JP4805304B2 - Metal foil with carrier and method for producing multilayer coreless circuit board - Google Patents

Metal foil with carrier and method for producing multilayer coreless circuit board Download PDF

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JP4805304B2
JP4805304B2 JP2008124381A JP2008124381A JP4805304B2 JP 4805304 B2 JP4805304 B2 JP 4805304B2 JP 2008124381 A JP2008124381 A JP 2008124381A JP 2008124381 A JP2008124381 A JP 2008124381A JP 4805304 B2 JP4805304 B2 JP 4805304B2
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metal foil
carrier
foil
plate
prepreg
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JP2009272589A (en
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雅之 高森
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JX Nippon Mining and Metals Corp
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Description

本発明は、プリント配線板に使用される片面若しくは2層以上の多層積層板又は極薄のコアレス基板の製造において用いられるキャリヤー付銅箔に関する。   The present invention relates to a copper foil with a carrier used in the production of a single-sided or two-layer multilayer board or an ultra-thin coreless substrate used for a printed wiring board.

多層積層体の代表的な例は、プリント回路板である。一般に、プリント回路板は、合成樹脂板、ガラス板、ガラス不織布、紙などの基材に合成樹脂を含浸させて得た「プリプレグ(Prepreg)」と称する誘電材を、基本的な構成としている。また、プリプレグと相対する側には電気伝導性を持った銅又は銅合金箔等のシートが接合されている。このように組み立てられた積層物を、一般にCCL(Copper Clad Laminate)材と呼んでいる。
銅又は銅合金箔の替りに、アルミニウム、ニッケル、亜鉛などの箔を使用する場合もある。これらの厚さは5〜200μm程度である。
A typical example of a multilayer laminate is a printed circuit board. In general, a printed circuit board has a basic configuration of a dielectric material called “prepreg” obtained by impregnating a synthetic resin into a base material such as a synthetic resin plate, a glass plate, a glass nonwoven fabric, or paper. Further, a sheet such as copper or copper alloy foil having electrical conductivity is bonded to the side facing the prepreg. The laminated body thus assembled is generally called a CCL (Copper Clad Laminate) material.
A foil made of aluminum, nickel, zinc or the like may be used instead of the copper or copper alloy foil. Their thickness is about 5 to 200 μm.

例えば、CAC(特許文献1参照)を使用した4層基板の製造工程においては、厚さが0.2〜2mmのプレス面が平滑なステンレス製のプレス板(通称、「鏡面板」と言う。)の上に、銅箔、所定枚数のプリプレグ、次に内層コアと称するCCL材料に回路を形成したプリント回路基板、次にプリプレグ、銅箔、鏡面板の順に重ねることにより、1組の4層基板材料からなる組み立てユニットが完成する。次に、これらのユニット(通称「ページ」)を2〜10回程度繰り返して重ね、プレス組立体(通称「ブック」)を構成する。   For example, in a manufacturing process of a four-layer substrate using CAC (see Patent Document 1), a stainless-steel press plate having a thickness of 0.2 to 2 mm and a smooth press surface (commonly called “mirror plate”). ) On top of a copper foil, a predetermined number of prepregs, and then a printed circuit board on which a circuit is formed on a CCL material called an inner layer core, and then a prepreg, copper foil, and a mirror plate are stacked in this order. An assembly unit made of substrate material is completed. Next, these units (commonly called “pages”) are repeatedly stacked about 2 to 10 times to form a press assembly (commonly called “book”).

その後、上記ブックを、ホットプレス機内の熱板上にセットし、所定の温度及び圧力で加圧成型することにより、積層板を製造する。
4層以上の基板については、内層コアの層数を上げることで、同様の工程で生産することが可能である。
この際、使用されるCACは、アルミニウムと銅箔の間に、接着剤が全面に塗布されている訳でなく、4辺の内側約10mm程度の位置に1mm程の幅で額縁状に塗工されている。このため、アルミニウムで銅箔を全面に亘って支持することが難しく、積層中に銅箔に皺が発生することがある。
Then, the said book is set on the hot plate in a hot press machine, and a laminated board is manufactured by press-molding by predetermined temperature and pressure.
A substrate having four or more layers can be produced in the same process by increasing the number of inner core layers.
At this time, the CAC used is not coated with an adhesive between aluminum and copper foil, but is coated in a frame shape with a width of about 1 mm at a position of about 10 mm inside the four sides. Has been. For this reason, it is difficult to support a copper foil with aluminum over the entire surface, and wrinkles may occur in the copper foil during lamination.

