Y-axis guide beam 21 extending in the Y-axis direction are arranged in parallel. On the upper surface of the Y-axis guide beam 21, a Y-axis linear guide 22, a first linear scale 25, and a second linear scale 23 extending in the Y-axis direction are provided.

  As described above, the Y-axis linear motor shaft 20 and the Y-axis guide beam 21 are installed in the vicinity of the respective end portions in the X-axis direction on the mounting apparatus base 16. Each Y-axis guide beam 21 is provided with a second linear scale 23 used for position detection of the second X-axis drive unit 6d and a second Y-axis position sensor 24 used for position detection of the second X-axis drive unit 6d. ing. Similarly, a first linear scale 25 used for position detection of the first X-axis drive unit 6c and a first Y-axis position sensor (not shown) used for position detection of the second X-axis drive unit 6d are provided. . The first linear scale 25 is provided so as to extend in the central direction from the front side end portion of the Y-axis guide beam 21 in FIG. 2 while the second linear scale 23 is provided on the Y-axis guide beam 21. It is provided so as to extend in the center direction from the illustrated back side end in FIG. The first X-axis drive unit 6c is provided with a first Y-axis position sensor (not shown) disposed so as to face the first linear scale 25 on the left side of FIG. 2, and the second X-axis drive unit 6d includes A second Y-axis position sensor 24 is provided so as to face the second linear scale 23 on the left side of FIG. The first and second linear scales 25 and 23 and the first and second Y-axis position sensors 26 and 24 can detect the positions of the first and second X-axis drive units 6c and 6d with high accuracy.

  A cylindrical permanent magnet is provided on the Y-axis linear motor shaft 20 of the Y-axis drive unit 6a so as to be repeatedly arranged in the direction in which the S and N poles face each other. Each of the permanent magnets is a hollow cylindrical permanent magnet having an equal length, and both axial ends thereof are S and N poles. Both Y-axis linear motor shafts 20 are inserted into a Y-axis movable unit 30 as an example of a second moving body connected to both ends of the first X-axis drive unit 6c and the second X-axis drive unit 6d, respectively, The drive unit 6c and the second X-axis drive unit 6d are held movably in the Y-axis direction. The Y-axis movable unit 30 provided at both ends of the first X-axis drive unit 6c and the second X-axis drive unit 6d is provided with an electromagnet made of a coil. By passing a drive current through the coil, the electromagnet has magnetism and functions as a linear motor.

  The Y-axis movable unit 30 is formed by laminating a plurality of coils provided with circular holes into which the Y-axis linear motor shaft 20 can be inserted in the center so that the holes overlap in the Y-axis direction. It is formed as an insertion hole for the shaft linear motor shaft 20. The coil is positioned in the stator so as to face the permanent magnet when the Y-axis linear motor shaft 20 is received in the through hole. Specifically, the coil is wound in a loop around a member that is curved along the surface of the driving permanent magnet and includes a core portion for winding the coil, and fixed so that the coil faces the driving permanent magnet. It is installed in the child. In order to protect the coil from contact with the driving permanent magnet, a protective film such as a Teflon (registered trademark) film is attached to the outer surface of the coil. As described above, the coil is preferably arranged along the curved outer surface of the driving permanent magnet 45a in order to minimize the loss of magnetic field lines.

  Bearings are provided at both ends in the Y-axis direction of the laminated coils, and the Y-axis linear motor shaft 20 is guided so as not to deviate from the axis center of the laminated coils. Holds in a state where it can be directed. In addition, a sensor unit composed of two magnetic pole sensors arranged side by side in the axial direction is provided below the right bearing in the figure. Each magnetic pole sensor used in the two sensor units detects the magnetic field of the driving permanent magnet based on the position of the Y-axis linear motor shaft 20. In this embodiment, an MR sensor (Magnetoresistance Sensor), which is made of a permalloy alloy and changes its electric resistance by a magnetoresistive effect when a magnetic field is applied, is supplied with a constant current. Therefore, by passing a current through the MR sensor and measuring the change in the voltage, the change in the magnetic field is detected, and the position of the Y-axis linear motor shaft 20 relative to the Y-axis movable unit 30 is detected as described below. can do.

  A drive current is simultaneously supplied from the mounting control device 100 to the coils disposed in the Y-axis movable units 30 at both ends in the X-axis direction of the first X-axis drive unit 6c, and the coils of the second X-axis drive unit 6d A drive current is simultaneously supplied from the mounting control device 100 to the coils arranged in the Y-axis movable units 30 at both ends in the X-axis direction. Therefore, the first X-axis drive unit 6c and the second X-axis drive unit 6d can move the Y-axis drive units 6a and 6b independently because the Y-axis movable units provided at both ends are completely synchronized and have magnetism. It is.

  In this way, the first X-axis drive unit 6c and the second X-axis drive unit 6c and the second X-axis drive unit 6d are driven by using a linear motor, and the coils as drive sources are arranged at both ends. The vibration of the shaft driving unit 6d can reduce the shake of the mounting head to reduce the effect of component mounting, and simultaneously supply drive current from one control driver to both ends of the two X-axis driving units 6c and 6d. Therefore, the operations of the drive mechanisms at both ends of the X-axis drive units 6c and 6d can be completely synchronized, and the first X-axis drive unit 6c and the second X-axis drive unit 6d are almost completely parallel to the X-axis. It is possible to move it while maintaining it in a stable state.

