JP4822980B2 - Electronic component mounting substrate, electronic device, and method of manufacturing electronic device - Google Patents

Electronic component mounting substrate, electronic device, and method of manufacturing electronic device Download PDF

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JP4822980B2
JP4822980B2 JP2006219747A JP2006219747A JP4822980B2 JP 4822980 B2 JP4822980 B2 JP 4822980B2 JP 2006219747 A JP2006219747 A JP 2006219747A JP 2006219747 A JP2006219747 A JP 2006219747A JP 4822980 B2 JP4822980 B2 JP 4822980B2
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electronic component
hole
resin material
substrate
component mounting
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JP2008047617A (en
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裕子 朝倉
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Kyocera Corp
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Kyocera Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electronic component mounting substrate and an electronic device for rigidly joining a resin material to a base material without leaving a large amount of processing liquids such as a plating liquid or the like to a hole of the base material. <P>SOLUTION: The base material 1 provided includes a part 1a for mounting an electronic component 4 provided to one principal surface, and a hole to be filled with a resin material opening to the one principal surface. In the hole 2, a segment 2a connecting the last positions of each depth is substantially continuous in the perspective side view along one direction B orthogonally crossing the depthwise direction D. Moreover, the segment 2a is formed of any one or both regions of the region substantially extending only in the depthwise direction D as the depth increases, and the region extends gradually or step by step toward the front side in one direction B as the depth increases. In addition, the hole 2 includes a ceiling region 2b where a part of the internal surface crosses the upper direction inverted from the depthwise direction D. <P>COPYRIGHT: (C)2008,JPO&amp;INPIT

Description

本発明は、電子部品を搭載するための電子部品搭載用基板および電子装置、ならびに電子装置の製造方法に関する。   The present invention relates to an electronic component mounting board and an electronic device for mounting an electronic component, and a method for manufacturing the electronic device.

従来、発光ダイオード等の発光素子を収容するための発光素子収納用パッケージ(以下、パッケージともいう)としてセラミック製のパッケージが用いられている。従来のセラミック製のパッケージは、上面の中央部に発光素子を搭載するための導体層から成る搭載部を有し、搭載部およびその周辺から下面に導出される一対の配線層を有する略直方体状のセラミック製の基体と、基体の上面に接合され、中央部に発光素子を収容するための貫通孔を有する略四角枠状のセラミック製の枠体とから構成されている。   Conventionally, a ceramic package is used as a light emitting element storage package (hereinafter also referred to as a package) for accommodating a light emitting element such as a light emitting diode. A conventional ceramic package has a mounting portion made of a conductor layer for mounting a light emitting element in the center of the upper surface, and has a substantially rectangular parallelepiped shape having a pair of wiring layers led out from the mounting portion and its periphery to the lower surface. A ceramic base body, and a substantially square frame-shaped ceramic frame body which is bonded to the upper surface of the base body and has a through-hole for accommodating a light emitting element in the center.

そして、基体の上面に導出された一方の配線層に接続された搭載部に発光素子を、導電性接合材等を介して固着するとともに、発光素子の電極と他方の配線層とをボンディングワイヤ等を介して電気的に接続し、しかる後、枠体の貫通孔内に透明な樹脂材を充填して発光素子を封止することによって発光装置となる(例えば、下記の特許文献1参照)。   Then, the light emitting element is fixed to the mounting portion connected to one wiring layer led out on the upper surface of the substrate through a conductive bonding material or the like, and the electrode of the light emitting element and the other wiring layer are bonded to the bonding wire or the like. After that, a light emitting device is obtained by filling a transparent resin material in the through hole of the frame body and sealing the light emitting element (for example, see Patent Document 1 below).

このようなセラミック製のパッケージは、セラミックグリーンシート(以下、グリーンシートともいう)積層法により製作されており、具体的には以下のように製作される。例えば基体が酸化アルミニウム質焼結体からなる場合は、酸化アルミニウムを主成分とするセラミック粉末と有機バインダーを含む基体用のグリーンシートと枠体用のグリーンシートとを準備し、これらのグリーンシートに配線層を導出させるための貫通孔や発光素子を収容するための貫通孔を打ち抜いて形成する。   Such a ceramic package is manufactured by a ceramic green sheet (hereinafter also referred to as “green sheet”) lamination method, and specifically manufactured as follows. For example, in the case where the substrate is made of an aluminum oxide sintered body, a green sheet for a substrate and a green sheet for a frame containing ceramic powder mainly composed of aluminum oxide and an organic binder and a green sheet for a frame are prepared. A through hole for leading out the wiring layer and a through hole for accommodating the light emitting element are punched and formed.

次に、基体用のグリーンシートの上面から下面にかけて配線層形成用のタングステン(W),モリブデン(Mo)等の高融点金属粉末から成る導体ペーストを従来周知のスクリーン印刷法等で塗布し、枠体用のグリーンシートの貫通孔の内側面にメタライズ金属層形成用の導体ペーストをスクリーン印刷法等で塗布する。   Next, a conductor paste made of a refractory metal powder such as tungsten (W) or molybdenum (Mo) for forming a wiring layer is applied from the upper surface to the lower surface of the green sheet for the substrate by a conventionally known screen printing method or the like. A conductor paste for forming a metallized metal layer is applied to the inner surface of the through hole of the body green sheet by a screen printing method or the like.

基体用のグリーンシートと枠体用のグリーンシートとを上下に積層し、次にこれらを高温で焼成して焼結体と成す。   A green sheet for a substrate and a green sheet for a frame are stacked one above the other, and then fired at a high temperature to form a sintered body.

その後、配線層およびメタライズ金属層の露出表面に、ニッケル(Ni)や金(Au)、銀(Ag)等の金属から成るめっき金属層を無電解めっき法や電解めっき法により被着させることにより製作される。このようなめっき層は、例えば、電解めっき法にてめっき層を被着する際には、めっき液中に垂直に立設された電極板に平行になるようにパッケージを立て掛けて配設させ、電極板とパッケージに電流を印加させることにより被着させることができる。   After that, a plating metal layer made of a metal such as nickel (Ni), gold (Au), silver (Ag) or the like is applied to the exposed surfaces of the wiring layer and the metallized metal layer by an electroless plating method or an electrolytic plating method. Produced. For example, when depositing a plating layer by an electrolytic plating method, such a plating layer is arranged by leaning a package so as to be parallel to an electrode plate vertically installed in a plating solution, It can be deposited by applying current to the electrode plate and the package.

また、近年は、発光装置の高輝度化に伴い、発光素子の発する熱量が高いものとなってきており、樹脂材とパッケージとの被着強度を高いものとすることが求められている。そこで、樹脂材がパッケージから剥がれることを抑制するために、基体上面の開口部から深さ方向に向かうにつれて、この深さ方向に直交する一方向の前方に向かって延在した領域と、同様に深さ方向に直交し、且つ一方向の前方とは逆の後方に向かって延在した領域とを備える穴が形成された発光素子収納用パッケージが提案されている。
特開2004−228531号公報
In recent years, with the increase in luminance of light emitting devices, the amount of heat generated by the light emitting elements has increased, and it is required to increase the adhesion strength between the resin material and the package. Therefore, in order to suppress the resin material from being peeled off from the package, as it goes in the depth direction from the opening on the upper surface of the base body, similarly to the region extending forward in one direction orthogonal to the depth direction, There has been proposed a light emitting element storage package in which a hole including a region orthogonal to the depth direction and extending rearward opposite to the front in one direction is formed.
Japanese Patent Application Laid-Open No. 2004-228531

しかしながら、このような従来の発光素子収納用パッケージでは、パッケージを実質的に垂直に立て掛けると、穴は横方向に向けて開口されることとなり、穴内部に開口部分よりも下方に位置する領域が存在する。このため、立て掛けたパッケージをめっき液中に浸漬して配線層にめっき金属層を被着した後、パッケージをめっき液から引き上げた際、穴内部にめっき液が残留してしまうということが懸念される。仮に穴内部にめっき液が残留してしまうと、穴周辺の基体および配線層にめっき液によるしみが発生するという問題を誘発する。   However, in such a conventional light emitting element storage package, when the package is stood substantially vertically, the hole is opened in the lateral direction, and there is an area located below the opening portion inside the hole. Exists. For this reason, there is a concern that the plating solution may remain inside the hole when the package is pulled up from the plating solution after the standing package is immersed in the plating solution to deposit the plating metal layer on the wiring layer. The If the plating solution remains inside the hole, there is a problem that a stain due to the plating solution is generated on the substrate and the wiring layer around the hole.

