JP4743801B2 - Work cutting method and wire winding width changing device for work cutting - Google Patents

Description

The present invention relates to a method of cutting a workpiece in a wire saw, and an apparatus for changing a winding state of a wire, particularly a part of pitch, that is, a winding width of the wire, in accordance with the shape of the workpiece in the process of cutting the workpiece.

A wire saw cuts a workpiece into a product having a predetermined thickness by winding multiple wires between main rollers and pressing the running wire against a workpiece such as a silicon ingot. In the cutting process, simultaneous cutting of a plurality of workpieces is a desirable mode from the improvement of work efficiency.

1 and 2 show a general method for simultaneously cutting a plurality of, for example, four workpieces 4 in a conventional wire saw. Each workpiece 4 is held by a glass holder 5 by an adhesive layer 6 on the upper surface. These workpieces 4 are bonded to the lower surface of the work plate 11 via the holder 5 at a predetermined interval in a direction perpendicular to the traveling direction of the wire 3, and the work plate 11 is attached by an appropriate clamping means (not shown). Fixed to the work table of the wire saw.

The wire 3 is pulled out from a delivery device (not shown), and is wound around the plurality of main rollers 2 through a grooved guide roller 23 in a multiple parallel state along the groove 2a of each main roller 2. Then, the sheet is fed to a winding device (not shown) via a guide roller 24 with a groove. Each groove 2 a of the main roller 2 is generally a V-shaped annular groove as shown in the enlarged sectional view in the circle of FIG. 2, and is independent on the outer peripheral surface of the main roller 2. For this reason, the wire 3 is orthogonal to the center line of the main roller 2 in the cutting area facing the work 4, that is, the upper area in the illustrated example, but the area not facing the work 4, that is, the lower area in the illustrated example. In the side area, the groove is displaced from one adjacent groove 2 a to the other groove 2 a, and is skewed with respect to the center line of the main roller 2. Note that the skewed portion of the wire 3 is omitted in FIG. 2 to avoid complication of the upper and lower lines.

During the cutting process, the wire 3 enters a traveling state by the rotation of the main roller 2 and is pressed against a plurality of workpieces 4. As a result, the workpiece 4 is cut to a target thickness t according to the wire pitch P between the wires 3, that is, the groove pitch of the main roller 2. The cut edge at this time is represented by a parallel cutting line C as shown in the work 4 at the left end of FIG.

If the workpiece 4 has irregularities at the ends or is deformed, for example, like a rhombus, as shown in FIG. 1, the end material 4b having a thickness less than t is formed at both ends of the workpiece 4 at the time of completion of cutting. The non-defective product 4a having the target thickness t is obtained between the end materials 4b. The end material 4b is usually shorter than the cutting height H of the non-defective product 4a.

A part of the end material 4b loses the adhesive layer 6 during cutting and is separated from the holder 5 to be separated, interfering with the wire 3 in the middle, or entering the groove 2a of the main roller 2 to jump the wire. Or, wire breakage or interference with rotating parts may cause defective rotating parts. For this reason, the separation of the end material 4b is also a problem from the viewpoint of maintaining the function of the wire saw and preventing danger, and must be prevented in advance.

On the other hand, Patent Literature 1 discloses that the wire winding position for returning the wire to the main roller by shifting the wire on the outside of the main roller is shifted by one pitch as a whole. However, this technique is not intended to separate or separate end materials, thereby maintaining the function of the wire saw, and preventing danger. Therefore, the above problem cannot be solved even if the technique of Patent Document 1 is simply transferred as it is.

JP 2008-49675 A

Therefore, the problem of the present invention is that the workpiece end material is constrained to the holder even during the cutting of the workpiece and at the time when the cutting is completed, so that the workpiece is not separated, so that the end material interferes with the wire or the end material against the groove of the main roller. Intrusion, interference between the end material and the rotating parts is eliminated, and wire jumping, wire breakage, and defective rotating parts are prevented in advance.

Based on the above problems, the present invention allows the wire to jump over the groove of the main roller at the position where the end material is generated in the cutting process of the workpiece by the wire saw, and the end material is used as a holder even after the completion of the cutting. It is restrained so that it does not become discrete.

