JP2000309015A - Method for stretching wire for wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent a method for stretching a wire for a wire saw capable of preventing abrasion of a grooved roller by a simple method. SOLUTION: In the case of forming a wire line W of a pitch M, grooved rollers 18A-18C to which grooves are formed at a M/2 pitch are used. In the case of forming the wire line W, on a pair of the cutting grooved rollers 18a, 18C, a wire 14 is starched in the 2, 4,... and 2nth grooves, and on an auxiliary grooved roller 18B, the wire is hung by winding in the 1, 3,... and 2n+1th grooves (m=0, 1, 2,...). Thereby, a load applied onto an inside wall face of the groove of each of the grooved rollers 18A-18C can be reduced, and abrasion of the groove can be effectively suppressed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire sawing method for a wire saw, and more particularly to a wire sawing method for cutting hard brittle materials such as silicon, glass and ceramics.

[0002]

2. Description of the Related Art A wire saw is an apparatus for simultaneously cutting a large number of wafers by pressing a workpiece against a row of wires running at a high speed. Conventionally, in a wire saw of this type, a wire row having a constant pitch is formed by winding a wire around three to four grooved rollers arranged at a predetermined interval.

However, in the conventional wire saw, since the grooves of each grooved roller are formed at the same position at a pitch corresponding to the thickness of the wafer to be cut, the wires are sequentially wound to form a wire row. Requires that the wire be wound obliquely between any two grooved rollers. Therefore, as shown in FIG. 13, the wire 14 presses the inner wall surface of the groove 18a of the grooved roller 18A at the portion where the wire 14 is wound obliquely, and the wire 14 travels in this state. There is a problem that the wires 18a are unevenly worn, and that the larger the pitch M of the wire rows, the more easily the wires come off from the predetermined grooves during the high-speed running of the wires.

In order to solve such a problem, Japanese Patent Laid-Open Publication No. Hei 10-202498 discloses that one of the three grooved rollers is replaced with the other two grooved rollers. There is disclosed a method of displacing the wires in the axial direction by a half pitch to reduce the load applied to the inner wall surface of the groove when the wire is wound obliquely.

[0005]

However, in the method disclosed in Japanese Patent Application Laid-Open No. Hei 10-202498, the manufacturing process of a pair of cutting grooved rollers contributing to processing and an auxiliary grooved roller is different, and cutting is performed. There is a drawback that there is no compatibility in mounting the grooved roller and the auxiliary grooved roller.

SUMMARY OF THE INVENTION The present invention has been made in view of such circumstances, and has as its object to provide a wire winding method for a wire saw that can prevent abrasion of a grooved roller by a simple method.

[0007]

The invention according to claim 1 is
In order to achieve the above object, a plurality of cutting grooved rollers arranged at a predetermined interval, and one auxiliary grooved roller disposed below the cutting grooved roller is provided with a wire. In a wire saw that cuts the workpiece into a wafer by winding and forming a row of wires with a constant pitch M between the respective cutting grooved rollers and pressing the workpiece while running the row of wires, Grooves are formed at an M / (2N) pitch on the outer periphery of each of the grooved rollers, and a wire is wound around the groove at the same position between each of the cutting grooved rollers.
It is characterized in that the wire is wound around the cutting grooved roller and the auxiliary grooved roller by shifting the N-groove between the cutting grooved roller and the auxiliary grooved roller.

According to the present invention, grooves are formed in each grooved roller at a pitch of M / (2N). When forming a wire row, the wire is wound around the groove at the same position between the cutting grooved rollers, and the wire is wound around the cutting grooved roller and the auxiliary grooved roller by shifting them by N grooves. Thus, the cutting grooved roller and the auxiliary grooved roller can be manufactured by the same method, and compatibility can be provided. Further, the load applied to the inner wall surface of the groove can be reduced, and the wear of the groove can be effectively suppressed.

According to a third aspect of the present invention, in order to achieve the above object, a plurality of cutting grooved rollers arranged at a predetermined interval and a plurality of cutting grooved rollers are provided below the cutting grooved rollers. A wire is wound around the X auxiliary grooved rollers formed to form a wire row having a constant pitch M between the respective cutting grooved rollers, and the workpiece is pressed while running the wire row. In a wire saw that cuts the workpiece into wafers, M / ｛N ×
(X + 1) A groove is formed at a pitch, and a wire is wound around the groove at the same position between the respective cutting grooved rollers.
A wire is wound around the cutting grooved roller and the auxiliary grooved roller and between the auxiliary grooved rollers while shifting the N grooves at a time, thereby forming the wire row.