  The first X-axis drive unit 6c and the second X-axis drive unit 6d have substantially the same configuration except that the mounting head mounting portion 31 for mounting the mounting head is disposed in a direction facing each other. Hereinafter, in FIG. 3A, the second X-axis drive unit 6d will be described as an example. As shown in FIG. 3B, the second X-axis drive unit 6d includes an X-axis linear motor shaft 32 on an X-axis frame 36 having a substantially Y-shaped cross section, and X-axis linear guides 33 at two locations above and below. Yes. The X-axis linear motor shaft 32 is inserted into the X-axis movable part 34 of the mounting head mounting part 31 and engages both. The mounting head mounting portion 31 is configured to be movable in the X-axis direction along the two X-axis linear guides 33. The X-axis frame 36 is provided with an X-axis linear scale 38 so that the position of the mounting head mounting portion 31 can be detected by an X-axis position sensor 37 provided on the mounting head mounting portion 31. ing.

  The X-axis linear motor shaft 32 is provided with columnar permanent magnets arranged so that the S poles and N poles are repeatedly arranged in the facing direction. An electromagnet including a coil is disposed on the X-axis movable unit 34 as the first moving body. By passing a drive current through the coil, the electromagnet has magnetism and functions as a linear motor. Note that the configuration of the X-axis drive unit as a linear motor is largely the same as the configuration of the linear motor used in the Y-axis drive unit.

  A drive current is supplied to the coil disposed in the X-axis movable unit 34 from the mounting control device 100 described above. Therefore, the mounting head attaching portion 31 moves along the X-axis linear motor shaft 32 by the magnetism generated in the X-axis movable portion 34.

  The mounting head attachment portion 31 includes an attachment surface 35 that fixes the first head portion 4 and the second head portion 14.

  The Y-axis drive unit detects the position of the Y-axis movable unit 30 with respect to the Y-axis linear motor shaft 20 using the linear scale 25 and the position sensor 24. However, the Y-axis movable unit of the linear motor The position can be detected by the magnetic pole sensor provided at 30 as follows.

  Next, the structure of the head parts 4 and 14 will be described in detail. In addition, since the 1st head part 4 and the 2nd head part 14 have the same structure, in the following description, description of the structure of the 1st head part 4 is typically shown in FIG. 1 is performed using a partial perspective view of the head portion 4. Since the drive mechanism of the suction nozzle device of the head unit 4 to be described later is the same as the drive mechanism of the XY robot, only the head unit 4 will be described here, and the description of the drive mechanism of the XY robot will be omitted. .

  As shown in FIG. 4, the first head unit 4 includes a plurality of, for example, twelve suction nozzle devices 10 in the Y-axis direction shown in the drawing along the X-axis direction. This is a so-called multiple-type head unit that is provided in a state where two rows are arranged with a constant pitch Py. The respective suction nozzle devices 10 included in the first head unit 4 are arranged in the order of the first suction nozzle device 10a, the second suction nozzle device 10b, the first suction nozzle device 10a, the second suction nozzle device 10b, A third suction nozzle device 10c, a fourth suction nozzle device 10d, a fifth suction nozzle device 10e, and a sixth suction nozzle device 10f, and a seventh suction nozzle device in order from the back in the Y-axis direction and from the left to the right in the X-axis direction. 10g, 8th suction nozzle device 10h, 9th suction nozzle device 10i, 10th suction nozzle device 10j, 11th suction nozzle device 10k, and 12th suction nozzle device 10l. Also, a plurality of component supply cassettes 80 are arranged in the component supply unit 8A (or 8B) with a constant interval pitch L along the X-axis direction in the drawing. Further, the fixed interval pitch Px in the array of the respective suction nozzle devices 10 may be a dimension that is an integral multiple of the fixed interval pitch L in the array of the respective component supply cassettes 80. In the present embodiment, the fixed interval pitch Px. Px and the interval pitch L have the same dimensions. In the following description, when the first suction nozzle device 10a to the twelfth suction nozzle device 101 are not specified and used, they are simply indicated as “suction nozzle device 10”.

  Further, the first suction nozzle device 10a to the twelfth suction nozzle device 101 have substantially the same structure, and an outer cylinder 53 including a casing 46 and a ball spline nut 53a provided above the first head portion 4. Thus, it can be moved in the axial direction and is held so as to be rotatable about the shaft. As will be described later, the suction nozzle device 10 is configured to be movable up and down in the axial direction (Z-axis direction) by an actuator 40 provided in the casing, and is splined so as to be able to rotate θ about the axis. A shaft 44 is provided.

  Each suction nozzle device 10 includes a spline shaft 44, a nozzle portion 39 provided at the lower end of the spline shaft, a drive shaft 45 configured integrally with the spline shaft 44, and the suction nozzle device 10 rotated by θ. And a timing pulley 41 for the purpose.

  The drive shaft 45 functions as a movable shaft of the actuator 40 for moving the suction nozzle device 10 up and down, and a cylindrical permanent magnet having magnet poles formed at both ends is opposed to the same pole. Fix by arranging multiple. The timing pulley 41 is connected to the spline shaft 44, and both can move relative to each other in the Z-axis direction and are restricted from moving in the rotational direction around the Z-axis. As shown in FIG. 5, a timing belt 43 is engaged from the timing pulley 41 of the first suction nozzle device 10a to the timing pulley 41 of the sixth suction nozzle device 10f. The timing belt 43 is engaged via five tension pulleys 43a and 43b, respectively, in order to be completely engaged with the pulleys of the six suction nozzle devices. Due to the engagement of the timing belt 43, the forward / reverse rotation drive of the θ rotation motor 42a is transmitted through the respective timing belts 43, and the sixth suction nozzle device 10f is simultaneously rotated by θ from the first suction nozzle device 10a. (Rotation around the axis of the suction nozzle device 10) is possible.

