JP2008082289A5 - - Google Patents

Download PDF

Info

Publication number
JP2008082289A5
JP2008082289A5 JP2006265186A JP2006265186A JP2008082289A5 JP 2008082289 A5 JP2008082289 A5 JP 2008082289A5 JP 2006265186 A JP2006265186 A JP 2006265186A JP 2006265186 A JP2006265186 A JP 2006265186A JP 2008082289 A5 JP2008082289 A5 JP 2008082289A5
Authority
JP
Japan
Prior art keywords
pump chamber
diaphragm
check valve
side check
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006265186A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008082289A (ja
JP4794401B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006265186A priority Critical patent/JP4794401B2/ja
Priority claimed from JP2006265186A external-priority patent/JP4794401B2/ja
Publication of JP2008082289A publication Critical patent/JP2008082289A/ja
Publication of JP2008082289A5 publication Critical patent/JP2008082289A5/ja
Application granted granted Critical
Publication of JP4794401B2 publication Critical patent/JP4794401B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006265186A 2006-09-28 2006-09-28 マイクロポンプ及びそれを備えた徐放装置 Expired - Fee Related JP4794401B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006265186A JP4794401B2 (ja) 2006-09-28 2006-09-28 マイクロポンプ及びそれを備えた徐放装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006265186A JP4794401B2 (ja) 2006-09-28 2006-09-28 マイクロポンプ及びそれを備えた徐放装置

Publications (3)

Publication Number Publication Date
JP2008082289A JP2008082289A (ja) 2008-04-10
JP2008082289A5 true JP2008082289A5 (enExample) 2008-10-16
JP4794401B2 JP4794401B2 (ja) 2011-10-19

Family

ID=39353397

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006265186A Expired - Fee Related JP4794401B2 (ja) 2006-09-28 2006-09-28 マイクロポンプ及びそれを備えた徐放装置

Country Status (1)

Country Link
JP (1) JP4794401B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6442377B2 (ja) * 2014-10-23 2018-12-19 東京エレクトロン株式会社 ポンプ装置セット及び液供給システム
US10655619B2 (en) 2014-10-23 2020-05-19 Tokyo Electron Limited Pump, pump device, and liquid supply system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0684824B2 (ja) * 1989-05-15 1994-10-26 清水建設株式会社 香り供給方法および香り供給装置
JP2002130137A (ja) * 2000-10-30 2002-05-09 Ckd Corp 圧電ポンプ
JP2005325780A (ja) * 2004-05-14 2005-11-24 Alps Electric Co Ltd 往復動式ポンプ

Similar Documents

Publication Publication Date Title
JP2010519463A5 (enExample)
JP2010522076A5 (enExample)
JP2010519011A5 (enExample)
WO2007114912A3 (en) Check valve diaphragm micropump
EP1892417A3 (en) Rotary lobe pump
EP1772195A3 (en) Pump with suction and pressure control for dry particulate material
EP1369585A3 (en) Pump
RU2007107793A (ru) Ингаляционное устройство
EP2338547A3 (en) Fluid delivery systems
ATE505652T1 (de) Verdichtungssystem
EP1369587A3 (en) Pump valve
JP2018100665A5 (enExample)
WO2009090856A3 (en) Compressor
JP2012032355A5 (enExample)
TWI658211B (zh) Liquid pump
EP1717447A3 (en) Rotary vane compressor
JP2008082289A5 (enExample)
JP2009052509A5 (enExample)
CN204419523U (zh) 一种基于稀土超磁致伸缩材料的微型流量泵
DE602006002258D1 (de) Einstufige Flüssigkeitsringvakuumpumpe mit Saug- und Druckleitungen im zentralen Gehäuse integriert.
JP2007195601A5 (enExample)
EP1624188A3 (en) Plunger pump and method of controlling discharge of the pump
JP5364120B2 (ja) 消音チャンバー及び消音チャンバーを備えたポンプ装置
JP2014525543A (ja) 多連弁ヘッドのコンプレッサ装置
CN112032030A (zh) 一种用于密闭液瓶的多出液口微型泵