JP4758354B2 - 基体上に炭化ケイ素層を形成する方法 - Google Patents
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 55
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 51
- 238000000034 method Methods 0.000 title claims description 31
- 239000000758 substrate Substances 0.000 title claims description 23
- 238000000151 deposition Methods 0.000 claims description 31
- 230000008021 deposition Effects 0.000 claims description 29
- 229910052710 silicon Inorganic materials 0.000 claims description 29
- 239000010703 silicon Substances 0.000 claims description 29
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 claims description 24
- 238000006243 chemical reaction Methods 0.000 claims description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims description 8
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims description 8
- 238000012360 testing method Methods 0.000 claims description 5
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 4
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims description 4
- 229910000077 silane Inorganic materials 0.000 claims description 4
- -1 halosilane Chemical compound 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- WZJUBBHODHNQPW-UHFFFAOYSA-N 2,4,6,8-tetramethyl-1,3,5,7,2$l^{3},4$l^{3},6$l^{3},8$l^{3}-tetraoxatetrasilocane Chemical compound C[Si]1O[Si](C)O[Si](C)O[Si](C)O1 WZJUBBHODHNQPW-UHFFFAOYSA-N 0.000 claims description 2
- JJQZDUKDJDQPMQ-UHFFFAOYSA-N dimethoxy(dimethyl)silane Chemical compound CO[Si](C)(C)OC JJQZDUKDJDQPMQ-UHFFFAOYSA-N 0.000 claims description 2
- 239000005055 methyl trichlorosilane Substances 0.000 claims description 2
- JLUFWMXJHAVVNN-UHFFFAOYSA-N methyltrichlorosilane Chemical compound C[Si](Cl)(Cl)Cl JLUFWMXJHAVVNN-UHFFFAOYSA-N 0.000 claims description 2
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 claims description 2
- VCZQFJFZMMALHB-UHFFFAOYSA-N tetraethylsilane Chemical compound CC[Si](CC)(CC)CC VCZQFJFZMMALHB-UHFFFAOYSA-N 0.000 claims description 2
- CZDYPVPMEAXLPK-UHFFFAOYSA-N tetramethylsilane Chemical compound C[Si](C)(C)C CZDYPVPMEAXLPK-UHFFFAOYSA-N 0.000 claims description 2
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 claims description 2
- 239000005052 trichlorosilane Substances 0.000 claims description 2
- PQDJYEQOELDLCP-UHFFFAOYSA-N trimethylsilane Chemical compound C[SiH](C)C PQDJYEQOELDLCP-UHFFFAOYSA-N 0.000 claims description 2
- GYIODRUWWNNGPI-UHFFFAOYSA-N trimethyl(trimethylsilylmethyl)silane Chemical compound C[Si](C)(C)C[Si](C)(C)C GYIODRUWWNNGPI-UHFFFAOYSA-N 0.000 claims 1
- 239000010408 film Substances 0.000 description 60
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 29
- 239000002243 precursor Substances 0.000 description 18
- 239000012686 silicon precursor Substances 0.000 description 15
- 235000012431 wafers Nutrition 0.000 description 15
- 101100460147 Sarcophaga bullata NEMS gene Proteins 0.000 description 14
- 239000007789 gas Substances 0.000 description 14