そして基体および配線層にしみが発生すると、樹脂材と基体および配線層との被着強度が低下してしまい、樹脂材が基体や配線層から剥がれやすくなる。   When the base and the wiring layer are stained, the adhesion strength between the resin material and the base and the wiring layer is lowered, and the resin material is easily peeled off from the base and the wiring layer.

本発明は、上記問題点に鑑み完成されたものであり、その目的は、基体の穴部にめっき液等の処理液を大量に残存させることなく、樹脂材を基体に強固に接合させることができる電子部品搭載用基板および電子装置を提供することにある。   The present invention has been completed in view of the above problems, and its purpose is to firmly bond a resin material to a substrate without leaving a large amount of a processing solution such as a plating solution in the hole of the substrate. It is an object to provide an electronic component mounting substrate and an electronic device that can be used.

本発明の電子部品搭載用基板は、少なくとも一主面に電子部品を搭載するための搭載部を有し、前記電子部品に被着される樹脂材の一部を充填するための複数の穴部が開口した電子部品搭載用基板であって、前記穴部は、平面透視したとき、一方向において内部空間全体が、前記開口の最後方よりも前方に位置しており、前記内部空間の一部を、前記穴部の内面が前記一方向の前方側へ突出する凸部を形成することのないように前記開口の外周よりも外側へ延在させたことを特徴とする。   The electronic component mounting board of the present invention has a mounting portion for mounting the electronic component on at least one main surface, and a plurality of holes for filling a part of the resin material to be attached to the electronic component Is an electronic component mounting board having an opening, and when the hole is viewed in plan, the entire internal space is located in front of the rearmost end of the opening in one direction, and a part of the internal space Are extended outward from the outer periphery of the opening so that the inner surface of the hole does not form a convex portion protruding forward in the one direction.

また本発明の電子部品搭載用基板は、少なくとも一主面に設けられた電子部品の搭載部、及び前記一主面に開口する樹脂材充填用の複数の穴部を有する基体を備え、前記穴部は、深さ方向と直交する一方向に沿った側面透視において、各深さにおける最後方の位置を結んだ線分が実質的に連続しており、且つ、前記線分が、深さが深くなるに連れて、実質的に深さ方向のみに延在する領域と、前記線分が、深さが深くなるに連れて漸次或いは段階的に前記一方向の前方側に向かって延在する領域のいずれかのみ、或いは両方のみからなるとともに、前記穴部は、内面の一部が深さ方向と逆の上向き方向と交差し前記一方向の前記前方側に天井領域を有するように延在しているとともに、前記一方向の後方側に延在していないことを特徴とする。
The electronic component mounting board of the present invention includes a base having a mounting portion for electronic components provided on at least one main surface and a plurality of holes for filling a resin material opened on the one main surface. In the side perspective view along one direction orthogonal to the depth direction, the portion is substantially continuous with a line segment connecting the rearmost positions at each depth, and the line segment has a depth of A region extending substantially only in the depth direction as the depth increases, and the line segment extends gradually or stepwise toward the front side in the one direction as the depth increases. The hole includes only one or both of the regions, and the hole extends so that a part of the inner surface intersects the upward direction opposite to the depth direction and has a ceiling region on the front side in the one direction. together are characterized in that does not extend to the rear side of said one direction

尚、本発明において、一方向の前方側とは、前記深さ方向及び前記一方向に直交する方向に沿った仮想線により二分される領域の一方向の前方側をいう。   In the present invention, the front side in one direction refers to the front side in one direction of the region divided by a virtual line along the depth direction and the direction orthogonal to the one direction.

本発明の電子装置は、前記複数の穴部は、平面視で前記搭載部の周囲に分散して位置することを特徴とする。   The electronic device of the present invention is characterized in that the plurality of hole portions are distributed and positioned around the mounting portion in a plan view.

本発明の電子装置は、上述の電子部品搭載用基板と、該電子部品搭載用基板の搭載部に搭載される電子部品と、前記電子部品を覆うとともに、前記複数の穴部に充填される樹脂材とを備えることを特徴とする。   An electronic device according to the present invention includes the above-described electronic component mounting substrate, an electronic component mounted on the mounting portion of the electronic component mounting substrate, and a resin that covers the electronic component and fills the plurality of holes. And a material.

本発明の電子装置の製造方法は、上述の前記電子部品搭載用基板を準備し、該電子部品搭載用基板を、処理液に浸漬させる第1の工程、前記一方向が実質的に上向きになるように前記電子部品搭載用基板を配置した状態で、前記処理液から引き上げる第2の工程、前記搭載部に電子部品を搭載する第3の工程、前記樹脂材により前記電子部品を覆うとともに、前記樹脂材を前記穴部に充填する第4の工程を順次経ることを特徴とする。   The electronic device manufacturing method of the present invention is a first step in which the electronic component mounting substrate described above is prepared, and the electronic component mounting substrate is immersed in a processing solution, and the one direction is substantially upward. In the state where the electronic component mounting substrate is arranged as described above, the second step of pulling up from the processing liquid, the third step of mounting the electronic component on the mounting portion, covering the electronic component with the resin material, A fourth step of filling the hole with a resin material is sequentially performed.

本発明によれば、上記構成により、一方向が実質的に上向きになるように電子部品搭載用基板を配置した状態で、処理液から引き上げることにより、容易に穴内部の処理液を排出することができる電子部品搭載用基板を提供でき、基体および配線層にしみが発生する可能性が低減される。   According to the present invention, with the above configuration, the processing liquid inside the hole can be easily discharged by pulling up from the processing liquid in a state where the electronic component mounting substrate is arranged so that one direction is substantially upward. An electronic component mounting substrate that can be manufactured can be provided, and the possibility of stains occurring on the substrate and the wiring layer is reduced.

また、一方向の前方側に延在する領域を有するので、電子部品を被覆する樹脂材の一部を複数の穴部内に充填した際、穴部内に充填された樹脂材の一部が、該樹脂材の剥がれを抑制して良好に保持することができ、樹脂材と基体および配線層との被着強度を良好なものとすることができる。   In addition, since it has a region extending forward in one direction, when a part of the resin material covering the electronic component is filled in the plurality of holes, a part of the resin material filled in the hole is Peeling of the resin material can be suppressed and can be held well, and the adhesion strength between the resin material, the substrate and the wiring layer can be improved.

また、好ましくは、本発明の電子部品搭載用基板によれば、複数の穴部は、平面視で搭載部の周囲に分散して位置することから、樹脂材を複数の穴部により分散して保持することにより、樹脂材を電子部品の周囲において良好に保持することができ、電子部品が搭載された電子装置を信頼性に優れたものとすることができる。   Preferably, according to the electronic component mounting substrate of the present invention, the plurality of hole portions are distributed and positioned around the mounting portion in a plan view, so that the resin material is dispersed by the plurality of hole portions. By holding, the resin material can be satisfactorily held around the electronic component, and the electronic device on which the electronic component is mounted can be made highly reliable.

本発明の電子装置は、本発明の電子部品搭載用基板と、電子部品搭載用基板の搭載部に搭載される電子部品と、電子部品を覆うとともに、穴部に充填される樹脂材とを備えることから、電子部品搭載用基板を基体および配線層にしみ等が発生する可能性を低減したものとして形成しているので、樹脂材は電子部品搭載用基板に良好に被着して樹脂材が電子部品搭載用基板から剥がれる可能性を低減することができ、信頼性に優れた電子装置となる。   An electronic device of the present invention includes the electronic component mounting substrate of the present invention, an electronic component mounted on a mounting portion of the electronic component mounting substrate, and a resin material that covers the electronic component and is filled in the hole. Therefore, since the electronic component mounting substrate is formed with a reduced possibility of occurrence of stains on the base and the wiring layer, the resin material adheres well to the electronic component mounting substrate and the resin material The possibility of peeling off from the electronic component mounting substrate can be reduced, and the electronic device is excellent in reliability.

また、本発明の電子装置によれば、電子部品が発光素子である。このことから、樹脂材を電子部品搭載用基板に良好に被着させているので、電子部品として高い発熱を有する発光素子を用いても、電子装置を信頼性に優れた発光装置とすることができる。   According to the electronic device of the present invention, the electronic component is a light emitting element. Therefore, since the resin material is satisfactorily adhered to the electronic component mounting substrate, even if a light emitting element having high heat generation is used as the electronic component, the electronic device can be made a highly reliable light emitting device. it can.

