JP4753539B2 - Electronic component mounting substrate and electronic device using the same - Google Patents

Electronic component mounting substrate and electronic device using the same Download PDF

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JP4753539B2
JP4753539B2 JP2004048238A JP2004048238A JP4753539B2 JP 4753539 B2 JP4753539 B2 JP 4753539B2 JP 2004048238 A JP2004048238 A JP 2004048238A JP 2004048238 A JP2004048238 A JP 2004048238A JP 4753539 B2 JP4753539 B2 JP 4753539B2
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electronic component
electrode pad
groove
metallized layer
component mounting
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JP2005101500A (en
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善友 鬼塚
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Kyocera Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/1615Shape
    • H01L2924/16195Flat cap [not enclosing an internal cavity]

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Description

本発明は、内部に電子部品を収容するための電子部品収納用パッケージに用いられる小型の電子部品搭載用基板およびこれを用いた電子装置に関するものである。   The present invention relates to a small electronic component mounting board used in an electronic component storage package for accommodating an electronic component therein, and an electronic apparatus using the same.

従来、半導体素子や圧電振動子等の電子部品を収容するための電子部品収納用パッケージに用いられる小型の電子部品搭載用基板は、図2(a),(b)に示すように、酸化アルミニウム質焼結体や窒化アルミニウム質焼結体、ムライト質焼結体、ガラス−セラミックス等のセラミック材料から成り、その上面等の主面に電子部品を搭載するための四角形状の搭載部16を有する絶縁基体11と、搭載部16を囲繞するように形成された絶縁枠体20と、搭載部16の隅部に形成された電極パッド12と、絶縁枠体20の上面に形成された四角枠状のメタライズ層14とから構成されている。   2. Description of the Related Art Conventionally, a small electronic component mounting substrate used for an electronic component storage package for storing electronic components such as semiconductor elements and piezoelectric vibrators is an aluminum oxide as shown in FIGS. 2 (a) and 2 (b). It is made of a ceramic material such as a sintered body, an aluminum nitride sintered body, a mullite sintered body, and a glass-ceramic, and has a rectangular mounting portion 16 for mounting electronic components on the main surface such as the upper surface. Insulating base 11, insulating frame 20 formed so as to surround mounting portion 16, electrode pad 12 formed at the corner of mounting portion 16, and rectangular frame shape formed on the upper surface of insulating frame 20. And a metallized layer 14.

四角枠状のメタライズ層14には、必要に応じて四角枠状の金属枠体15が銀ろう等のろう材を介して接合される。   A square frame-shaped metal frame 15 is bonded to the square frame-shaped metallization layer 14 via a brazing material such as silver brazing as necessary.

また、電極パッド12は、通常、絶縁基体11の内部に形成された配線導体17を介して絶縁基体11の下面や側面に導出されている。   In addition, the electrode pad 12 is usually led out to the lower surface or side surface of the insulating base 11 via a wiring conductor 17 formed inside the insulating base 11.

そして、電子部品19を絶縁基体11と絶縁枠体20とで形成される凹状部内に収容し、搭載部16上に搭載するとともに、この電子部品19の電極を搭載部16の隅部の電極パッド12に導電性接着剤等を介して電気的に接続し、しかる後、金属枠体15の上面に金属製の蓋体18をシームウエルド法等により接合することによって、絶縁基体11と、絶縁枠体20と、封止用の金属枠体15と、蓋体18とから成る容器の内部に電子部品19が気密に封止され、それにより製品としての電子装置となる。
特開平9−246415号公報
Then, the electronic component 19 is accommodated in a recessed portion formed by the insulating base 11 and the insulating frame 20, and mounted on the mounting portion 16, and the electrodes of the electronic component 19 are electrode pads at the corners of the mounting portion 16. 12 is electrically connected to the insulating base 11 and the insulating frame by bonding a metal lid 18 to the upper surface of the metal frame 15 by a seam weld method or the like. An electronic component 19 is hermetically sealed inside a container composed of a body 20, a metal frame 15 for sealing, and a lid 18, thereby forming an electronic device as a product.
JP-A-9-246415

近年、このような電子部品搭載用基板およびこれを用いた電子装置は、小型化,薄型化の要求が著しく、これに対応して、図3(a),(b)に示すように、主面に電子部品19を搭載するための四角形状の搭載部16が形成された絶縁基体11と、搭載部16の隅部に形成された電極パッド12と、絶縁基体11の主面に搭載部16を囲繞するように形成された四角枠状のメタライズ層14とを具備した構造の薄型の電子部品搭載用基板が提案されている。   In recent years, such an electronic component mounting board and an electronic device using the same have been required to be reduced in size and thickness, and in response to this, as shown in FIGS. Insulating substrate 11 having a rectangular mounting portion 16 for mounting electronic component 19 on the surface, electrode pads 12 formed at the corners of mounting portion 16, and mounting portion 16 on the main surface of insulating substrate 11 A thin electronic component mounting substrate having a structure including a metallization layer 14 having a rectangular frame shape formed so as to surround the substrate has been proposed.

そして、電子部品19を搭載部16の上面に搭載するとともに、電子部品19の電極を電極パッド12に導電性接着剤等を介して電気的に接続し、その後、四角枠状のメタライズ層14に直接、または金属枠体15を介して蓋体18をシーム溶接法やダイレクトシーム法、ろう付け法等の接合手段で接合して電子部品19を気密封止することにより電子装置として完成する。   Then, the electronic component 19 is mounted on the upper surface of the mounting portion 16, and the electrode of the electronic component 19 is electrically connected to the electrode pad 12 via a conductive adhesive or the like. The electronic device 19 is hermetically sealed by joining the lid 18 directly or through a metal frame 15 with a joining means such as a seam welding method, a direct seam method, or a brazing method, thereby completing an electronic device.