- 239000000463 material Substances 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 238000000137 annealing Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 235000012239 silicon dioxide Nutrition 0.000 description 7
- 239000007833 carbon precursor Substances 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- 238000001878 scanning electron micrograph Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
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- 239000000203 mixture Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052755 nonmetal Inorganic materials 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- HJUGFYREWKUQJT-UHFFFAOYSA-N tetrabromomethane Chemical compound BrC(Br)(Br)Br HJUGFYREWKUQJT-UHFFFAOYSA-N 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 241000408659 Darpa Species 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- BUMGIEFFCMBQDG-UHFFFAOYSA-N dichlorosilicon Chemical compound Cl[Si]Cl BUMGIEFFCMBQDG-UHFFFAOYSA-N 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 210000002445 nipple Anatomy 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
- C23C16/325—Silicon carbide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Carbon And Carbon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
本発明の一部は、NASAによって授与された契約書番号第NCA3−201およびDARPAによって授与されたDABT63−1−0010の下での政府の支援によりなされた。政府は、本発明に特定の権利を有する。
本発明は、炭化ケイ素および他の膜、そしてより具体的には基体上へのこれらの膜の制御された堆積に関する。
本発明は、基体上に膜を堆積する方法を提供し、この方法は、堆積された膜の残存応力、残存応力勾配、および電気抵抗率の制御を可能にする。本発明は、金属成分および非金属成分を有するセラミック化合物を有するセラミック膜のような、種々の組成の膜を包含する。好ましくは、この膜は、炭化ケイ素膜である。この炭化ケイ素膜は、反応チャンバ中に基体を配置して約10mtorr未満の圧力までこのチャンバを排気することにより、化学気相成長によってケイ素基体のような基体上に堆積される。このチャンバの温度は、約900℃に維持される。アセチレン(水素中の5%)のような炭素前駆体は、毎分約180立方センチメートル(標準状態換算)(sccm)の流速でそのチャンバに供給される。ジクロロシラン(DCS)のようなケイ素前駆体は、約54sccmの流速でそのチャンバに供給される。これらの前駆体が供給されるにつれて、この反応チャンバの圧力は高まり、そして固定された圧力に維持され得る。
本発明は、残存応力、残存応力勾配、および電気抵抗率のような種々の特性の制御を伴う、基体上への膜、好ましくは炭化ケイ素(SiC)膜の堆積に関する。本発明は、本発明が、特にMEMSデバイスおよびNEMSデバイスを伴う使用のための、ケイ素基体上へのSiCの堆積に関するとして記載される。しかし、本発明は、このような記載によって例示されるに過ぎず、添付の特許請求の範囲によってのみ限定される。
図1および2は、以下の手順を実施するために使用される装置を図示する。チップ状のケイ素基体、ウェーハ、を低圧気相成長装置12、112の反応チャンバ10、110の中にローディングする前に、そのウェーハ14、114を、標準的なRCA洗浄手順を使用して洗浄した。直径100mmのシリコンウェーハ14、114を、従来の熱壁水平円筒型水晶炉(hot−wall horizontal cylindrical quartz furnace)16、116中に配置した。反応チャンバまたは堆積チャンバ10、110は、長さ2007mmおよび直径225mmであった。このウェーハを、可動式の前フランジ22、122に取付けられたパドル20、120上に静止したSiCボート18、118に保持し、反応チャンバ10、110の中央付近に配置した。
図1は、これらの試験のために使用される低圧化学気相成長装置12を図示する。堆積を、約0.42torr〜約5torrの圧力設定で2時間実施した。いくつかの場合には、より長い時間を使用してより厚い膜を堆積させた。DCSおよびアセチレン(水素中の5%)の流速を、それぞれ、毎分約54立方センチメートル(標準状態換算)(sccm)および毎分180sccmで一定に保持した。温度を、約900℃に固定して保持した。その炉を、上記アセチレンガスおよびDCSガスを上記反応チャンバ中に導入するための注入管を備えて構成した。
図2に図示する低圧化学気相成長装置112を使用した(インジェクタなし、単一の前フランジ)ことを除いて、上記と同じ手順を使用した。この一連の試験について、堆積圧力を、本質的に約2.0torrに一定に維持し、そして上記ケイ素前駆体(この場合は、DCS)の流速を約18sccmと約54sccmとの間で変化させた。アセチレン(水素中の5%)の流速を、約180sccmに固定し、そして上記反応チャンバの温度を、約900℃に維持した。
Claims (14)
- 基体上に炭化ケイ素層を形成する方法であって、該方法は、