According to the present invention, grooves are formed in each grooved roller at a pitch of M / {N × (X + 1)}. When forming a wire row, a wire is wound around the groove at the same position between the cutting grooved rollers, and N is applied between the cutting grooved roller and the auxiliary grooved roller and between the auxiliary grooved rollers.
Wind the wire while shifting the groove. This allows
The cutting grooved roller and the auxiliary grooved roller can be manufactured by the same method, and compatibility can be provided. Further, the load applied to the inner wall surface of the groove can be reduced, and the wear of the groove can be effectively suppressed.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the method for winding a wire of a wire saw according to the present invention will be described below in detail with reference to the accompanying drawings. First, the wire saw will be described.
FIG. 1 is a perspective view showing the configuration of the wire saw. As shown in the figure, the wire 14 wound on the wire reel 12 is
The three grooved rollers 18A, 18B, 18 pass through a wire running path formed by the guide rollers 16, 16,.
C is wound around C to form a wire row W. Wire row W
Is wound on a wire reel (not shown) through a wire running path on the other side formed symmetrically with respect to the wire row W.

A traverse device 22, a dancer roller 24, and a wire cleaning device 26 are provided on each of the wire running paths formed on both sides of the wire row W (only one side is shown). Reel 1
The wire 14 which is unwound from the wire 2 or wound on the wire reel 12 is guided at a constant pitch. The dancer roller 24 applies a constant tension to the traveling wire 14, and the wire cleaning device 26 cleans dirt attached to the wire 14.

A motor (not shown) is connected to each of the pair of wire reels 12 and one grooved roller 18C of the three, and the wire 14 is driven by driving the motor. It runs at high speed between the wire reels 12. A work feed table 28 vertically moving with respect to the wire row W is provided above the wire row W.
Is installed. The work feed table 28 is provided with a tilting device 30. An ingot 32, which is a workpiece, is attached to a lower portion of the tilting device 30 and is set at an arbitrary tilt angle.

In the wire saw 10 configured as described above, the cutting of the ingot 32 is performed as follows.
That is, the work feed table 28 on which the ingot 32 is mounted is lowered toward the wire row W, and the ingot 32 is pressed against the wire row 24 running at high speed. At this time, the slurry is supplied to the wire row 24 from the slurry tank 34 via a nozzle (not shown). Ingot 32
Is simultaneously cut into a number of wafers by the lapping action of abrasive grains contained in the slurry.

Next, a method for winding a wire of a wire saw according to the present invention will be described. In addition, there are various types of wire saws, such as a type in which a wire row W is formed using three grooved rollers, and a type in which a wire row W is formed using four grooved rollers. is there. First, a case of a wire saw of a type in which a wire row W is formed by three grooved rollers will be described.

When the wire row W is formed by three grooved rollers, each grooved roller is arranged as shown in FIG. That is, two of the three grooved rollers 18A and 18C are
The two grooved rollers 18B are arranged horizontally at a predetermined interval, and the remaining one grooved roller 18B is arranged below the intermediate portion of the two grooved rollers 18A and 18C. Grooves are formed at a constant pitch on the outer periphery of the three grooved rollers 18A, 18B, 18C arranged in this way, and the wires 14 are sequentially wound around these grooves to be horizontally arranged. A wire row W having a constant pitch is formed between the two grooved rollers 18A and 18C. The ingot 32 is pressed against the wire row W from above and cut into wafers.

The method of winding the wire 14 around the three grooved rollers 18A, 18B, 18C arranged as described above is as follows. Here, a case where a wire array W with a pitch M is formed is considered. in this case,
On the outer circumference of each grooved roller 18A, 18B, 18C, M /
One having grooves formed at two pitches is used.

