JP2008500547A5 - - Google Patents

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Publication number
JP2008500547A5
JP2008500547A5 JP2007517533A JP2007517533A JP2008500547A5 JP 2008500547 A5 JP2008500547 A5 JP 2008500547A5 JP 2007517533 A JP2007517533 A JP 2007517533A JP 2007517533 A JP2007517533 A JP 2007517533A JP 2008500547 A5 JP2008500547 A5 JP 2008500547A5
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JP
Japan
Prior art keywords
proof mass
sensor array
capacitive sensor
actuator
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007517533A
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English (en)
Japanese (ja)
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JP4782114B2 (ja
JP2008500547A (ja
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Publication date
Priority claimed from US10/851,029 external-priority patent/US7036374B2/en
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Publication of JP2008500547A publication Critical patent/JP2008500547A/ja
Publication of JP2008500547A5 publication Critical patent/JP2008500547A5/ja
Application granted granted Critical
Publication of JP4782114B2 publication Critical patent/JP4782114B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2007517533A 2004-05-21 2005-05-20 地震計 Expired - Lifetime JP4782114B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/851,029 2004-05-21
US10/851,029 US7036374B2 (en) 2002-01-25 2004-05-21 Micro-machined suspension plate with integral proof mass for use in a seismometer or other device
PCT/IB2005/003998 WO2006059231A2 (en) 2004-05-21 2005-05-20 Improved micro-machined suspension plate with integral proof mass for use in a seismometer or other device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011092194A Division JP5453599B2 (ja) 2004-05-21 2011-04-18 地震計などのデバイスに用いられる、マイクロ機械加工により製作され、プルーフマスが一体的に形成された、改良したサスペンション・プレート

Publications (3)

Publication Number Publication Date
JP2008500547A JP2008500547A (ja) 2008-01-10
JP2008500547A5 true JP2008500547A5 (https=) 2008-06-26
JP4782114B2 JP4782114B2 (ja) 2011-09-28

Family

ID=36282981

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2007517533A Expired - Lifetime JP4782114B2 (ja) 2004-05-21 2005-05-20 地震計
JP2011092194A Expired - Fee Related JP5453599B2 (ja) 2004-05-21 2011-04-18 地震計などのデバイスに用いられる、マイクロ機械加工により製作され、プルーフマスが一体的に形成された、改良したサスペンション・プレート
JP2013186244A Expired - Fee Related JP5699269B2 (ja) 2004-05-21 2013-09-09 加速度計及びトランスデューサ

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2011092194A Expired - Fee Related JP5453599B2 (ja) 2004-05-21 2011-04-18 地震計などのデバイスに用いられる、マイクロ機械加工により製作され、プルーフマスが一体的に形成された、改良したサスペンション・プレート
JP2013186244A Expired - Fee Related JP5699269B2 (ja) 2004-05-21 2013-09-09 加速度計及びトランスデューサ

Country Status (7)

Country Link
US (1) US7036374B2 (https=)
EP (1) EP1754082B1 (https=)
JP (3) JP4782114B2 (https=)
CN (1) CN101014879B (https=)
CA (1) CA2564680C (https=)
TW (1) TWI368045B (https=)
WO (1) WO2006059231A2 (https=)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7036374B2 (en) * 2002-01-25 2006-05-02 William Thomas Pike Micro-machined suspension plate with integral proof mass for use in a seismometer or other device
US7870788B2 (en) * 2002-01-25 2011-01-18 Kinemetrics, Inc. Fabrication process and package design for use in a micro-machined seismometer or other device
CA2569295C (en) * 2006-11-28 2014-04-29 Nanometrics Inc. Seismic sensor
US8065915B2 (en) * 2008-10-08 2011-11-29 Honeywell International Inc. MEMS accelerometer
CA2658143C (en) * 2009-03-06 2013-06-04 Nanometrics Inc. Force-feedback seismometer
US8661901B2 (en) 2009-03-19 2014-03-04 Hewlett-Packard Development Company, L.P. Three phase capacitance-based sensing
JP5652966B2 (ja) 2009-05-13 2015-01-14 シナプティクス インコーポレイテッド 静電容量センサデバイス
US8307710B2 (en) * 2009-07-09 2012-11-13 Honeywell International Inc. Translational mass in-plane MEMS accelerometer
DE102011076555B4 (de) * 2011-05-26 2019-11-07 Robert Bosch Gmbh Mikromechanisches Bauelement mit einer Dämpfungseinrichtung
CN103596874A (zh) 2011-06-28 2014-02-19 惠普发展公司，有限责任合伙企业 平面外移动限制结构
FR3011334B1 (fr) * 2013-09-27 2017-06-09 Centre Nat Rech Scient Capteur sismique
US10161956B2 (en) * 2016-04-25 2018-12-25 Honeywell International Inc. Reducing bias in an accelerometer via a pole piece
EP3252444B1 (en) 2016-06-01 2023-12-20 Sonion Nederland B.V. Vibration or acceleration sensor applying squeeze film damping
US10947108B2 (en) 2016-12-30 2021-03-16 Sonion Nederland B.V. Micro-electromechanical transducer
CN109188021B (zh) * 2018-08-30 2020-06-16 太原理工大学 低频微加速度传感器的多孔弹簧悬臂敏感结构
IT201900016091A1 (it) * 2019-09-11 2021-03-11 Ima Spa Apparato e metodo per neutralizzare elettricità statica presente sulla superficie di contenitori e/o vassoi portacontenitori.
CN112782428A (zh) * 2019-11-07 2021-05-11 霍尼韦尔国际公司 具有压力阻尼的振梁加速度计
CN112782426B (zh) * 2019-11-07 2026-02-17 霍尼韦尔国际公司 包括一个或多个具有附加质量块的机械梁的谐振器
CN113296144B (zh) * 2020-02-24 2024-05-24 防灾科技学院 一种阻尼调零的地震计