また、CACの銅箔表面を鍍金又はエッチングする際に、これを薬液に投入することができない。これは、上記の通りCACに使用されている接着剤が隙間なく塗工されているわけではなく、アルミニウムと銅箔の間の所々に隙間があるため、そこから薬液が入り込むためである。
さらに、CACに使用されているアルミ板(JIS#5182)の線膨張係数は、23.8×10−6/°Cと、基板の構成材料である銅箔(16.5×10−6/°C)及び重合後のプリプレグ(Cステージ:12〜18×10−6/°C)に比べて大きいことから、プレス前後の基板サイズが設計時のそれとは異なる現象(スケーリング変化)が起きる。これは厚さ方向の回路の位置ずれを招くことから、歩留り低下の一因となる問題がある。
In addition, when the surface of the copper foil of CAC is plated or etched, it cannot be put into a chemical solution. This is because the adhesive used in the CAC is not applied without a gap as described above, and there are gaps between the aluminum and the copper foil, so that the chemical solution enters from there.
Furthermore, the linear expansion coefficient of the aluminum plate (JIS # 5182) used for CAC is 23.8 × 10 −6 / ° C., and the copper foil (16.5 × 10 −6 / ° C) and the prepreg after polymerization (C stage: 12 to 18 × 10 −6 / ° C.), the phenomenon that the substrate size before and after pressing differs from that during design (scaling change) occurs. This causes a positional shift of the circuit in the thickness direction, and there is a problem that contributes to a decrease in yield.

プリント配線板に使用される各種材料の線膨張係数(常温)は、下記の通りである。アルミニウム板の線膨張係数が、他に突出して大きいことが分かる。
・銅箔:16.5(×10-6/°C)
・SUS304:17.3×10-6/°C
・SUS301:15.2×10-6/°C
・SUS630:11.6×10-6/°C
・プリプレグ(Cステージ):12〜18×10-6/°C
・アルミニウム板(JIS#5182):23.8×10−6/°C
特許第3100983号公報
The linear expansion coefficients (room temperature) of various materials used for the printed wiring board are as follows. It can be seen that the linear expansion coefficient of the aluminum plate is prominently large.
Copper foil: 16.5 (× 10 −6 / ° C)
SUS304: 17.3 × 10 −6 / ° C
SUS301: 15.2 × 10 −6 / ° C
・ SUS630: 11.6 × 10 −6 / ° C
・ Prepreg (C stage): 12-18 × 10 -6 / ° C
Aluminum plate (JIS # 5182): 23.8 × 10 −6 / ° C
Japanese Patent No. 3100833

本発明は、これらの事象に鑑みてなされたものであり、プリント配線板に使用される片面若しくは2層以上の多層積層板又は極薄のコアレス基板の製造の際に用いられるキャリヤー付銅箔に関する。
詳しくは、積層板の製造時に使用するキャリヤー付き銅箔に係り、その目的とするのは樹脂を支持体とし、その片面または表裏両面に、易剥離性銅箔を配置することを特徴とし、プリント基板製造工程の簡素化及び歩留りアップによるコスト削減を実現することを課題とする。
The present invention has been made in view of these events, and relates to a carrier-attached copper foil used in the production of a single-sided or two-layer multilayer board or an ultra-thin coreless board used for printed wiring boards. .
More specifically, the present invention relates to a copper foil with a carrier used in the production of a laminated board, and its purpose is to use a resin as a support and to dispose easily peelable copper foil on one side or both sides of the print. It is an object to realize cost reduction by simplifying the substrate manufacturing process and increasing yield.