More specifically, the workpiece cutting method according to the present invention travels a wire wound in a multiple manner between a plurality of parallel main rollers, and pushes the workpiece constrained by the holder to the traveling wire. In the wire saw that cuts the workpiece to the target thickness by applying the workpiece, the workpiece cutting area is set within the range in which a non-defective product can be secured while leaving the constrained part with the holder at both ends of the workpiece in the target thickness direction of the workpiece. Set and set the wire pitch of the wire within the workpiece cutting area to a value corresponding to the target thickness, and set the wire skipping area where there is no wire outside the workpiece cutting area and in the range where it interferes with the workpiece (Claim 1).

Here, with respect to the workpiece, a workpiece in which a predetermined dimension is secured in any one of the workpiece cutting height, the cutting length , and the combination of the cutting height and the cutting length as the non- defective product. (Claim 2). Accordingly, the workpiece cutting zone, while ensuring the target thickness, the cutting height of the work only, cut length only, the combination of the cutting height and cut length is determined by three aspects of the.

Further, the present invention allows a wire wound in a multiple manner between a plurality of parallel main rollers to travel, and presses the workpiece restrained by the holder against the wire in the traveling state, thereby causing the workpiece to have a target thickness. In a wire saw that cuts into a workpiece, in the target thickness direction of the workpiece, the workpiece cutting area is set within a range in which a non-defective product can be ensured while leaving a restrained portion with the holder at both ends of the workpiece. In addition to setting the wire pitch of the wire to a value corresponding to the target thickness, a wire skipping area in which no wire is present is set in a range that interferes with the work other than the work cutting area, and the main roller is set in this wire skipping area. The wire blow roller is placed outside the wire and the wire is wound around the wire blow roller so that the wire is placed inside the main roller. It is displaced in the direction of the line, to form a wire skip area, and a work cutting wire winding width changing device (claim 3).

Also in this workpiece cutting wire winding width changing device, the workpiece has a predetermined dimension at any one of the workpiece cutting height, the cutting length , and the combination of the cutting height and the cutting length at the target thickness of the workpiece. Is ensured as the non-defective product (claim 4). Accordingly, the workpiece cutting zone, while ensuring the target thickness, the cutting height of the work only, cut length only, the combination of the cutting height and cut length is determined by three aspects of the.

Furthermore, in the wire cutting width changing device for cutting a workpiece, the present invention is arranged such that two wire blowing rollers are arranged in a wire flying area of an adjacent workpiece, and the axis of the two wire blowing rollers is the center of the main roller. Parallel to the line, a plurality of guide rollers are arranged between the two wire blowing rollers, and the axis of these guide rollers intersects the center line of the main roller, for two wire blowing A wire is sequentially wound around the roller and the guide roller, and the wire is made nonexistent within a range where it interferes with the workpiece in the wire skipping area.

In the wire cutting width changing device for cutting a workpiece, the present invention is arranged such that one or two wire blowing rollers are arranged in a wire blowing area of an adjacent workpiece, and the axis of the wire blowing roller is set to the center line of the main roller. It is set in an oblique direction, the wire is wound around a wire blow roller, and the wire is made nonexistent within a range where it interferes with the workpiece in the wire blow area (Claim 6).

Further, in the wire cutting width changing device for cutting a workpiece, the present invention is configured to hold the wire blowing roller rotatably by different brackets and to move each bracket in a direction parallel to the main roller. Item 7).

In the wire cutting width changing device for cutting a workpiece, the present invention is configured to hold a wire blowing roller rotatably by the same bracket, and to move the bracket in a direction parallel to the main roller. .

In the wire cutting width changing device for cutting a workpiece, according to the present invention, a wire blowing roller is attached to a bracket so that the inclination angle can be adjusted by an inclination bearing holder and a fulcrum shaft.

According to the workpiece cutting method according to the present invention, the workpiece is cut as a non-defective product with a target thickness in the workpiece cutting region, the non-defective product is restrained by the holder, and the end material is cut after cutting in the wire skipping region at both ends of the workpiece. Although generated, these end materials are not cut finely due to the absence of the wire in the wire skipping region, and remain in the holder like the non-defective product. Therefore, in the process of cutting the workpiece by the wire, the end material is not separated from the holder, so that the end material does not interfere with the wire and the end material does not enter the groove of the main roller, and the end material interferes with the rotating part. Therefore, it is possible to prevent wire jumping, wire breakage, and defective rotating parts (claim 1).