本発明の電子装置の製造方法によれば、本発明の電子部品搭載用基板を準備し、電子部品搭載用基板を、処理液に浸漬させる第1の工程、一方向が上向きになるように前記電子部品搭載用基板を配置した状態で、処理液から引き上げる第2の工程、搭載部に電子部品を搭載する第3の工程、樹脂材が電子部品を覆うとともに、穴部に充填する第4の工程を順次経ることから、電子部品搭載用基板に処理液によるしみの発生を抑制できるので、樹脂材が電子部品搭載用基板から剥がれる可能性を低減させることができ、信頼性に優れた電子装置を製作することができる。   According to the electronic device manufacturing method of the present invention, the electronic component mounting substrate of the present invention is prepared, the first step of immersing the electronic component mounting substrate in the treatment liquid, the one direction is directed upward In a state where the electronic component mounting substrate is arranged, a second step of pulling up from the processing liquid, a third step of mounting the electronic component on the mounting portion, a fourth step of filling the hole with the resin material covering the electronic component Since the process is performed sequentially, the occurrence of stains due to the processing liquid on the electronic component mounting substrate can be suppressed, so that the possibility that the resin material is peeled off from the electronic component mounting substrate can be reduced, and the electronic device has excellent reliability. Can be produced.

本発明の実施形態を以下に詳細に説明する。図1は、本発明のパッケージについて実施の形態の一例を示す平面図であり、図2は、図1の電子部品搭載用基板のA−A’線における実施の形態の一例を示す断面図である。これらの図において、1は基体、1aは搭載部、2は穴部、3は配線層、4は電子部品である。   Embodiments of the present invention are described in detail below. FIG. 1 is a plan view showing an example of the embodiment of the package of the present invention, and FIG. 2 is a cross-sectional view showing an example of the embodiment along the line AA ′ of the electronic component mounting board of FIG. is there. In these drawings, 1 is a base, 1a is a mounting portion, 2 is a hole, 3 is a wiring layer, and 4 is an electronic component.

本発明の電子部品搭載用基板は、一主面に設けられた電子部品4の搭載部1a、及び一主面に開口する樹脂材充填用の複数の穴部2を有する基体1を備え、穴部2は、深さ方向Dと直交する一方向Bに沿った側面透視において、各深さにおける最後方の位置を結んだ線分2aが実質的に連続しており、且つ、線分2aが、深さが深くなるに連れて、実質的に深さ方向Dのみに延在する領域と、線分2aが、深さが深くなるに連れて漸次或いは段階的に一方向Bの前方側に延在する領域とのいずれかのみ、或いは両方のみからなるとともに、前記穴部2は、内面の一部が深さ方向Dと逆の上向き方向と交差し一方向Bの前方側に天井領域2bを有するように延在しているとともに、一方向Bの後方側に延在していないAn electronic component mounting board according to the present invention includes a base 1 having a mounting portion 1a for an electronic component 4 provided on one main surface and a plurality of hole portions 2 for filling a resin material opened on one main surface. In the side see-through along one direction B orthogonal to the depth direction D, the part 2 is substantially continuous with a line segment 2a connecting the rearmost positions at each depth, and the line segment 2a is The region extending substantially only in the depth direction D as the depth increases and the line segment 2a gradually or stepwise in front of the one direction B as the depth increases. The hole 2 includes only one or both of the extending regions, and the hole 2 has a part of the inner surface that intersects the upward direction opposite to the depth direction D, and the ceiling region 2b on the front side in one direction B. And does not extend to the rear side in one direction B.

尚、本発明において、一方向Bの前方側とは、深さ方向D及び一方向Bに直交する方向に沿った仮想線Lにより二分される領域の一方向Bの前方側をいう。   In the present invention, the front side in one direction B refers to the front side in one direction B in a region divided by a virtual line L along a direction perpendicular to the depth direction D and the one direction B.

本発明に適用可能な基体1は、セラミックスや樹脂材からなり、例えば、酸化アルミニウム質焼結体、ムライト質焼結体、窒化アルミニウム質焼結体、炭化珪素質焼結体等の電気絶縁材料から成る。基体1が、酸化アルミニウム質焼結体から成る場合には、アルミナ(Al)、シリカ(SiO)、カルシア(CaO)、マグネシア(MgO)等の原料粉末に適当な有機溶剤、溶媒を添加混合して泥漿状となすとともにこれを従来周知のドクターブレード法やカレンダーロール法等を採用し、シート状に成形することによってセラミックグリーンシート(セラミック生シート)を得、次にセラミック生シートに適当な打ち抜き加工を施すとともに複数枚積層し、高温(約1500〜1800℃)で焼成することによって製作される。 The substrate 1 applicable to the present invention is made of ceramics or a resin material. For example, an electrical insulating material such as an aluminum oxide sintered body, a mullite sintered body, an aluminum nitride sintered body, or a silicon carbide sintered body. Consists of. When the substrate 1 is made of an aluminum oxide sintered body, an organic solvent or solvent suitable for raw material powders such as alumina (Al 2 O 3 ), silica (SiO 2 ), calcia (CaO), magnesia (MgO), etc. Is added to and mixed to make a mud-like shape, and a ceramic green sheet (ceramic green sheet) is obtained by forming the sheet into a sheet shape using a conventionally known doctor blade method or calendar roll method. A suitable punching process is performed, and a plurality of sheets are laminated and fired at a high temperature (about 1500 to 1800 ° C.).

基体1は、少なくとも一主面に電子部品4を搭載するための搭載部1aと、一主面に開口する複数の穴部2とを備えており、搭載部1a上またはその周囲から基体1の他主面または側面等に導出する配線層3が形成されている。   The base body 1 includes a mounting portion 1a for mounting the electronic component 4 on at least one main surface and a plurality of holes 2 opened on one main surface, and the base 1 is mounted on or around the mounting portion 1a. A wiring layer 3 leading to the other main surface or the side surface is formed.

穴部2内は、電子部品4を搭載部1a上に搭載した後に、樹脂材が充填され、樹脂材を固定するために用いられる。このような穴部2は、基体1用のセラミックグリーンシートのいくつかに穴部2用の貫通孔を金型やパンチングによる打ち抜き方法またはレーザ加工等の加工方法により形成しておき、他のセラミックグリーンシートと積層することにより形成される。   The inside of the hole 2 is filled with a resin material after the electronic component 4 is mounted on the mounting portion 1a and used for fixing the resin material. Such holes 2 are formed by forming through holes for holes 2 in some of the ceramic green sheets for the substrate 1 by a punching method using a die or punching or a processing method such as laser processing. It is formed by laminating with a green sheet.

配線層3は、タングステンやモリブデン、銅、銀等の金属粉末メタライズから成り、電子部品4を外部に電気的に接続するための導電路である。そして、配線層3は、基体1用のセラミックグリーンシートにスクリーン印刷法等の印刷手段により配線層3用のメタライズペーストを印刷塗布し、基体1用のセラミックグリーンシートとともに焼成することによって所定の領域に被着形成される。配線層3用のメタライズペーストは、主成分の金属粉末に有機バインダー、有機溶剤、必要に応じて分散剤等を加えてボールミル、三本ロールミル、プラネタリーミキサー等の混練手段により混合および混練することで製作される。セラミックグリーンシートの焼結挙動に合わせたり、焼結後の積層基板との接合強度を高めたりするためにガラスやセラミックスの粉末を添加しても良い。   The wiring layer 3 is made of metal powder metallization such as tungsten, molybdenum, copper, or silver, and is a conductive path for electrically connecting the electronic component 4 to the outside. The wiring layer 3 is formed by applying a metallized paste for the wiring layer 3 to the ceramic green sheet for the substrate 1 by a printing means such as a screen printing method, and firing it together with the ceramic green sheet for the substrate 1. Is formed on the substrate. The metallized paste for the wiring layer 3 is mixed and kneaded by kneading means such as a ball mill, a three-roll mill, a planetary mixer, etc., with an organic binder, an organic solvent, and a dispersant as necessary added to the main component metal powder. Will be produced. Glass or ceramic powder may be added to match the sintering behavior of the ceramic green sheet or to increase the bonding strength with the laminated substrate after sintering.

また、基体1の表面および内部に形成された配線層3は、必要に応じて基体1を貫通する貫通導体により電気的に接続されている。このような貫通導体は、配線層3を形成するためのメタライズペーストの印刷塗布に先立って基体1用のセラミックグリーンシートに金型やパンチングによる打ち抜き方法またはレーザ加工等の加工方法により貫通導体用の貫通孔を形成し、この貫通導体用の貫通孔に貫通導体用のメタライズペーストをスクリーン印刷法等の印刷手段により充填しておくとともにこれを基体1用のセラミックグリーンシートとともに焼成することによって各領域に形成される。貫通導体用のメタライズペーストは配線層3用のメタライズペーストと同様にして作製されるが、有機バインダーや有機溶剤の量により充填に適した粘度に調製される。   Further, the wiring layer 3 formed on the surface and inside of the base body 1 is electrically connected by a through conductor penetrating the base body 1 as necessary. Such a through conductor is formed for the through conductor by a punching method using a die or punching or a processing method such as laser processing on a ceramic green sheet for the substrate 1 prior to the printing application of the metallized paste for forming the wiring layer 3. Each region is formed by forming a through hole, filling the through hole for the through conductor with a metallized paste for the through conductor by a printing means such as a screen printing method, and firing this together with the ceramic green sheet for the substrate 1. Formed. The metallized paste for the through conductor is prepared in the same manner as the metallized paste for the wiring layer 3, but is prepared to have a viscosity suitable for filling depending on the amount of the organic binder or the organic solvent.

