JP4782114B2 - 地震計 - Google Patents
地震計 Download PDFInfo
- Publication number
- JP4782114B2 JP4782114B2 JP2007517533A JP2007517533A JP4782114B2 JP 4782114 B2 JP4782114 B2 JP 4782114B2 JP 2007517533 A JP2007517533 A JP 2007517533A JP 2007517533 A JP2007517533 A JP 2007517533A JP 4782114 B2 JP4782114 B2 JP 4782114B2
- Authority
- JP
- Japan
- Prior art keywords
- sensor array
- capacitive sensor
- piston
- proof mass
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
- G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
- G01V1/181—Geophones
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Remote Sensing (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Geology (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Geophysics (AREA)
- Electromagnetism (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
- Geophysics And Detection Of Objects (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Vibration Prevention Devices (AREA)
Description
Claims (4)
- 地震計において、
少なくとも1枚の固定された容量性プレートを備え、
前記固定された容量性プレートの表面に設けられた第1容量性センサ・アレイを備え、該第1容量性センサ・アレイは周期的パターンを成す複数の導電性エレメントを有しており、
サスペンション・プレートを備え、該サスペンション・プレートは複数の可撓性エレメントにより支持されたプルーフマスを有しており、前記複数の可撓性エレメントは前記プルーフマスの運動を単一の軸方向の運動だけに規制するものであり、前記複数の可撓性エレメントの間に少なくとも1つの中間枠体が介設されており、該中間枠体はスプリアス振動周波数を排除することによって前記地震計の有効動作帯域幅を広げるものであり、
前記プルーフマスの表面に設けられた第2容量性センサ・アレイを備え、該第2容量性センサ・アレイは周期的パターンを成す複数の導電性エレメントを有しており、該複数の導電性エレメントは、前記第1容量性センサ・アレイの前記複数の導電性エレメントと平行な共通の方向の周期性を持ち、間隔をあけて対向して整列されており、
前記固定されたプレートに設けられた前記第1容量性センサ・アレイに接続するための電気的接続手段を備え、該電気的接続手段によって、外部構成要素から、周期的パターンを成す前記第1容量性センサ・アレイを介して周期的パターンを成す前記第2容量性センサ・アレイへ、周期的励振信号を結合できるようにしてあり、これにより結合される信号は0%から100%までの範囲内で変動し、且つ、前記固定されたプレートに対する前記プルーフマスの周期的相対位置の指標となり、
前記プルーフマスに設けられた前記第2容量性センサ・アレイに接続するための電気的接続手段を備え、該電気的接続手段は、前記第1容量性センサ・アレイから前記第2容量性センサ・アレイへの結合によって発生した信号を外部電子回路へ伝達するものであり、該外部電子回路が、前記第1容量性センサ・アレイと前記第2容量性センサ・アレイとの間の結合のパーセンテージを判定して、前記固定されたプレートに対する前記プルーフマスの相対位置を表す信号に変換するようにしてある、
ことを特徴とする地震計。 - 前記サスペンション・プレートが更にスプリング/ガスダンピング構造を備えており、該スプリング/ガスダンピング構造が、
最外側の中間枠体に設けられた台形のピストンを備え、
前記サスペンション・プレートの内側面に設けられた、前記ピストンに対応した嵌合開口を備え、前記最外側の中間枠体が前記サスペンション・プレートの内側面に近付くと、前記ピストンが前記嵌合開口に嵌合してその中へ進入し、これによって、前記最外側の中間枠体が前記サスペンション・プレートの前記内側面に当接する前にダンピング作用が得られるようにしてある、
ことを特徴とする請求項1記載の地震計。 - 前記ピストンが、
第1半体部分を備え、
第2半体部分を備え、該第2半体部分は、小さな抵抗用スプリングを介して前記第1半体部分に結合されており、前記ピストンが前記スプリング/ガスダンピング構造の前記開口に更に進入する際に、前記ピストンの前記第2半体部分が前記第1半体部分の方へ押し付けられることにより、前記抵抗用スプリングが前記第2半体部分に対して力を作用させるようにしてある、
ことを特徴とする請求項2記載の地震計。 - 前記ピストンが、
第1半体部分を備え、
第2半体部分を備え、
前記第1半体部分と前記第2半体部分との間に介装されたダンピング材を備え、前記ピストンが前記スプリング/ガスダンピング構造の前記開口に更に進入する際に、前記ピストンの前記第2半体部分が前記第1半体部分の方へ押し付けられることにより、前記ダンピング材が前記第2半体部分に対して抵抗力及び散逸力を作用させるようにしてある、
ことを特徴とする請求項2記載の地震計。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/851,029 | 2004-05-21 | ||
US10/851,029 US7036374B2 (en) | 2002-01-25 | 2004-05-21 | Micro-machined suspension plate with integral proof mass for use in a seismometer or other device |
PCT/IB2005/003998 WO2006059231A2 (en) | 2004-05-21 | 2005-05-20 | Improved micro-machined suspension plate with integral proof mass for use in a seismometer or other device |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011092194A Division JP5453599B2 (ja) | 2004-05-21 | 2011-04-18 | 地震計などのデバイスに用いられる、マイクロ機械加工により製作され、プルーフマスが一体的に形成された、改良したサスペンション・プレート |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008500547A JP2008500547A (ja) | 2008-01-10 |