In the work cutting method according to the present invention, the cutting zone cutting height of the workpiece, when it is determined by considering the etc. cut length Sana, depending on the quality of the shape and the product, such as a silicon ingot as a work, a suitable A cutting area can be set (claim 2).

According to the wire cutting width changing device for cutting a workpiece according to the present invention, the workpiece is cut as a non-defective product having a target thickness in the workpiece cutting area, and the non-defective product is restrained by the holder in the same manner as the above-described workpiece cutting method. End materials are generated after cutting in the wire skipping regions at both ends, but these end materials are not cut due to the absence of wires in the wire skipping regions and are constrained by the holder in the same way as non-defective products. Therefore, in the process of cutting the workpiece by the wire, the end material is not separated from the holder and is not separated. For this reason, after completion of cutting, the end material can be collected together with the non-defective product together with the holder. In addition, there is no interference of the end material to the wire, and the end material does not enter the groove of the main roller, and there is no interference between the end material and the rotating part, and it is possible to prevent wire jumping, wire breakage, and defective rotating parts ( Claim 3). In particular, since the wire skipping area can be formed by winding a wire around a wire skipping roller disposed outside the main roller, it is not necessary to change the configuration of the main roller or the like, and the cutting process can be easily performed. 3).

Also in the work cutting wire winding width changing device, similarly to the workpiece cutting method, the cutting zone cutting height of the workpiece, when it is determined in consideration of the etc. disconnect length Sana, shape, such as a silicon ingot as a workpiece An appropriate cutting area can be set according to the quality of the product.

In the wire cutting width changing device for cutting a workpiece, two wire blowing rollers are arranged in the wire blowing area, and a plurality of guide rollers are interposed between the wire blowing rollers. This change can be easily dealt with by changing the position of the wire blow-off roller, and the diameter of the wire blow-off roller may be small (Claim 5).

In the wire cutting width changing device for cutting a workpiece, if one or two wire blowing rollers are arranged in an oblique direction with respect to the center line of the main roller in the wire flying area of the adjacent workpiece, the wire blowing roller By adjusting the angle in the oblique direction, it is possible to flexibly cope with changes in the dimensions of the wire skipping area, and it is sufficient that the diameters of the two wire skipping rollers are small.

In the wire cutting width changing device for cutting a workpiece, the wire blowing roller is rotatably held by different brackets, and each bracket is provided so as to be movable in a direction parallel to the main roller. It is also possible to flexibly cope with changes in the range of wires, changes in the range of the wire skipping area, in other words, changes in the dimensions of the workpiece and changes in the interval at the time of workpiece placement.

In the wire cutting width changing device for workpiece cutting, if the wire blowing roller is held by the same bracket, the size of the workpiece cutting area changes, but when the wire flying area hardly changes, the wire moves by moving the bracket. The setting of the cutting process can be easily performed without changing the flying area.

In the wire cutting width changing device for workpiece cutting, if the wire blow roller is attached to the bracket so that the tilt angle can be adjusted by the tilt bearing holder and the fulcrum shaft, the workpiece cutting area and the wire flying area can be changed. Since both the dimensional changes can be dealt with simultaneously by adjusting the tilt angle of the tilt bearing holder, the dimensional changes can be flexibly dealt with (claim 9).

It is a side view of the conventional workpiece cutting method. It is a top view of the conventional workpiece cutting method. It is a side view of the workpiece cutting method of the present invention. It is a top view of the workpiece cutting method of the present invention. It is a side view of the other example of the workpiece | work cutting method of this invention. It is a side view of the other example of the workpiece | work cutting method of this invention. It is a top view of the other example of the workpiece cutting method of the present invention. It is a front view of the example of FIG. It is one side view of the wire winding width changing apparatus for workpiece | work cutting | disconnection of this invention. It is the other side view of the wire winding width changing apparatus for workpiece | work cutting | disconnection of this invention. It is a front view of a wire path | route in the wire winding width changing apparatus for workpiece | work cutting | disconnection of this invention. It is an expanded sectional view of the connection part of a bracket and a rail in the wire winding width changing apparatus for workpiece | work cutting | disconnection of this invention. It is a side view of the example of holding | maintenance of a skip roller in the wire winding width changing apparatus for workpiece | work cutting | disconnection of this invention. It is a side view of the other holding example of a skip roller in the wire winding width changing apparatus for workpiece | work cutting | disconnection of this invention. The other workpiece | work shape is shown in the wire winding width changing apparatus for workpiece | work cutting | disconnection of this invention, (1) is a side view of a workpiece | work, (2) is a top view of a workpiece | work. It is a side view of the example of arrangement | positioning of three main rollers in the wire winding width changing apparatus for workpiece | work cutting | disconnection of this invention. It is a side view of the example of arrangement of four main rollers in the wire cutting width changing device for work cutting of the present invention.

3 and 4 show a mode when a plurality of, for example, four workpieces 4 are simultaneously cut by the workpiece cutting method according to the present invention. In these FIG. 3 and FIG. 4, the wire saw 1 runs the wire 3 wound in multiple between the two parallel main rollers 2 as an example, and moves the four workpieces 4 on the wire 3 in the running state. By pressing, the workpiece 4 is cut to a target thickness t.

The wire 3 is pulled out from a delivery device (not shown), and is wound around the plurality of main rollers 2 through the grooved guide rollers 23 along the grooves 2a of the main rollers 2 in a multiple manner. A parallel cutting region is formed at a position facing the, and the sheet is fed to a winding device (not shown) via a grooved guide roller 24.

Each groove 2a of the main roller 2 is a V-shaped annular groove as shown in the enlarged sectional view in the circle of FIG. 4 and is formed on the outer peripheral surface of the main roller 2 corresponding to the wire pitch P, and is independent of each other. is doing. Since all the wires 3 are parallel to each other in the cut region facing the workpiece 4, that is, the upper region in the illustrated example, in the corresponding grooves 2a of the two main rollers 2, the center of the main roller 2 is The main roller is displaced from one adjacent groove 2a to the other groove 2a in a non-cutting area that is orthogonal to the line but does not face the workpiece 4, that is, in the illustrated lower side area. It is skewed with respect to the center line of 2. The skewed portion of the wire 3 is partially omitted in FIG. 4 in order to avoid complication of the line.

The workpiece 4 is fixed to, for example, a glass holder 5 by an adhesive layer 6 on the upper surface, and is arranged on the workpiece plate 11 via the holder 5 at a predetermined interval in a direction orthogonal to the traveling direction of the wire 3. It is attached to the work table of the wire saw by an appropriate clamping means (not shown).

Then, as shown in FIG. 3, the workpiece cutting method of the present invention sets a workpiece cutting area A by a line parallel to the cutting line C for each workpiece 4 before cutting the workpiece 4, A wire skipping area B is set by a line parallel to the cutting line C between the workpieces 4 and for each end in the arrangement direction of the workpieces 4. In the workpiece cutting area A, in the direction of the target thickness t of the workpiece 4, that is, in the arrangement direction of the four workpieces 4, the constrained portions with the holder 5 at both ends of the workpiece 4, that is, the adhesive layer 6 of the workpiece 4 to the holder 5. The remaining dimension is set for each workpiece 4 within a range in which a necessary dimension for the workpiece 4a , that is, a cutting height H can be secured. Within this workpiece cutting area A, the wire pitch P is set to a value corresponding to the target thickness t.

Further, the wire skipping area B is left outside the workpiece cutting area A, that is, between the two adjacent workpieces 4 and outside the workpiece cutting area A at the workpiece 4 at the end position in the arrangement direction. It is set to a range that includes the adhesive layer 6 that has been made and can secure the necessary cutting height H for the workpiece 4 to be a non-defective product 4a . In order to set the wire skipping area B, for example, a skip roller 71 with a groove as a wire skipping roller is used. The skip roller 71 is disposed outside the main roller 2 in the three wire skipping areas B other than the wire skipping areas B at both ends, and the axis of the skip roller 71 is inclined with respect to the center line of the main roller 2. Is set. In the wire skipping region B at both ends, the wire skipping region B is set by not winding the wire 3 there.