  Similarly, another timing belt 43 is engaged from the pulley of the seventh suction nozzle device 10g to the timing pulley 41 of the twelfth suction nozzle device 10l, whereby the forward and reverse of another θ rotation motor 42b. The rotational driving force is transmitted via the timing belt 43, so that the seventh suction nozzle device 10b and the twelfth suction nozzle device 101 can be simultaneously rotated by θ.

  Further, as shown in FIG. 6, each actuator 40 is constituted by a shaft type linear motor, and the corresponding suction nozzle device 10 is moved up and down by the shaft type linear motor to selectively hold or hold parts. The mounting operation can be performed. A specific configuration of the shaft type linear motor will be described later. As shown in FIGS. 4 and 6, the power of the two θ rotation motors 42a is transmitted through the timing belt 43, and the sixth suction nozzle device 10f is rotated by θ from the first suction nozzle device 10a, respectively. The power of the θ rotation motor 42b is transmitted through the timing belt 43, and the seventh suction nozzle device 10g to the twelfth suction nozzle device 101 are each rotated by θ. Such a configuration is an example. In addition, it is possible to perform the vertical movement and θ rotation of each suction nozzle device 10 with only one actuator, so that a plurality of suction nozzle devices 10 can be selectively driven. .

  Each of the component supply cassettes 80 is provided with a component extraction position for detachably storing a plurality of components and arranging the components in a removable manner. Further, as described above, the respective component take-out positions are arranged in a line at a constant interval pitch L in the illustrated X-axis direction. Thus, by arranging the respective component extraction positions, for example, the first suction nozzle device 10a is placed above the component extraction position in the first component supply cassette 80, and the component extraction position in the second component supply cassette 80, for example. The nozzle unit 39 arranged in the X-axis direction may be arranged above each of the component supply cassettes arranged in the X-axis direction, such as simultaneously arranging the second suction nozzle device 10b above the 81. In addition, it is possible to perform the suction holding and taking out of the parts simultaneously from the respective parts taking out positions by the respective suction nozzle devices 10.

  Next, a shaft type linear motor as an actuator of the first head unit 4 and the second head unit 14 will be described. The shaft type linear motor is provided in the drive shaft 45 configured coaxially with the spline shaft 44 of the suction nozzle device 10 and in the housing 46 of the first head portion 4 and the second head portion 14, and detects the position of the coil 48. And a stator 47 having a magnetic pole sensor 49 for operation. The drive shaft 45 has a plurality of cylindrical magnets arranged so that their south poles and north poles face each other, and air suction holes are formed in the hollow portions. As described above, the driving shaft 45 of the seventh to twelfth suction nozzle devices is not configured to be hollow to both ends.

  As shown in FIG. 8, the housing 46 has a hollow rectangular parallelepiped shape having a sufficient thickness for mechanical strength, and is made of a nonmagnetic material, for example, a plastic material. The housing 46 has a through hole 56 on its upper surface that is slightly larger than the diameter of the drive shaft 45 so as to movably receive the drive shaft 45. The through-hole 56 is positioned so as to communicate with a hole provided in a stator coil disposed in the housing 46 as described later. Further, a female screw 57 for screwing to the mounting surface 35 of the mounting head mounting portion 31 is provided on the side surface.

  The drive shaft 45 fixed to the first suction nozzle device 10a to the sixth suction nozzle device 10f (the right side of the two suction nozzle devices shown in FIG. 6) is configured to be hollow. By suction from a suction connection port 45b provided at the upper end, suction air can be passed through the hollow hole 45c to the nozzle portion 39 provided at the tip of the shaft. Further, the drive shaft 45 fixed to the seventh suction nozzle device 10g to the twelfth suction nozzle device 101 (the left side of the two suction nozzle devices shown in FIG. 6) has a solid structure. The spline shaft 44 is provided with a suction port 45d for air suction. The suction port 45d is connected to a suction connection nozzle 45d provided in the outer cylinder 53, and sucks air in the spline shaft 44 to pass suction air to the nozzle portion 39 provided at the tip of the spline shaft 44. It is configured to be able to.

  Each of the driving permanent magnets 45a is a hollow cylindrical permanent magnet having an equal length, and both axial ends thereof are S and N poles. The drive permanent magnet 45a is arranged on the drive shaft 45 so that the S pole and the N pole face each other.

  The stator 47 is formed by laminating a plurality of coils each having a circular hole into which the driving shaft 45 can be inserted at the center so that the holes overlap in the Z-axis direction. It is formed as an insertion hole. The coil 48 is positioned in the stator 47 so as to face the permanent magnet 45a when the driving shaft 45 is received in the through hole. Specifically, the coil is wound in a loop around a member that is curved along the surface of the driving permanent magnet 45a and includes a core portion for winding the coil, so that the coil faces the driving permanent magnet 45a. Installed in the stator. In order to protect the coil 48 from contact with the driving permanent magnet 45a, a protective film such as a Teflon (registered trademark) film is attached to the outer surface of the coil. As described above, the coil is preferably arranged along the curved outer surface of the driving permanent magnet 45a in order to minimize the loss of magnetic field lines.

  Bearings 50a and 50b are provided above and below the stacked coils, and the drive shaft 45 is guided so as not to deviate from the axial center of the stacked coils, and the axial direction of the drive shaft 45 is possible. Hold on. In addition, sensor units 49a and 49b composed of two magnetic pole sensors 491 and 492 arranged side by side in the axial direction are provided on the lower side of the lower bearing in the figure (in FIG. 7A and FIG. 7B, Shown for actual shaft). The magnetic pole sensors 491 and 492 used in the two sensor units 49 a and 49 b detect the magnetic field of the driving permanent magnet 45 a based on the position of the driving shaft 45. In this embodiment, an MR sensor (Magnetoresistance Sensor), which is made of a permalloy alloy and changes its electric resistance by a magnetoresistive effect when a magnetic field is applied, is supplied with a constant current. Therefore, by passing a current through the MR sensor and measuring the change in the voltage, the change in the magnetic field can be detected, and the position of the drive shaft 45 relative to the stator can be detected.