このような構造によれば、絶縁基体11の上面に絶縁枠体を別途取り付ける必要が無く、電子部品19が搭載される搭載部16と、電子部品19の電極が接続される電極パッド12と、電子部品19を気密封止する四角枠状のメタライズ層14とが同一面上に形成されることになり、電子部品搭載用基板および電子装置の薄型化が達成できる。   According to such a structure, it is not necessary to separately attach an insulating frame to the upper surface of the insulating base 11, the mounting portion 16 on which the electronic component 19 is mounted, the electrode pad 12 to which the electrode of the electronic component 19 is connected, The square frame-like metallization layer 14 that hermetically seals the electronic component 19 is formed on the same surface, so that the electronic component mounting substrate and the electronic device can be thinned.

しかしながら、上記構成の電子部品収納用パッケージおよび電子装置においては、薄型化が可能となる反面、電子装置の小型化により、搭載部16の隅部に形成された電極パッド12と四角枠状のメタライズ層14との間隔が狭いものとなることから、電子部品19を電極パッド12に導電性接着剤等を介して接続する際や、四角枠状のメタライズ層14(または金属枠体15)に蓋体18を接合する際に、導電性接着剤やろう材、溶接に使用される金属材料の流れ出し等により、電極パッド12と四角枠状のメタライズ層14との間で電気的短絡(ショート)が発生し易くなるという問題点を有していた。   However, in the electronic component storage package and the electronic device configured as described above, the thickness can be reduced. However, due to the downsizing of the electronic device, the electrode pad 12 formed at the corner of the mounting portion 16 and the metallization in the form of a square frame. Since the distance from the layer 14 is narrow, when the electronic component 19 is connected to the electrode pad 12 via a conductive adhesive or the like, the lid is attached to the metallized layer 14 (or the metal frame 15) having a square frame shape. When the body 18 is joined, an electrical short (short) occurs between the electrode pad 12 and the square frame metallization layer 14 due to the flow of a conductive adhesive, brazing material, metal material used for welding, etc. It has a problem that it is likely to occur.

本発明は、かかる問題点に鑑み案出されたものであり、その目的は、小型化,薄型化が可能であり、かつ、電極パッドと四角枠状のメタライズ層との間での電気的短絡等の不具合を誘発することのない、信頼性の高い電子部品搭載用基板および電子装置を提供することにある。   The present invention has been devised in view of such problems, and its object is to make it possible to reduce the size and thickness, and to electrically short-circuit between the electrode pad and the rectangular metallization layer. It is an object of the present invention to provide a highly reliable electronic component mounting substrate and electronic device that do not induce such troubles.

本発明の電子部品搭載用基板は、主面に電子部品を搭載するための四角形状の搭載部が形成された絶縁基体と、搭載部の隅部に形成された電極パッドと、絶縁基体の主面に搭載部を囲繞するように形成された四角枠状のメタライズ層とを具備しており、電極パッドは、2辺がメタライズ層に沿った四角形の2辺の間の角部が面取りされた形状であり、主面の電極パッドとメタライズ層との間の部位で四角枠状のメタライズ層の角部を除いた部位に、2辺に対応する溝が形成されていることを特徴とするものである。
An electronic component mounting board according to the present invention includes an insulating substrate having a rectangular mounting portion for mounting an electronic component on a main surface, electrode pads formed at corners of the mounting portion, and a main portion of the insulating substrate. The electrode pad has a rectangular metallization layer formed so as to surround the mounting portion on the surface, and the electrode pad has two sides chamfered at the corners between the two sides of the square along the metallization layer the shape, the portions excluding the corners of the rectangular frame-shaped metallized layer at a site between the electrode pad and the metallization layer of the main surface, grooves corresponding to the two sides are formed as characterized by Tei Rukoto It is.

また、本発明の電子部品搭載用基板は、好ましくは、前記溝は、複数形成されているとともにそのうちの1つの開口形状が他の開口形状と異なっていることを特徴とするものである。   Also, the electronic component mounting board of the present invention is preferably characterized in that a plurality of the grooves are formed and one opening shape thereof is different from the other opening shape.

また、本発明の電子部品搭載用基板は、好ましくは、前記溝は、その下端から上端にかけて漸次その内寸法が大きくなっていることを特徴とするものである。   In the electronic component mounting board according to the present invention, preferably, the groove has an inner dimension that gradually increases from the lower end to the upper end.

また、本発明の電子装置は、上記本発明の電子部品搭載用基板と、搭載部に搭載されるとともに電極が電極パッドに電気的に接続された電子部品と、メタライズ層に取着された蓋体とを具備していることを特徴とするものである。
The electronic device according to the present invention includes an electronic component mounting board according to the present invention, an electronic component mounted on the mounting portion and having an electrode electrically connected to the electrode pad, and a lid attached to the metallization layer. And a body.

本発明の電子部品搭載用基板によれば、主面の電極パッドと四角枠状のメタライズ層との間の部位に溝が形成されていることから、電極パッドに電子部品を接続する際や四角枠状のメタライズ層に蓋体を接合する際に、余分な導電性接着剤やろう材、溶接に使用する金属材料が流れ出したとしても、これらを溝に溜めることにより電極パッドとメタライズ層との電気的短絡の発生を有効に防止することができる。   According to the electronic component mounting substrate of the present invention, since the groove is formed in the portion between the electrode pad on the main surface and the square frame-shaped metallization layer, when connecting the electronic component to the electrode pad, the square is formed. When joining the lid to the frame-like metallized layer, even if excess conductive adhesive, brazing material, or metal material used for welding flows out, the electrode pad and the metallized layer are separated by storing them in the groove. The occurrence of an electrical short can be effectively prevented.