In the illustrated example, the wire 3 exits from one work cutting area A, leaves the main roller 2, is wound around the skip roller 71, enters the other work cutting area A, and is wound around the main roller 2. Therefore, it looks like an open belt. Therefore, as apparent from FIG. 3, the diameter of the skip roller 71 is such that the position of the wire 3 exiting from one workpiece cutting area A (out-side position) and the position of the wire 3 entering the other workpiece cutting area A (in-side). The dimension corresponding to the length of the diagonal line connecting to the position of the diagonal line is preferable, but there may be an operation with a diameter smaller than the length of the diagonal line within an allowable range. Thus, since the wire 3 is wound around the skip roller 71 in the wire skipping area B, a large interval is formed by jumping over the plurality of grooves 2a of the main roller 2 in the wire skipping area B. In area B, it is absent.

When the workpiece 4 is cut, the wire saw 1 travels the wires 3 wound in a multiple manner between the main rollers 2 and simultaneously presses the four workpieces 4 against the wires 3 in the traveling state. The corresponding workpiece 4 is cut to a target thickness t within the range of. The cut surface at the time of completion of cutting is represented by a plurality of parallel cutting lines C as illustrated with respect to the work 4 at the left end in FIG.

The workpiece 4 cut to the target thickness t in the workpiece cutting area A becomes a plurality of non-defective products 4a. Since each non-defective product 4a is fixed to the holder 5 by the adhesive layer 6 and restrained even after the completion of the cutting, it is not separated therefrom. Accordingly, the plurality of non-defective products 4 a can be removed together with the holder 5 as a product.

On the other hand, in the wire skipping zone B, the workpiece 4 cut to the target thickness t becomes the end material 4b. The end material 4b is generated at both ends of each workpiece 4, but, like the non-defective product 4a, the adhesive layer 6 is not lost and is still constrained to the holder 5 by the adhesive layer 6, and is not separated therefrom. It ’s not discrete.

Therefore, the end material 4b interferes with the wire 3, enters into the groove 2a of the main roller 2, or interferes with the rotating parts, and causes wire jumping, wire breakage, and defective rotating parts. Absent. Moreover, after the completion of cutting, the end materials 4b at both ends can be collected together with the holder 5 together with the non-defective products 4a.

Even if the wire 3 exists at a position where the workpiece 4 does not exist, for example, at a position in the space between the two workpieces 4 within the range of the wire skipping area B, the wire 3 at that position interferes with the workpiece 4 when the workpiece is cut. Of course, since the workpiece 4 is not cut, there is no problem that the end material 4b is dispersed in that range. Therefore, in the range of the wire skipping area B, the wire 3 may be substantially absent in a range where it interferes with the workpiece 4. In addition, when the workpiece 4 is deformed into a diamond shape as in the example of FIG. 3, if the end material 4 b does not satisfy the cutting height H after cutting, the end material 4 b is It becomes the same as the end material 4b at the left end of and becomes discrete. From this, according to the example of FIG. 3, it can be said that the cutting height H is necessary also for the end material 4b.

5 replaces one skip roller 71 shown in FIGS. 3 and 4 with two small- diameter skip rollers 72 and 73 serving as wire blowing rollers. An example is shown in which the wire 3 is disposed obliquely at the position of the wire 3, the wire 3 is obliquely wound around the skip rollers 72 and 73, and the wire 3 does not exist in the wire skipping region B. According to this example, the diameters of the two skip rollers 72 and 73 need only be small.

In FIG. 6, two skip rollers 72 and 73 having a small diameter are arranged at the out-side position and the in-side position of the wire 3, and their axes are parallel to the center line of the main roller 2. The two guide rollers 81 and 82 are arranged between the skip rollers 72 and 73, the axis of the guide rollers 81 and 82 intersects the center line of the main roller 2, and the skip roller 72 and the guide roller on the out side An example is shown in which the wire 3 is sequentially wound around the 81, 82 and the in-side skip roller 73 so that the wire 3 is absent in the wire skipping region B. According to the example of FIG. 6, the two skip rollers 72 and 73 need only be small. Moreover, the direction of the axis of the skip rollers 72 and 73 is always parallel to the center line of the main roller 2 regardless of the change in the width dimension of the wire skipping area B, and when the dimension of the wire skipping area B changes. , You do not have to change.