  As shown in FIG. 7B, two sets of sensor units 49a and 49b are provided at substantially the same circumference around the drive shaft 45 at the above-mentioned axially symmetric positions. Further, as shown in FIG. 7A, each of the two magnetic pole sensors 491 and 492 constituting the sensor units 49a and 49b is arranged at an interval approximately half the axial dimension of the permanent magnet 45a incorporated in the drive shaft 45. Has been. As a result, in the state of FIG. 7A, when one magnetic pole detection sensor 492 detects a substantially maximum magnetic field strength, the other magnetic pole detection sensor 491 can detect a substantially zero magnetic field strength. The position detection of the drive shaft 45 by the sensor units 49a and 49b and the detection method thereof will be described later.

  Each suction nozzle device 10 is configured to move up and down in the Z-axis direction by a shaft type linear motor 40, while the suction nozzle device 10 is moved upward in the figure by a spring 52 so that the suction nozzle device 10 is not lowered by gravity. It is held in an energized state. That is, it is fixed to a spring seat 54 provided on the outer cylinder 53 side having a ball spline nut 53 a that receives the spline shaft 44 of each suction nozzle device 10, and a drive shaft 45 that is integrally formed with each spline shaft 44. A spring 52 having a natural length longer than the distance between the two spring seats 54, 55 is arranged between the spring seat 55 and the drive shaft 45 as shown in FIG. Is biased to the upper side in the figure, and the suction nozzle device 10 is configured not to fall due to gravity. The spring seat 55 also functions as a stopper that contacts the lower end of the stator 47 when the drive shaft is at the origin position and prevents the drive shaft from rising further. A method for detecting the origin of the driving shaft will be described later.

  FIG. 9A is a block diagram of a control circuit for driving control and position detection of the shaft type linear motor schematically shown. FIG. 9A shows the configuration of the linear motor used in the first and second head units 4 and 14. In the XY robot, when the first X-axis drive unit 6c and the second X-axis drive unit 6d perform drive control and position detection in the X-axis direction of the first head unit 4 and the second head unit 14, and the Y-axis drive The same control is performed when the units 6a and 6b perform drive control and position detection of the Y-axis movable unit 30 in the Y-axis direction. Hereinafter, the shaft type linear motor 40 will be described as an example, and the drive control and position detection method will be described. As described above, the linear motor drive control and position detection method are the same for the XY robot and the mounting head, and therefore the mounting head will be described below. However, for the XY robot, the block diagram of the control circuit for driving control and position detection of the shaft type linear motor schematically shown is configured as shown in FIG. 9E.

  As shown in FIGS. 9A and 9E, the servo controller servo amplifier 110 that controls the drive of the shaft type linear motor constitutes a part of the mounting control device 100, and includes an amplifier unit 112 and a controller unit 111. Is done. The amplifier unit 112 receives, for example, an operation command signal input from the host controller 100a in the mounting control apparatus 100, and supplies power to the coil 48 of the stator 47 through the power line. The drive current output from the amplifier unit 111 of the servo controller servo amplifier 110 causes a current to flow through the coil 48, and a repulsive force acts between the coil 48 and the north or south pole of the drive permanent magnet 45a. 45 moves along the stator 47 in the predetermined Z-axis direction.

  The controller unit 111 of the servo controller servo amplifier 110 includes a cycle counter 113, a resolution performance table 114 for each cycle, a pulse signal receiver 115, and a calculator 116. The cycle counter 113 describes a magnetic field cycle, which will be described later, as a plurality of pulses (in this embodiment, 1000 for convenience of explanation. However, in actuality, in order to detect at which position in the drive cycle the drive shaft 45 exists. In order to perform computer processing, it is divided into, for example, 1024), and the drive pulse of each period counter is counted. The resolution table 114 for each period is data for storing the length of each magnetic field period provided in the drive shaft, and the magnetic field period provided in the drive period is not completely the same as will be described later. It is used for correction of position detection based on.

  As the drive shaft 45 moves along the stator 47, the drive permanent magnet 45 a provided on the drive shaft 45 is replaced with a magnetic pole sensor 491 of the sensor units 49 a and 49 b provided on the stator 47. , 492. As described above, if the length in the Z-axis direction of the driving permanent magnet 45a is 4 mm, for example, the N and S poles are formed every 4 mm, so the magnetic field cycle is 8 mm. As the drive shaft moves, the resistance values of the magnetic pole sensors 491 and 492 change as the relative positions of the magnetic pole sensors 491 and 492 and the permanent magnets change.

  Since a constant current flows through the magnetic pole sensors 491 and 492, when the driving permanent magnet 45a moves, magnetic field intensity signals are output from the magnetic pole sensors 491 and 492 according to the magnetic field strength of the magnetic field period, respectively. / D conversion circuit 110 is input. The magnetic field strength signals output from the magnetic pole sensors 491 and 492 take a substantially sinusoidal locus, similarly to the magnetic field strength of the magnetic field period. The A / D conversion circuit 110 A / D converts and amplifies the magnetic field strength signal and inputs the amplified signal to the pulse signal receiving unit 115. The pulse signal reception unit 115 generates a predetermined digital signal by shaping the waveform of the digital signal that is continuously input, and outputs the digital signal to the calculation unit 116. The computing unit 116 detects the origin of the driving shaft 45 and calculates the position based on the value of the input waveform-shaped digital signal as described below.