本発明者等は、上記課題を解決するために鋭意研究した結果、片面又は両面多層積層板の製造の際に使用するCACのアルミニウムに替えて、樹脂を使用することが有効であるとの知見を得た。
この知見に基づき、本発明は
1)合成樹脂製の板状キャリヤーと、該キャリヤーの少なくとも一方の面に、機械的に剥離可能に密着させた金属箔からなるキャリヤー付金属箔
2)合成樹脂が、プリプレグであることを特徴とする上記1)記載のキャリヤー付金属箔
3)合成樹脂が、樹脂の重合によりBステージ(モノマー)からCステージ(ポリマー)へ変化した樹脂であることを特徴とする上記1)又は2)記載のキャリヤー付金属箔
4)金属箔が、銅箔又は銅合金箔であることを特徴とする上記1)〜3)のいずかに記載のキャリヤー付金属箔、を提供する。
As a result of intensive studies to solve the above problems, the present inventors have found that it is effective to use a resin instead of the aluminum of CAC used in the production of a single-sided or double-sided multilayer laminate. Got.
Based on this knowledge, the present invention is based on 1) a synthetic resin plate carrier, and a metal foil with a carrier comprising a metal foil mechanically peelably adhered to at least one surface of the carrier. The metal foil with a carrier according to the above 1), characterized in that it is a prepreg, 3) the synthetic resin is a resin that has changed from a B stage (monomer) to a C stage (polymer) by polymerization of the resin. The metal foil with a carrier according to 1) or 2) 4) The metal foil with a carrier according to any one of 1) to 3) above, wherein the metal foil is a copper foil or a copper alloy foil. provide.

また、本願発明は、
5)金属箔が、5〜120μmの厚みを有する電解箔であることを特徴とする上記1)〜4)のいずかに記載のキャリヤー付金属箔
6)金属箔が、5〜120μmの厚みを有する圧延箔であることを特徴とする請求項1)〜4)のいずかに記載のキャリヤー付金属箔
7)板状キャリヤーと金属箔との剥離強度が1g/cm以上、1kg/cm以下であり、剥離面が板状キャリヤーと金属との境界であることを特徴とする上記1)〜6)のいずかに記載のキャリヤー付金属箔
8)板状キャリヤーの熱膨張率が金属箔の熱膨張率の+10%、−30%以内であることを特徴とする上記1)〜7)のいずかに記載のキャリヤー付金属箔、を提供する。
In addition, the present invention
5) The metal foil with a carrier according to any one of 1) to 4) above, wherein the metal foil is an electrolytic foil having a thickness of 5 to 120 μm. 6) The metal foil has a thickness of 5 to 120 μm. A metal foil with a carrier according to any one of claims 1) to 4), wherein the peel strength between the plate-like carrier and the metal foil is 1 g / cm or more and 1 kg / cm. The metal foil with a carrier according to any one of 1) to 6) above, wherein the peeling surface is a boundary between the plate-like carrier and the metal. 8) The coefficient of thermal expansion of the plate-like carrier is metal. The metal foil with a carrier according to any one of 1) to 7) above, which is within + 10% and −30% of the thermal expansion coefficient of the foil.

本発明は、板状の合成樹脂(Resin)製の少なくとも一方の面に、金属箔を密着させてキャリヤー付金属箔とするものであり、合成樹脂で銅箔を全面に亘って支持するので、積層中に銅箔に皺の発生を防止できる。また、このキャリヤー付金属箔は、金属箔と合成樹脂が隙間なく密着しているので、金属箔表面を鍍金又はエッチングする際に、これを鍍金又はエッチング用の薬液に投入することが可能となる。
さらに、合成樹脂の線膨張係数は、基板の構成材料である銅箔及び重合後のプリプレグと同等のレベルにあることから、回路の位置ずれを招くことがないので、不良品発生が少なくなり、歩留りを向上させることができるという優れた効果を有する。
The present invention is a metal foil with a carrier by sticking a metal foil to at least one surface made of a plate-shaped synthetic resin (Resin), and supports the copper foil over the entire surface with the synthetic resin. Generation of wrinkles on the copper foil during lamination can be prevented. Further, in this metal foil with a carrier, since the metal foil and the synthetic resin are in close contact with each other, when the surface of the metal foil is plated or etched, it can be put into a chemical solution for plating or etching. .
Furthermore, since the linear expansion coefficient of the synthetic resin is at the same level as the copper foil that is a constituent material of the substrate and the prepreg after polymerization, the circuit does not cause a position shift, so that the occurrence of defective products is reduced. It has the outstanding effect that a yield can be improved.

