JP4746346B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP4746346B2 JP4746346B2 JP2005132094A JP2005132094A JP4746346B2 JP 4746346 B2 JP4746346 B2 JP 4746346B2 JP 2005132094 A JP2005132094 A JP 2005132094A JP 2005132094 A JP2005132094 A JP 2005132094A JP 4746346 B2 JP4746346 B2 JP 4746346B2
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- well region
- scr
- mosfet
- effect transistor
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- 239000004065 semiconductor Substances 0.000 title claims description 54
- 239000000758 substrate Substances 0.000 claims description 34
- 239000012212 insulator Substances 0.000 claims description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 12
- 230000005669 field effect Effects 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 229910052710 silicon Inorganic materials 0.000 claims description 12
- 239000010703 silicon Substances 0.000 claims description 12
- 230000015556 catabolic process Effects 0.000 claims description 7
- 230000000694 effects Effects 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 description 31
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000002955 isolation Methods 0.000 description 5
- 239000000470 constituent Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000004088 simulation Methods 0.000 description 4
- 230000001960 triggered effect Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000001066 destructive effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
- H01L27/0259—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using bipolar transistors as protective elements
- H01L27/0262—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using bipolar transistors as protective elements including a PNP transistor and a NPN transistor, wherein each of said transistors has its base coupled to the collector of the other transistor, e.g. silicon controlled rectifier [SCR] devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
Description
Vt1=(n+1)Vbi
で与えられる。
M.P.J.Mergens et.al.,"Diode−Triggered SCR(DTSCR) for RF−ESD Protection of BiCMOS SiGe HBTs and CMOS Ultra−Thin Gate Oxides",in IEDM’03 Tech. Digest,pp.21.3.1−21.3.4,2003.
図1は、この発明の第1の実施形態にしたがった、半導体集積回路における、静電気放電(ESD)保護回路装置の基本構成を示すものである。なお、ここでは第1の金属絶縁物半導体電界効果トランジスタ(MOSFET:Metal−Oxide−Silicon Field−Effect Transistor)をトリガ回路として備えた、シリコン制御整流器(SCR)型のESD保護回路装置において、SCRおよびトリガ回路をP型の半導体基板(Si基板)上に搭載した場合を例に示している。
図5は、この発明の第2の実施形態にしたがった、半導体集積回路における、ESD保護回路装置の基本構成を示すものである。なお、ここでは、MOSFETをトリガ回路として備えたSCR型のESD保護回路装置において、通常の回路動作時のリーク電流を抑制できるように構成した場合について説明する。また、同一部分には同一符号を付して、詳しい説明は割愛する。
Claims (4)
- 内部回路を静電破壊から保護するためのシリコン制御整流器と、
前記シリコン制御整流器にトリガ電圧を与えるための、ゲート電極と基板とが電気的に接続された第1の金属絶縁物半導体電界効果トランジスタと
を具備し、
前記シリコン制御整流器および前記第1の金属絶縁物半導体電界効果トランジスタは共通の第1導電型半導体基板または第1の第1導電型ウェル領域上に設けられ、
前記第1の金属絶縁物半導体電界効果トランジスタの第2の第1導電型ウェル領域と前記シリコン制御整流器の第3の第1導電型ウェル領域とが、前記第1導電型半導体基板または前記第1の第1導電型ウェル領域を介して電気的に接続されている
ことを特徴とする半導体装置。 - 前記第1の金属絶縁物半導体電界効果トランジスタおよび前記シリコン制御整流器は、N型の半導体層によって電気的に分離されていることを特徴とする請求項1に記載の半導体装置。
- 前記第1の金属絶縁物半導体電界効果トランジスタのゲート電極および基板には、さらに、通常動作時に、前記第1の金属絶縁物半導体電界効果トランジスタをオフするための、第2の金属絶縁物半導体電界効果トランジスタが接続されていることを特徴とする請求項1に記載の半導体装置。
- 前記第2の第1導電型ウェル領域の不純物濃度は、前記第3の第1導電型ウェル領域の不純物濃度よりも高いことを特徴とする請求項1に記載の半導体装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005132094A JP4746346B2 (ja) | 2005-04-28 | 2005-04-28 | 半導体装置 |
US11/223,131 US7473973B2 (en) | 2005-04-28 | 2005-09-12 | Semiconductor device including metal-oxide-silicon field-effect transistor as a trigger circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005132094A JP4746346B2 (ja) | 2005-04-28 | 2005-04-28 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006310595A JP2006310595A (ja) | 2006-11-09 |
JP4746346B2 true JP4746346B2 (ja) | 2011-08-10 |
Family
ID=37233635