  The origin detection method will be described below. In the present embodiment, when the drive shaft 45 moves upward and the spring seat 55 contacts the lower end of the stator 47, the current value applied to the coil is changed and the current value is detected. By doing this, the origin is detected. That is, as shown in FIG. 9B, the drive shaft 45 moves upward, and at the point A in the figure, the spring seat 55 contacts the lower end of the stator 47 and cannot move upward any further. At this time, as shown in FIG. 9B, the value of the current applied to the coil rises at the point A because it tries to move the shaft even though the shaft cannot move.

  The servo controller servo amplifier 110 detects the origin based on the position of the drive shaft existing when the current value starts to rise and exceeds the threshold value, and the drive shaft based on the position as shown below. Detect the position of. At this time, since the drive shaft 45 is stopped, the output value output from each magnetic pole sensor shows a constant value. Therefore, by adding this requirement to the condition for detecting the origin, more stable detection can be performed. It becomes possible.

  In the present embodiment, as shown in FIG. 9C, the drive shaft 45 moves upward and the spring seat 55 comes into contact with the lower end of the stator 47, so that the current value exceeds the threshold value and the two When it is detected that the output of the magnetic pole sensor does not change, the drive shaft 45 is controlled to descend from the position. Then, the output of one of the magnetic pole sensors 491 and 492 (in the figure, it is not necessary to distinguish between the two sensors, and is represented as the first or second magnetic pole sensor) is initially 0. The new position is the origin.

  As another method for determining the origin position, as shown in FIG. 9D, the drive shaft 45 is moved upward, and the spring seat 55 is applied to the lower end of the stator 47, that is, applied to the coil. The position where the drive shaft 45 exists when the current value starts to rise may be used as the origin.

  Next, a specific detection calculation example of the position detection of the drive shaft 45 will be described with reference to FIG. 10A. In FIG. 10A, if the length of the driving permanent magnet 45a in the Z-axis direction is 4 mm, the distance H between the N poles is 8 mm. Assuming that the drive shaft 45 moves downward in the Z-axis direction in FIG. 10A, the two magnetic pole sensors 491, 492 each have a magnetic field strength as a voltage (in the present embodiment, between −5 V to +5 V). The output signal is an approximately sine wave magnetic field strength signal as shown in FIG. 10B. Here, since the two magnetic pole sensors 491 and 492 are arranged with an interval of approximately half of the length of one driving permanent magnet 45a in the Z-axis direction, that is, with an interval of 2 mm, the output magnetic field The phase of the sine wave of the intensity signal is shifted by π / 2.

  Here, the measurement resolution of the voltage value (vertical axis direction in FIG. 10B) of the A / D conversion circuit 110 that converts the magnetic field strength signals output from the two magnetic pole sensors 491 and 492 into digital values is ± 500, and the magnetic field cycle direction Assuming that 1000 (in the horizontal axis direction in FIG. 10B) is 1000, the resolution of detection accuracy is every 8 mm / 1000 = 8 μm.

  Here, in FIG. 10B, the case where it outputs from two magnetic pole sensors 491 and 492 is demonstrated. In order to detect the position of the drive shaft 45, the position of the drive shaft is detected based on the movement distance from the origin. That is, as described above, the drive shaft is moved to the origin detected by detecting the current value applied to the coil, and is moved in the downward direction in the figure. At this time, each detection point is a point that takes the same output value as the output value at the origin position of the magnetic pole sensors 491 and 492 (in FIG. 10B, the output of the sensor 491 is 0 and the output of the sensor 492 takes the maximum value). As the first detection point, the second detection point,... One magnetic field period is defined between the origin and each detection point.

  The resolution table 114 for each period stores resolution information for each period direction pulse number of each period as shown in FIG. 10C. As described above, in the present embodiment, since the resolution in the magnetic field periodic direction is 1000, one cycle, that is, a value obtained by dividing the total length of two magnets by 1000 is the resolution of one pulse. Further, although the drive permanent magnet 45a incorporated in the drive shaft 45 is configured to have substantially the same length in the Z-axis direction, there may be a variation in length during processing, which is a variation in the magnetic field cycle. It becomes. Since this variation is cumulatively added as the distance from the origin increases, the accuracy of position detection at a position far from the origin deteriorates. Therefore, in order to correct this variation in period length, information on the length of each period is stored in the resolution table 114 for each period of the magnetic field. In FIG. 10C, when the first cycle has a cycle length of 8.1 mm and the resolution of one pulse is 8.1 μm, the second cycle has a cycle length of 8.2 mm and the resolution of one pulse is 8.2 μm. Is illustrated.

  Here, when the output values of the magnetic pole sensors 491 and 492 are outputs as indicated by the point B in FIG. 10B (for example, the output of the magnetic pole sensor 491 is −2 V and the output of the magnetic pole sensor 492 is +2 V), Thus, since it passes through the first detection point, it turns out that the point B is a point located in the second period. Further, as shown in FIG. 10D, the point B has an in-circle angle ATTN of (−2/2) × (180 / π) = − 45 degrees, and the output of the magnetic pole sensor 491 is negative. 45 = 135 degrees. Therefore, from the waveform of the magnetic pole sensor, the point of Z1 is a position of 270 degrees and rotates counterclockwise from the point, so that the detection position is a period length of 8.2 mm × (225 degrees / 360). Degrees) = 5.125 mm, which means that the position has moved by 5.125 mm with reference to the start position of the second period, that is, the first detection point.