一般に、プリント回路板は、合成樹脂板、ガラス板、ガラス不織布、紙などの基材に合成樹脂を含浸させて得た「プリプレグ(Prepreg)」と称する誘電材を用い、このプリプレグを間に挟んで、電気伝導性を持った銅又は銅合金箔等のシートが接合されている。このように組み立てられた積層物を、一般にCCL(Copper Clad Laminate)材と呼んでいる。
この一般的に用いられるCCL(Copper Clad Laminate)材を図1に示す。前記銅又は銅合金箔の替りに、アルミニウム、ニッケル、亜鉛などの箔を使用する場合もある。これらの厚さは5〜200μm程度である。
Generally, a printed circuit board uses a dielectric material called “prepreg” obtained by impregnating a synthetic resin into a base material such as a synthetic resin plate, a glass plate, a glass nonwoven fabric, and paper, and sandwiches the prepreg therebetween. Thus, a sheet of copper or copper alloy foil having electrical conductivity is joined. The laminated body thus assembled is generally called a CCL (Copper Clad Laminate) material.
This commonly used CCL (Copper Clad Laminate) material is shown in FIG. Instead of the copper or copper alloy foil, a foil of aluminum, nickel, zinc or the like may be used. Their thickness is about 5 to 200 μm.

本願発明のキャリヤー付金属箔を図2に示す。キャリヤー付金属箔は、合成樹脂製の板状キャリヤーと該キャリヤーの少なくとも一方の面に機械的に剥離可能に密着した金属箔からなる。図2では、合成樹脂製の板状キャリヤーの両側に、金属箔が密着させたキャリヤー付金属箔が示されている。
構造的には、前記図1に示すCCL材と類似しているが、本願発明のキャリヤー付金属箔は、金属箔と樹脂は最終的に分離されるもので、機械的に容易に剥離できる構造を有する。この点、CCL材は剥離させるものではないので、構造と機能は、全く異なるものである。
The metal foil with a carrier of the present invention is shown in FIG. The metal foil with a carrier is composed of a synthetic resin plate-shaped carrier and a metal foil which is in close contact with at least one surface of the carrier so as to be mechanically peelable. FIG. 2 shows a metal foil with a carrier in which a metal foil is in close contact with both sides of a plate-shaped carrier made of synthetic resin.
The structure is similar to the CCL material shown in FIG. 1, but the metal foil with a carrier of the present invention is a structure in which the metal foil and the resin are finally separated and can be easily separated mechanically. Have In this respect, since the CCL material is not peeled off, the structure and function are completely different.

金属箔としては、銅又は銅合金箔が代表的なものであるが、アルミニウム、ニッケル、亜鉛などの箔を使用することもできる。銅又は銅合金箔の場合、5〜120μmの厚みを有する電解箔又は圧延箔を使用することができる。
板状キャリヤーとなる合成樹脂としては、フェノール樹脂、ポリイミド樹脂、エポキシ樹脂等を使用することができる。また、前記プリプレグを使用することもできる。特に、合成樹脂が、樹脂の重合によりBステージ(モノマー)からCステージ(ポリマー)へ変化した樹脂を使用することができる。上記の通り、本願発明は、従来のCACに替えて、銅(Cu)−樹脂(Regin)−銅(Cu)の構造を有する(CRC)ものである。
なお、前記プリプレグについては、キャリヤー付銅箔に使用する剥離可能なプリプレグ及び回路基板を構成するプリプレグに、同じ物を使用しても良いし、また異なるプリプレグを使用しても良い。プリプレグと銅箔との剥離性と密着性は、銅箔との界面の状態や処理により任意に調節可能である。
As the metal foil, copper or copper alloy foil is typical, but foils of aluminum, nickel, zinc and the like can also be used. In the case of copper or copper alloy foil, electrolytic foil or rolled foil having a thickness of 5 to 120 μm can be used.
As the synthetic resin serving as the plate-like carrier, phenol resin, polyimide resin, epoxy resin, or the like can be used. Moreover, the said prepreg can also be used. In particular, a resin in which the synthetic resin is changed from the B stage (monomer) to the C stage (polymer) by polymerization of the resin can be used. As described above, the present invention is a (CRC) having a structure of copper (Cu) -resin (Regin) -copper (Cu) instead of the conventional CAC.
In addition, about the said prepreg, the same thing may be used for the peelable prepreg used for copper foil with a carrier, and the prepreg which comprises a circuit board, and a different prepreg may be used. The peelability and adhesion between the prepreg and the copper foil can be arbitrarily adjusted by the state of the interface with the copper foil and the treatment.