また、配線層3の基体1の外部表面に露出する部分には、ニッケル(Ni)、金(Au)、銀(Ag)等の耐蝕性に優れる金属を1〜20μm程度の厚みで被着させておくのが良く、配線層3が酸化腐食するのを有効に防止できるとともに、配線層3と電子部品4との固着または配線導体3とボンディングワイヤ5や半田バンプ等の電気的接続、配線層3と外部電気回路板の配線導体との接合を強固なものとすることができる。従って、配線層3の露出する表面には、厚さ1〜10μm程度のNiめっき層と厚さ0.1〜5μm程度のAuめっき層またはAgめっき層とが、電解めっき法や無電解めっき法により順次被着されていることがより好ましい。   Further, a portion of the wiring layer 3 exposed on the outer surface of the substrate 1 is coated with a metal having excellent corrosion resistance such as nickel (Ni), gold (Au), silver (Ag), etc. with a thickness of about 1 to 20 μm. The wiring layer 3 can be effectively prevented from being oxidatively corroded, and the wiring layer 3 and the electronic component 4 can be fixed or the wiring conductor 3 can be electrically connected to the bonding wire 5 or the solder bump. 3 and the wiring conductor of the external electric circuit board can be strengthened. Therefore, on the exposed surface of the wiring layer 3, an Ni plating layer having a thickness of about 1 to 10 μm and an Au plating layer or an Ag plating layer having a thickness of about 0.1 to 5 μm are electroplating or electroless plating. It is more preferable that the layers are sequentially deposited.

そして、本発明において、少なくとも一主面に設けられた電子部品4の搭載部1a、及び一主面に開口する樹脂材充填用の複数の穴部2を有する基体1を備え、穴部2は、深さ方向Dと直交する一方向に沿った側面透視において、各深さにおける最後方の位置を結んだ線分2aが実質的に連続しており、且つ、線分2aが、深さが深くなるに連れて、実質的に深さ方向Dのみに延在する領域からなる。これにより、基体1が処理液に浸漬される工程において、深さ方向Dと直交する一方向Bが上向きとなった状態で、基体1を処理液から引き上げたときに、穴部2内の処理液が、穴部2の線分2aに沿って実質的に全て流れ出る構造を有することとなる。   And in this invention, it is equipped with the base | substrate 1 which has the mounting part 1a of the electronic component 4 provided in at least one main surface, and the several hole part 2 for resin material filling which opens in one main surface, In a side perspective view along one direction orthogonal to the depth direction D, the line segment 2a connecting the rearmost position at each depth is substantially continuous, and the line segment 2a has a depth of As the depth increases, the region extends substantially only in the depth direction D. Thereby, in the process of immersing the base body 1 in the processing liquid, when the base body 1 is pulled up from the processing liquid in a state where one direction B orthogonal to the depth direction D is upward, the processing in the hole 2 is performed. The liquid has a structure in which substantially all of the liquid flows out along the line segment 2 a of the hole 2.

更に、穴部2は、内面の一部が深さ方向Dと逆の上向き方向と交差する天井領域2bを有する。これにより、穴部2内に樹脂材が充填された場合に、充填された樹脂材の一主面側の表面が、穴部2の内面に当接することなる。そして、樹脂材が天井領域2bに当接することにより、樹脂材が剥がれにくくなる。   Furthermore, the hole 2 has a ceiling region 2b in which a part of the inner surface intersects the upward direction opposite to the depth direction D. Thereby, when the resin material is filled in the hole 2, the surface on the one main surface side of the filled resin material comes into contact with the inner surface of the hole 2. And when a resin material contact | abuts on the ceiling area | region 2b, it becomes difficult to peel a resin material.

なお、図1においては、基体1の内部における穴部2の状態を分かりやすく説明するために、穴部2が、基体1の内部において延在し、且つ一主面側から隠れている部分を破線にて示している。また、他の平面図においても、基体1の内部において、穴部2が基体1の内部において一方向Bの前方側に延在し、且つ一主面側から隠れている部分を同様に破線にて示すこととする。複数の穴部2は、穴部2の開口部よりも基体1の内部にて広がるように延在する領域を有しており、基体1を上述の一方向Bが上向きになるように配置した際、穴部2が、深さ方向Dと直交する一方向に沿った側面透視において、各深さにおける最後方の位置を結んだ線分2aが穴部2の他の領域よりも下方に位置することとなる。なお、複数の穴部2のそれぞれにおいて、線分2aが他の領域よりも下方に位置している。図3は、図1および図2に示すような基体1をめっき槽6中のめっき液6aから取り出したことを模式的に示す断面図であり、図3において、破線の示すBの方向が一方向であることを示している。基体1をめっき液6aから取り出す際、複数の穴部2内の一方向B側に残存しためっき液6aが、実質的に穴部の線分2aに沿って良好に排出される。これにより、複数の穴部2内部にめっき液6aが残留することを低減でき、基体1および配線層3にしみが発生する可能性を低減することができる。尚、めっき液6a以外の他の処理液に関しても、同様に本発明の作用効果を奏することは云うまでもない。   In FIG. 1, in order to explain the state of the hole 2 inside the base body 1 in an easy-to-understand manner, a portion where the hole part 2 extends inside the base body 1 and is hidden from one main surface side is shown. It is indicated by a broken line. Also in other plan views, the portion where the hole 2 extends forward in one direction B inside the base body 1 and is hidden from one main surface side is similarly broken in the base body 1. Will be shown. The plurality of hole portions 2 have a region extending so as to expand inside the base body 1 more than the opening portion of the hole portion 2, and the base body 1 is arranged so that the one direction B is upward. When the hole 2 is seen through the side view along one direction orthogonal to the depth direction D, the line segment 2a connecting the rearmost position at each depth is located below the other region of the hole 2. Will be. In each of the plurality of hole portions 2, the line segment 2a is positioned below the other region. FIG. 3 is a cross-sectional view schematically showing that the substrate 1 as shown in FIGS. 1 and 2 is taken out from the plating solution 6a in the plating tank 6. In FIG. Indicates that the direction. When the substrate 1 is taken out from the plating solution 6a, the plating solution 6a remaining on the one-direction B side in the plurality of hole portions 2 is effectively discharged substantially along the line segment 2a of the hole portions. Thereby, it can reduce that the plating solution 6a remains in the some hole part 2, and it can reduce possibility that the base | substrate 1 and the wiring layer 3 will generate | occur | produce a stain. In addition, it cannot be overemphasized that there exists an effect of this invention similarly about process liquids other than the plating solution 6a.

また、一方向Bの前方側に向かって延在する領域を有するので、樹脂材を、電子部品4を覆うように塗布するとともに複数の穴部2内に充填した際、穴部2内に充填された樹脂材の一主面側の表面が、穴部2の内面の天井領域2bに当接することとなり、樹脂材の剥がれを抑制して良好に保持することができ、樹脂材を剥がれにくくすることができる。   Moreover, since it has the area | region extended toward the front side of one direction B, when resin material is applied so that the electronic component 4 may be covered and it fills in the some hole part 2, it fills in the hole part 2 The surface on the one principal surface side of the resin material thus brought into contact with the ceiling region 2b on the inner surface of the hole 2 can suppress the resin material from peeling off and can be held well, making the resin material difficult to peel off. be able to.

このような穴部2、例えば、2枚の穴部2用のセラミックグリーンシートを準備し、これらのセラミックグリーンシートに、パンチングによる打ち抜き方法またはレーザ加工等の加工方法により口径の異なる貫通孔を形成し、口径の小さな貫通孔の一方側面と口径の大きな貫通孔の一方側面とがともに線分2aを形成するように、セラミックグリーンシート同士を積層することにより容易に形成することができる。なお、穴部2は、3枚以上のセラミックグリーンシートから形成しておいても構わない。   Prepare ceramic green sheets for such holes 2, for example, two holes 2, and form through-holes with different diameters in these ceramic green sheets by punching by punching or processing methods such as laser processing And it can form easily by laminating | stacking ceramic green sheets so that the one side surface of a through-hole with a small diameter and the one side surface of a through-hole with a large diameter may form the line segment 2a. The hole 2 may be formed from three or more ceramic green sheets.

