JP4763897B2 - スパッタリング用電源装置 - Google Patents

スパッタリング用電源装置 Download PDF

Info

Publication number
JP4763897B2
JP4763897B2 JP2001028505A JP2001028505A JP4763897B2 JP 4763897 B2 JP4763897 B2 JP 4763897B2 JP 2001028505 A JP2001028505 A JP 2001028505A JP 2001028505 A JP2001028505 A JP 2001028505A JP 4763897 B2 JP4763897 B2 JP 4763897B2
Authority
JP
Japan
Prior art keywords
arc
voltage
output terminal
power supply
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2001028505A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002235170A5 (enExample
JP2002235170A (ja
Inventor
昇 栗山
和彦 今川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Priority to JP2001028505A priority Critical patent/JP4763897B2/ja
Publication of JP2002235170A publication Critical patent/JP2002235170A/ja
Publication of JP2002235170A5 publication Critical patent/JP2002235170A5/ja
Application granted granted Critical
Publication of JP4763897B2 publication Critical patent/JP4763897B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP2001028505A 2001-02-05 2001-02-05 スパッタリング用電源装置 Expired - Lifetime JP4763897B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001028505A JP4763897B2 (ja) 2001-02-05 2001-02-05 スパッタリング用電源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001028505A JP4763897B2 (ja) 2001-02-05 2001-02-05 スパッタリング用電源装置

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP2011053780A Division JP5284396B2 (ja) 2011-03-11 2011-03-11 スパッタリング用電源装置
JP2011053782A Division JP5301594B2 (ja) 2011-03-11 2011-03-11 スパッタリング用電源装置
JP2011053781A Division JP5284397B2 (ja) 2011-03-11 2011-03-11 スパッタリング用電源装置

Publications (3)

Publication Number Publication Date
JP2002235170A JP2002235170A (ja) 2002-08-23
JP2002235170A5 JP2002235170A5 (enExample) 2008-03-21
JP4763897B2 true JP4763897B2 (ja) 2011-08-31

Family

ID=18892995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001028505A Expired - Lifetime JP4763897B2 (ja) 2001-02-05 2001-02-05 スパッタリング用電源装置

Country Status (1)

Country Link
JP (1) JP4763897B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4673653B2 (ja) * 2005-03-30 2011-04-20 オリジン電気株式会社 真空装置における異常放電発生予防方法及び真空装置
US20060283702A1 (en) * 2005-06-21 2006-12-21 Applied Materials, Inc. Random pulsed DC power supply
EP1928009B1 (de) * 2006-11-28 2013-04-10 HÜTTINGER Elektronik GmbH + Co. KG Bogenentladungs-Erkennungseinrichtung, Plasma-Leistungsversorgung und Verfahren zum Erkennen von Bogenentladungen
ATE547804T1 (de) 2007-12-24 2012-03-15 Huettinger Electronic Sp Z O O Stromänderungsbegrenzungsvorrichtung
JP4492974B2 (ja) * 2008-11-14 2010-06-30 芝浦メカトロニクス株式会社 電源、スパッタ用電源及びスパッタ装置
JP4492975B2 (ja) * 2008-11-14 2010-06-30 芝浦メカトロニクス株式会社 電源、スパッタ用電源及びスパッタ装置
DE102010031568B4 (de) 2010-07-20 2014-12-11 TRUMPF Hüttinger GmbH + Co. KG Arclöschanordnung und Verfahren zum Löschen von Arcs
KR101421483B1 (ko) * 2010-08-18 2014-07-22 가부시키가이샤 알박 직류 전원 장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3047277B2 (ja) * 1993-08-23 2000-05-29 日本電子工業株式会社 グロー放電処理装置におけるアーク放電後の復帰方法
JP2835322B2 (ja) * 1997-02-20 1998-12-14 芝浦メカトロニクス株式会社 スパッタリング用電源装置および該装置を用いたスパッタリング装置
JP4034008B2 (ja) * 1998-07-03 2008-01-16 キヤノンアネルバ株式会社 インバータ式ｄｃ電源

Also Published As

Publication number Publication date
JP2002235170A (ja) 2002-08-23

Similar Documents

Publication Publication Date Title
JP4272522B2 (ja) スパッタリング用電源装置
US10014789B2 (en) Resonant converter and driving method thereof
US5815388A (en) Polarity reversing circuit having energy compensation
JP4763897B2 (ja) スパッタリング用電源装置
US9068259B2 (en) AC power supply for sputtering apparatus
JP2012033409A (ja) 直流プラズマ用逆極性パルス発生回路及び直流プラズマ電源装置
WO2019222965A1 (en) Totem pole bridgeless pfc power converters
US6631079B2 (en) Switching power supply apparatus having plural outputs and plural output voltage detection
CN101902126A (zh) 溅射离子泵用电源设备
JP5284396B2 (ja) スパッタリング用電源装置
JP2008235997A (ja) スイッチング回路
JP5284397B2 (ja) スパッタリング用電源装置
JP5301594B2 (ja) スパッタリング用電源装置
JP4079561B2 (ja) スパッタ用電源
JP3505514B2 (ja) 電源回路
JP2007531231A (ja) 回路装置
JP4673653B2 (ja) 真空装置における異常放電発生予防方法及び真空装置
JP5788669B2 (ja) イオンビーム源及び非導電材料をスパッタリングする装置
JP4949285B2 (ja) プラズマ放電装置
JP2004194452A (ja) Ｄｃ−ｄｃコンバータ
JPH07231650A (ja) 昇圧チョッパー回路
JP2004050298A (ja) 放電加工方法及び放電加工装置
JP2000340383A (ja) 放電灯点灯装置
JP2000005874A (ja) アーク加工用電源装置
KR100462275B1 (ko) 전기집진기용 인버터의 스위칭 타임 설정 회로와 그 방법

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080205

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080205

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20100128

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110111

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110311

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110607

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110610

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140617

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4763897

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

EXPY Cancellation because of completion of term