さらに、合成樹脂の熱膨張率が、金属箔の熱膨張率の+10%、−30%以内であることが望ましい。これによって、金属箔と合成樹脂との熱膨張差に起因する回路の位置ずれを効果的に防止することができ、不良品発生を減少させ、歩留りを向上させることができる。
板状キャリヤーと金属箔とは、めっき又はエッチング等の工程において、適度の密着性が必要であるが、いずれ機械的に剥がすことになるので、両者の剥離強度は、1g/cm以上、1kg/cm以下であることが望ましい。さらに、剥離面は板状キャリヤーと金属との境界であることが望ましく、両者の間で、相手材料の残渣が残ることは、除去工程が必要となり、工程の複雑化になるので、避けなければならない。
Furthermore, it is desirable that the thermal expansion coefficient of the synthetic resin is within + 10% and −30% of the thermal expansion coefficient of the metal foil. As a result, it is possible to effectively prevent circuit misalignment due to the difference in thermal expansion between the metal foil and the synthetic resin, reduce the occurrence of defective products, and improve the yield.
The plate-like carrier and the metal foil must have appropriate adhesion in a process such as plating or etching. However, since they will be peeled off mechanically, the peel strength of both is 1 g / cm or more, 1 kg / It is desirable that it is cm or less. Furthermore, it is desirable that the peeling surface is the boundary between the plate-like carrier and the metal, and it is necessary to avoid that the residue of the counterpart material remains between them because a removal process is required and the process becomes complicated. Don't be.

次に、本発明の具体的な実施例を説明する。なお、以下の実施例は、本願発明の理解を容易にするためのものであり、これに制限されるものではない。すなわち、本願発明の技術思想に基づく変形、実施態様、他の例は、本願発明に含まれるものである。   Next, specific examples of the present invention will be described. The following examples are intended to facilitate understanding of the present invention and are not limited thereto. That is, modifications, embodiments, and other examples based on the technical idea of the present invention are included in the present invention.

(実施例1)
樹脂材料として、エポキシ樹脂から作製したプリプレグを用いた。このプリプレグの表裏に銅箔を接着させてキャリヤー付銅箔とした。このキャリヤー付銅箔上に、所望枚数のプリプレグ、次に内層コアと称する2層プリント回路基板、次にプリプレグ、さらにキャリヤー付銅箔を順に重ねることで1組の4層基板の材料組み立てユニットが完成させた。
次に、このユニット(通称「ページ」と言う)を10回程度繰り返し、プレス組み立て物(通称「ブック」と言う)を構成した。
Example 1
A prepreg produced from an epoxy resin was used as the resin material. A copper foil was bonded to the front and back of the prepreg to obtain a copper foil with a carrier. On this copper foil with a carrier, a desired number of prepregs, then a two-layer printed circuit board called an inner layer core, then a prepreg, and then a copper foil with a carrier are sequentially stacked to form a set of four-layer board material assembly units. Completed.
Next, this unit (commonly called “page”) was repeated about 10 times to form a press assembly (commonly called “book”).

その後、このブックをホットプレス機にセットし、所定の温度及び圧力で加圧成型することにより4層基板を製造した。なお、4層以上の基板についても、一般的には内層コアの層数を上げることで、同様の工程で生産することが可能である。このようにして作製した材料を、プレス機の上下ステンレス製熱板の間に挟んで、プレスし積層板とする。通常、熱板は50mm程度の厚板を使用するが、厚さに制限を受けるものではない。   Thereafter, this book was set in a hot press machine, and a four-layer substrate was manufactured by pressure molding at a predetermined temperature and pressure. In general, a substrate having four or more layers can be produced in the same process by increasing the number of inner core layers. The material thus produced is sandwiched between upper and lower stainless steel hot plates of a press machine and pressed to obtain a laminated plate. Usually, a thick plate of about 50 mm is used as the hot plate, but the thickness is not limited.

このようにして作製された、プリプレグを有する多層構造のプリント回路基板は、めっき工程及び又はエッチング工程経て回路を形成し、さらにキャリヤー樹脂と銅箔の間で、剥離分離させて完成品となるが、合成樹脂製のキャリヤーで銅箔を全面に亘って支持しているので、前記積層中に、銅箔に皺の発生は全く認められなかった。   A printed circuit board having a multilayer structure having a prepreg produced in this way forms a circuit through a plating process and / or an etching process, and further peels and separates between the carrier resin and the copper foil to become a finished product. Since the copper foil was supported over the entire surface by the synthetic resin carrier, no wrinkles were observed on the copper foil during the lamination.