また、この溝は、電極パッドとメタライズ層との間の部位で四角枠状のメタライズ層の角部を除いた部位に、電極パッドの面取りされた2辺に対応して形成されていることから、蓋体を接合する際の熱応力が最も大きく作用する絶縁基体の角部の強度を維持することができ、絶縁基体が歪むのを有効に抑制することができる。その結果、熱的衝撃にともなうクラック(いわゆるサーマルクラック)等の機械的な破壊が絶縁基体に発生するのを有効に防止することができ、電子部品の気密封止の信頼性を非常に優れたものとすることができる。また、メタライズ層の角部側の電極パッドの角部が面取りされていることから、四角枠状のメタライズ層の角部と電極パッドとの間の距離を大きくすることができ、電極パッドとメタライズ層との電気的短絡を有効に防止することができる。 In addition, this groove is formed in a portion between the electrode pad and the metallized layer , excluding the corner of the square frame-shaped metallized layer , corresponding to the two chamfered sides of the electrode pad. Further, the strength of the corner portion of the insulating base where the thermal stress at the time of joining the lid acts most can be maintained, and the insulating base can be effectively prevented from being distorted. As a result, it is possible to effectively prevent mechanical breakdown such as cracks (so-called thermal cracks) caused by thermal shock from occurring in the insulating substrate, and the reliability of hermetic sealing of electronic parts is extremely excellent. Can be. Further, since the corner of the electrode pad on the corner side of the metallized layer is chamfered, the distance between the corner of the metallized layer having a square frame shape and the electrode pad can be increased. An electrical short circuit with the layer can be effectively prevented.

また、本発明の電子部品搭載用基板によれば、好ましくは、溝は複数形成されているとともにそのうちの1つの開口形状が他の開口形状と異なっていることから、絶縁基体の大きさがさらに小さくなって電子部品搭載後の方向性を確認するアライメントマークを形成する場所を絶縁基体に確保することが難しくなったとしても、この開口形状が異なる溝をアライメントマークとして機能させ、その方向等を確認することで絶縁基体の方向性を容易に確認することができる。   Further, according to the electronic component mounting substrate of the present invention, preferably, the plurality of grooves are formed and one of the opening shapes is different from the other opening shape. Even if it becomes difficult to secure a place on the insulating substrate to form an alignment mark for confirming the directionality after mounting an electronic component, this groove having a different opening shape functions as an alignment mark. By confirming, the directionality of the insulating substrate can be easily confirmed.

また、本発明の電子部品搭載用基板によれば、好ましくは、溝は、その下端から上端にかけて漸次その内寸法が大きくなっていることから、電極パッドに電子部品を接続する際や四角枠状のメタライズ層に蓋体を接合する際に、余分な導電性接着剤やろう材、溶接に使用する金属材料が流れ出したとしても、これらをより効果的に溝に導いて溜めることができるようになり、電極パッドとメタライズ層との電気的短絡の発生をより有効に防止することができる。   Further, according to the electronic component mounting substrate of the present invention, preferably, the groove has a gradually increasing inner dimension from the lower end to the upper end, so that when the electronic component is connected to the electrode pad or a rectangular frame shape When joining the lid to the metallized layer, even if excess conductive adhesive, brazing material, or metal material used for welding flows out, these can be more effectively guided and stored in the groove. Thus, the occurrence of an electrical short between the electrode pad and the metallized layer can be more effectively prevented.

本発明の電子装置によれば、上記本発明の電子部品搭載用基板と、搭載部に搭載されるとともに電極が電極パッドに電気的に接続された電子部品と、メタライズ層に取着された蓋体とを具備していることにより、電極パッドと四角枠状のメタライズ層との間の電気的短絡が効果的に防止されるとともに、電子部品の気密封止の信頼性に優れた電子装置を提供することができる。
According to the electronic device of the present invention, the electronic component mounting board of the present invention, the electronic component mounted on the mounting portion and having the electrode electrically connected to the electrode pad, and the lid attached to the metallized layer An electronic device that effectively prevents an electrical short circuit between the electrode pad and the rectangular frame metallization layer and is excellent in the reliability of hermetic sealing of electronic components. Can be provided.

次に、本発明の電子部品搭載用基板および電子装置を添付の図面を基に説明する。図1(a)は本発明の電子部品搭載用基板および電子装置の実施の形態の一例を示した平面図であり、図1(b)は図1(a)のA−A’線における断面図である。同図において1は絶縁基体、2は電子部品を接続するための電極パッド、3は溝、4は四角枠状のメタライズ層、5は金属枠体である。そして、主として絶縁基体1と電極パッド2と溝3と四角枠状のメタライズ層4とで本発明の電子部品搭載用基板が構成されている。   Next, an electronic component mounting board and an electronic device according to the present invention will be described with reference to the accompanying drawings. FIG. 1A is a plan view showing an example of an embodiment of an electronic component mounting board and an electronic device according to the present invention, and FIG. 1B is a cross-sectional view taken along line AA ′ of FIG. FIG. In the figure, 1 is an insulating substrate, 2 is an electrode pad for connecting electronic components, 3 is a groove, 4 is a metallized layer in the form of a square frame, and 5 is a metal frame. The insulating substrate 1, electrode pad 2, groove 3, and rectangular frame-shaped metallization layer 4 constitute the electronic component mounting substrate of the present invention.