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4280206A (en) * 1978-03-15 1981-07-21 National Research Development Corporation Seismometers
US4586260A (en) * 1984-05-29 1986-05-06 The L. S. Starrett Company Capacitive displacement measuring instrument
US4879508A (en) * 1986-04-04 1989-11-07 Mitutoyo Corporation Capacitance-type measuring device for absolute measurement of positions
US5153494A (en) * 1990-04-06 1992-10-06 International Business Machines Corp. Ultrafast electro-dynamic x, y and theta positioning stage
JP3135721B2 (ja) * 1992-11-20 2001-02-19 キヤノン株式会社 励振動型光検出角速度センサ
DE4400127C2 (de) * 1994-01-05 2003-08-14 Bosch Gmbh Robert Kapazitiver Beschleunigungssensor und Verfahren zu seiner Herstellung
US5524488A (en) * 1994-01-24 1996-06-11 Alliedsignal Inc. Flux control groove
US5447068A (en) * 1994-03-31 1995-09-05 Ford Motor Company Digital capacitive accelerometer
KR100336151B1 (ko) * 1994-06-27 2002-09-05 세르게이 페오도시에비키 코노발로브 서보 가속도계
US5834864A (en) * 1995-09-13 1998-11-10 Hewlett Packard Company Magnetic micro-mover
JPH1090299A (ja) * 1996-09-12 1998-04-10 Mitsubishi Electric Corp 静電容量式加速度センサ
JP3278363B2 (ja) * 1996-11-18 2002-04-30 三菱電機株式会社 半導体加速度センサ
FR2764706B1 (fr) * 1997-06-17 1999-07-09 Commissariat Energie Atomique Accelerometre miniaturise du type a compensation par ressort de l'effet de la pesanteur et son procede de fabrication
US6065341A (en) * 1998-02-18 2000-05-23 Denso Corporation Semiconductor physical quantity sensor with stopper portion
DE19817357B4 (de) * 1998-04-18 2008-10-30 Robert Bosch Gmbh Mikromechanisches Bauelement
US6196067B1 (en) * 1998-05-05 2001-03-06 California Institute Of Technology Silicon micromachined accelerometer/seismometer and method of making the same
US6105427A (en) * 1998-07-31 2000-08-22 Litton Systems, Inc. Micro-mechanical semiconductor accelerometer
US6308569B1 (en) * 1999-07-30 2001-10-30 Litton Systems, Inc. Micro-mechanical inertial sensors
EP1083430B1 (en) * 1999-09-10 2006-07-26 STMicroelectronics S.r.l. Semiconductor integrated inertial sensor with calibration microactuator
JP2002013931A (ja) * 2000-06-29 2002-01-18 Matsushita Electric Ind Co Ltd 角速度・加速度センサの梁構造
DE10038761A1 (de) * 2000-08-09 2002-02-21 Bosch Gmbh Robert Beschleunigungssensor
US6481286B1 (en) * 2000-08-30 2002-11-19 The Charles Stark Draper Laboratory, Inc. Reentrant microwave resonant cavity accelerometer
JP3512004B2 (ja) * 2000-12-20 2004-03-29 トヨタ自動車株式会社 力学量検出装置
DE10118340A1 (de) * 2001-04-12 2002-10-24 Bosch Gmbh Robert Vorrichtung zur Messung einer Beschleunigung und/oder einer Drehrate
US6776042B2 (en) * 2002-01-25 2004-08-17 Kinemetrics, Inc. Micro-machined accelerometer
US7036374B2 (en) * 2002-01-25 2006-05-02 William Thomas Pike Micro-machined suspension plate with integral proof mass for use in a seismometer or other device
JP2003344445A (ja) * 2002-05-24 2003-12-03 Mitsubishi Electric Corp 慣性力センサ
FR2840906B1 (fr) 2002-06-12 2004-07-16 Commissariat Energie Atomique Derives de per(3,6-anhydro) cyclodextrines, leur preparation et leur utilisation pour separer des ions, notamment des anions a base de chrome et de manganese

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