また、このキャリヤー付金属箔は、金属箔と合成樹脂が隙間なく密着しているので、金属箔表面を鍍金又はエッチングする際に、鍍金又はエッチング用の薬液に投入することができた。
さらに、合成樹脂の線膨張係数は、基板の構成材料である銅箔及び重合後のプリプレグと、殆ど同じレベルにあることから、回路の位置ずれを起こすことがなかった。したがって、従来のCACを使用する場合に比べて、不良品発生が少なくなり、歩留りを向上させることができた。
Further, in this metal foil with a carrier, the metal foil and the synthetic resin were in close contact with each other without any gap, so that when the surface of the metal foil was plated or etched, it could be put into the plating or etching chemical.
Furthermore, the linear expansion coefficient of the synthetic resin is almost the same level as that of the copper foil as the constituent material of the substrate and the prepreg after polymerization, so that the circuit is not displaced. Therefore, compared with the case where a conventional CAC is used, the generation of defective products is reduced, and the yield can be improved.

(実施例2)
次に、極薄基板の製造の例を図4〜図7に基づいて説明する。これらの図は、キャリヤー付銅箔の両側に、プリプレグを配置し、さらにこのプリプレグ面上に銅の回路を形成し、さらに樹脂からなるキャリヤーを剥離させて2個の基板を同時に生産する工程説明図である。実施例1と同様に、キャリヤーとなる樹脂材料として、フェノール樹脂から作製したプリプレグを用いた。このプリプレグの表裏に、銅箔を接着させてキャリヤー付銅箔とした。
(Example 2)
Next, an example of manufacturing an ultrathin substrate will be described with reference to FIGS. In these figures, prepregs are arranged on both sides of a copper foil with a carrier, a copper circuit is formed on the prepreg surface, and a carrier made of resin is further peeled to produce two substrates simultaneously. FIG. As in Example 1, a prepreg made of a phenol resin was used as a resin material to be a carrier. Copper foil was bonded to the front and back of this prepreg to obtain a copper foil with a carrier.

このキャリヤー付銅箔に、鍍金するか又は銅箔を半分程度エッチングすることにより、図4に示すように、L1(第1層)を本発明品の両面に作成した。
次に、図5に示すように、キャリヤー付銅箔の表裏に、所望枚数のプリプレグ、次に銅箔を重ね、さらにこれをホットプレスすることにより、L2(第2層)の銅箔層を形成した。これに、さらに回路形成を行うことでL2を完成させた。これ以降、必要に応じてL3(第3層)以降も同様に形成することが出来る。図3〜図7に示す「×n」は、多層(n=1、2、3・・n)を意味する。
By plating the copper foil with carrier or etching the copper foil about half, L1 (first layer) was formed on both sides of the product of the present invention as shown in FIG.
Next, as shown in FIG. 5, a copper foil layer of L2 (second layer) is formed by stacking a desired number of prepregs and then a copper foil on the front and back of the copper foil with a carrier, and further hot pressing this. Formed. Further, L2 was completed by further circuit formation. Thereafter, L3 (third layer) and the like can be formed in the same manner as necessary. “× n” shown in FIGS. 3 to 7 means a multilayer (n = 1, 2, 3,... N).

所定の層数を重ねた後、キャリヤー付銅箔のプリプレグ及び銅箔の界面から剥離させた。これを、図6に示す。上下2個の、2層CCLが形成されている。
次に、この剥離面を、全面エッチングすることで、この面に露出した回路を形成した。結果として、図7に示すように、多層の極薄コアレス基板が生産できた。しかも、この場合、1枚のキャリヤー付銅箔上に形成した基板材料の表裏2面から、2個の基板を同時に生産できるので生産効率が向上するという効果があった。上記と同様に、L2、L3・・以降も同様に形成することが出来るので、多層の極薄コアレス基板の生産も容易である。
After stacking a predetermined number of layers, the copper foil with a carrier was peeled from the interface between the prepreg and the copper foil. This is shown in FIG. Two upper and lower two-layer CCLs are formed.
Next, the entire surface of the peeled surface was etched to form a circuit exposed on the surface. As a result, as shown in FIG. 7, a multilayer ultra-thin coreless substrate could be produced. In addition, in this case, two substrates can be produced simultaneously from the two front and back surfaces of the substrate material formed on a single copper foil with a carrier, so that the production efficiency is improved. Similarly to the above, L2, L3, and so on can be formed in the same manner, so that it is easy to produce a multi-layer ultra-thin coreless substrate.