  In addition, since the drive shaft 45 moves over one cycle, the first cycle length (that is, the length of two drive permanent magnets) is set at a distance with respect to the first detection point as 8. Add 1 mm. Therefore, the movement distance from the origin is output as 13.225 mm.

  Note that the period length of the magnetic field applied during the calculation of the movement distance may be calculated as the length of two driving permanent magnets instead of preliminarily storing it as table data as described above.

  As described above, the first head portion 4 and the second head portion 14 guide the drive shaft 45 by the bearings 50 a and 50 b provided above and below the coil 38 so that the axis thereof coincides with the central axis of the coil 38. Therefore, the drive shaft 45 is configured not to be displaced in the X axis direction and the Y axis direction in the stator 47. Therefore, even when the suction nozzle device 10f is rotated about its axis by the θ rotation motor 42a, the gap between the sensor unit and the drive permanent magnet 45a incorporated in the drive shaft 45 is substantially as described above. The distance between the driving shaft 45 can be detected by the sensor unit 49a having the two magnetic pole sensors 491 and 492 as described above.

  However, it is conceivable that the axis of the drive shaft 45 is deviated from the central axis of the coil 38 during long-term use. However, even in this case, the position of the drive shaft 45 can be detected with high accuracy by having the two sensor units 49a and 49b as described above.

  That is, as shown in FIG. 11A, when the axis of the drive shaft 45 coincides with the central axis of the coil 38 of the stator 47, the four magnetic pole sensors 491, 492, 493, 494 of the two sensor units 49a, 49b. And the permanent magnet 45a for driving are the same, and the outputs of the two magnetic pole sensors 492 and 494, which are the upper two magnetic pole sensors 491 and 493 included in the respective sensor units 49a and 49b, are shown in FIG. It becomes the same as shown in 11B.

  However, as shown in FIG. 12A, when the drive shaft 45 moves in the direction indicated by the arrow 120 in the direction perpendicular to the Z-axis, the drive permanent magnet 45a approaches the sensor unit 49b and is driven from the sensor unit 49a. The permanent magnet 45a for use will move away. In such a case, the output from each magnetic pole sensor of the sensor unit is as shown in FIG. 12B. That is, the upper magnetic pole sensor 491 of the sensor unit 49a has a longer distance from the driving permanent magnet 45a and a lower output gain than the upper magnetic pole sensor 493 of the sensor unit 49b. Further, the lower magnetic pole sensor 492 of the sensor unit 49a has a longer distance from the driving permanent magnet 45a and a lower output gain than the lower magnetic pole sensor 494 of the sensor unit 49b.

  As shown in FIG. 13A, when the drive shaft 45 moves in the left direction as shown by an arrow 121 and moves downward in the right direction as shown by an arrow 122, the drive shaft 45 is moved. With the movement in the Z-axis direction, the distance between the sensor units 49a and 49b and the driving permanent magnet 45a changes. That is, the drive shaft 45 is close to the sensor unit 49a side at the position of the drive permanent magnet 451 on the lower side in the Z-axis direction, and is closer to the sensor unit 49b side at the position of the drive permanent magnet 452 on the upper side in the Z-axis direction. Proximity. Accordingly, the outputs of the magnetic pole sensors 491 to 494 of each sensor unit when the drive shaft 45 moves downward between Z1 and Z2 are as shown in FIG. 13B. That is, in the magnetic pole sensor on the upper side of each sensor unit 49a, 49b, the output of the magnetic pole sensor 491 decreases with movement, whereas the output of the magnetic pole sensor 493 increases with movement. Further, in the magnetic pole sensors below the sensor units 49a and 49b, the output of the magnetic pole sensor 492 decreases with movement, whereas the output of the magnetic pole sensor 494 increases with movement.

  Thus, as shown in FIGS. 12A and 13A, when the axis of the drive shaft 45 is displaced from the center axis of the shaft insertion hole of the stator 47, it is difficult to detect the position with one sensor unit. It becomes. In this embodiment, by using the outputs of the two sensor units, the position can be detected when the drive shaft 45 is displaced.

  That is, in the present embodiment, the average value of the output values of the upper magnetic pole sensors 491 and 493 and the lower magnetic pole sensors 492 and 494 of the two sensor units 49a and 49b is calculated, and driving is performed based on the calculated values. The position of the shaft 45 is detected. Since the two sensor units 49a and 49b are provided on substantially the same circumference centering on the shaft insertion hole of the stator, the drive shaft 45 is displaced in any direction from the center axis of the stator. Even if the output of one magnetic pole sensor becomes small, the output of the other magnetic pole sensor becomes large, so the total distance to the two sensor units is kept substantially constant. That is, by taking the average of the outputs of the two sensor units, it is possible to absorb an error when the axis of the drive shaft 45 is displaced from the center axis of the stator.

  As described above, according to the component mounting apparatus according to the present embodiment, the drive shaft 45 constituting a part of the suction nozzle device can be used as a component part of an actuator that is a shaft type linear motor. The part can be reduced in size. Further, since the drive shaft 45 is arranged so as not to be moved in the X-axis direction and the Y-axis direction by the bearings 50a and 50b, it is possible to prevent the nozzle portion from shaking during the component mounting operation.

  Furthermore, since the sensor unit having a plurality of magnetic pole sensors that detect the magnetic field of the driving permanent magnet is used for detecting the position of the driving shaft 45, the driving shaft 45 can be configured to rotate θ. Even in the case of θ rotation, the position detection accuracy can be kept high.