穴部2の開口部分の幅は、樹脂材の種類や穴部2の深さ等により異なるが、樹脂材を複数の穴部2内に充填しやすくするため、穴部2の開口部分の幅は0.2mm以上に形成しておくことが好ましい。   The width of the opening portion of the hole portion 2 varies depending on the type of the resin material, the depth of the hole portion 2, and the like, but the width of the opening portion of the hole portion 2 is easy to fill the resin material into the plurality of hole portions 2. Is preferably 0.2 mm or more.

また、穴部2は、円形状、四角形状、三角形状等の多角形状に形成しておけば良く、上述以外の形状であっても構わない。穴部2は、樹脂材を穴部2内に良好に充填しやすくするため、円形状、長円形状、楕円形状等の角部を有しない形状であることが好ましい。   Moreover, the hole part 2 should just be formed in polygonal shapes, such as circular shape, square shape, and triangular shape, and may be shapes other than the above-mentioned. The hole 2 is preferably a shape having no corners such as a circular shape, an oval shape, or an elliptical shape so that the resin material can be easily filled into the hole portion 2 easily.

また、複数の穴部2同士の比較において、少なくとも一つの穴部2の開口部分の幅が他の穴部2の開口部分の幅とは異なるようにしていても構わない。例えば、基体1が矩形状であり、基体1の一主面の中央部に電子部品4の搭載部1aと、搭載部1aの周囲に4つの穴部2が分散して配設されている場合、穴部2のうちの1つの開口部分の幅を、他の3つの開口部分の幅とは異なるようにしておけば良い。具体的には、例えば、基体1が5.0mm×5.0mmの矩形状であり、基体1の一主面側において角部の対角線上の角部近傍に穴部2を4つ分散して配設する場合、穴部2のうちの1つの開口部分をΦ1.0mmの円形状とし、他の3つの穴部2の開口部分をΦ0.5mmの円形状とすれば良い。これにより、基体1の一主面目視した際、穴部2の開口部分の大きさの違いにより基体1の方向性等を良好に認識することができ、電子部品4を搭載部1aに搭載する際や基体1を外部回路基板に搭載する際に良好に行いやすくなる。また、複数の穴部2の少なくとも一つの開口部分における形状を他の穴部2の開口部分における形状と異なるようにしておいても良い。   In comparison between the plurality of hole portions 2, the width of the opening portion of at least one hole portion 2 may be different from the width of the opening portion of the other hole portion 2. For example, when the base body 1 has a rectangular shape, the mounting portion 1a of the electronic component 4 is disposed at the center of one main surface of the base body 1, and the four hole portions 2 are distributed around the mounting portion 1a. The width of one of the holes 2 may be different from the width of the other three openings. Specifically, for example, the base 1 has a rectangular shape of 5.0 mm × 5.0 mm, and four holes 2 are dispersed in the vicinity of the corners on the diagonal of the corners on one main surface side of the base 1. In the case of arrangement, one of the hole portions 2 may have a circular shape of Φ1.0 mm, and the other three hole portions 2 may have a circular shape of Φ0.5 mm. Thereby, when one main surface of the base body 1 is observed, the directionality of the base body 1 can be well recognized by the difference in the size of the opening portion of the hole portion 2, and the electronic component 4 is mounted on the mounting portion 1a. In this case, it is easy to perform well when mounting the substrate 1 on the external circuit board. Further, the shape of at least one opening portion of the plurality of hole portions 2 may be different from the shape of the opening portions of the other hole portions 2.

次に、本発明の他の実施例を、図4を基に説明する。本発明の他の実施例にかかる電子部品搭載用基板においては、少なくとも一主面に設けられた電子部品4の搭載部1a、及び一主面に開口する樹脂材充填用の複数の穴部2を有する基体1を備え、穴部2は、深さ方向Dと直交する一方向に沿った側面透視において、各深さにおける最後方の位置を結んだ線分2cが実質的に連続しており、且つ、線分2cが、深さが深くなるに連れて、実質的に深さ方向Dのみに延在する領域と、線分2cが、深さが深くなるに連れて漸次或いは段階的に一方向Bの前方側に向かって延在する領域との両方のみからなる。   Next, another embodiment of the present invention will be described with reference to FIG. In an electronic component mounting substrate according to another embodiment of the present invention, at least a mounting portion 1a of an electronic component 4 provided on one main surface and a plurality of hole portions 2 for filling a resin material opened on one main surface. The hole 2 has a substantially continuous line segment 2c connecting the rearmost positions at each depth in a side perspective view along one direction orthogonal to the depth direction D. In addition, a region where the line segment 2c extends substantially only in the depth direction D as the depth increases, and a line segment 2c gradually or stepwise as the depth increases. It consists only of both the area | region extended toward the front side of the one direction B.

これにより、穴部2が処理液に浸漬される工程において、深さ方向Dと直交する一方向Bが上向きとなった状態で、基体1を処理液から引き上げたときに、穴部2内の処理液が、穴部2の線分2cに沿って実質的に全て流れ出る構造を有することとなる。   Thus, in the step of immersing the hole 2 in the processing liquid, when the base body 1 is pulled up from the processing liquid in a state where one direction B orthogonal to the depth direction D is upward, The processing liquid has a structure in which substantially all flows out along the line segment 2 c of the hole 2.

更に、穴部2は、内面の一部が深さ方向Dと逆の上向き方向と交差する天井領域2dを有する。これにより、穴部2内に樹脂材が充填された場合に、充填された樹脂材の一主面側の表面が、穴部2の内面の天井領域2dに当接することなる。そして、樹脂材が天井領域2dに当接することにより、樹脂材が剥がれにくくなる。   Furthermore, the hole 2 has a ceiling region 2 d where a part of the inner surface intersects the upward direction opposite to the depth direction D. Thus, when the hole 2 is filled with the resin material, the surface on the one main surface side of the filled resin material comes into contact with the ceiling region 2 d of the inner surface of the hole 2. And since a resin material contact | abuts on the ceiling area | region 2d, it becomes difficult to peel a resin material.

図4においては、線分2cが漸次深さ方向Dと直交する一方向Bの前方側に延在するように、線分2cを穴部2の開口側から底部側に向かって傾斜させており、図5においては、線分2cが段階的に深さ方向Dと直交する一方向B側に延在するように、線分2cに段差を形成している。複数の穴部2は、図1〜図2と同様に、穴部2の開口部よりも基体1の内部にて一方向B側に延在する領域を有しており、複数の穴部2における線分2cを含む側部と同じ位置か、もしくは線分2cを含む側部よりも一方向側に位置することを示している。   In FIG. 4, the line segment 2 c is inclined from the opening side of the hole portion 2 toward the bottom side so that the line segment 2 c gradually extends to the front side in one direction B orthogonal to the depth direction D. In FIG. 5, a step is formed in the line segment 2c so that the line segment 2c extends stepwise in the direction B perpendicular to the depth direction D. Similar to FIGS. 1 to 2, the plurality of hole portions 2 have a region extending to the one direction B side inside the base body 1 from the opening portion of the hole portion 2. It is shown that it is located in the same position as the side part including the line segment 2c or in one direction side from the side part including the line segment 2c.

すなわち、基体1を上述した一方向Bが実質的に上向きとなるように配置した際、穴部2の他の側部が線分2cを含む側部と同位置か、もしくは線分2cを含む側部よりも上方に位置することとなり、穴部2は、開口部分における線分2cを含む側部よりも下方に位置する領域を有しないこととなる。この構成により、基体1を上述した一方向が上向きとなるようにしてめっき液から取り出した場合、複数の穴部2内に流入しためっき液は、線分2cを含む側部よりも下方にめっき液が残留しやすい領域がないことから、めっき液を良好に排出することができる。これにより、複数の穴部2内部にめっき液が残留する可能性を低減することができ、基体1および配線層3にしみが発生する可能性を低減することができる。   That is, when the base body 1 is disposed so that the above-described one direction B is substantially upward, the other side portion of the hole portion 2 is placed with the side portion including the line segment 2c, or includes the line segment 2c. It will be located above the side part, and the hole part 2 will not have the area | region located below rather than the side part containing the line segment 2c in an opening part. With this configuration, when the substrate 1 is taken out from the plating solution so that the above-described one direction is upward, the plating solution that has flowed into the plurality of holes 2 is plated below the side portion including the line segment 2c. Since there is no region where the solution tends to remain, the plating solution can be discharged well. Thereby, possibility that a plating solution will remain inside a plurality of hole parts 2 can be reduced, and possibility that a base 1 and wiring layer 3 may generate a stain can be reduced.