JP2008500547A5 JP2008500547A5 (ja) | 2008-06-26 |
JP4782114B2 true JP4782114B2 (ja) | 2011-09-28 |
Family
ID=36282981
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007517533A Active JP4782114B2 (ja) | 2004-05-21 | 2005-05-20 | 地震計 |
JP2011092194A Active JP5453599B2 (ja) | 2004-05-21 | 2011-04-18 | 地震計などのデバイスに用いられる、マイクロ機械加工により製作され、プルーフマスが一体的に形成された、改良したサスペンション・プレート |
JP2013186244A Active JP5699269B2 (ja) | 2004-05-21 | 2013-09-09 | 加速度計及びトランスデューサ |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011092194A Active JP5453599B2 (ja) | 2004-05-21 | 2011-04-18 | 地震計などのデバイスに用いられる、マイクロ機械加工により製作され、プルーフマスが一体的に形成された、改良したサスペンション・プレート |
JP2013186244A Active JP5699269B2 (ja) | 2004-05-21 | 2013-09-09 | 加速度計及びトランスデューサ |
Country Status (7)
Country | Link |
---|---|
US (1) | US7036374B2 (ja) |
EP (1) | EP1754082B1 (ja) |
JP (3) | JP4782114B2 (ja) |
CN (1) | CN101014879B (ja) |
CA (1) | CA2564680C (ja) |
TW (1) | TWI368045B (ja) |
WO (1) | WO2006059231A2 (ja) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7870788B2 (en) * | 2002-01-25 | 2011-01-18 | Kinemetrics, Inc. | Fabrication process and package design for use in a micro-machined seismometer or other device |
US7036374B2 (en) * | 2002-01-25 | 2006-05-02 | William Thomas Pike | Micro-machined suspension plate with integral proof mass for use in a seismometer or other device |
CA2569295C (en) * | 2006-11-28 | 2014-04-29 | Nanometrics Inc. | Seismic sensor |
US8065915B2 (en) * | 2008-10-08 | 2011-11-29 | Honeywell International Inc. | MEMS accelerometer |
CA2658143C (en) * | 2009-03-06 | 2013-06-04 | Nanometrics Inc. | Force-feedback seismometer |
CN102356323B (zh) | 2009-03-19 | 2014-07-30 | 惠普开发有限公司 | 基于三相电容的感测 |
CN105424067B (zh) | 2009-05-13 | 2019-04-09 | 辛纳普蒂克斯公司 | 电容传感器装置 |
US8307710B2 (en) * | 2009-07-09 | 2012-11-13 | Honeywell International Inc. | Translational mass in-plane MEMS accelerometer |
DE102011076555B4 (de) * | 2011-05-26 | 2019-11-07 | Robert Bosch Gmbh | Mikromechanisches Bauelement mit einer Dämpfungseinrichtung |
CN103596874A (zh) | 2011-06-28 | 2014-02-19 | 惠普发展公司,有限责任合伙企业 | 平面外移动限制结构 |
FR3011334B1 (fr) * | 2013-09-27 | 2017-06-09 | Centre Nat Rech Scient | Capteur sismique |
US10161956B2 (en) * | 2016-04-25 | 2018-12-25 | Honeywell International Inc. | Reducing bias in an accelerometer via a pole piece |
US10078097B2 (en) | 2016-06-01 | 2018-09-18 | Sonion Nederland B.V. | Vibration or acceleration sensor applying squeeze film damping |
US10947108B2 (en) | 2016-12-30 | 2021-03-16 | Sonion Nederland B.V. | Micro-electromechanical transducer |
CN109188021B (zh) * | 2018-08-30 | 2020-06-16 | 太原理工大学 | 低频微加速度传感器的多孔弹簧悬臂敏感结构 |
IT201900016091A1 (it) * | 2019-09-11 | 2021-03-11 | Ima Spa | Apparato e metodo per neutralizzare elettricità statica presente sulla superficie di contenitori e/o vassoi portacontenitori. |
CN113296144B (zh) * | 2020-02-24 | 2024-05-24 | 防灾科技学院 | 一种阻尼调零的地震计 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002188923A (ja) * | 2000-12-20 | 2002-07-05 | Toyota Motor Corp | 力学量検出装置 |
US20030140699A1 (en) * | 2002-01-25 | 2003-07-31 | Pike William Thomas | Micro-machined accelerometer |
