CN101014879B - 用于地震仪或其它装置中的微机械悬浮板 - Google Patents

用于地震仪或其它装置中的微机械悬浮板 Download PDF

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Publication number
CN101014879B
CN101014879B CN2005800163915A CN200580016391A CN101014879B CN 101014879 B CN101014879 B CN 101014879B CN 2005800163915 A CN2005800163915 A CN 2005800163915A CN 200580016391 A CN200580016391 A CN 200580016391A CN 101014879 B CN101014879 B CN 101014879B
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CN
China
Prior art keywords
proof mass
sensor array
half parts
capacitance sensor
motion
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Expired - Lifetime
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CN2005800163915A
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English (en)
Chinese (zh)
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CN101014879A (zh
Inventor
威廉·托马斯·派克
艾安·斯坦德利
理查德·西姆斯
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Kinemetrics Inc
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Kinemetrics Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
    • G01V1/181—Geophones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Remote Sensing (AREA)
  • Geology (AREA)
  • Acoustics & Sound (AREA)
  • Environmental & Geological Engineering (AREA)
  • Electromagnetism (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geophysics (AREA)
  • Pressure Sensors (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Micromachines (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Vibration Prevention Devices (AREA)
CN2005800163915A 2004-05-21 2005-05-20 用于地震仪或其它装置中的微机械悬浮板 Expired - Lifetime CN101014879B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/851,029 2004-05-21
US10/851,029 US7036374B2 (en) 2002-01-25 2004-05-21 Micro-machined suspension plate with integral proof mass for use in a seismometer or other device
PCT/IB2005/003998 WO2006059231A2 (en) 2004-05-21 2005-05-20 Improved micro-machined suspension plate with integral proof mass for use in a seismometer or other device

Publications (2)

Publication Number Publication Date
CN101014879A CN101014879A (zh) 2007-08-08
CN101014879B true CN101014879B (zh) 2010-05-05

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CN2005800163915A Expired - Lifetime CN101014879B (zh) 2004-05-21 2005-05-20 用于地震仪或其它装置中的微机械悬浮板

Country Status (7)

Country Link
US (1) US7036374B2 (https=)
EP (1) EP1754082B1 (https=)
JP (3) JP4782114B2 (https=)
CN (1) CN101014879B (https=)
CA (1) CA2564680C (https=)
TW (1) TWI368045B (https=)
WO (1) WO2006059231A2 (https=)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7036374B2 (en) * 2002-01-25 2006-05-02 William Thomas Pike Micro-machined suspension plate with integral proof mass for use in a seismometer or other device
US7870788B2 (en) * 2002-01-25 2011-01-18 Kinemetrics, Inc. Fabrication process and package design for use in a micro-machined seismometer or other device
CA2569295C (en) * 2006-11-28 2014-04-29 Nanometrics Inc. Seismic sensor
US8065915B2 (en) * 2008-10-08 2011-11-29 Honeywell International Inc. MEMS accelerometer
CA2658143C (en) * 2009-03-06 2013-06-04 Nanometrics Inc. Force-feedback seismometer
US8661901B2 (en) 2009-03-19 2014-03-04 Hewlett-Packard Development Company, L.P. Three phase capacitance-based sensing
JP5652966B2 (ja) 2009-05-13 2015-01-14 シナプティクス インコーポレイテッド 静電容量センサデバイス
US8307710B2 (en) * 2009-07-09 2012-11-13 Honeywell International Inc. Translational mass in-plane MEMS accelerometer
DE102011076555B4 (de) * 2011-05-26 2019-11-07 Robert Bosch Gmbh Mikromechanisches Bauelement mit einer Dämpfungseinrichtung
CN103596874A (zh) 2011-06-28 2014-02-19 惠普发展公司，有限责任合伙企业 平面外移动限制结构
FR3011334B1 (fr) * 2013-09-27 2017-06-09 Centre Nat Rech Scient Capteur sismique
US10161956B2 (en) * 2016-04-25 2018-12-25 Honeywell International Inc. Reducing bias in an accelerometer via a pole piece
EP3252444B1 (en) 2016-06-01 2023-12-20 Sonion Nederland B.V. Vibration or acceleration sensor applying squeeze film damping
US10947108B2 (en) 2016-12-30 2021-03-16 Sonion Nederland B.V. Micro-electromechanical transducer
CN109188021B (zh) * 2018-08-30 2020-06-16 太原理工大学 低频微加速度传感器的多孔弹簧悬臂敏感结构
IT201900016091A1 (it) * 2019-09-11 2021-03-11 Ima Spa Apparato e metodo per neutralizzare elettricità statica presente sulla superficie di contenitori e/o vassoi portacontenitori.
CN112782428A (zh) * 2019-11-07 2021-05-11 霍尼韦尔国际公司 具有压力阻尼的振梁加速度计
CN112782426B (zh) * 2019-11-07 2026-02-17 霍尼韦尔国际公司 包括一个或多个具有附加质量块的机械梁的谐振器
CN113296144B (zh) * 2020-02-24 2024-05-24 防灾科技学院 一种阻尼调零的地震计