  Further, since the two magnetic pole sensors are provided at a distance of about half of the Z-axis direction dimension of one driving permanent magnet, the one magnetic pole detection sensor has a substantially maximum or minimum magnetic field strength. When the other magnetic pole detection sensor detects the magnetic field strength, the magnetic field intensity of the other magnetic pole sensor is detected to be substantially zero, and the position is detected directly by detecting the angle within the circle based on the output of both magnetic pole sensors. It can be performed. That is, it is possible to detect the position by reducing the influence of the change in the state of the drive shaft and the coil as compared with the case where the output of the magnetic pole sensor is stored in advance as a reference value and the position is detected by comparison with the reference value. .

  In particular, when a plurality of sensor units are provided, the distance between the drive shaft and the stator is changed by taking the average of the outputs of the magnetization sensors arranged at the same position in the Z-axis direction of each sensor unit. Even in this case, position detection can be performed with high accuracy.

  In addition, the analog signal output from each sensor unit is A / D converted and converted into a digital value, so that the resolution of detection accuracy can be increased by increasing the measurement resolution of the converted digital value. it can. In other words, the detection accuracy can be determined by the magnetic field period length determined by the length of the driving permanent magnet and the measurement resolution, and the detection accuracy can be relatively easily increased by increasing the measurement resolution that can be processed in software. Can be improved.

  In addition, this invention is not limited to the said embodiment, It can implement in another various aspect. For example, the number of sensor units provided in the stator is not limited to two, and three or more sensor units may be provided. In this case, it is preferable to install so as to be positioned at an equal angle with respect to the center of the coil.

  In addition, the magnetic field strength of the end magnets and the magnetic field strength of the magnets having magnets on both sides of the plurality of magnets provided on the movable shaft vary, so the magnetic field of the end magnet is detected. It is preferable that a magnetic pole sensor is provided at such a position that it is not used, or it is not adopted as position information for detecting the position of the movable shaft even if it is detected, or the output value is corrected and used.

  Note that the XY robot in the above embodiment moves the component mounting head of the component mounting apparatus in the XY biaxial directions, but the XY robot according to the present invention is not limited to this application.

1 is an overall schematic perspective view of a component mounting apparatus according to a first embodiment of the present invention. It is a perspective view which shows schematic structure of the XY robot of the component mounting apparatus of FIG. FIG. 3 is a sectional view taken along line III-III in FIG. 2. It is a side view of the X-axis drive part of FIG. 3A. It is a perspective view which shows the external appearance structure of the 1st head part of the component mounting apparatus of FIG. 5 is a θ rotation mechanism of the suction nozzle device of the first head unit in FIG. 4. FIG. 5 is a cross-sectional view in the Y direction of the first head portion of FIG. 4. FIG. 5 is a partial enlarged cross-sectional view of an actuator of a first head unit in FIG. 4. It is a VII-VII sectional view of Drawing 7A. FIG. 5 is a partially enlarged perspective view of a first head portion in FIG. 4. FIG. 2 is a block diagram of a control circuit for driving and controlling a shaft type linear motor used in the component mounting apparatus of FIG. 1 schematically shown. It is a graph which shows the locus | trajectory of the electric current value for detecting the origin of a drive shaft in the control circuit of FIG. 9A. It is a figure for demonstrating the example of the process of the origin detection of a drive shaft in the control circuit of FIG. 9A. It is a figure for demonstrating the example of the other process of the origin detection of a drive shaft in the control circuit of FIG. 9A. It is a figure which shows the structure in the case of applying the control circuit for drive-controlling the shaft type linear motor shown to FIG. 9A to XY robot. It is explanatory drawing of the mechanism of position detection of a drive shaft. It is an example of the output signal of each magnetic pole sensor of FIG. 10A. It is a structural example of the resolution table of each period. It is explanatory drawing of the angle in a circle used for the position detection of the shaft for a drive. It is explanatory drawing of the mechanism of a position detection in case the axial center of a drive shaft corresponds with the central axis of a coil. It is an example of the output signal of the magnetic pole sensor of FIG. 11A. It is explanatory drawing of the mechanism of a position detection when the axial center of a drive shaft moves in parallel with respect to the central axis of a coil. It is an example of the output signal of the magnetic pole sensor of FIG. 12A. It is explanatory drawing of the mechanism of a position detection when the axial center of a drive shaft moves to the direction which cross | intersects with respect to the central axis of a coil. It is an example of the output signal of the magnetic pole sensor of FIG. 13A. It is a figure which shows the structural example of the drive device using the conventional linear motor.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Loader 2, 2-0, 2-1, 2-2, 2-3 Circuit board 3,13 1st board | substrate conveyance holding apparatus, 2nd board | substrate conveyance holding apparatus 4 1st head part 5 XY robot 6a Y-axis drive part 6b, 6c X-axis drive unit 7, 17 Nozzle station 8A, 8B, 8C Component supply unit 9, 19 Recognition camera 10 Suction nozzle device 12 Load cell 14 Second head unit 39 Nozzle unit 40 Actuator 41 Timing pulley 42a, 42b θ rotation motor 43 Timing belt 43a, 43b Tension pulley 44 Spline shaft 45 Drive shaft 46 Housing 47 Stator 48 Coil 49a, 49b Sensor unit 50a, 50b Bearing 52 Spring 100 Mounting portion 100a Host controller 101 Component mounting device 110 A / D converter multiplication Circuit 111 Servo controller Amplifier 491,492,493,494 magnetic pole sensor

Claims (14)