Further, in FIGS. 7 and 8, two skip rollers 71 are arranged outside the wire 3 in the non-cutting region, in this example, below, and one wire 3 is placed between the two skip rollers 71 on one side. This is an example of jumping from the workpiece cutting area A to the other workpiece cutting area A. As a result, the wire 3 is skewed from the one skip roller 71 to the other skip roller 71 below the wire skipping area B, and is wound around the other main roller 2 from the one main roller 2. The wire skipping area B is skipped. Incidentally, according to the example of FIGS. 3 to 6, the wire 3 jumps over the wire skipping area B in the process of shifting from the position of the wire 3 to the position of the in side with respect to each main roller 2. As indicated by a two-dot chain line, if the wire 3 wound around the two skip rollers 71 is positioned outside the wire 3 in the non-cutting region, the position of the skip roller 71 is illustrated by an imaginary line. Can be set appropriately. Of course, an idle roller may be interposed between the skip rollers 71.

Next, in order to actually implement the above-described workpiece cutting method, FIGS. 9 to 12 show the configuration of FIG. 6 as a basic configuration, that is, two skip rollers 72 and 73 with grooves. While adopting, a specific example is shown in which three guide rollers 81, 82, 83 with grooves are added to the wire cutting width changing device 10 for workpiece cutting according to the present invention. In FIGS. 9 and 10, some parts on the rear side of each figure are omitted because they overlap with the front part and become complicated.

9 and 10, the upper skip roller 72 and the upper grooved guide roller 81 are rotatably held by the bearing holder 13 at their shaft portions and attached to one bracket 91. Further, the lower skip roller 73 and the lower grooved guide roller 83 are rotatably held by the bearing holder 13 at their shaft portions and attached to the other bracket 92.

The upper bearing holder 13 is attached to the corresponding bracket 91 so that the position of the upper bearing holder 13 can be adjusted in the direction of the center line of the main roller 2 by the mounting bolt 15 for each of the upper and lower elongated holes 14, and the bracket 91 and each bearing holder. The position of the main roller 2 can be adjusted in the direction of the center line by an adjusting screw 16 mounted between the main roller 2 and the adjusting screw 16.

The grooved guide roller 82 at the intermediate position is rotatably held by the bearing holder 17, is rotatably attached to the bracket 91 by the support shaft 18, and is required by the arc hole 19 and the fastening bolt 20. In order to loosen the wire 3 accordingly, it is mounted so as to be freely displaceable.

Similarly to the upper bearing holder 13, the lower bearing holder 13 can be adjusted in the center line direction of the main roller 2 with respect to the corresponding bracket 92 by the upper and lower elongated holes 14 and the mounting bolts 15 for each elongated hole 14. The adjustment screw 16 attached between the bracket 92 and each bearing holder 13 can adjust the position in the direction of the center line of the main roller 2.

As shown in FIG. 12, the two brackets 91 and 92 are respectively provided at the lower portion thereof with respect to the rail 12 having a C-shaped cross section parallel to the main roller 2. The retaining nut 22 can be fixed at an appropriate position. By adjusting the positions of the two brackets 91 and 92, the wire skipping area B can be set freely.

As shown in FIG. 9, the wire 3 is pulled out from a reel on the delivery side (not shown), is wound around the groove of the main roller 2 through a guide roller 23 with a groove on the inlet side, and corresponds to four workpieces 4. After forming the workpiece cutting area A and forming the wire skipping area B between the workpieces 4 and at the arrangement end, the workpiece is wound on a reel on the winding side (not shown) via a guide roller 24 with a groove on the outlet side. . Since the wire skipping areas B between the workpieces 4 are at three places, the pair of skip rollers 72 and 73 are installed at three places.

The grooved guide rollers 23 and 24 are also rotatably held by the guide brackets 29 and 30, and like the brackets 91 and 92, the fixing bolt 21 and the rail 12 are fixed to the rail 12 having a C-shaped cross section. It can be fixed at an appropriate position by an internal retaining slide nut 22.

As shown in FIG. 11, at the boundary position between the workpiece cutting area A and the wire skipping area B, the wire 3 intersects between the main roller 2 and the upper and lower skip rollers 72 and 73 as if they were cross belts. Wrapped as a state. This crossed winding is employed to increase the winding angle of the wire 3 with respect to the main roller 2 so as to eliminate the unstable movement of the wire 3 inside the groove 2a of the main roller 2 .

9 to 12 also, the cutting operation of the workpiece 4 is performed in the same manner as the method of FIGS. 9 to 12, the upper and lower skip rollers 72 and 73 are independently supported by different brackets 91 and 92. Therefore, changes in the range of the workpiece cutting area A and the wire skipping area B, in other words, the workpiece 4 can respond flexibly to changes in the dimensions of 4 and changes in the arrangement interval of the workpieces 4.

Next, FIG. 13 is an example in which the skip rollers 72 and 73 are rotatably held by the same bracket 93, and the bracket 93 is movably attached to the rail 12 parallel to the main roller 2.

According to the example of FIG. 13, the dimension of the workpiece cutting area A changes, but when the wire skipping area B hardly changes, the setting of the workpiece 93 can be easily performed without changing the wire skipping area B by the movement of the bracket 93 with respect to the rail 12. Can do.

Further, FIG. 14 is an example corresponding to the two skip rollers 72 and 73 in FIG. 5, and the tilt angle of the skip rollers 72 and 73 can be adjusted with respect to the common bracket 93 by the tilt bearing holder 25 and the fulcrum shaft 26. It is a specific example attached to. The position of the tilt bearing holder 25 after adjustment is fixed by tightening the positioning bolt 28 on the bracket 93 side with respect to the arc-shaped hole 27 of the tilt bearing holder 25.

In the example of FIG. 14, the two skip rollers 72 and 73 can be replaced by a single skip roller 71 as shown in FIGS.

According to the example of FIG. 14, since changes in the dimensions of the workpiece cutting area A and the wire skipping area B can be simultaneously dealt with by changing the inclination angle of the inclined bearing holder 25, Can respond flexibly to changes.

Above example, in order to cut the non-defective 4a from the work 4, taking into account the target thickness t and the cutting height H of the workpiece 4, and it determines the cut zone A. However, in the cutting area A, when the non-defective product 4a is cut from the cubic work 4, depending on the shape of the work 4 and the presence or absence of the uneven shape on the side surface, the cutting length L is not only the cutting height H but also the cutting length L. The required dimensions.

FIG. 15 shows a workpiece 4 having another shape. In FIG. 15, the workpiece 4 has an inverted trapezoidal shape as a planar shape, tends to be lower than the other upper surfaces at the triangular upper surface of the end, and has a gentle inclined surface. For this reason, the inclined surfaces at both ends are partly separated from the adhesive layer 5, and are separated into the end material 4 b at the separated part at the time of cutting.

Thus, in the example of FIG. 15, the cutting zone A, the target thickness t of the workpiece 4, the outer dimensions of the required cutting height H, is determined in consideration of the effective cutting length L. When setting the cutting zone A as this, the necessary dimensions for the workpiece 4, the shape of the silicon ingot as the workpiece 4, the quality of the products, in particular depending on the presence or absence of uneven sides, the target thickness of the workpiece 4 t and the cutting height H, the cutting length L, or a combination of the cutting height H and the cutting length L. In fact, only the target thickness t and the cutting height H of the workpiece 4, or cut if Mitoo securing length L, a virtually cut zone A can often be set almost significance to.

The number of main rollers 2 is not limited to two, and may be more than that, for example, three or four. FIG. 16 is an example in which three main rollers 2 are arranged in parallel to the positions of the respective apex angles of the triangle, and FIG. 17 is an example in which four main rollers 2 are arranged in parallel to the positions of the respective apex angles of the square. and, the position of the upper and lower wires 3 and the cutting zone, Ru example der be disposed as two stages workpiece 4 up and down.

The above specific example shows an aspect in which a plurality of workpieces 4 in an array state are simultaneously cut, and the effect and cutting efficiency are remarkable in the aspect of simultaneous cutting of the plurality of workpieces 4. However, since the object of the present invention, that is, the prevention of the discontinuity of the end material 4b, is also valid when cutting a single workpiece 4, the present invention is not limited to the mode of simultaneous cutting of a plurality of workpieces 4. The cutting mode of the workpiece 4 is included.

