JP4782114B2 - 地震計 - Google Patents

地震計 Download PDF

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Publication number
JP4782114B2
JP4782114B2 JP2007517533A JP2007517533A JP4782114B2 JP 4782114 B2 JP4782114 B2 JP 4782114B2 JP 2007517533 A JP2007517533 A JP 2007517533A JP 2007517533 A JP2007517533 A JP 2007517533A JP 4782114 B2 JP4782114 B2 JP 4782114B2
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JP
Japan
Prior art keywords
sensor array
capacitive sensor
piston
proof mass
spring
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Expired - Lifetime
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JP2007517533A
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English (en)
Japanese (ja)
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JP2008500547A5 (https=
JP2008500547A (ja
Inventor
トマス・ウィリアム・パイク
イアン・スタンドレイ
リチャード・サイムス
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
    • G01V1/181—Geophones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Remote Sensing (AREA)
  • Geology (AREA)
  • Acoustics & Sound (AREA)
  • Environmental & Geological Engineering (AREA)
  • Electromagnetism (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geophysics (AREA)
  • Pressure Sensors (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Micromachines (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Vibration Prevention Devices (AREA)
JP2007517533A 2004-05-21 2005-05-20 地震計 Expired - Lifetime JP4782114B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/851,029 2004-05-21
US10/851,029 US7036374B2 (en) 2002-01-25 2004-05-21 Micro-machined suspension plate with integral proof mass for use in a seismometer or other device
PCT/IB2005/003998 WO2006059231A2 (en) 2004-05-21 2005-05-20 Improved micro-machined suspension plate with integral proof mass for use in a seismometer or other device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011092194A Division JP5453599B2 (ja) 2004-05-21 2011-04-18 地震計などのデバイスに用いられる、マイクロ機械加工により製作され、プルーフマスが一体的に形成された、改良したサスペンション・プレート

Publications (3)

Publication Number Publication Date
JP2008500547A JP2008500547A (ja) 2008-01-10
JP2008500547A5 JP2008500547A5 (https=) 2008-06-26
JP4782114B2 true JP4782114B2 (ja) 2011-09-28

Family

ID=36282981

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2007517533A Expired - Lifetime JP4782114B2 (ja) 2004-05-21 2005-05-20 地震計
JP2011092194A Expired - Fee Related JP5453599B2 (ja) 2004-05-21 2011-04-18 地震計などのデバイスに用いられる、マイクロ機械加工により製作され、プルーフマスが一体的に形成された、改良したサスペンション・プレート
JP2013186244A Expired - Fee Related JP5699269B2 (ja) 2004-05-21 2013-09-09 加速度計及びトランスデューサ

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2011092194A Expired - Fee Related JP5453599B2 (ja) 2004-05-21 2011-04-18 地震計などのデバイスに用いられる、マイクロ機械加工により製作され、プルーフマスが一体的に形成された、改良したサスペンション・プレート
JP2013186244A Expired - Fee Related JP5699269B2 (ja) 2004-05-21 2013-09-09 加速度計及びトランスデューサ

Country Status (7)

Country Link
US (1) US7036374B2 (https=)
EP (1) EP1754082B1 (https=)
JP (3) JP4782114B2 (https=)
CN (1) CN101014879B (https=)
CA (1) CA2564680C (https=)
TW (1) TWI368045B (https=)
WO (1) WO2006059231A2 (https=)

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US7036374B2 (en) * 2002-01-25 2006-05-02 William Thomas Pike Micro-machined suspension plate with integral proof mass for use in a seismometer or other device
US7870788B2 (en) * 2002-01-25 2011-01-18 Kinemetrics, Inc. Fabrication process and package design for use in a micro-machined seismometer or other device
CA2569295C (en) * 2006-11-28 2014-04-29 Nanometrics Inc. Seismic sensor
US8065915B2 (en) * 2008-10-08 2011-11-29 Honeywell International Inc. MEMS accelerometer
CA2658143C (en) * 2009-03-06 2013-06-04 Nanometrics Inc. Force-feedback seismometer
US8661901B2 (en) 2009-03-19 2014-03-04 Hewlett-Packard Development Company, L.P. Three phase capacitance-based sensing
JP5652966B2 (ja) 2009-05-13 2015-01-14 シナプティクス インコーポレイテッド 静電容量センサデバイス
US8307710B2 (en) * 2009-07-09 2012-11-13 Honeywell International Inc. Translational mass in-plane MEMS accelerometer
DE102011076555B4 (de) * 2011-05-26 2019-11-07 Robert Bosch Gmbh Mikromechanisches Bauelement mit einer Dämpfungseinrichtung
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FR3011334B1 (fr) * 2013-09-27 2017-06-09 Centre Nat Rech Scient Capteur sismique
US10161956B2 (en) * 2016-04-25 2018-12-25 Honeywell International Inc. Reducing bias in an accelerometer via a pole piece
EP3252444B1 (en) 2016-06-01 2023-12-20 Sonion Nederland B.V. Vibration or acceleration sensor applying squeeze film damping
US10947108B2 (en) 2016-12-30 2021-03-16 Sonion Nederland B.V. Micro-electromechanical transducer
CN109188021B (zh) * 2018-08-30 2020-06-16 太原理工大学 低频微加速度传感器的多孔弹簧悬臂敏感结构
IT201900016091A1 (it) * 2019-09-11 2021-03-11 Ima Spa Apparato e metodo per neutralizzare elettricità statica presente sulla superficie di contenitori e/o vassoi portacontenitori.
CN112782428A (zh) * 2019-11-07 2021-05-11 霍尼韦尔国际公司 具有压力阻尼的振梁加速度计
CN112782426B (zh) * 2019-11-07 2026-02-17 霍尼韦尔国际公司 包括一个或多个具有附加质量块的机械梁的谐振器
CN113296144B (zh) * 2020-02-24 2024-05-24 防灾科技学院 一种阻尼调零的地震计

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Also Published As

Publication number Publication date
JP5699269B2 (ja) 2015-04-08
JP2014059303A (ja) 2014-04-03
WO2006059231A3 (en) 2006-08-24
TWI368045B (en) 2012-07-11
CA2564680A1 (en) 2006-06-08
TW200604556A (en) 2006-02-01
US7036374B2 (en) 2006-05-02
EP1754082B1 (en) 2013-03-27
WO2006059231A2 (en) 2006-06-08
JP2011185943A (ja) 2011-09-22
CA2564680C (en) 2014-04-01
EP1754082A2 (en) 2007-02-21
CN101014879B (zh) 2010-05-05
JP5453599B2 (ja) 2014-03-26
CN101014879A (zh) 2007-08-08
US20050097959A1 (en) 2005-05-12
JP2008500547A (ja) 2008-01-10

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