該基体を含む反応チャンバに第一のガスを提供する工程であって、該第一のガスは、ケイ素を含み、そして該第一のガスは第一の流速で提供される、工程;
第二のガスを該反応チャンバに提供する工程であって、該第二のガスは炭素を含み、そして該第二のガスは第二の流速で提供される、工程;
該反応チャンバ中の該第一の流速および圧力のうちの一つを制御変数として選択する工程;
該基体上に該炭化ケイ素層を形成する工程;および
該制御変数を制御して、該炭化ケイ素の少なくとも二つの特性を制御する工程であって、該制御変数は、該制御変数と該二つの特性の各々との間の確立された関係に基づいて制御される、工程;
を包含し、ここで、一つの制御された特性は、電気抵抗性であり、一つの制御された特性は、残存応力および残存応力勾配のうちの一つである、方法。 - 前記炭化ケイ素層は、低圧化学気相成長により形成される、請求項1に記載の方法。
- 前記制御変数と前記二つの特性の各々との間の確立された関係を、複数の堆積条件の各々で前記反応チャンバ中で成長した炭化ケイ素試験層に対する該二つの特性の各々を特徴付けることによって決定する工程をさらに包含し、該複数の堆積条件の各々は、選択された制御変数に対する異なる値を含む、請求項1に記載の方法。
- 残存応力が、前記二つの特性のうちの一つとして選択され、前記制御変数は、前記炭化ケイ素層が約−100MPa〜約+100MPaの範囲である残存応力により特徴付けられるように制御される、請求項1に記載の方法。
- 前記制御変数は、前記炭化ケイ素が約10Ω・cm未満である電気抵抗性により特徴付けられるように制御される、請求項1に記載の方法。
- 前記制御変数が、前記圧力と選択される、請求項1に記載の方法。
- 前記制御変数が、前記第一の流速と選択される、請求項1に記載の方法。
- シラン、ジクロロシラン、トリクロロシラン、テトラクロロシラン、ハロシラン、トリメチルシラン、テトラメチルシラン、ジメチルジメトキシシラン、テトラメチルシクロテトラシロキサン、ビス−トリメチルシリルメタン、メチルトリクロロシラン、シラン、テトラエチルシラン、およびシラシクロブタンからなる群からの第一のガスを選択する工程をさらに包含する、請求項1に記載の方法。
- 前記第一のガスをジクロロシランと選択し、前記第二のガスをアセチレンと選択する工程をさらに包含する、請求項1に記載の方法。
- 前記二つの特性は、残存応力および電気抵抗性と選択される、請求項1に記載の方法。
- 前記制御変数は、前記炭化ケイ素層が、(1)約−100MPa〜約+100MPaの範囲である残存応力、および(2)約10Ω・cm未満である電気抵抗性により特徴付けられるように制御される、請求項10に記載の方法。
- 前記二つの特性は、電気抵抗性および残存応力勾配と選択される、請求項1に記載の方法。
- 前記炭化ケイ素層が、該炭化ケイ素層の残存応力をさらに制御するように前記制御変数を制御しながら形成される、請求項12に記載の方法。
- 前記制御変数は、前記炭化ケイ素層が、(1)約−100MPa〜約+100MPaの範囲である残存応力、および(2)約10Ω・cm未満である電気抵抗性により特徴付けられるように制御される、請求項13に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/716,006 | 2003-11-18 | ||
US10/716,006 US7261919B2 (en) | 2003-11-18 | 2003-11-18 | Silicon carbide and other films and method of deposition |
PCT/US2004/037064 WO2005049884A2 (en) | 2003-11-18 | 2004-11-05 | Method for depositing silicon carbide and ceramic films |
Publications (3)
Publication Number | Publication Date |
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JP2007516355A JP2007516355A (ja) | 2007-06-21 |
JP2007516355A5 JP2007516355A5 (ja) | 2008-01-24 |
JP4758354B2 true JP4758354B2 (ja) | 2011-08-24 |
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JP2006539688A Expired - Fee Related JP4758354B2 (ja) | 2003-11-18 | 2004-11-05 | 基体上に炭化ケイ素層を形成する方法 |
Country Status (9)
Country | Link |
---|---|
US (3) | US7261919B2 (ja) |
EP (1) | EP1690287A2 (ja) |
JP (1) | JP4758354B2 (ja) |
KR (1) | KR20060123343A (ja) |
CN (1) | CN1906735A (ja) |
AU (1) | AU2004291847A1 (ja) |
CA (1) | CA2546081A1 (ja) |
IL (1) | IL175640A0 (ja) |
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EP1690287A2 (en) | 2006-08-16 |
IL175640A0 (en) | 2006-09-05 |
WO2005049884A2 (en) | 2005-06-02 |
WO2005049884A3 (en) | 2005-11-17 |
CA2546081A1 (en) | 2005-06-02 |
USRE42887E1 (en) | 2011-11-01 |
US20050106320A1 (en) | 2005-05-19 |
KR20060123343A (ko) | 2006-12-01 |
JP2007516355A (ja) | 2007-06-21 |
AU2004291847A1 (en) | 2005-06-02 |
CN1906735A (zh) | 2007-01-31 |
US7261919B2 (en) | 2007-08-28 |
US20110001143A1 (en) | 2011-01-06 |
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