絶縁基体1は、酸化アルミニウム質焼結体や窒化アルミニウム質焼結体、ムライト質焼結体、ガラス−セラミックス等のセラミック材料から成り、例えば一辺の長さが2〜20mm程度で厚みが0.5〜3mm程度の四角形状である。なお、絶縁基体1は一層でもよく、二層以上の積層体であってもよい。   The insulating substrate 1 is made of a ceramic material such as an aluminum oxide sintered body, an aluminum nitride sintered body, a mullite sintered body, or a glass-ceramic, and has a side length of about 2 to 20 mm and a thickness of 0.5 to 0.5, for example. It is a square shape of about 3 mm. The insulating substrate 1 may be a single layer or a laminate of two or more layers.

また、絶縁基体1の主面(図1(a)の例では上面)に、電子部品9を搭載するための四角形状の搭載部6が形成されている。   A rectangular mounting portion 6 for mounting the electronic component 9 is formed on the main surface of the insulating substrate 1 (the upper surface in the example of FIG. 1A).

このような絶縁基体1は、酸化アルミニウム質焼結体から成る場合であれば、酸化アルミニウム、酸化珪素、酸化マグネシウム、酸化カルシウム等の原料粉末に適当な有機バンイダ、溶剤、可塑剤等を添加混合して泥漿状となすとともに、これを例えばドクタブレード法等のシート成形法によりシート状となすことにより複数枚のセラミックグリーンシートを得、次にそれらのセラミックグリーンシートに適当な打ち抜き加工を施すとともに上下に積層し、その積層体を高温で焼成することにより製作される。   If such an insulating substrate 1 is made of an aluminum oxide sintered body, an appropriate organic binder, solvent, plasticizer, etc. are added to and mixed with raw material powders such as aluminum oxide, silicon oxide, magnesium oxide, and calcium oxide. As a result, a plurality of ceramic green sheets are obtained by making a sheet shape by a sheet forming method such as a doctor blade method, and then appropriately punching the ceramic green sheets. It is manufactured by laminating up and down and firing the laminate at a high temperature.

また、絶縁基体1の搭載部6の隅部には、電極パッド2が形成されている。この電極パッド2は、搭載部6に搭載される電子部品9の電極を接続するためのパッドとして機能する。電子部品9は、例えば、圧電振動子や弾性表面波素子等であり、通常、その外形が四角形状で、その隅部に電極が形成されており、そのような電極の接続を容易かつ確実に行なえるようにするため、電極パッド2は搭載部6の隅部に形成されている。   Electrode pads 2 are formed at the corners of the mounting portion 6 of the insulating base 1. The electrode pad 2 functions as a pad for connecting the electrode of the electronic component 9 mounted on the mounting portion 6. The electronic component 9 is, for example, a piezoelectric vibrator, a surface acoustic wave element, or the like. Usually, the outer shape is a square shape, and electrodes are formed at the corners thereof, and the connection of such electrodes is easy and reliable. The electrode pad 2 is formed at the corner of the mounting portion 6 so that it can be performed.

なお、電子部品9の各電極と電極パッド2との接続は、例えば半田や導電性樹脂等の導電性接着剤を用いた電気的接続手段等によって行なわれる。   The electrodes of the electronic component 9 and the electrode pads 2 are connected by electrical connection means using a conductive adhesive such as solder or conductive resin.

この電極パッド2は、例えば、絶縁基体1の内部や表面に形成された配線導体7を介して、絶縁基体1の外表面(図1(b)の例では下面)に導出されている。配線導体7は、搭載部6に搭載される電子部品9の各電極を外部の電気回路に電気的に接続するための導電路として機能し、この配線導体7の絶縁基体1外表面への導出部分を半田等を介して外部電気回路に接続することにより、電子部品9の電極が電極パッド2および配線導体7を介して外部の電気回路に電気的に接続される。   The electrode pad 2 is led to the outer surface of the insulating substrate 1 (the lower surface in the example of FIG. 1B) via, for example, a wiring conductor 7 formed inside or on the surface of the insulating substrate 1. The wiring conductor 7 functions as a conductive path for electrically connecting each electrode of the electronic component 9 mounted on the mounting portion 6 to an external electric circuit, and the wiring conductor 7 is led out to the outer surface of the insulating base 1. By connecting the portion to an external electric circuit via solder or the like, the electrode of the electronic component 9 is electrically connected to the external electric circuit via the electrode pad 2 and the wiring conductor 7.

なお、電極パッド2および配線導体7の露出表面には、電極パッド2および配線導体7の酸化腐食を防止するとともに、電極パッド2と電子部品9の各電極との接続や、配線導体7と外部電気回路基板との接続を強固なものするために、通常であれば1〜10μm程度の厚みのニッケルめっき層と0.1〜3μm程度の厚みの金めっき層とが順次被着されているのがよい。   The exposed surfaces of the electrode pad 2 and the wiring conductor 7 prevent oxidative corrosion of the electrode pad 2 and the wiring conductor 7, connect the electrode pad 2 to each electrode of the electronic component 9, and connect the wiring conductor 7 to the outside. In order to strengthen the connection with the electric circuit board, normally, a nickel plating layer with a thickness of about 1 to 10 μm and a gold plating layer with a thickness of about 0.1 to 3 μm are preferably sequentially deposited. .