また、基体1および配線層3にしみが発生する可能性が低減されるとともに、一方向B側に向かって延在する領域を有するので、電子部品上および複数の穴部2内に樹脂材を充填した際、穴部2内に充填された樹脂材の剥がれを抑制して良好に保持することができ、樹脂材と基体1および配線層3との被着強度を良好なものとすることができる。   In addition, the possibility of stains occurring on the base body 1 and the wiring layer 3 is reduced, and since there is a region extending toward the one direction B, the resin material is placed on the electronic component and in the plurality of holes 2. When filled, the peeling of the resin material filled in the hole 2 can be suppressed and held well, and the adhesion strength between the resin material, the substrate 1 and the wiring layer 3 can be made good. it can.

また、図4、図5のような場合において、基体1を、上述した一方向Bが実質的に上向きとなるようにして配置した際、穴部2の線分2cが底部(深さ方向Dが鉛直方向に一致するように、基体1を載置した場合の底部をいう。)側よりも下方に位置することとなり、より良好にめっき液を穴部2から排出しやすくなる。   4 and 5, when the base body 1 is arranged so that the above-described one direction B is substantially upward, the line segment 2c of the hole 2 is the bottom (depth direction D). Means the bottom when the substrate 1 is placed so that it coincides with the vertical direction.) It is located below the side, and the plating solution can be more easily discharged from the hole 2 better.

図4のような穴部2は、パンチングによる打ち抜き方法またはレーザ加工等の加工方法により2枚のセラミックグリーンシートのそれぞれに、積層後に線分2cを含む側部となる部位が斜面を形成するように貫通孔を設けるとともに、積層後の貫通孔の斜面同士が、連続的な段差のない斜面となるように積層される。このとき、下側のセラミックグリーンシートの貫通孔の口径が、上側のセラミックグリーンシートの貫通孔の口径と同じかそれよりも大きくなるように形成される。なお、穴部2は、3枚以上のセラミックグリーンシートから形成しておいても構わない。   The hole 2 as shown in FIG. 4 is formed such that a portion that becomes a side portion including the line segment 2c is formed on each of the two ceramic green sheets by a punching method by punching or a processing method such as laser processing. In addition, the through holes are stacked so that the slopes of the stacked through holes are slopes without a continuous step. At this time, the diameter of the through hole of the lower ceramic green sheet is formed to be the same as or larger than the diameter of the through hole of the upper ceramic green sheet. The hole 2 may be formed from three or more ceramic green sheets.

また、図5のような穴部2は、例えば、2枚の穴部2用のセラミックグリーンシートに、パンチングによる打ち抜き方法またはレーザ加工等の加工方法により貫通孔を形成し、それぞれの貫通孔の側面の位置を深さ方向Dに向かうにつれて一方向B側にずらして、線分2cを含む段差を備えた側部が構成されるように、2枚のセラミックグリーンシートを積層することにより形成することができる。なお、穴部2は、3枚以上のセラミックグリーンシートから形成しておいても構わない。このように予め貫通孔の位置をずらしておくことにより、2枚以上のセラミックグリーンシートを積層して穴部2を形成する際、これらのセラミックグリーンシートに積層ずれが発生したとしても、線分2cを含む側部を下方として配置した際に、穴部2には、開口部分における線分2cよりも下方に位置する領域が形成されにくくすることができる。   In addition, the hole 2 as shown in FIG. 5 is formed, for example, by forming through holes in a ceramic green sheet for two holes 2 by a punching method by punching or a processing method such as laser processing. Formed by laminating two ceramic green sheets so that the side portion is shifted to one direction B side in the depth direction D and a side portion having a step including the line segment 2c is formed. be able to. The hole 2 may be formed from three or more ceramic green sheets. In this way, by shifting the positions of the through holes in advance, when the hole 2 is formed by stacking two or more ceramic green sheets, even if a stacking shift occurs in these ceramic green sheets, the line segment When the side part including 2c is arranged as a lower side, it is possible to make it difficult to form a region in the hole part 2 below the line segment 2c in the opening part.

また、図6〜図9に示すように、複数の穴部2は、平面視で搭載部1aの周囲に分散して位置することが好ましい。この構成により、樹脂材を複数の穴部2により分散して保持することにより、電子部品の周囲において樹脂材を複数の穴部2により良好に保持することができ、電子部品4が搭載された電子装置を信頼性に優れたものとすることができる。   Moreover, as shown in FIGS. 6-9, it is preferable that the some hole part 2 is disperse | distributed and located around the mounting part 1a by planar view. With this configuration, the resin material is dispersed and held by the plurality of hole portions 2, so that the resin material can be better held by the plurality of hole portions 2 around the electronic component, and the electronic component 4 is mounted. The electronic device can have excellent reliability.

また、基体1は平板形状に限るものではなく、図10に示すように、基体1の少なくとも一主面に電子部品4が収納される凹部7を形成しておいても構わない。これにより、凹部7内(凹部7の底面上)に電子部品4を良好に収容することができるようになる。このような凹部7は、基体1用のセラミックグリーンシートのいくつかに凹部7用の貫通孔を金型やパンチングによる打ち抜き方法またはレーザ加工等の加工方法により形成しておき、他のセラミックグリーンシートと積層することにより形成することができる。なお、基体1が一主面に凹部7を有する場合、穴部2は、凹部7の底面に形成しても構わない。   Further, the substrate 1 is not limited to a flat plate shape, and as shown in FIG. 10, a recess 7 in which the electronic component 4 is accommodated may be formed on at least one main surface of the substrate 1. Thereby, the electronic component 4 can be satisfactorily accommodated in the recess 7 (on the bottom surface of the recess 7). Such recesses 7 are formed by forming through holes for the recesses 7 in some of the ceramic green sheets for the substrate 1 by a punching method using a die or punching, or a processing method such as laser processing. And can be formed by stacking. When the base body 1 has the recess 7 on one main surface, the hole 2 may be formed on the bottom surface of the recess 7.

また、図11に示すように、セラミックスや樹脂材、金属等からなる枠体8を、ガラス、樹脂材、ロウ材等の接着剤により板状体9上に接合することにより、凹部7を形成しても構わない。この場合、枠体8と板状体9とからなる構造体が基体1を構成し、枠体8の一主面に上述のような穴部2を形成しておいても構わない。なお、板状体9は、平板形状に限るものではなく、凹部7を備えるものであっても良い。また、穴部2は、凹部7の底面や板状体9の一主面に形成しても構わない。   In addition, as shown in FIG. 11, a recess 8 is formed by bonding a frame 8 made of ceramics, resin, metal, or the like onto a plate-like body 9 with an adhesive such as glass, resin, or brazing material. It doesn't matter. In this case, a structure including the frame body 8 and the plate-like body 9 may constitute the base body 1 and the hole 2 as described above may be formed on one main surface of the frame body 8. In addition, the plate-like body 9 is not limited to a flat plate shape, and may include a concave portion 7. The hole 2 may be formed on the bottom surface of the recess 7 or one main surface of the plate-like body 9.

また、本発明の電子部品搭載用基板は、めっき液、洗浄液等の処理液に浸漬する際においても有効に利用することができる。すなわち、上述の電子部品搭載用基板を準備し、電子部品搭載用基板を処理液に浸漬させる第1の工程、一方向が上向きになるように電子部品搭載用基板を配置した状態で、処理液から引き上げる第2の工程、搭載部1aに電子部品4を搭載する第3の工程、樹脂材を、電子部品4を覆うとともに、穴部2に充填する第4の工程を順次経るものことにより、電子装置が形成される。なお、第2の工程において、処理液に浸漬する前に予め電子部品搭載用基板の一方向Bが上向きとなるように電子部品搭載用基板を配置しておいても良いし、処理液から引き上げる際に、一方向Bが上向きとなるように電子部品搭載用基板を配置しても構わない。この構成により、電子部品搭載用基板に処理液によるしみの発生を抑制できるので、樹脂材が電子部品搭載用基板から剥がれる可能性を低減させることができ、信頼性に優れた電子装置を製作することができる。   In addition, the electronic component mounting substrate of the present invention can be effectively used when immersed in a processing solution such as a plating solution or a cleaning solution. That is, in the first step of preparing the above-described electronic component mounting substrate and immersing the electronic component mounting substrate in the processing liquid, in a state where the electronic component mounting substrate is arranged so that one direction is upward, By sequentially passing through the second step of pulling up from the third step, the third step of mounting the electronic component 4 on the mounting portion 1a, and the fourth step of covering the electronic component 4 with the resin material and filling the hole portion 2, An electronic device is formed. In the second step, the electronic component mounting substrate may be arranged in advance so that one direction B of the electronic component mounting substrate faces upward before being immersed in the processing solution, or pulled up from the processing solution. At this time, the electronic component mounting board may be arranged so that the one direction B faces upward. With this configuration, it is possible to suppress the occurrence of stains due to the processing liquid on the electronic component mounting substrate, so that the possibility that the resin material is peeled off from the electronic component mounting substrate can be reduced, and an electronic device with excellent reliability can be manufactured. be able to.