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005132094A Expired - Fee Related JP4746346B2 (ja) | 2005-04-28 | 2005-04-28 | 半導体装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7473973B2 (ja) |
JP (1) | JP4746346B2 (ja) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5232444B2 (ja) * | 2007-11-12 | 2013-07-10 | ルネサスエレクトロニクス株式会社 | 半導体集積回路 |
JP5174434B2 (ja) * | 2007-11-16 | 2013-04-03 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
US8039868B2 (en) * | 2008-12-23 | 2011-10-18 | International Business Machines Corporation | Structure and method for an electrostatic discharge (ESD) silicon controlled rectifier (SCR) structure |
US8693148B2 (en) * | 2009-01-08 | 2014-04-08 | Micron Technology, Inc. | Over-limit electrical condition protection circuits for integrated circuits |
US8634172B2 (en) | 2010-05-18 | 2014-01-21 | International Business Machines Corporation | Silicon controlled rectifier based electrostatic discharge protection circuit with integrated JFETs, method of operation and design structure |
US8896064B2 (en) * | 2010-10-18 | 2014-11-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Electrostatic discharge protection circuit |
KR101130767B1 (ko) * | 2010-10-20 | 2012-03-28 | 주식회사 바우압텍 | 정전기 방전 보호소자 |
CN102270658B (zh) * | 2011-07-27 | 2012-09-05 | 浙江大学 | 一种低触发电压低寄生电容的可控硅结构 |
US8611058B2 (en) | 2011-08-23 | 2013-12-17 | Micron Technology, Inc. | Combination ESD protection circuits and methods |
US8724268B2 (en) * | 2011-08-30 | 2014-05-13 | Micron Technology, Inc. | Over-limit electrical condition protection circuits and methods |
CN103258822B (zh) * | 2012-02-21 | 2015-10-14 | 旺宏电子股份有限公司 | 高压半导体元件及其操作方法 |
US9281682B2 (en) | 2013-03-12 | 2016-03-08 | Micron Technology, Inc. | Apparatuses and method for over-voltage event protection |
TWI538154B (zh) * | 2013-10-23 | 2016-06-11 | 美商微晶片科技公司 | 晶片與靜電放電保護元件及其製造方法 |
FR3016999A1 (fr) * | 2014-01-30 | 2015-07-31 | St Microelectronics Sa | Dispositif electronique, en particulier pour la protection contre les decharges electrostatiques |
US9355971B1 (en) * | 2015-06-23 | 2016-05-31 | Alpha And Omega Semiconductor Incorporated | EOS protection for integrated circuits |
US10600776B2 (en) | 2017-02-24 | 2020-03-24 | Nxp B.V. | Device and method for electrostatic discharge (ESD) protection |
CN109841615B (zh) * | 2019-02-26 | 2020-12-22 | 合肥奕斯伟集成电路有限公司 | 一种过电压摆幅静电放电防护器件及电路 |
CN111627902B (zh) * | 2020-06-04 | 2022-06-24 | 电子科技大学 | 一种具有sgt和晶闸管的可编程过电压保护器件 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09213811A (ja) * | 1995-11-13 | 1997-08-15 | Lsi Logic Corp | 電子回路を静電放電による破壊から保護するための装置、方法およびシステム |
JP2003203985A (ja) * | 2001-03-19 | 2003-07-18 | Nec Electronics Corp | 半導体集積回路の静電保護回路 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5671111A (en) | 1995-10-30 | 1997-09-23 | Motorola, Inc. | Apparatus for electro-static discharge protection in a semiconductor device |
KR100239424B1 (ko) * | 1997-09-26 | 2000-01-15 | 김영환 | 정전기 보호회로 |
TW411607B (en) * | 1998-12-02 | 2000-11-11 | Winbond Electronics Corp | Electrostatic discharge protection circuit |
US20050275029A1 (en) * | 2004-06-15 | 2005-12-15 | Jeffrey Watt | Fast turn-on and low-capacitance SCR ESD protection |
-
2005
- 2005-04-28 JP JP2005132094A patent/JP4746346B2/ja not_active Expired - Fee Related
- 2005-09-12 US US11/223,131 patent/US7473973B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09213811A (ja) * | 1995-11-13 | 1997-08-15 | Lsi Logic Corp | 電子回路を静電放電による破壊から保護するための装置、方法およびシステム |
JP2003203985A (ja) * | 2001-03-19 | 2003-07-18 | Nec Electronics Corp | 半導体集積回路の静電保護回路 |
Also Published As
Publication number | Publication date |
---|---|
US20060244071A1 (en) | 2006-11-02 |
US7473973B2 (en) | 2009-01-06 |
JP2006310595A (ja) | 2006-11-09 |
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