本発明は、板状の合成樹脂(Resin)製の少なくとも一方の面に、金属箔を密着させてキャリヤー付金属箔とするものであり、合成樹脂で銅箔を全面に亘って支持するので、積層中に銅箔に皺の発生を防止できる。また、このキャリヤー付金属箔は、金属箔と合成樹脂が隙間なく密着しているので、金属箔表面を鍍金又はエッチングする際に、これを鍍金又はエッチング用の薬液に投入することが可能となる。さらに、合成樹脂の線膨張係数は、基板の構成材料である銅箔及び重合後のプリプレグと同等のレベルにあることから、回路の位置ずれを招くことがないので、不良品発生が少なくなり、歩留りを向上させることができるという優れた効果を有するので、本願発明により得られるキャリヤー付金属箔のメリットは大きく、特にプリント回路板の製造に有用である。   The present invention is a metal foil with a carrier by sticking a metal foil to at least one surface made of a plate-shaped synthetic resin (Resin), and supports the copper foil over the entire surface with the synthetic resin. Generation of wrinkles on the copper foil during lamination can be prevented. Further, in this metal foil with a carrier, since the metal foil and the synthetic resin are in close contact with each other, when the surface of the metal foil is plated or etched, it can be put into a chemical solution for plating or etching. . Furthermore, since the linear expansion coefficient of the synthetic resin is at the same level as the copper foil that is a constituent material of the substrate and the prepreg after polymerization, the circuit does not cause a position shift, so that the occurrence of defective products is reduced. Since it has the excellent effect that the yield can be improved, the merit of the metal foil with a carrier obtained by the present invention is great, and is particularly useful for the production of a printed circuit board.

銅箔、プリプレグ、銅箔を、順に重ね、密着させたCCL材の概念説明図である。It is a conceptual explanatory view of a CCL material in which a copper foil, a prepreg, and a copper foil are sequentially stacked and adhered. 樹脂基板の両面に銅箔が貼り付けられた本発明のキャリヤー付銅箔の説明図である。It is explanatory drawing of the copper foil with a carrier of this invention by which copper foil was affixed on both surfaces of the resin substrate. 積層金型の上に本発明のキャリヤー付銅箔にプリプレグを重ね合わせた、プレス成形前の様子を示す説明図である。It is explanatory drawing which shows the mode before press molding which piled up the prepreg on the copper foil with a carrier of this invention on the lamination metal mold | die. キャリヤー付銅箔に、鍍金するか又は銅箔を半分程度エッチングすることにより、L1を両面に作成した様子を示す説明図である。It is explanatory drawing which shows a mode that L1 was created on both surfaces by plating a copper foil with a carrier or etching a copper foil about half. キャリヤー付銅箔の表裏に、複数のプリプレグ、次に銅箔を重ね、さらにこれをホットプレスすることにより、L2の銅箔層を形成し、さらに銅箔層に回路形成を行うことでL2を作成した様子を示す説明図である。A plurality of prepregs and then a copper foil are stacked on the front and back of the copper foil with a carrier, and further hot-pressed to form a copper foil layer of L2, and further, a circuit is formed on the copper foil layer to form L2 It is explanatory drawing which shows a mode that it produced. 所定の層数を重ねた後、キャリヤー付銅箔のプリプレグ及び銅箔の界面から剥離し、上下2個の、2層CCLを形成した様子を示す説明図である。It is explanatory drawing which shows a mode that it peeled from the prepreg of copper foil with a carrier, and the interface of copper foil, and formed two upper and lower two-layer CCL, after piled up a predetermined number of layers. 剥離面を、全面エッチングすることで、この面に露出した回路を形成し多層の極薄コアレス基板を作成した様子を示す説明図である。It is explanatory drawing which shows a mode that the circuit exposed to this surface was formed by etching the peeling surface entirely, and the multilayer ultra-thin coreless board | substrate was created.