JP2003344445A (ja) * | 2002-05-24 | 2003-12-03 | Mitsubishi Electric Corp | 慣性力センサ |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4280206A (en) * | 1978-03-15 | 1981-07-21 | National Research Development Corporation | Seismometers |
US4586260A (en) * | 1984-05-29 | 1986-05-06 | The L. S. Starrett Company | Capacitive displacement measuring instrument |
US4879508A (en) * | 1986-04-04 | 1989-11-07 | Mitutoyo Corporation | Capacitance-type measuring device for absolute measurement of positions |
US5153494A (en) * | 1990-04-06 | 1992-10-06 | International Business Machines Corp. | Ultrafast electro-dynamic x, y and theta positioning stage |
JP3135721B2 (ja) * | 1992-11-20 | 2001-02-19 | キヤノン株式会社 | 励振動型光検出角速度センサ |
DE4400127C2 (de) * | 1994-01-05 | 2003-08-14 | Bosch Gmbh Robert | Kapazitiver Beschleunigungssensor und Verfahren zu seiner Herstellung |
US5524488A (en) * | 1994-01-24 | 1996-06-11 | Alliedsignal Inc. | Flux control groove |
US5447068A (en) * | 1994-03-31 | 1995-09-05 | Ford Motor Company | Digital capacitive accelerometer |
WO1996010185A1 (fr) * | 1994-06-27 | 1996-04-04 | Sergei Feodosievich Konovalov | Accelerometre a compensation |
US5834864A (en) * | 1995-09-13 | 1998-11-10 | Hewlett Packard Company | Magnetic micro-mover |
JPH1090299A (ja) * | 1996-09-12 | 1998-04-10 | Mitsubishi Electric Corp | 静電容量式加速度センサ |
JP3278363B2 (ja) * | 1996-11-18 | 2002-04-30 | 三菱電機株式会社 | 半導体加速度センサ |
FR2764706B1 (fr) * | 1997-06-17 | 1999-07-09 | Commissariat Energie Atomique | Accelerometre miniaturise du type a compensation par ressort de l'effet de la pesanteur et son procede de fabrication |
US6065341A (en) * | 1998-02-18 | 2000-05-23 | Denso Corporation | Semiconductor physical quantity sensor with stopper portion |
DE19817357B4 (de) * | 1998-04-18 | 2008-10-30 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
US6196067B1 (en) * | 1998-05-05 | 2001-03-06 | California Institute Of Technology | Silicon micromachined accelerometer/seismometer and method of making the same |
US6105427A (en) * | 1998-07-31 | 2000-08-22 | Litton Systems, Inc. | Micro-mechanical semiconductor accelerometer |
US6308569B1 (en) * | 1999-07-30 | 2001-10-30 | Litton Systems, Inc. | Micro-mechanical inertial sensors |
EP1083430B1 (en) * | 1999-09-10 | 2006-07-26 | STMicroelectronics S.r.l. | Semiconductor integrated inertial sensor with calibration microactuator |
JP2002013931A (ja) * | 2000-06-29 | 2002-01-18 | Matsushita Electric Ind Co Ltd | 角速度・加速度センサの梁構造 |
DE10038761A1 (de) * | 2000-08-09 | 2002-02-21 | Bosch Gmbh Robert | Beschleunigungssensor |
US6481286B1 (en) * | 2000-08-30 | 2002-11-19 | The Charles Stark Draper Laboratory, Inc. | Reentrant microwave resonant cavity accelerometer |
DE10118340A1 (de) * | 2001-04-12 | 2002-10-24 | Bosch Gmbh Robert | Vorrichtung zur Messung einer Beschleunigung und/oder einer Drehrate |
US7036374B2 (en) * | 2002-01-25 | 2006-05-02 | William Thomas Pike | Micro-machined suspension plate with integral proof mass for use in a seismometer or other device |
FR2840906B1 (fr) | 2002-06-12 | 2004-07-16 | Commissariat Energie Atomique | Derives de per(3,6-anhydro) cyclodextrines, leur preparation et leur utilisation pour separer des ions, notamment des anions a base de chrome et de manganese |
-
2004
- 2004-05-21 US US10/851,029 patent/US7036374B2/en not_active Expired - Lifetime