本発明の電子装置は、上記のような電子部品搭載用基板と、電子部品搭載用基板の搭載部1aに搭載される電子部品4と、電子部品4を覆うとともに、複数の穴部2に充填される樹脂材とを備える。なお、図12は、本発明の電子装置の一例を示す断面図であり、図12において、10は封止材を示している。そして、本発明の電子部品搭載用基板を基体1および配線層3にしみ等が発生する可能性を低減したものとなるように形成したので、樹脂材は電子部品搭載用基板に良好に被着して樹脂材が電子部品搭載用基板から剥がれる可能性を低減することができる信頼性に優れた電子装置となる。   The electronic device according to the present invention covers the electronic component mounting substrate as described above, the electronic component 4 mounted on the mounting portion 1a of the electronic component mounting substrate, and covers the electronic component 4 and fills the plurality of holes 2. Resin material. FIG. 12 is a cross-sectional view illustrating an example of the electronic device of the present invention. In FIG. 12, reference numeral 10 denotes a sealing material. Since the electronic component mounting substrate of the present invention is formed so as to reduce the possibility of occurrence of stains on the substrate 1 and the wiring layer 3, the resin material is satisfactorily adhered to the electronic component mounting substrate. Thus, an electronic device having excellent reliability that can reduce the possibility that the resin material is peeled off from the electronic component mounting substrate.

電子部品4は、半導体素子、圧電素子、発光素子、受光素子等が用いられる。また、電子部品4として発光素子を用いる場合においては、発光素子として発光ダイオード(LED)や半導体レーザ(LD)等が用いられる。樹脂材10を電子部品搭載用基板に良好に被着させているので、電子装置は、信頼性に優れた発光装置となる。発光素子は、例えばAu−シリコン(Si)合金や銀(Ag)を含むエポキシ樹脂材等の導電性接合材により基体1の上面に形成された搭載部1aに固着されるとともに、発光素子の電極と配線層3がボンディングワイヤ5等を介して電気的に接続される。なお、発光素子をフリップチップ接続により配線層3に電気的に接続させても良い。   As the electronic component 4, a semiconductor element, a piezoelectric element, a light emitting element, a light receiving element, or the like is used. When a light emitting element is used as the electronic component 4, a light emitting diode (LED), a semiconductor laser (LD), or the like is used as the light emitting element. Since the resin material 10 is satisfactorily attached to the electronic component mounting substrate, the electronic device is a light emitting device with excellent reliability. The light emitting element is fixed to the mounting portion 1a formed on the upper surface of the substrate 1 by a conductive bonding material such as an epoxy resin material containing, for example, an Au-silicon (Si) alloy or silver (Ag), and an electrode of the light emitting element. And the wiring layer 3 are electrically connected via a bonding wire 5 or the like. Note that the light emitting element may be electrically connected to the wiring layer 3 by flip chip connection.

樹脂材10は、例えばシリコーン樹脂材,エポキシ樹脂材が好適である。樹脂材10を、電子部品4を覆うように塗布するとともに、複数の穴部2内部に充填させた後、樹脂材10を硬化することで電子装置となる。なお、電子部品4が発光素子や受光素子からなる場合は、透光性の樹脂材が用いられる。発光素子からなる場合、樹脂材中に蛍光体を含有していてもよい。蛍光体は、発光素子から発する光の波長を他の波長に変換して可視化するためのものや、外部からの特定波長を受けて発光素子の受光感度に合わせることができるものであり、発光素子からの発する光と発光可能な蛍光体との組み合わせにより任意の発光色を得ることができる。例えば、発光素子からの発する光が青色光であり、蛍光体からの発する光が黄色光であれば、混色により白色光を発光装置から発光することができる。   The resin material 10 is preferably a silicone resin material or an epoxy resin material, for example. The resin material 10 is applied so as to cover the electronic component 4, and after filling the inside of the plurality of holes 2, the resin material 10 is cured to obtain an electronic device. In addition, when the electronic component 4 consists of a light emitting element or a light receiving element, a translucent resin material is used. In the case of a light emitting element, the resin material may contain a phosphor. The phosphor is for converting the wavelength of light emitted from the light emitting element into another wavelength for visualization, or for receiving a specific wavelength from the outside and matching the light receiving sensitivity of the light emitting element. Arbitrary emission colors can be obtained by a combination of light emitted from and a phosphor capable of emitting light. For example, if the light emitted from the light emitting element is blue light and the light emitted from the phosphor is yellow light, white light can be emitted from the light emitting device by color mixture.

また、電子部品4が発光素子からなり、凹部7内に発光素子が収容される発光装置においては、凹部7の内周面に反射層を形成しておくことにより、発光素子が発光する光を外部に良好に放射することができるようになる。例えば、このような反射層としては、基体1がセラミックスからなる場合、凹部7の内周面にメタライズ層を形成しておき、メタライズ層上にNi,Au,Ag等の反射率の高い金属からなるめっき層を被着することにより形成することができる。また、蒸着法等により、凹部7の内周面に、Ni,Au,Ag等の薄膜を被着しておくことにより形成しても構わない。また、少なくとも表面にNi,Au,Ag等の反射層が形成された金属製の枠状の部材や白色系のセラミックス製の枠状の部材を凹部7内に収容しても良いし、凹部7の内周面に少なくとも表面にNi,Au,Ag等の反射層が形成された金属製の板材や金属箔を貼付することにより形成しても構わない。また、凹部7の底面から基体1の上面にかけて凹部7の内周面が広がるように凹部7を形成しておくと、発光素子が発光する光を外部に良好に放射することができる。   In the light emitting device in which the electronic component 4 is formed of a light emitting element and the light emitting element is accommodated in the recess 7, the light emitted from the light emitting element is generated by forming a reflective layer on the inner peripheral surface of the recess 7. It becomes possible to radiate well to the outside. For example, when the base 1 is made of ceramics, such a reflective layer is formed by forming a metallized layer on the inner peripheral surface of the recess 7 and using a highly reflective metal such as Ni, Au, or Ag on the metallized layer. It can be formed by depositing a plating layer. Moreover, you may form by depositing thin films, such as Ni, Au, Ag, on the internal peripheral surface of the recessed part 7 by a vapor deposition method etc. Further, a metal frame-like member having a reflective layer of Ni, Au, Ag or the like formed on at least the surface thereof or a white ceramic frame-like member may be accommodated in the recess 7, or the recess 7 It may be formed by attaching a metal plate or metal foil having a reflective layer made of Ni, Au, Ag or the like formed on at least the surface of the inner peripheral surface. In addition, if the concave portion 7 is formed so that the inner peripheral surface of the concave portion 7 extends from the bottom surface of the concave portion 7 to the upper surface of the substrate 1, the light emitted from the light emitting element can be radiated well to the outside.

なお、本発明は上述の実施の形態に限定されず、本発明の要旨を逸脱しない範囲内で種々の変更を施すことは何ら差し支えない。例えば、図13に示すように、母基板11に複数個の電子部品搭載用基板を配列形成した多数個取り基板の形態で形成して構わない。電子部品4を搭載部1aに搭載前または後に基体領域1’の外縁に沿って形成され、一点鎖線で示された分割予定線12に沿って分割することで、基板領域1’毎に分割することで、複数個の電子部品搭載用基板を効率良く形成することができる。なお、複数の電子部品搭載用基板に分割する方法としては、多数個取り基板の各基板領域1’の境界となる分割予定線12に沿って分割溝を形成しておき、この分割溝に沿って撓折して分割する方法、またはスライシング法等により基板領域1’毎に切断する方法等がある。また、上述での例においては、基体1上に電子部品4が1個搭載される場合について説明を行っているが、基体1上に電子部品4が2個以上搭載される場合であっても構わない。この場合、それぞれの電子部品4の電極に対応するように配線層3を形成しておけば良い。また、図14に示すように、電子部品4は、基体1上に直接搭載し、電子部品4の電極を搭載部1aの周囲に形成された配線層3に電気的に接続したものであっても構わない。   Note that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the present invention. For example, as shown in FIG. 13, it may be formed in the form of a multi-piece substrate in which a plurality of electronic component mounting substrates are arranged on the mother substrate 11. The electronic component 4 is formed along the outer peripheral edge of the base region 1 ′ before or after being mounted on the mounting portion 1a, and is divided along the planned dividing line 12 indicated by a one-dot chain line, thereby dividing the substrate region 1 ′. Thus, a plurality of electronic component mounting substrates can be formed efficiently. In addition, as a method of dividing into a plurality of electronic component mounting substrates, a dividing groove is formed along the planned dividing line 12 which becomes the boundary of each substrate region 1 ′ of the multi-piece substrate, and along this dividing groove, There are a method of bending and dividing, a method of cutting each substrate region 1 ′ by a slicing method, and the like. In the above example, the case where one electronic component 4 is mounted on the substrate 1 is described. However, even when two or more electronic components 4 are mounted on the substrate 1. I do not care. In this case, the wiring layer 3 may be formed so as to correspond to the electrode of each electronic component 4. Further, as shown in FIG. 14, the electronic component 4 is mounted directly on the base 1, and the electrodes of the electronic component 4 are electrically connected to the wiring layer 3 formed around the mounting portion 1a. It doesn't matter.