In the following description, if necessary, the two grooved rollers 18A and 18C disposed horizontally are referred to as cutting grooved rollers 18A and 18C, and the two cutting grooved rollers 18A and 18C. , 18C is located below the intermediate portion of the grooved roller 18B. First, as shown in FIG. 3, the wire 14 is wound around the _first groove 18b1 of the auxiliary grooved roller 18B. Next, as shown in FIG.
The wire 14 is wound around the _second groove 18a2. Next, as shown in FIG.
The wire 14 is wound around the _second groove 18c2. Thereby, as shown in FIG.
The first column W ₁ of the wire array W is formed between the.

Next, as shown in FIG. ₃ , the wire 14 is wound around the _third groove 18b3 of the auxiliary grooved roller 18B. Next, as shown in FIG. 4, the wire 14 is wound around the _fourth groove 18a4 of the cutting grooved roller 18A on one side. Next, as shown in FIG. 5, the wire 14 is wound around the _fourth groove 18c4 of the cutting grooved roller 18C on the other side. Thus, as shown in the figure, the cutting grooved roller 18A, second row W ₂ of wire array W between 18C are formed.

Next, as shown in FIG. 3, the wire 14 is wound around the _fifth groove 18b5 of the auxiliary grooved roller 18B. Next, as shown in FIG. 4, the wire 14 is wound around the _sixth groove 18a6 of the cutting grooved roller 18A on one side. Next, as shown in FIG. 5, the wire 14 is wound around the _sixth groove 18c6 of the cutting grooved roller 18C on the other side. Thus, as shown in the figure, the cutting grooved roller 18A, the third column W ₃ of the wire array W between 18C are formed.

Hereinafter, the auxiliary grooved roller 18 will be described in the same manner.
B, the wire 14 is wound around the grooved rollers 18A and 18C every other groove. Thereby, the wire array W having a constant pitch M is provided between the cutting grooved rollers 18A and 18C.
Are formed horizontally. Generally, three grooved rollers 18
When the wire row W is formed by A, 18B and 18C, the wire 14 is wound around the groove at the same position between the cutting grooved rollers 18A and 18C, and the wire is wound from the cutting grooved roller 18C to the auxiliary grooved roller 18B. When the wire 14 is wound, and when the wire 14 is wound from the auxiliary grooved roller 18B to the cutting grooved roller 18A, the groove is shifted by one groove.

By winding the wire 14 in this way, the pressing force exerted on the inner wall surface of the groove by the wire 14 wound around each grooved roller 18A, 18B, 18C is reduced, and uneven wear of the groove is reduced. It can be effectively prevented. In the above method, each grooved roller 18A, 18B,
The same roller (ie, a grooved roller having the same length and the same pitch of grooves) can be used for 18C, and the trouble of manufacturing a grooved roller shifted by a half pitch as in the related art can be used. No complicated setup change work is required.

Also, grooved rollers 18A, 18B, 18C
Are interchangeable, so that replacement work or the like can be easily performed. In the above embodiment, a grooved roller having grooves formed on the outer periphery at M / 2 pitch is used. In addition, grooves are formed at M / (2N) pitch (N is a positive integer). A formed grooved roller may be used. In this case, the wire 14 is wound around the (2N × n) -th groove on the cutting grooved rollers 18A and 18C, respectively.
In B, the wire 14 is wound around the (2N × n + N) -th groove to form a wire row W (n = 0, 1, 2, 3, 3).
…).

For example, when N = 2, a grooved roller in which grooves are formed at an M / 4 pitch is used, and (4, 8, 12, 12
, 4n) The wire 14 is wound around the groove and the auxiliary grooved roller 18B is wound around the (2, 6, 10, ..., 4n + 2) groove to form a wire row W. When N = 3, a grooved roller having grooves formed at an M / 6 pitch is used, and a cutting grooved roller 18 is used.
A and 18C have (6, 12, 18, ..., 6 respectively)
n) The wire 14 is wound around the groove and the auxiliary grooved roller 18B is wound around the (3, 9, 14,..., 6n + 3) -th groove to form a wire row W.

Thus, the same effect as described above can be obtained, and even if uneven wear occurs in the groove around which the wire is wound, the wire is re-wound in adjacent grooves one by one so that the grooved roller can be used. Life can be extended. But,
As the number of grooves increases, the number of mistakes in hanging and the like also increases. Therefore, it is better to set N to a minimum number, that is, to set N = 1 as in the above embodiment.