また、絶縁基体1の主面(上面)には、搭載部6を取り囲むようにしてタングステンやモリブデン、銅、銀等の金属粉末メタライズから成る四角枠状のメタライズ層4が形成されている。メタライズ層4は、厚みが10〜30μm程度、各辺の幅が0.2〜0.5mm程度であり、絶縁基体1に蓋体8を接合したり、金属枠体5を接合したりするための下地金属として機能する。   Further, on the main surface (upper surface) of the insulating substrate 1, a rectangular frame-shaped metallization layer 4 made of metal powder metallization such as tungsten, molybdenum, copper, or silver is formed so as to surround the mounting portion 6. The metallized layer 4 has a thickness of about 10 to 30 μm and a width of each side of about 0.2 to 0.5 mm, and is a base metal for joining the lid 8 or the metal frame 5 to the insulating substrate 1. Function as.

メタライズ層4は、図1に示すように、封止用の金属枠体5が銀ろう等のろう材を介してろう付けされてもよい。メタライズ層4の表面に金属枠体5をろう付けする場合、ろう材との濡れ性を良好とするために、例えば、メタライズ層4の表面に厚みが0.5〜5μm程度のニッケルめっき層がろう付けの前に予め被着されているのがよい。   As shown in FIG. 1, the metallized layer 4 may be brazed with a metal frame 5 for sealing via a brazing material such as silver brazing. When the metal frame 5 is brazed on the surface of the metallized layer 4, for example, a nickel plating layer having a thickness of about 0.5 to 5 μm is brazed on the surface of the metallized layer 4 in order to improve the wettability with the brazing material. It may be pre-deposited before.

金属枠体5は、例えば鉄−ニッケル合金や鉄−ニッケル−コバルト合金等の金属から成り、蓋体8を絶縁基体1に溶接するための下地金属部材として機能する。この金属枠体5は、その内周が搭載部6の外寸と同じ大きさであり、厚みが0.1〜0.5mm程度、各辺の幅が0.15〜0.45mm程度である。   The metal frame 5 is made of a metal such as an iron-nickel alloy or an iron-nickel-cobalt alloy, and functions as a base metal member for welding the lid 8 to the insulating base 1. The metal frame 5 has an inner circumference that is the same size as the outer dimension of the mounting portion 6, has a thickness of about 0.1 to 0.5 mm, and a width of each side of about 0.15 to 0.45 mm.

金属枠体5をメタライズ層4に接合する方法としては、金属枠体5の下面に予め20〜50μmの厚みの銀ろうを被着しておき、この銀ろうが被着された下面をメタライズ層4上に載置してシーム溶接やエレクトロンビーム等で加熱することにより、容易にメタライズ層4との間を気密性よく強固にロウ付けすることができる。   As a method of joining the metal frame 5 to the metallized layer 4, a silver brazing having a thickness of 20 to 50 μm is previously applied to the lower surface of the metal frame 5, and the lower surface to which this silver brazing is applied is applied to the metallized layer. By placing on 4 and heating by seam welding, electron beam or the like, the metallized layer 4 can be easily brazed with good airtightness.

なお、封止用の金属枠体5や金属枠体5とメタライズ層4とを接合するろう材、露出する四角枠状のメタライズ層4の表面には、これらが酸化腐蝕するのを有効に防止するとともに封止用の金属枠体5と蓋体8との溶接を容易なものとするために、通常であれば、1〜10μm程度の厚みのニッケルめっき層と0.3〜3μm程度の金めっき層とが順次被着されているのがよい。   It is to be noted that the metal frame 5 for sealing, the brazing material for bonding the metal frame 5 and the metallized layer 4, and the surface of the exposed square frame-shaped metallized layer 4 are effectively prevented from being oxidized and corroded. In addition, in order to facilitate welding of the metal frame 5 for sealing and the lid 8, a nickel plating layer with a thickness of about 1 to 10 μm and a gold plating layer with a thickness of about 0.3 to 3 μm are usually used. Are preferably deposited sequentially.

そして、絶縁基体1の搭載部6に電子部品9を搭載し、電子部品9の電極を導電性接着剤等を介して電極パッド2に接続した後、メタライズ層4または金属枠体5の上面に蓋体8を、シーム溶接法やエレクトロンビーム法等の溶接法やろう付け法等で接合することにより、蓋体8と金属枠体5と絶縁基体1とからなる容器に内部に電子部品9が気密封止され、電子装置として完成する。   Then, after mounting the electronic component 9 on the mounting portion 6 of the insulating base 1 and connecting the electrode of the electronic component 9 to the electrode pad 2 via a conductive adhesive or the like, the metallized layer 4 or the metal frame 5 is formed on the upper surface. By joining the lid 8 by a welding method such as a seam welding method or an electron beam method, a brazing method, or the like, an electronic component 9 is placed inside a container composed of the lid 8, the metal frame 5, and the insulating base 1. It is hermetically sealed and completed as an electronic device.

蓋体8は、金属やセラミックス、樹脂から成り、ろう付け法や溶接法等でメタライズ層4または金属枠体5に取着される。なお、蓋体8がセラミックスや樹脂から成る場合、ろう付け法や溶接法によってメタライズ層4または金属枠体5に接合可能とするために、蓋体8の接合面にメタライズやめっき、金属体の埋め込み等により金属導体を形成しておくのがよい。   The lid 8 is made of metal, ceramics, or resin, and is attached to the metallized layer 4 or the metal frame 5 by a brazing method, a welding method, or the like. When the lid 8 is made of ceramics or resin, in order to be able to be joined to the metallized layer 4 or the metal frame 5 by a brazing method or a welding method, metallization, plating, metal It is preferable to form a metal conductor by embedding or the like.

