JP4794401B2 - マイクロポンプ及びそれを備えた徐放装置 - Google Patents

マイクロポンプ及びそれを備えた徐放装置 Download PDF

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Publication number
JP4794401B2
JP4794401B2 JP2006265186A JP2006265186A JP4794401B2 JP 4794401 B2 JP4794401 B2 JP 4794401B2 JP 2006265186 A JP2006265186 A JP 2006265186A JP 2006265186 A JP2006265186 A JP 2006265186A JP 4794401 B2 JP4794401 B2 JP 4794401B2
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Japan
Prior art keywords
discharge
liquid
diaphragm
pump chamber
check valve
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Expired - Fee Related
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JP2006265186A
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Japanese (ja)
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JP2008082289A (ja
JP2008082289A5 (enExample
Inventor
和也 尾山
隆 岸本
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Sharp Corp
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Sharp Corp
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JP2006265186A 2006-09-28 2006-09-28 マイクロポンプ及びそれを備えた徐放装置 Expired - Fee Related JP4794401B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006265186A JP4794401B2 (ja) 2006-09-28 2006-09-28 マイクロポンプ及びそれを備えた徐放装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006265186A JP4794401B2 (ja) 2006-09-28 2006-09-28 マイクロポンプ及びそれを備えた徐放装置

Publications (3)

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JP2008082289A JP2008082289A (ja) 2008-04-10
JP2008082289A5 JP2008082289A5 (enExample) 2008-10-16
JP4794401B2 true JP4794401B2 (ja) 2011-10-19

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ID=39353397

Family Applications (1)

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JP2006265186A Expired - Fee Related JP4794401B2 (ja) 2006-09-28 2006-09-28 マイクロポンプ及びそれを備えた徐放装置

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JP (1) JP4794401B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6442377B2 (ja) * 2014-10-23 2018-12-19 東京エレクトロン株式会社 ポンプ装置セット及び液供給システム
US10655619B2 (en) 2014-10-23 2020-05-19 Tokyo Electron Limited Pump, pump device, and liquid supply system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0684824B2 (ja) * 1989-05-15 1994-10-26 清水建設株式会社 香り供給方法および香り供給装置
JP2002130137A (ja) * 2000-10-30 2002-05-09 Ckd Corp 圧電ポンプ
JP2005325780A (ja) * 2004-05-14 2005-11-24 Alps Electric Co Ltd 往復動式ポンプ

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Publication number Publication date
JP2008082289A (ja) 2008-04-10

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