Next, a description will be given of a case of a wire saw of a type in which the wire row W is formed by four grooved rollers (when the cutting portion is one). When the wire row W is formed by four grooved rollers, each grooved roller is arranged as shown in FIG. That is, they are horizontally arranged at predetermined intervals two by two vertically. Four grooved rollers 1 arranged in this manner
8A, 18B, 18C, and 18D, grooves are formed at a constant pitch on the outer periphery thereof.
4, the wire row W having a constant pitch is formed between the two grooved rollers 18A and 18D arranged above. The ingot 32 is pressed against the wire row W from above and cut into wafers.

The method of winding the wire 14 around the four grooved rollers 18A, 18B, 18C, 18D arranged as described above is as follows. Here, the case where the wire row W of the pitch M is formed as described above is considered. In this case, each grooved roller 18A, 18B, 18
On the outer periphery of C and 18D, those having grooves formed at an M / 3 pitch are used.

In the following description, if necessary, the two grooved rollers 18A and 18D arranged above are called cutting grooved rollers 18A and 18D, and the two grooved rollers 18A and 18D arranged below.
The two grooved rollers 18B and 18C are used as auxiliary grooved rollers 18
B, 18C. First, as shown in FIG. 7, the wire 14 is wound around the _first groove 18c1 of the auxiliary grooved roller 18C on one side. Next, as shown in FIG. 8, the wire 14 is wound around the _second groove 18b2 of the auxiliary grooved roller 18B on the other side. Next, as shown in FIG. 9, the wire 14 is wound around the _third groove 18a3 of the cutting grooved roller 18A on one side. Then, as shown in FIG.
Third groove 18d ₃ of cutting grooved roller 18D on the other side
Around the wire 14. Thus, as shown in the figure, the cutting grooved rollers 18A, first row W ₁ of the wire array W between 18D is formed.

Next, as shown in FIG. 7, the wire 14 is wound around the _fourth groove 18c4 of the auxiliary grooved roller 18C on one side. Next, as shown in FIG. 8, the wire 14 is inserted into the _fifth groove 18b5 of the auxiliary grooved roller 18B on the other side.
Wrap around. Next, as shown in FIG. 9, the wire 1 is inserted into the _sixth groove 18a6 of the cutting grooved roller 18A on one side.
Wrap 4 around. Next, as shown in FIG. 10, the wire 14 is wound around the _sixth groove 18d6 of the cutting grooved roller 18D on the other side. As a result, as shown in FIG.
Cutting grooved roller 18A, second row of wire array W between 18D W ₂ is formed.

Next, as shown in FIG. ₇ , the wire 14 is wound around the _seventh groove 18c7 of the auxiliary grooved roller 18C on one side. Next, as shown in FIG. ₈ , the wire 14 is inserted into the _eighth groove 18b8 of the auxiliary grooved roller 18B on the other side.
Wrap around. Next, as shown in FIG. ₉ , the wire 1 is inserted into the _ninth groove 18a9 of the cutting grooved roller 18A on one side.
Wrap 4 around. Next, as shown in FIG. 10, the wire 14 is wound around the _ninth groove 18d9 of the cutting grooved roller 18D on the other side. As a result, as shown in FIG.
Cutting grooved roller 18A, the third column W ₃ of the wire array W between 18D is formed.

Hereinafter, the auxiliary grooved roller 18 will be described in the same manner.
B, 18C, cutting grooved rollers 18A, 18D
The wire 14 is wound around the groove. As a result, a wire row W having a constant pitch M is formed horizontally between the cutting grooved rollers 18A and 18D. Generally, when the wire row W is formed by four grooved rollers 18A, 18B, 18C, and 18D, the wire 14 is wound around the groove at the same position between the cutting grooved rollers 18A and 18D, and the cutting grooved roller is formed. 18
D, when the wire 14 is wound around the auxiliary grooved roller 18C, the auxiliary grooved roller 18C
When winding the wire 14 around the wire 8B and when winding the wire 14 from the auxiliary grooved roller 18B to the cutting grooved roller 18A, the grooves are shifted by one groove at a time.

By winding the wire 14 in this manner, the pressing force exerted on the inner wall surface of the groove by the wire 14 wound around each of the grooved rollers 18A, 18B, 18C is reduced, and uneven wear of the groove is reduced. It can be effectively prevented. In addition, replacement work of the grooved rollers 18A, 18B, and 18C can be easily performed. In the above embodiment, a grooved roller having grooves formed on the outer periphery at an M / 2 pitch is used. In addition, grooves are formed at an M / 3N pitch (N is a positive integer). A grooved roller may be used. In this case, the wire is wound around the (3N × n) th groove around the cutting grooved rollers 18A and 18D,
One of the auxiliary grooved rollers (grooved roller 18C) has (3
The wire is wound around the (N × n + N) -th groove, and the wire 14 is wound around the (3N × n + 2N) -th groove (n = 0, 1, 2, 3,...) On the other (grooved roller 18B).

For example, when N = 2, M / 6
A grooved roller in which grooves are formed at a pitch is used, and (6, 12, 1) are used for cutting grooved rollers 18A and 18C, respectively.
8,..., 6n) Wrap the wire 14 around the groove. Then, (2, 8, 1) is added to one auxiliary grooved roller 18C.
4,..., 6n + 2) Wrap the wire 14 around the groove,
The other auxiliary grooved roller 18B has (4, 10, 16,
.., 6n + 4) The wire 14 is wound around the groove and the wire row W is formed. When N = 3, M /
A grooved roller in which grooves are formed at 9 pitches is used, and (9, 18,
27,..., 9n) Wrap the wire 14 around the groove.
Then, (3, 2) is applied to one auxiliary grooved roller 18C.
The wire 14 is wound around the (1, 30,..., 9n + 3) -th groove, and (6, 24,
33,..., 9n + 6) The wire 14 is wound around the groove and the wire row W is formed.

Thus, the same effect as described above can be obtained, and even if uneven wear occurs in the groove around which the wire is wound, the wire is wound around the adjacent groove one by one to rewind the wire. Life can be extended. But,
Similarly to the above, as the number of grooves increases, erroneous hooking and the like also increase. Therefore, it is better to set N to a minimum number, that is, to set N = 1 as in the above embodiment.

In general, when the cutting grooved roller is composed of Y rollers and the auxiliary grooved roller is composed of one roller, each grooved roller is formed with grooves on the outer periphery at an M / (2N) pitch. (M is the pitch of the wire row, N is a positive integer). When the wire row W is formed, the wire is wound around the groove at the same position between the cutting grooved rollers, and the wire is wound around the cutting grooved roller and the auxiliary grooved roller by shifting them by N grooves. .

For example, in the example shown in FIG. 11, three cutting grooved rollers 18A, 18B and 18C are provided, and one auxiliary grooved roller 18D is provided. In this case, for each of the grooved rollers 18A to 18D, a roller having grooves formed on the outer periphery at an M / (2N) pitch is used. The wire 14 is wound around the groove at the same position between the cutting grooved rollers 18A and 18B and between the cutting grooved rollers 18B and 18C.
When the wire 14 is wound around the auxiliary grooved roller 18D, the wire 14 is shifted by N grooves. Similarly, when winding from the auxiliary grooved roller 18D to the cutting grooved roller 18A, N
The wire 14 is wound around the groove.

When the number of cutting grooved rollers is Y and the number of auxiliary grooved rollers is X, the grooved roller has grooves on the outer periphery thereof at M / {N × (X + 1)} pitch. (M is the pitch of the wire row, and N is a positive integer). When the wire row W is formed, a wire is wound around the groove at the same position between the cutting grooved rollers, and between the cutting grooved roller and the auxiliary grooved roller, and between the cutting grooved rollers. Winds the wire while shifting it by N grooves.

For example, in the example of FIG. 12, three cutting grooved rollers 18A, 18B and 18C are provided, and two auxiliary grooved rollers 18D and 18E are provided. In this case, for each of the grooved rollers 18A to 18E, a roller having grooves formed on the outer periphery at an M / 3N pitch is used. The wire 14 is wound around the groove at the same position between the cutting grooved rollers 18A and 18B and between the cutting grooved rollers 18B and 18C.
When winding the wire 14 around the auxiliary grooved roller 18D from 8C, the wire 14 is shifted by N grooves. Similarly, when the wire 14 is wound around the auxiliary grooved roller 18E from the auxiliary grooved roller 18D to the auxiliary grooved roller 18E, the wire 14 is wound around the auxiliary grooved roller 18E. The wire 14 is wound around the groove.

As described above, by winding the wire 14, the manufacturing method of all the grooved rollers can be made the same, and the load applied to the inner wall surface of the groove on each grooved roller can be reduced. In particular, the greater the pitch M of the wire rows, the more remarkable effects can be obtained. In the present embodiment, the example in which the wire row contributing to the processing is arranged at the upper part has been described. However, the present invention is not limited to this, and the wire row W contributing to the processing is provided on the side surface or the lower part. The same effect can be obtained with the arrangement.

[0040]

As described above, according to the present invention,
The manufacturing method for all grooved rollers can be the same. In addition, the load applied to the inner wall surface of the groove on each grooved roller can be reduced, and the wear of the groove can be effectively suppressed.

[Brief description of the drawings]

FIG. 1 is a perspective view showing the entire configuration of a wire saw.

FIG. 2 is a side view of a main part of the first embodiment of the wire winding method according to the present invention.

FIG. 3 is a view taken in the direction of arrows 3-3 in FIG. 2;

FIG. 4 is a view taken in the direction of arrows 4-4 in FIG. 2;

FIG. 5 is a view taken in the direction of arrows 5-5 in FIG. 2;

FIG. 6 is a side view of a main part of a second embodiment of the wire winding method according to the present invention.

FIG. 7 is a view taken along arrow 7-7 in FIG. 2;

FIG. 8 is a view taken in the direction of arrow 8-8 in FIG. 2;

FIG. 9 is a view taken in the direction of arrows 9-9 in FIG. 2;

FIG. 10 is a view taken in the direction of arrow 10-10 in FIG. 2;

FIG. 11 is a side view of a main part of another embodiment of the wire winding method according to the present invention.

FIG. 12 is a side view of a main part of another embodiment of the wire winding method according to the present invention.

FIG. 13 is an enlarged view of a main part showing a wear phenomenon of a groove of a grooved roller by a conventional wire winding method.

[Explanation of symbols]

10 ... wire saw, 12 ... wire reel, 14 ... wire, 16 ... guide roller, 18A-18D ... grooved rollers, 18a ₁ ~18d ₁ ... groove, 28 ... work feed table, 30 ... tilting device, 32 ... ingot, W
… Wire row

Continued on the front page F term (reference) 3C058 AA05 AA07 AA13 AA14 AA16 AB04 CA01 CA04 CA05 CA06 CB07 DA03 3C069 AA01 BA06 BB01 BB03 BC02 CA04 EA02 EA03

Claims (4)

[Claims] A plurality of cutting grooved rollers arranged at a predetermined interval, and one auxiliary grooved roller arranged at a predetermined interval with respect to the cutting grooved wire. To form a row of wires having a constant pitch M between the respective cutting grooved rollers, and press the workpiece while running the row of wires to cut the workpiece into a wafer. A groove is formed on the outer periphery of each grooved roller at an M / (2N) pitch, a wire is wound around the groove at the same position between each of the cutting grooved rollers, and the cutting grooved roller and the auxiliary are wound. A wire winding method for a wire saw, characterized in that the wire is wound by shifting the N grooves between the grooved rollers for forming the wire row. 2. The method according to claim 1, wherein N = 1.
A wire winding method of the wire saw according to the above. 3. Wires are provided to a plurality of cutting grooved rollers arranged at a predetermined interval and X auxiliary grooved rollers arranged at a predetermined interval to the cutting grooved rollers. To form a row of wires having a constant pitch M between the respective cutting grooved rollers, and press the workpiece while running the row of wires to cut the workpiece into a wafer. A groove is formed on the outer periphery of each of the grooved rollers at a pitch of M / {N × (X + 1)}, and a wire is wound around the groove at the same position between each of the cutting grooved rollers, and the cutting grooved groove is formed. A wire winding method for a wire saw, wherein a wire is wound around a roller and an auxiliary grooved roller and between the auxiliary grooved rollers while shifting the N grooves at a time. 4. The method according to claim 3, wherein N = 1.
A wire winding method of the wire saw according to the above.