Claims (10)

プリプレグからなる板状キャリヤーと、該キャリヤーの少なくとも一方の面に、機械的に剥離可能に密着させた銅箔又は銅合金箔からなるキャリヤー付金属箔。 A plate-like carrier made of a prepreg and a metal foil with a carrier made of a copper foil or a copper alloy foil mechanically and peelably adhered to at least one surface of the carrier. 板状キャリヤーと金属箔との剥離強度が1g/cm以上、1kg/cm以下であり、剥離面が板状キャリヤーと金属との境界であることを特徴とする請求項1記載のキャリヤー付金属箔。   2. The metal foil with a carrier according to claim 1, wherein the peel strength between the plate-like carrier and the metal foil is 1 g / cm or more and 1 kg / cm or less, and the peel surface is a boundary between the plate-like carrier and the metal. . 板状キャリヤーの熱膨張率が金属箔の熱膨張率の+10%、−30%以内であることを特徴とする請求項1又は2記載のキャリヤー付金属箔。 The metal foil with a carrier according to claim 1 or 2 , wherein the thermal expansion coefficient of the plate-like carrier is within + 10% and -30% of the thermal expansion coefficient of the metal foil. 金属箔が、5〜120μmの厚みを有する電解箔または圧延箔であることを特徴とする請求項1〜3のいずれか一項に記載のキャリヤー付金属箔。 The metal foil with a carrier according to any one of claims 1 to 3 , wherein the metal foil is an electrolytic foil or a rolled foil having a thickness of 5 to 120 µm. プリプレグからなる板状キャリヤーと、該キャリヤーの少なくとも一方の面に機械的に剥離可能に密着させた金属箔からなるキャリヤー付金属箔に、鍍金または金属箔厚みの半分程度エッチングすることにより回路を形成する工程、次に、その回路上にプリプレグ、さらに金属箔を重ねてホットプレスして新たな金属箔層を形成する工程、次いで、その新たな金属箔層に回路を形成する工程を行い、さらに所定の層数を重ねた後、板状キャリヤー付金属箔のプリプレグと金属箔の界面から剥離し、さらに剥離面を全面エッチングして、回路を露出させることを特徴とする多層コアレス回路基板の製造方法。   A circuit is formed by etching a plate-like carrier made of prepreg and a metal foil with a carrier made of metal foil that is mechanically peelably adhered to at least one surface of the carrier, or by etching about half the thickness of the metal foil or metal foil. Next, a step of forming a new metal foil layer by hot pressing the prepreg and metal foil on the circuit, then forming a circuit on the new metal foil layer, After a predetermined number of layers have been stacked, the multilayer coreless circuit board is manufactured by peeling from the interface between the prepreg and metal foil of the metal foil with a plate-like carrier and further etching the peeled surface to expose the circuit. Method. キャリヤー付金属箔が、板状キャリヤーの両面に金属箔を貼り付け、両方の金属箔層に予め回路を形成しておくことを特徴とする請求項5記載の多層コアレス回路基板の製造方法。 6. The method for producing a multilayer coreless circuit board according to claim 5 , wherein the metal foil with a carrier is formed by attaching a metal foil to both sides of a plate-like carrier and forming a circuit in advance on both metal foil layers. 金属箔が、銅箔又は銅合金箔であることを特徴とする請求項5又は6記載の多層コアレス回路基板の製造方法。 7. The method for producing a multilayer coreless circuit board according to claim 5 , wherein the metal foil is a copper foil or a copper alloy foil. 板状キャリヤーと金属箔との剥離強度が1g/cm以上、1kg/cm以下であり、剥離面がプリプレグと金属との境界であることを特徴とする請求項5〜7のいずれか一項に記載の多層コアレス回路基板の製造方法。 Plate carrier and peel strength between the metal foil 1 g / cm or more and 1 kg / cm or less, in any one of claims 5-7 in which the release surface is characterized in that it is a boundary between the prepreg and the metal The manufacturing method of the multilayer coreless circuit board of description. 板状キャリヤーの熱膨張係数が金属箔の熱膨張係数の+10%、−30%以内であることを特徴とする請求項5〜8のいずれか一項に記載の多層コアレス回路基板の製造方法。 The method for producing a multilayer coreless circuit board according to any one of claims 5 to 8 , wherein the thermal expansion coefficient of the plate carrier is within + 10% and -30% of the thermal expansion coefficient of the metal foil. 金属箔が、5〜120μmの厚みを有する電解箔または圧延箔であることを特徴とする請求項5〜9のいずれか一項に記載の多層コアレス回路基板の製造方法。 The method for producing a multilayer coreless circuit board according to any one of claims 5 to 9 , wherein the metal foil is an electrolytic foil or a rolled foil having a thickness of 5 to 120 µm.
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