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6065341A (en) * 1998-02-18 2000-05-23 Denso Corporation Semiconductor physical quantity sensor with stopper portion
US6272926B1 (en) * 1998-04-18 2001-08-14 Robert Bosch Gmbh Micromechanical component
DE10038761A1 (de) * 2000-08-09 2002-02-21 Bosch Gmbh Robert Beschleunigungssensor
DE10118340A1 (de) * 2001-04-12 2002-10-24 Bosch Gmbh Robert Vorrichtung zur Messung einer Beschleunigung und/oder einer Drehrate

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4280206A (en) * 1978-03-15 1981-07-21 National Research Development Corporation Seismometers
US4586260A (en) * 1984-05-29 1986-05-06 The L. S. Starrett Company Capacitive displacement measuring instrument
US4879508A (en) * 1986-04-04 1989-11-07 Mitutoyo Corporation Capacitance-type measuring device for absolute measurement of positions
US5153494A (en) * 1990-04-06 1992-10-06 International Business Machines Corp. Ultrafast electro-dynamic x, y and theta positioning stage
JP3135721B2 (ja) * 1992-11-20 2001-02-19 キヤノン株式会社 励振動型光検出角速度センサ
DE4400127C2 (de) * 1994-01-05 2003-08-14 Bosch Gmbh Robert Kapazitiver Beschleunigungssensor und Verfahren zu seiner Herstellung
US5524488A (en) * 1994-01-24 1996-06-11 Alliedsignal Inc. Flux control groove
US5447068A (en) * 1994-03-31 1995-09-05 Ford Motor Company Digital capacitive accelerometer
KR100336151B1 (ko) * 1994-06-27 2002-09-05 세르게이 페오도시에비키 코노발로브 서보 가속도계
US5834864A (en) * 1995-09-13 1998-11-10 Hewlett Packard Company Magnetic micro-mover
JPH1090299A (ja) * 1996-09-12 1998-04-10 Mitsubishi Electric Corp 静電容量式加速度センサ
JP3278363B2 (ja) * 1996-11-18 2002-04-30 三菱電機株式会社 半導体加速度センサ
FR2764706B1 (fr) * 1997-06-17 1999-07-09 Commissariat Energie Atomique Accelerometre miniaturise du type a compensation par ressort de l'effet de la pesanteur et son procede de fabrication
US6196067B1 (en) * 1998-05-05 2001-03-06 California Institute Of Technology Silicon micromachined accelerometer/seismometer and method of making the same
US6105427A (en) * 1998-07-31 2000-08-22 Litton Systems, Inc. Micro-mechanical semiconductor accelerometer
US6308569B1 (en) * 1999-07-30 2001-10-30 Litton Systems, Inc. Micro-mechanical inertial sensors
EP1083430B1 (en) * 1999-09-10 2006-07-26 STMicroelectronics S.r.l. Semiconductor integrated inertial sensor with calibration microactuator
JP2002013931A (ja) * 2000-06-29 2002-01-18 Matsushita Electric Ind Co Ltd 角速度・加速度センサの梁構造
US6481286B1 (en) * 2000-08-30 2002-11-19 The Charles Stark Draper Laboratory, Inc. Reentrant microwave resonant cavity accelerometer
JP3512004B2 (ja) * 2000-12-20 2004-03-29 トヨタ自動車株式会社 力学量検出装置
US6776042B2 (en) * 2002-01-25 2004-08-17 Kinemetrics, Inc. Micro-machined accelerometer
US7036374B2 (en) * 2002-01-25 2006-05-02 William Thomas Pike Micro-machined suspension plate with integral proof mass for use in a seismometer or other device
JP2003344445A (ja) * 2002-05-24 2003-12-03 Mitsubishi Electric Corp 慣性力センサ
FR2840906B1 (fr) 2002-06-12 2004-07-16 Commissariat Energie Atomique Derives de per(3,6-anhydro) cyclodextrines, leur preparation et leur utilisation pour separer des ions, notamment des anions a base de chrome et de manganese

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6065341A (en) * 1998-02-18 2000-05-23 Denso Corporation Semiconductor physical quantity sensor with stopper portion
US6272926B1 (en) * 1998-04-18 2001-08-14 Robert Bosch Gmbh Micromechanical component
DE10038761A1 (de) * 2000-08-09 2002-02-21 Bosch Gmbh Robert Beschleunigungssensor
DE10118340A1 (de) * 2001-04-12 2002-10-24 Bosch Gmbh Robert Vorrichtung zur Messung einer Beschleunigung und/oder einer Drehrate

Also Published As

Publication number Publication date
JP5699269B2 (ja) 2015-04-08
JP2014059303A (ja) 2014-04-03
WO2006059231A3 (en) 2006-08-24
JP4782114B2 (ja) 2011-09-28
TWI368045B (en) 2012-07-11
CA2564680A1 (en) 2006-06-08
TW200604556A (en) 2006-02-01
US7036374B2 (en) 2006-05-02
EP1754082B1 (en) 2013-03-27
WO2006059231A2 (en) 2006-06-08
JP2011185943A (ja) 2011-09-22
CA2564680C (en) 2014-04-01
EP1754082A2 (en) 2007-02-21
JP5453599B2 (ja) 2014-03-26
CN101014879A (zh) 2007-08-08
US20050097959A1 (en) 2005-05-12
JP2008500547A (ja) 2008-01-10

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