また、蓋体8の形状は、四角平板状や下面に凹部を有する四角形状であり、メタライズ層4に直接蓋体8を接合する場合、電子部品9を収容するための空洞部を形成するために下面に凹部を有する四角形状のものが用いられる。   Further, the shape of the lid body 8 is a square flat plate shape or a quadrangular shape having a recess on the lower surface, and when the lid body 8 is directly joined to the metallized layer 4, a cavity for accommodating the electronic component 9 is formed. A rectangular shape having a recess on the lower surface is used.

本発明の電子部品搭載用基板およびこれを用いた電子装置においては、絶縁基体1の主面(上面)の電極パッド2と四角枠状のメタライズ層4との間の部位でメタライズ層4の角部を除いた部位に溝3が形成されている。これにより、電極パッド2に電子部品9を接続する際や四角枠状のメタライズ層4に蓋体8を接合する際に、余分な導電性接着剤やろう材、溶接に使用する金属材料が流れ出したとしても、これらを溝3に溜めることにより電極パッド2とメタライズ層4との電気的短絡の発生を有効に防止することができる。   In the electronic component mounting substrate and the electronic device using the same according to the present invention, the corners of the metallized layer 4 are formed at portions between the electrode pads 2 on the main surface (upper surface) of the insulating substrate 1 and the metallized layer 4 having a rectangular frame shape. A groove 3 is formed in a portion excluding the portion. As a result, when the electronic component 9 is connected to the electrode pad 2 or when the lid 8 is joined to the rectangular frame-like metallized layer 4, excess conductive adhesive, brazing material, and metal material used for welding flow out. Even so, the accumulation of these in the groove 3 can effectively prevent the occurrence of an electrical short circuit between the electrode pad 2 and the metallized layer 4.

また、この溝3は四角枠状のメタライズ層4の角部を除いた部位に形成されていることから、蓋体8を接合する際の熱応力が最も大きく作用する絶縁基体1の角部の強度を維持することができ、絶縁基体1が歪むのを有効に抑制することができる。その結果、熱的衝撃にともなうクラック等の機械的な破壊が絶縁基体1に発生するのを有効に防止することができ、電子部品9の気密封止の信頼性を非常に優れたものとすることができる。   Further, since the groove 3 is formed in a portion excluding the corner portion of the square frame-shaped metallized layer 4, the corner portion of the insulating base body 1 where the thermal stress at the time of joining the lid body 8 acts most greatly. The strength can be maintained, and the distortion of the insulating substrate 1 can be effectively suppressed. As a result, it is possible to effectively prevent mechanical breakdown such as cracks caused by thermal shock from occurring in the insulating substrate 1, and to make the airtight sealing reliability of the electronic component 9 very excellent. be able to.

また、図4(a)に示すように、溝3は複数形成されているとともにそのうちの1つの開口形状が他の開口形状と異なっていることが好ましい。他の開口形状と異なって形成されている溝3’の形状は、例えば絶縁基体1の四角枠状のメタライズ層4の角部を避けるようにして、かつ電極パッド2とメタライズ層4との距離が狭くなり過ぎないように、他の溝3よりも長い形状とすればよい。このように溝3’を形成することにより、絶縁基体1の大きさがさらに小さくなって電子部品9を搭載後の方向性を確認するアライメントマークを形成する場所を絶縁基体1に確保することが難しくなったとしても、この開口形状が異なる溝3’をアライメントマークとして機能させ、その方向等を確認することで絶縁基体1の方向性を容易に確認することができる。   Further, as shown in FIG. 4A, it is preferable that a plurality of grooves 3 are formed and one of the opening shapes is different from the other opening shapes. The shape of the groove 3 ′ formed differently from the other opening shapes is such that, for example, a corner of the rectangular frame-like metallization layer 4 of the insulating substrate 1 is avoided and the distance between the electrode pad 2 and the metallization layer 4 is avoided. In order not to become too narrow, the shape may be longer than the other grooves 3. By forming the groove 3 ′ in this way, the size of the insulating base 1 is further reduced, and a place for forming an alignment mark for confirming the directionality after mounting the electronic component 9 can be secured in the insulating base 1. Even if it becomes difficult, the directionality of the insulating substrate 1 can be easily confirmed by making the groove 3 ′ having a different opening shape function as an alignment mark and confirming its direction.

また、溝3のうち1つのもの(溝3’)の開口形状を他のものと異ならせる場合、上記のように、その長さを異ならせるに限らず、絶縁基体1を主面側から見たときに、その開口形状の異なる溝を容易かつ明瞭に目視で識別できるようなものであれば、主面の電極パッド2とメタライズ層4との間の部位でメタライズ層4の角部を除いた部位という要件を満たす範囲で、種々の形状とすることができる。   Further, when the opening shape of one of the grooves 3 (groove 3 ′) is different from the other, the length is not limited as described above, but the insulating substrate 1 is viewed from the main surface side. If the grooves having different opening shapes can be easily and clearly identified visually, the corners of the metallized layer 4 are removed at the site between the electrode pad 2 and the metallized layer 4 on the main surface. Various shapes can be used as long as they satisfy the requirement of a region.

例えば、1つの溝3’の幅を他の溝3の幅と異ならせる、1つの溝3’の外辺形状を他の溝3の外辺形状と異ならせる、1つの溝3’の一部を平面方向に凹または凸とする、溝3を延長した延長線と絶縁基体1の外辺とのなす角度を、1つの溝3’と他の溝3とで異ならせる等の形状とすることができる。   For example, the width of one groove 3 ′ is different from the width of another groove 3, and the outer edge shape of one groove 3 ′ is different from the outer edge shape of another groove 3. Is made concave or convex in the plane direction, and the angle formed by the extension line extending the groove 3 and the outer side of the insulating base 1 is made different between one groove 3 ′ and the other groove 3. Can do.