DESCRIPTION OF SYMBOLS 1 Wire saw 2 Main roller 2a Groove 3 Wire 4 Work piece 4a Good product 4b End material 5 Holder 6 Adhesive layer 71, 72, 73 Skip roller 81, 82, 83 as a wire blowing roller Guide roller 91, 92, 93 Bracket 10 Work piece cutting Wire winding width change device 11 Work plate 12 Rail 13 Bearing holder 14 Long hole 15 Mounting bolt 16 Adjustment screw 17 Bearing holder 18 Support shaft 19 Arc hole 20 Tightening bolt 21 Fixing bolt 22 Retaining slide nut 23 Guide roller 24 Guide roller 25 Inclined bearing holder 26 Support shaft 27 Arc-shaped hole 28 Positioning bolt 29 Bracket 30 Bracket

A Work cutting area B Wire skipping area C Cutting line H Cutting height L Cutting length P Wire pitch t Target thickness

Claims (9)

In a wire saw that cuts a workpiece to a target thickness by running a wire wound in multiple between a plurality of parallel main rollers, and pressing the workpiece restrained by a holder against the running wire,
In the target thickness direction of the workpiece, the workpiece cutting area is set in a range where a non-defective product can be secured while leaving the constrained part with the holder at both ends of the workpiece, and the wire pitch of the wire is set within this workpiece cutting area. A work cutting method, characterized in that a wire skipping area in which a wire is absent is set in a range that interferes with a work other than the work cutting area, while being set to a value corresponding to a target thickness. For work, to the target thickness of the workpiece, the cutting height of the workpiece, cut length, and the good what predetermined size is secured in any one of the combination of the cutting height and cut length Contact and The workpiece cutting method according to claim 1, wherein: In a wire saw that cuts a workpiece to a target thickness by running a wire wound in multiple between a plurality of parallel main rollers, and pressing the workpiece restrained by a holder against the running wire,
In the target thickness direction of the workpiece, the workpiece cutting area is set in a range where a non-defective product can be secured while leaving the constrained part with the holder at both ends of the workpiece, and the wire pitch of the wire is set within this workpiece cutting area. Set to a value corresponding to the target thickness, and set a wire skipping area in which the wire does not exist in the area that interferes with the work other than the work cutting area. In this wire skipping area, the wire is blown outside the main roller. A wire cutting width change device for cutting a workpiece, characterized in that a roller is disposed and the wire is wound around a wire blow roller to displace the wire in the direction of the center line of the main roller to form a wire blow area. . For work, to the target thickness of the workpiece, the cutting height of the workpiece, cut length, and the good what predetermined size is secured in any one of the combination of the cutting height and cut length Contact and The wire cutting width changing device for workpiece cutting according to claim 3. Two wire blow rollers are arranged in the wire blow area of adjacent workpieces, the axes of the two wire blow rollers are parallel to the center line of the main roller, and the two wire blow rollers A plurality of guide rollers are arranged between them, the axis of these guide rollers intersects with the center line of the main roller, and the wire is wound around the two wire blow-off rollers and the guide roller in sequence, and the wire blow-off area 4. The wire cutting width changing device for cutting a workpiece according to claim 3, wherein the wire is absent in a range where the workpiece interferes with the workpiece. One or two wire blow rollers are arranged in the wire blow area of the adjacent workpiece, the axis of the wire blow roller is set obliquely with respect to the center line of the main roller, and the wire is wound around the wire blow roller. 4. The wire cutting width changing device for cutting a workpiece according to claim 3, wherein the wire is made nonexistent within a range in which the wire is interfered with the workpiece in the wire skipping region. 7. The workpiece according to claim 3, wherein the wire blow roller is rotatably held by different brackets, and each bracket is provided so as to be movable in a direction parallel to the main roller. Wire winding width changing device for cutting. 7. The workpiece cutting device according to claim 3, wherein the wire blow roller is rotatably held by the same bracket, and the bracket is provided so as to be movable in a direction parallel to the main roller. Wire winding width changing device. 7. The wire cutting width changing device for cutting a workpiece according to claim 6, wherein the wire blowing roller is attached to the bracket so that the inclination angle can be adjusted by an inclination bearing holder and a fulcrum shaft.

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