A first moving body that moves a moving object in the X-axis direction, and an X that includes a first guide portion that extends along a moving direction of the first moving body and guides the first moving body. An axis drive,
A second moving body connected to the X-axis driving section and moving the X-axis driving section in the Y-axis direction; and extending along a moving direction of the second moving body and the second moving body. Two Y-axis drive units including a second guide unit for guiding, the Y-axis drive unit configured so that the second guide units are arranged in parallel with each other;
An XY robot including a drive signal supply unit configured to supply a drive signal for driving the first and second moving bodies to the X-axis drive unit and the Y-axis drive unit;
At least one of the X-axis drive unit and the Y-axis drive unit is
The first and second coils have a plurality of coils having a through hole in the center, and the plurality of coils are arranged so that the through holes of the coil are arranged linearly to form a shaft insertion hole. A coil section as a moving body;
The magnetic poles of a plurality of permanent magnets are arranged so that the same poles face each other, and are arranged in the shaft insertion hole of the coil portion so as to be movable relative to the coil portion in the axial direction, the first and second A cylindrical shaft as a guide part of
It has a shaft type linear motor with
The XY robot according to claim 1, wherein the driving signal supply unit supplies a driving current to a coil unit of the shaft type linear motor.   2. The XY according to claim 1, wherein the drive signal supply unit supplies the same drive current to each of the coil units of two shaft type linear motors respectively provided in the Y-axis drive unit. robot. The Y-axis drive unit includes a coil unit in which the second moving unit is inserted into each of two shafts of the shaft type linear motor.
Two X-axis drive units are provided, and both ends of the first guide unit are connected to the other second coil units of the Y-axis drive unit, respectively. The XY robot according to claim 2.   4. The shaft type linear motor according to claim 1, wherein the coil portion includes a bearing portion that guides the shaft so that the shaft type linear motor does not move in a direction that intersects an axis of the shaft. 5. XY robot described in 2. The shaft type linear motor further includes a plurality of shaft-type linear motors arranged at predetermined intervals in the axial direction of the shaft so as to face the side surfaces of the shaft, and each of them detects the strength of the magnetic field of the permanent magnet. A plurality of magnetic pole detection sensors that output a corresponding magnetic field strength signal;
A coil position detection unit that receives a plurality of magnetic field strength signals output from the plurality of magnetic pole detection sensors, and detects a relative position of the coil unit and the shaft based on the plurality of magnetic field strength signals. The XY robot according to any one of claims 1 to 4, characterized by:   The coil position detection unit has two magnetic pole detection sensors. When one magnetic pole detection sensor detects a substantially maximum or substantially minimum magnetic field strength, the other magnetic pole detection sensor has a substantially zero magnetic field. The XY robot according to claim 5, wherein the XY robot is disposed at a position where the strength is detected. The shaft type linear motor is
The magnetic pole detection sensor is configured as a sensor unit,
A plurality of the sensor units are provided at equal intervals on substantially the same circumference having a center on the central axis of the shaft insertion hole of the coil portion and existing on a plane orthogonal to the central axis,
The coil position detection unit corrects the output from the plurality of sensor units according to the shift in the direction intersecting the axis of the shaft based on the plurality of magnetic field strength signals respectively output from the plurality of sensor units. The XY robot according to claim 6, wherein the position of the movable shaft is detected. The shaft type linear motor is
The moving amount of the movable shaft corresponding to the length between the magnetic poles of the plurality of permanent magnets is stored in the coil position detection unit, and the position of the movable shaft is corrected when the position of the movable shaft is detected. 8. The XY robot according to any one of 7. The X-axis drive unit is
An X-axis frame connected to a moving body of the two Y-axis drive units;
2. The XY robot according to claim 1, further comprising: an X-axis linear guide provided on the X-axis frame in parallel with the shaft as the first guide portion and guiding movement of the coil portion as the first moving body. . The moving object connected to the XY robot according to any one of claims 1 to 9,
A nozzle device having a spline shaft and a nozzle connected to the spline shaft and capable of holding a component by suction, and a spline that is fitted to the spline shaft and is slidable and rotatable, and connected to a rotational drive source The component mounting apparatus which is a component mounting head which has a nut and the nozzle moving apparatus which moves the said nozzle apparatus. The nozzle moving device is
A stator having a plurality of coils having a through hole in the center, and the plurality of coils arranged so that the through holes of the coil are linearly arranged to form a shaft insertion hole;
A cylindrical movable shaft provided with magnetic poles of a plurality of permanent magnets so that the same poles face each other, and arranged to be movable in the axial direction in the shaft insertion hole of the stator and connected to the spline shaft,
Opposite to the side surface of the movable shaft, a plurality of them are arranged at predetermined intervals in the axial direction of the movable shaft, and each of them detects the magnetic field strength of the permanent magnet and generates a magnetic field strength signal corresponding to the strength. A plurality of magnetic pole detection sensors for output;
A movable shaft position detector that receives a plurality of magnetic field strength signals respectively output from the plurality of magnetic pole detection sensors and detects a position of the movable shaft with respect to the stator based on the plurality of magnetic field strength signals. The component mounting apparatus according to claim 10.   The component mounting apparatus according to claim 11, wherein the movable shaft position detection unit of the nozzle moving device is disposed between the coil and the spline nut.   13. The component mounting head is configured such that the movable shaft and the spline shaft are hollow and integrally connected, and a suction path that communicates from the upper portion of the movable shaft to the nozzle portion is formed. Component mounting equipment. The component mounting head is a multiple component mounting head having a plurality of the nozzle devices,
A plurality of the nozzle moving devices are provided corresponding to the respective nozzle devices,
14. The component mounting apparatus according to claim 11, wherein the stator of each of the nozzle moving devices is disposed in the housing of the component mounting head as an integrally disposed stator block.

Images