JP4780826B2 - 電気光学装置の作製方法 - Google Patents
電気光学装置の作製方法 Download PDFInfo
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- JP4780826B2 JP4780826B2 JP2000308742A JP2000308742A JP4780826B2 JP 4780826 B2 JP4780826 B2 JP 4780826B2 JP 2000308742 A JP2000308742 A JP 2000308742A JP 2000308742 A JP2000308742 A JP 2000308742A JP 4780826 B2 JP4780826 B2 JP 4780826B2
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| TW548860B (en) | 2001-06-20 | 2003-08-21 | Semiconductor Energy Lab | Light emitting device and method of manufacturing the same |
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| JP3825395B2 (ja) * | 2001-10-30 | 2006-09-27 | 株式会社半導体エネルギー研究所 | 発光装置および電気器具 |
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| JP4650495B2 (ja) | 2008-02-05 | 2011-03-16 | セイコーエプソン株式会社 | 発光装置及び電子機器 |
| JP2010153365A (ja) | 2008-11-19 | 2010-07-08 | Semiconductor Energy Lab Co Ltd | 発光素子、発光装置、電子機器及び照明装置 |
| US8093803B2 (en) | 2009-03-17 | 2012-01-10 | Seiko Epson Corporation | Electro-optical device, electronic device, and method for manufacturing electro-optical device |
| JP5545970B2 (ja) * | 2009-03-26 | 2014-07-09 | 株式会社半導体エネルギー研究所 | 発光装置及びその作製方法 |
| US8404500B2 (en) | 2009-11-02 | 2013-03-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing light-emitting element, light-emitting element, light-emitting device, lighting device, and electronic appliance |
| JP5969216B2 (ja) | 2011-02-11 | 2016-08-17 | 株式会社半導体エネルギー研究所 | 発光素子、表示装置、照明装置、及びこれらの作製方法 |
| JP2017004950A (ja) * | 2015-06-15 | 2017-01-05 | 住友化学株式会社 | 有機ｅｌ素子の製造方法 |
| JP2017188478A (ja) * | 2017-06-19 | 2017-10-12 | 株式会社半導体エネルギー研究所 | 発光装置 |
| JP2019149384A (ja) * | 2019-05-29 | 2019-09-05 | 株式会社半導体エネルギー研究所 | 発光装置 |
| JP2019149385A (ja) * | 2019-05-29 | 2019-09-05 | 株式会社半導体エネルギー研究所 | 発光装置 |
| US20240341109A1 (en) | 2021-08-12 | 2024-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Display apparatus and manufacturing method of display apparatus |
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| JP3180978B2 (ja) * | 1992-01-21 | 2001-07-03 | 京セラ株式会社 | 光磁気記録素子 |
| JPH05315360A (ja) * | 1992-05-08 | 1993-11-26 | Fuji Xerox Co Ltd | 薄膜トランジスタの製造方法 |
| JP2677167B2 (ja) * | 1993-07-08 | 1997-11-17 | 日本電気株式会社 | 駆動回路内蔵型液晶表示装置の製造方法 |
| TW345654B (en) * | 1995-02-15 | 1998-11-21 | Handotai Energy Kenkyusho Kk | Active matrix display device |
| JP3111024B2 (ja) * | 1995-07-19 | 2000-11-20 | キヤノン株式会社 | カラーフィルタの製造装置及び製造方法及び表示装置の製造方法及び表示装置を備えた装置の製造方法 |
| JP3383535B2 (ja) * | 1995-12-14 | 2003-03-04 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JP3786427B2 (ja) * | 1996-09-19 | 2006-06-14 | セイコーエプソン株式会社 | 発光装置の製造方法 |
| JPH10107266A (ja) * | 1996-09-27 | 1998-04-24 | New Japan Radio Co Ltd | Ｍｏｓ型ｆｅｔの製造方法 |
| JPH10275682A (ja) * | 1997-02-03 | 1998-10-13 | Nec Corp | 有機ｅｌ素子 |
| JP3830238B2 (ja) * | 1997-08-29 | 2006-10-04 | セイコーエプソン株式会社 | アクティブマトリクス型装置 |
| JPH11231805A (ja) * | 1998-02-10 | 1999-08-27 | Sanyo Electric Co Ltd | 表示装置 |
| CN100550472C (zh) * | 1998-03-17 | 2009-10-14 | 精工爱普生株式会社 | 薄膜构图的衬底及其表面处理 |
| JPH11273855A (ja) * | 1998-03-25 | 1999-10-08 | Tdk Corp | 有機ｅｌ表示器 |
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