或いは、上述した穴部が、平面透視したときに、一方向において内部空間全体が開口の最後方よりも前方に位置しており、且つ、内部空間の一部を、穴部の内面が一方向の前方側へ突出する凸部を形成することのないように開口の外周よりも外側へ延在させてもよい。そして、このような穴部の場合、第一の深さにおける内部空間の最後方よりも深さが深い第2の深さにおいて、第一の深さにおける内部空間の最後方よりも、第二の深さにおける最後方が、前記一方向の後方側に位置しないことが重要である。これによっても、穴部の内部に処理液が残存し難く、且つ樹脂材の剥がれが抑制できる。   Alternatively, when the hole described above is seen through a plane, the entire internal space is positioned in front of the rear end of the opening in one direction, and a part of the internal space is arranged in one direction on the inner surface of the hole. You may make it extend outside the outer periphery of opening so that the convex part which protrudes to the front side may not be formed. In the case of such a hole, the second depth is deeper than the rearmost end of the internal space at the first depth, and the second depth is higher than the rearmost end of the internal space at the first depth. It is important that the rearmost in the depth is not located on the rear side in the one direction. This also makes it difficult for the treatment liquid to remain inside the hole, and can prevent the resin material from peeling off.

本発明の電子部品搭載用基板について実施の形態の一例を示す平面図である。It is a top view which shows an example of embodiment about the board | substrate for electronic component mounting of this invention. 図1のA−A’線における断面図断面図である。It is sectional drawing sectional drawing in the A-A 'line of FIG. 本発明の電子部品搭載用基板をめっき液から取り出した際の様子を模式的に示す断面図である。It is sectional drawing which shows typically a mode when the board | substrate for electronic component mounting of this invention is taken out from the plating solution. 本発明の電子部品搭載用基板について実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment about the electronic component mounting board | substrate of this invention. 本発明の電子部品搭載用基板について実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment about the electronic component mounting board | substrate of this invention. 本発明の電子部品搭載用基板について実施の形態の一例を示す平面図である。It is a top view which shows an example of embodiment about the board | substrate for electronic component mounting of this invention. 本発明の電子部品搭載用基板について実施の形態の一例を示す平面図である。It is a top view which shows an example of embodiment about the board | substrate for electronic component mounting of this invention. 本発明の電子部品搭載用基板について実施の形態の一例を示す平面図である。It is a top view which shows an example of embodiment about the board | substrate for electronic component mounting of this invention. 本発明の電子部品搭載用基板について実施の形態の一例を示す平面図である。It is a top view which shows an example of embodiment about the board | substrate for electronic component mounting of this invention. 本発明の電子部品搭載用基板について実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment about the electronic component mounting board | substrate of this invention. 本発明の電子部品搭載用基板について実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment about the electronic component mounting board | substrate of this invention. 本発明の電子装置について実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment about the electronic device of this invention. 本発明の電子部品搭載用基板が複数配列された多数個取り基板の一例を示す平面図である。It is a top view which shows an example of the multi-piece board | substrate with which the electronic component mounting substrate of this invention was arranged in multiple numbers. 本発明の電子部品搭載用基板について実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment about the electronic component mounting board | substrate of this invention.

符号の説明Explanation of symbols

1:基体
1a:搭載部
2:穴部
2a、2c:線分
2b、2d:天井領域
3:配線層
4:電子部品
1: Base 1a: Mounting portion 2: Hole 2a, 2c: Line segment 2b, 2d: Ceiling area 3: Wiring layer 4: Electronic component

Claims (6)

少なくとも一主面に電子部品を搭載するための搭載部を有し、一主面に前記電子部品に被着される樹脂材の一部を充填するための複数の穴部が開口した電子部品搭載用基板であって、
前記穴部は、平面透視したとき、一方向において内部空間全体が、前記開口の最後方よりも前方に位置しており、
前記内部空間の一部を、前記穴部の内面が前記一方向の前方側へ突出する凸部を形成することのないように前記開口の外周よりも外側へ延在させたことを特徴とする電子部品搭載用基板。
Electronic component mounting having a mounting portion for mounting an electronic component on at least one main surface, and a plurality of holes for filling a part of the resin material attached to the electronic component on one main surface Substrate for
When the hole is seen through a plane, the entire internal space is positioned in front of the rearmost end of the opening in one direction,
A part of the internal space is extended outward from the outer periphery of the opening so that the inner surface of the hole portion does not form a convex portion protruding forward in the one direction. Electronic component mounting board.
少なくとも一主面に設けられた電子部品の搭載部、及び前記一主面に開口する樹脂材充填用の複数の穴部を有する基体を備え、
前記穴部は、深さ方向と直交する一方向に沿った側面透視において、各深さにおける最後方の位置を結んだ線分が実質的に連続しており、
且つ、前記線分が、深さが深くなるに連れて、実質的に深さ方向のみに延在する領域と、前記線分が、深さが深くなるに連れて漸次或いは段階的に前記一方向の前方側に向かって延在する領域のいずれかのみ、或いは両方からなるとともに、
前記穴部は、内面の一部が深さ方向と逆の上向き方向と交差し前記一方向の前記前方側に天井領域を有するように延在しているとともに、前記一方向の後方側に延在していないことを特徴とする電子部品搭載用基板。
An electronic component mounting portion provided on at least one main surface, and a substrate having a plurality of holes for filling a resin material that opens on the one main surface;
In the side see-through along one direction orthogonal to the depth direction, the hole portion is substantially continuous with a line segment connecting the rearmost position at each depth,
In addition, the line segment extends substantially only in the depth direction as the depth increases, and the line segment gradually or stepwise increases as the depth increases. Consisting of only one or both of the regions extending toward the front side of the direction,
The hole extends so that a part of the inner surface intersects the upward direction opposite to the depth direction and has a ceiling region on the front side in the one direction, and extends to the rear side in the one direction. An electronic component mounting board characterized by being absent .
前記複数の穴部は、平面視で前記搭載部の周囲に分散して位置することを特徴とする請求項1または請求項記載の電子部品搭載用基板。 Wherein the plurality of holes is, according to claim 1 or claim 2 electronic component carrier, wherein the positioned distributed around the mounting portion in a plan view. 請求項1乃至請求項のいずれかに記載の電子部品搭載用基板と、該電子部品搭載用基板の搭載部に搭載される電子部品と、前記電子部品を覆うとともに、前記複数の穴部に充填される樹脂材とを備えることを特徴とする電子装置。 The electronic component mounting substrate according to any one of claims 1 to 3 , an electronic component mounted on a mounting portion of the electronic component mounting substrate, and covering the electronic component, and in the plurality of hole portions An electronic device comprising: a resin material to be filled. 前記電子部品は発光素子であることを特徴とする請求項に記載の電子装置。 The electronic device according to claim 4 , wherein the electronic component is a light emitting element. 請求項1乃至請求項のいずれかに記載の前記電子部品搭載用基板を準備し、該電子部品搭載用基板を、処理液に浸漬させる第1の工程、前記一方向が実質的に上向きになるように前記電子部品搭載用基板を配置した状態で、前記処理液から引き上げる第2の工程、前記搭載部に電子部品を搭載する第3の工程、前記樹脂材により前記電子部品を覆うとと
もに、前記樹脂材を前記穴部に充填する第4の工程を順次経ることを特徴とする電子装置の製造方法。
A first step of preparing the electronic component mounting substrate according to any one of claims 1 to 3 and immersing the electronic component mounting substrate in a processing solution, wherein the one direction is substantially upward. In a state where the electronic component mounting substrate is arranged as described above, the second step of pulling up from the processing liquid, the third step of mounting the electronic component on the mounting portion, covering the electronic component with the resin material, A method of manufacturing an electronic device, wherein a fourth step of filling the hole with the resin material is sequentially performed.
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