-
2005
- 2005-05-19 TW TW094116335A patent/TWI368045B/zh active
- 2005-05-20 EP EP05850742A patent/EP1754082B1/en active Active
- 2005-05-20 WO PCT/IB2005/003998 patent/WO2006059231A2/en not_active Application Discontinuation
- 2005-05-20 JP JP2007517533A patent/JP4782114B2/ja active Active
- 2005-05-20 CN CN2005800163915A patent/CN101014879B/zh active Active
- 2005-05-20 CA CA2564680A patent/CA2564680C/en active Active
-
2011
- 2011-04-18 JP JP2011092194A patent/JP5453599B2/ja active Active
-
2013
- 2013-09-09 JP JP2013186244A patent/JP5699269B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002188923A (ja) * | 2000-12-20 | 2002-07-05 | Toyota Motor Corp | 力学量検出装置 |
US20030140699A1 (en) * | 2002-01-25 | 2003-07-31 | Pike William Thomas | Micro-machined accelerometer |
JP2003344445A (ja) * | 2002-05-24 | 2003-12-03 | Mitsubishi Electric Corp | 慣性力センサ |
Also Published As
Publication number | Publication date |
---|---|
TW200604556A (en) | 2006-02-01 |
CA2564680A1 (en) | 2006-06-08 |
US20050097959A1 (en) | 2005-05-12 |
JP2008500547A (ja) | 2008-01-10 |
CN101014879B (zh) | 2010-05-05 |
EP1754082A2 (en) | 2007-02-21 |
EP1754082B1 (en) | 2013-03-27 |
JP2011185943A (ja) | 2011-09-22 |
WO2006059231A3 (en) | 2006-08-24 |
JP5699269B2 (ja) | 2015-04-08 |
TWI368045B (en) | 2012-07-11 |
JP5453599B2 (ja) | 2014-03-26 |
CA2564680C (en) | 2014-04-01 |
CN101014879A (zh) | 2007-08-08 |
WO2006059231A2 (en) | 2006-06-08 |
US7036374B2 (en) | 2006-05-02 |
JP2014059303A (ja) | 2014-04-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4782114B2 (ja) | 地震計 | |
US6484578B2 (en) | Vibrating beam accelerometer | |
US8746066B2 (en) | Acceleration sensor having a damping device | |
US8353212B2 (en) | Micromechanical rate-of-rotation sensor | |
US10611628B2 (en) | MEMS isolation platform with three-dimensional vibration and stress isolation | |
US8297121B2 (en) | Micro-machined accelerometer | |
US6634231B2 (en) | Accelerometer strain isolator | |
JP2009501882A (ja) | 磁気レオロジーダンパーおよびその使用 | |
JPH09119943A (ja) | 加速度センサ | |
KR20050121223A (ko) | 차동식 전기 용량 픽 오프를 갖는 굽힘 빔 가속도계 | |
US10802042B2 (en) | Measurement of acceleration | |
KR20180101181A (ko) | 진동 감쇠 마운트 | |
JP2014055935A (ja) | 振動絶縁微小電気機械システム構造およびその製造方法 | |
CN109828123B (zh) | 一种基于长周期光纤光栅弯曲特性的二维加速度传感器及测量方法 | |
JP6513519B2 (ja) | 物理量センサ | |
US5109175A (en) | Monolithic resonator for vibrating beam force sensors | |
JP2007536544A (ja) | モノリシック差動振動センサ用の機械的デカップリング装置 | |
US6128956A (en) | Active cover accelerometer | |
RU2377575C2 (ru) | Частотный микромеханический акселерометр | |
JP2021524035A (ja) | Mems加速度センサの振動減衰 | |
JP6958533B2 (ja) | 振動式センサ装置 | |
KR20240011997A (ko) | 관성센서 조립체 및 관성센서 조립체용 관성센서 블록 단위체 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080502 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080502 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110118 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110418 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110607 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110706 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140715 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4782114 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |