CA2564680C - Improved micro-machined suspension plate with integral proof mass for use in a seismometer or other device - Google Patents
Improved micro-machined suspension plate with integral proof mass for use in a seismometer or other device Download PDFInfo
- Publication number
- CA2564680C CA2564680C CA2564680A CA2564680A CA2564680C CA 2564680 C CA2564680 C CA 2564680C CA 2564680 A CA2564680 A CA 2564680A CA 2564680 A CA2564680 A CA 2564680A CA 2564680 C CA2564680 C CA 2564680C
- Authority
- CA
- Canada
- Prior art keywords
- proof mass
- capacitive sensor
- accelerometer
- sensor array
- half portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000725 suspension Substances 0.000 title claims abstract description 64
- 230000033001 locomotion Effects 0.000 claims abstract description 38
- 238000013016 damping Methods 0.000 claims abstract description 17
- 230000000694 effects Effects 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 9
- 230000001133 acceleration Effects 0.000 claims description 6
- 238000013459 approach Methods 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims 10
- 238000010168 coupling process Methods 0.000 claims 10
- 238000005859 coupling reaction Methods 0.000 claims 10
- 230000000737 periodic effect Effects 0.000 claims 8
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000003491 array Methods 0.000 claims 3
- 125000004122 cyclic group Chemical group 0.000 claims 2
- 230000001351 cycling effect Effects 0.000 claims 2
- 230000005284 excitation Effects 0.000 claims 2
- 230000003993 interaction Effects 0.000 claims 2
- 238000012886 linear function Methods 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 2
- 230000011664 signaling Effects 0.000 claims 2
- 208000031481 Pathologic Constriction Diseases 0.000 claims 1
- 238000003801 milling Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 18
- 238000013461 design Methods 0.000 description 16
- 238000000034 method Methods 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 11
- 238000006073 displacement reaction Methods 0.000 description 8
- 230000004044 response Effects 0.000 description 7
- 230000005484 gravity Effects 0.000 description 5
- 230000035939 shock Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000000708 deep reactive-ion etching Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000008030 elimination Effects 0.000 description 2
- 238000003379 elimination reaction Methods 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
- 239000003190 viscoelastic substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
- G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
- G01V1/181—Geophones
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Remote Sensing (AREA)
- Geology (AREA)
- Acoustics & Sound (AREA)
- Environmental & Geological Engineering (AREA)
- Electromagnetism (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geophysics (AREA)
- Pressure Sensors (AREA)
- Geophysics And Detection Of Objects (AREA)
- Micromachines (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Vibration Prevention Devices (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/851,029 | 2004-05-21 | ||
| US10/851,029 US7036374B2 (en) | 2002-01-25 | 2004-05-21 | Micro-machined suspension plate with integral proof mass for use in a seismometer or other device |
| PCT/IB2005/003998 WO2006059231A2 (en) | 2004-05-21 | 2005-05-20 | Improved micro-machined suspension plate with integral proof mass for use in a seismometer or other device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2564680A1 CA2564680A1 (en) | 2006-06-08 |
| CA2564680C true CA2564680C (en) | 2014-04-01 |
Family
ID=36282981
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2564680A Expired - Lifetime CA2564680C (en) | 2004-05-21 | 2005-05-20 | Improved micro-machined suspension plate with integral proof mass for use in a seismometer or other device |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7036374B2 (https=) |
| EP (1) | EP1754082B1 (https=) |
| JP (3) | JP4782114B2 (https=) |
| CN (1) | CN101014879B (https=) |