なお、1つの溝3’の外辺形状を他の溝3の外辺形状と異ならせる場合、1つの溝3’の外辺を円弧状や、波形、折れ線形等とし、他の溝3の外辺を直線状としたり、1つの溝3’の外辺を平行四辺形等の、角部が直角にならない四角形となるような形状とし、他の溝3を長方形とする等の形態とすることができる。   When the outer side shape of one groove 3 ′ is different from the outer side shape of the other groove 3, the outer side of one groove 3 ′ has an arc shape, a waveform, a bent linear shape, etc. The outer side is linear, the outer side of one groove 3 'is a shape such as a parallelogram, etc., such that the corner is a square that does not form a right angle, and the other grooves 3 are rectangular. be able to.

また、1つの溝3’の一部を平面方向に凹または凸とする場合、凹部や凸部の形状は、例えば、円弧状、楕円弧状、四角形状、三角形状等の識別しやすい形状とする。なお、凸部が電極パッド2に接して溝3’内に溜まる余計な金属材料と電極パッド2との間で電気的な短絡が生じたり、凹部が溝3’の幅を狭めすぎて余分な金属材料が溝3’内に入り込み難くなったりすることがないようにその大きさを調整する。   In addition, when a part of one groove 3 ′ is concave or convex in the planar direction, the shape of the concave or convex portion is, for example, an easily distinguishable shape such as an arc shape, an elliptical arc shape, a square shape, or a triangular shape. . Note that an electrical short circuit occurs between the electrode pad 2 and the extra metal material that the convex portion contacts the electrode pad 2 and accumulates in the groove 3 ′, or the concave portion excessively narrows the width of the groove 3 ′. The size is adjusted so that the metal material does not easily enter the groove 3 '.

また、本発明の電子部品搭載用基板において、溝3は、図4(b)に示すように、その下端から上端にかけて漸次その内寸法が大きくなっていることが好ましい。   In the electronic component mounting substrate of the present invention, it is preferable that the groove 3 has a gradually increasing inner dimension from the lower end to the upper end, as shown in FIG.

これにより、電極パッド2に電子部品9を接続する際や四角枠状のメタライズ層4に蓋体8を接合する際に、余分な導電性接着剤やろう材、溶接に使用する金属材料が流れ出したとしても、これらをより効果的に溝3に導いて溜めることができるようになり、電極パッド2とメタライズ層4との電気的短絡の発生をより有効に防止することができる。   As a result, when the electronic component 9 is connected to the electrode pad 2 or when the lid 8 is joined to the rectangular frame-like metallized layer 4, excess conductive adhesive, brazing material, and metal material used for welding flow out. Even in such a case, these can be more effectively guided and accumulated in the groove 3, and the occurrence of an electrical short circuit between the electrode pad 2 and the metallized layer 4 can be more effectively prevented.

なお、溝3の内寸法を、溝3の下端から上端にかけて漸次大きくする場合、溝3の側面と絶縁基体1の主面とのなす角度が95度〜110度の範囲となるようにしておくことが好ましい。110度を超えると、溝3の開口面積が大きくなる傾向があるので、溝3が電極パッド2に接して電極パッド2と溝3内に溜まる金属材料との間で電気的な短絡を生じやすくなる。   When the inner dimension of the groove 3 is gradually increased from the lower end to the upper end of the groove 3, the angle formed between the side surface of the groove 3 and the main surface of the insulating base 1 is in the range of 95 degrees to 110 degrees. It is preferable. If the angle exceeds 110 degrees, the opening area of the groove 3 tends to increase, so that the groove 3 is in contact with the electrode pad 2 and an electrical short circuit is likely to occur between the electrode pad 2 and the metal material accumulated in the groove 3. Become.

なお、メタライズ層4の角部側の電極パッド2の角部を図1に示すように面取りしておく。これにより、四角枠状のメタライズ層4の角部と電極パッド2との間の距離を大きくすることができ、電極パッド2とメタライズ層4との電気的短絡を有効に防止することができる。 Note that the corner portion of the electrode pad 2 of the corner side of the metallization layer 4 chamfered as shown in FIG. 1 Contact Ku. Thereby, the distance between the corner | angular part of the rectangular frame-shaped metallization layer 4 and the electrode pad 2 can be enlarged, and the electrical short circuit with the electrode pad 2 and the metallization layer 4 can be prevented effectively.

電極パッド2と四角枠状のメタライズ層4との間隔は通常0.2〜0.4mm程度であり、四角枠状のメタライズ層4と電極パッド2との間に設けられた溝3の幅は0.1mm以上とすることが望ましい。また、溝3の深さは、溝3の幅方向より深く形成することが望ましい。   The distance between the electrode pad 2 and the square frame-like metallization layer 4 is usually about 0.2 to 0.4 mm, and the width of the groove 3 provided between the square frame-like metallization layer 4 and the electrode pad 2 is 0.1 mm or more. Is desirable. Further, it is desirable that the depth of the groove 3 is deeper than the width direction of the groove 3.