| CA (1) | CA2564680C (https=) |
| TW (1) | TWI368045B (https=) |
| WO (1) | WO2006059231A2 (https=) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7036374B2 (en) * | 2002-01-25 | 2006-05-02 | William Thomas Pike | Micro-machined suspension plate with integral proof mass for use in a seismometer or other device |
| US7870788B2 (en) * | 2002-01-25 | 2011-01-18 | Kinemetrics, Inc. | Fabrication process and package design for use in a micro-machined seismometer or other device |
| CA2569295C (en) * | 2006-11-28 | 2014-04-29 | Nanometrics Inc. | Seismic sensor |
| US8065915B2 (en) * | 2008-10-08 | 2011-11-29 | Honeywell International Inc. | MEMS accelerometer |
| CA2658143C (en) * | 2009-03-06 | 2013-06-04 | Nanometrics Inc. | Force-feedback seismometer |
| US8661901B2 (en) | 2009-03-19 | 2014-03-04 | Hewlett-Packard Development Company, L.P. | Three phase capacitance-based sensing |
| JP5652966B2 (ja) | 2009-05-13 | 2015-01-14 | シナプティクス インコーポレイテッド | 静電容量センサデバイス |
| US8307710B2 (en) * | 2009-07-09 | 2012-11-13 | Honeywell International Inc. | Translational mass in-plane MEMS accelerometer |
| DE102011076555B4 (de) * | 2011-05-26 | 2019-11-07 | Robert Bosch Gmbh | Mikromechanisches Bauelement mit einer Dämpfungseinrichtung |
| CN103596874A (zh) | 2011-06-28 | 2014-02-19 | 惠普发展公司，有限责任合伙企业 | 平面外移动限制结构 |
| FR3011334B1 (fr) * | 2013-09-27 | 2017-06-09 | Centre Nat Rech Scient | Capteur sismique |
| US10161956B2 (en) * | 2016-04-25 | 2018-12-25 | Honeywell International Inc. | Reducing bias in an accelerometer via a pole piece |
| EP3252444B1 (en) | 2016-06-01 | 2023-12-20 | Sonion Nederland B.V. | Vibration or acceleration sensor applying squeeze film damping |
| US10947108B2 (en) | 2016-12-30 | 2021-03-16 | Sonion Nederland B.V. | Micro-electromechanical transducer |
| CN109188021B (zh) * | 2018-08-30 | 2020-06-16 | 太原理工大学 | 低频微加速度传感器的多孔弹簧悬臂敏感结构 |
| IT201900016091A1 (it) * | 2019-09-11 | 2021-03-11 | Ima Spa | Apparato e metodo per neutralizzare elettricità statica presente sulla superficie di contenitori e/o vassoi portacontenitori. |
| CN112782428A (zh) * | 2019-11-07 | 2021-05-11 | 霍尼韦尔国际公司 | 具有压力阻尼的振梁加速度计 |
| CN112782426B (zh) * | 2019-11-07 | 2026-02-17 | 霍尼韦尔国际公司 | 包括一个或多个具有附加质量块的机械梁的谐振器 |
| CN113296144B (zh) * | 2020-02-24 | 2024-05-24 | 防灾科技学院 | 一种阻尼调零的地震计 |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4280206A (en) * | 1978-03-15 | 1981-07-21 | National Research Development Corporation | Seismometers |
| US4586260A (en) * | 1984-05-29 | 1986-05-06 | The L. S. Starrett Company | Capacitive displacement measuring instrument |
| US4879508A (en) * | 1986-04-04 | 1989-11-07 | Mitutoyo Corporation | Capacitance-type measuring device for absolute measurement of positions |
| US5153494A (en) * | 1990-04-06 | 1992-10-06 | International Business Machines Corp. | Ultrafast electro-dynamic x, y and theta positioning stage |
| JP3135721B2 (ja) * | 1992-11-20 | 2001-02-19 | キヤノン株式会社 | 励振動型光検出角速度センサ |
| DE4400127C2 (de) * | 1994-01-05 | 2003-08-14 | Bosch Gmbh Robert | Kapazitiver Beschleunigungssensor und Verfahren zu seiner Herstellung |
| US5524488A (en) * | 1994-01-24 | 1996-06-11 | Alliedsignal Inc. | Flux control groove |
| US5447068A (en) * | 1994-03-31 | 1995-09-05 | Ford Motor Company | Digital capacitive accelerometer |
| KR100336151B1 (ko) * | 1994-06-27 | 2002-09-05 | 세르게이 페오도시에비키 코노발로브 | 서보 가속도계 |
| US5834864A (en) * | 1995-09-13 | 1998-11-10 | Hewlett Packard Company | Magnetic micro-mover |
| JPH1090299A (ja) * | 1996-09-12 | 1998-04-10 | Mitsubishi Electric Corp | 静電容量式加速度センサ |
| JP3278363B2 (ja) * | 1996-11-18 | 2002-04-30 | 三菱電機株式会社 | 半導体加速度センサ |
| FR2764706B1 (fr) * | 1997-06-17 | 1999-07-09 | Commissariat Energie Atomique | Accelerometre miniaturise du type a compensation par ressort de l'effet de la pesanteur et son procede de fabrication |
| US6065341A (en) * | 1998-02-18 | 2000-05-23 | Denso Corporation | Semiconductor physical quantity sensor with stopper portion |
| DE19817357B4 (de) * | 1998-04-18 | 2008-10-30 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
| US6196067B1 (en) * | 1998-05-05 | 2001-03-06 | California Institute Of Technology | Silicon micromachined accelerometer/seismometer and method of making the same |
| US6105427A (en) * | 1998-07-31 | 2000-08-22 | Litton Systems, Inc. | Micro-mechanical semiconductor accelerometer |
| US6308569B1 (en) * | 1999-07-30 | 2001-10-30 | Litton Systems, Inc. | Micro-mechanical inertial sensors |
| EP1083430B1 (en) * | 1999-09-10 | 2006-07-26 | STMicroelectronics S.r.l. | Semiconductor integrated inertial sensor with calibration microactuator |
| JP2002013931A (ja) * | 2000-06-29 | 2002-01-18 | Matsushita Electric Ind Co Ltd | 角速度・加速度センサの梁構造 |
| DE10038761A1 (de) * | 2000-08-09 | 2002-02-21 | Bosch Gmbh Robert | Beschleunigungssensor |
| US6481286B1 (en) * | 2000-08-30 | 2002-11-19 | The Charles Stark Draper Laboratory, Inc. | Reentrant microwave resonant cavity accelerometer |
| JP3512004B2 (ja) * | 2000-12-20 | 2004-03-29 | トヨタ自動車株式会社 | 力学量検出装置 |
| DE10118340A1 (de) * | 2001-04-12 | 2002-10-24 | Bosch Gmbh Robert | Vorrichtung zur Messung einer Beschleunigung und/oder einer Drehrate |
| US6776042B2 (en) * | 2002-01-25 | 2004-08-17 | Kinemetrics, Inc. | Micro-machined accelerometer |
| US7036374B2 (en) * | 2002-01-25 | 2006-05-02 | William Thomas Pike | Micro-machined suspension plate with integral proof mass for use in a seismometer or other device |
| JP2003344445A (ja) * | 2002-05-24 | 2003-12-03 | Mitsubishi Electric Corp | 慣性力センサ |
| FR2840906B1 (fr) | 2002-06-12 | 2004-07-16 | Commissariat Energie Atomique | Derives de per(3,6-anhydro) cyclodextrines, leur preparation et leur utilisation pour separer des ions, notamment des anions a base de chrome et de manganese |
-
2004
- 2004-05-21 US US10/851,029 patent/US7036374B2/en not_active Expired - Lifetime
-
2005
- 2005-05-19 TW TW094116335A patent/TWI368045B/zh not_active IP Right Cessation
- 2005-05-20 WO PCT/IB2005/003998 patent/WO2006059231A2/en not_active Ceased
- 2005-05-20 CA CA2564680A patent/CA2564680C/en not_active Expired - Lifetime
- 2005-05-20 CN CN2005800163915A patent/CN101014879B/zh not_active Expired - Lifetime
- 2005-05-20 JP JP2007517533A patent/JP4782114B2/ja not_active Expired - Lifetime
- 2005-05-20 EP EP05850742A patent/EP1754082B1/en not_active Expired - Lifetime
-
2011
- 2011-04-18 JP JP2011092194A patent/JP5453599B2/ja not_active Expired - Fee Related
-
2013
- 2013-09-09 JP JP2013186244A patent/JP5699269B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP5699269B2 (ja) | 2015-04-08 |
| JP2014059303A (ja) | 2014-04-03 |
| WO2006059231A3 (en) | 2006-08-24 |
| JP4782114B2 (ja) | 2011-09-28 |
| TWI368045B (en) | 2012-07-11 |
| CA2564680A1 (en) | 2006-06-08 |
| TW200604556A (en) | 2006-02-01 |
| US7036374B2 (en) | 2006-05-02 |
| EP1754082B1 (en) | 2013-03-27 |
| WO2006059231A2 (en) | 2006-06-08 |
| JP2011185943A (ja) | 2011-09-22 |
| EP1754082A2 (en) | 2007-02-21 |
| CN101014879B (zh) | 2010-05-05 |
| JP5453599B2 (ja) | 2014-03-26 |
| CN101014879A (zh) | 2007-08-08 |
| US20050097959A1 (en) | 2005-05-12 |
| JP2008500547A (ja) | 2008-01-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA2564680C (en) | Improved micro-machined suspension plate with integral proof mass for use in a seismometer or other device | |
| US6776042B2 (en) | Micro-machined accelerometer | |
| US9869796B2 (en) | Fabrication process and package design for use in a micro-machined seismometer or other device | |
| US20180252739A1 (en) | Vibration damping mount | |
| US20180230005A1 (en) | Mems isolation platform with three-dimensional vibration and stress isolation | |
| JPH09119943A (ja) | 加速度センサ | |
| US20170276697A1 (en) | Measurement of Acceleration | |
| Beitia et al. | Quartz pendulous accelerometers for navigation and tactical grade systems | |
| US10802040B2 (en) | Acceleration sensor | |
| US6128956A (en) | Active cover accelerometer | |
| US6269698B1 (en) | Vibrating beam force sensor | |
| CN101281032B (zh) | 倾斜角传感器以及具备倾斜角传感器的被检测装置 | |
| CN117471562A (zh) | 隔振系统及相对重力仪 | |
| Elwenspoek et al. | Acceleration and Angular Rate Sensors |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request |