溝3は、絶縁基体1の主面に切削加工やレーザ加工等を施すことによって形成される。また、絶縁基体1が2層以上の絶縁層の積層体から成る場合、搭載部6側の絶縁層に溝3と成る貫通孔を形成しておき、複数の絶縁層を積層することで溝3を形成してもよい。例えば、通常の絶縁基体1を構成する各絶縁層の焼成後の厚みは0.1〜0.5mmであり、この絶縁基体1を構成する最上層の絶縁層、もしくは最上層とその下層に貫通孔を形成し複数の絶縁層を積層することにより、0.1〜0.5mmの深さの溝3を形成することができる。   The groove 3 is formed by subjecting the main surface of the insulating substrate 1 to cutting or laser processing. Further, when the insulating base 1 is formed of a laminate of two or more insulating layers, a through-hole serving as the groove 3 is formed in the insulating layer on the mounting portion 6 side, and a plurality of insulating layers are stacked to form the groove 3. May be formed. For example, the thickness of each insulating layer constituting the normal insulating substrate 1 after firing is 0.1 to 0.5 mm, and through holes are formed in the uppermost insulating layer constituting the insulating substrate 1 or in the uppermost layer and its lower layer. By stacking a plurality of insulating layers, the groove 3 having a depth of 0.1 to 0.5 mm can be formed.

なお、本発明は、上述の実施の形態の例に限定されるものではなく、種々の変形は可能である。例えば、絶縁基体1は三層以上のセラミック層を積層することにより形成されていてもよい。   In addition, this invention is not limited to the example of the above-mentioned embodiment, A various deformation | transformation is possible. For example, the insulating substrate 1 may be formed by laminating three or more ceramic layers.

(a)は本発明の電子部品搭載用基板の実施の形態の一例を示す平面図、(b)は(a)の電子部品搭載用基板のA−A’線における断面図である。(A) is a top view which shows an example of embodiment of the electronic component mounting substrate of this invention, (b) is sectional drawing in the A-A 'line of the electronic component mounting substrate of (a). (a)は従来の電子部品搭載用基板の平面図、(b)は(a)の電子部品搭載用基板のB−B’線における断面図である。(A) is a top view of the conventional electronic component mounting substrate, and (b) is a cross-sectional view taken along line B-B ′ of the electronic component mounting substrate of (a). (a)は従来の電子部品搭載用基板の平面図、(b)は(a)の電子部品搭載用基板のC−C’線における断面図である。(A) is a top view of the conventional electronic component mounting board | substrate, (b) is sectional drawing in the C-C 'line | wire of the electronic component mounting board | substrate of (a). (a)は本発明の電子部品搭載用基板の実施の形態の他の例を示す平面図、(b)は(a)の電子部品搭載用基板のA−A’線における断面図である。(A) is a top view which shows the other example of embodiment of the electronic component mounting board | substrate of this invention, (b) is sectional drawing in the A-A 'line of the electronic component mounting board | substrate of (a).

符号の説明Explanation of symbols

1・・・・・絶縁基体
2・・・・・電極パッド
3・・・・・溝
3’・・・・・開口形状が異なる溝
4・・・・・メタライズ層
5・・・・・金属枠体
6・・・・・搭載部
7・・・・・配線導体
8・・・・・蓋体
9・・・・・電子部品
DESCRIPTION OF SYMBOLS 1 ... Insulation base | substrate 2 ... Electrode pad 3 ... Groove 3 '... Groove from which opening shape differs 4 ... Metallization layer 5 ... Metal Frame 6 ... Mounting part 7 ... Wiring conductor 8 ... Cover 9 ... Electronic components

Claims (4)

主面に電子部品を搭載するための四角形状の搭載部が形成された絶縁基体と、前記搭載部の隅部に形成された電極パッドと、前記絶縁基体の前記主面に前記搭載部を囲繞するように形成された四角枠状のメタライズ層とを具備しており、前記電極パッドは、2辺が前記メタライズ層に沿った四角形の前記2辺の間の角部が面取りされた形状であり、前記主面の前記電極パッドと前記メタライズ層との間の部位で前記メタライズ層の角部を除いた部位に、前記2辺に対応する溝が形成されていることを特徴とする電子部品搭載用基板。 An insulating substrate having a rectangular mounting portion for mounting an electronic component on the main surface, an electrode pad formed at a corner of the mounting portion, and surrounding the mounting portion on the main surface of the insulating substrate The electrode pad has a shape in which the corners between the two sides of the quadrilateral along the metallization layer are chamfered. , the electronic component mounting, characterized in sites other than the corner portion of the metallized layer at the site, the Tei Rukoto the groove formed corresponding to the two sides between the metallized layer and the electrode pad of the main surface Substrate. 前記溝は、複数形成されているとともにそのうちの1つの開口形状が他の開口形状と異なっていることを特徴とする請求項1記載の電子部品搭載用基板。   2. The electronic component mounting board according to claim 1, wherein a plurality of the grooves are formed, and one of them has an opening shape different from the other opening shape. 前記溝は、その下端から上端にかけて漸次その内寸法が大きくなっていることを特徴とする請求項1または請求項2記載の電子部品搭載用基板。   3. The electronic component mounting board according to claim 1, wherein an inner dimension of the groove gradually increases from a lower end to an upper end. 4. 請求項1乃至請求項3のいずれかに記載の電子部品搭載用基板と、前記搭載部に搭載されるとともに電極が前記電極パッドに電気的に接続された電子部品と、前記メタライズ層に取着された蓋体とを具備していることを特徴とする電子装置。   4. The electronic component mounting substrate according to claim 1, an electronic component mounted on the mounting portion and having an electrode electrically connected to the electrode pad, and attached to the metallized layer And an electronic device.
JP2004048238A 2003-08-27 2004-02-24 Electronic component mounting substrate and electronic device using the same Expired - Fee Related JP4753539B2 (en)

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JP3410199B2 (en) * 1994-02-24 2003-05-26 ソニー株式会社 Device for preventing bridging of connection member, semiconductor integrated circuit having the same, and mounting substrate
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JP2001077651A (en) * 1999-08-31 2001-03-23 Kyocera Corp Piezoelectric device
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