WO2012141072A1

WO2012141072A1 - Wire saw

Info

Publication number: WO2012141072A1
Application number: PCT/JP2012/059355
Authority: WO
Inventors: 晶寛松田; 俊樹長井
Original assignee: コマツＮｔｃ株式会社
Priority date: 2011-04-13
Filing date: 2012-04-05
Publication date: 2012-10-18
Also published as: JP2012218129A; CN103201070B; TW201240758A; KR20130050389A; CN103201070A; JP5064583B1; KR101290213B1

Abstract

A wire saw provided with first to sixth guide rollers (24A-29A, 24B-29B) on wire travel routes between a pair of bobbins (22A, 22B) and processing rollers (23A, 23B) in a corresponding manner. A guide groove (31) on the fourth guide rollers (27A, 27B) is configured to restrict movement of a wire (21) in the width direction of the guide groove (31). A guide groove (32) on the fifth guide rollers (28A, 28B) is configured to allow the wire (21) to move in the width direction of the guide groove (32). The guide groove (31) on the sixth guide rollers (29A, 29B) is configured to restrict movement of the wire (21) in the width direction of the guide groove (31). The fifth guide rollers (28A, 28B) are disposed on each wire travel route between the fourth guide rollers (27A, 27B) and the sixth guide rollers (29A, 29B).

Description

Wire saw

The present invention relates to a wire saw for cutting a workpiece made of a brittle material such as a semiconductor material, a magnetic material, and ceramics with a wire, and more particularly to a wire saw characterized by a guide roller for guiding the traveling of the wire.

A wire saw having the following configuration is conventionally known. In other words, a wire saw having a conventional configuration includes a pair of bobbins around which both ends of a workpiece machining wire are wound, a plurality of machining rollers around which a wire portion between the bobbins is wound, a machining roller, and each bobbin. And a plurality of guide rollers that are provided on the wire travel path between them and guide the travel of the wires. When the wire runs around between the processing rollers as the processing roller and bobbin rotate, the workpiece is cut by pressing the workpiece while supplying slurry containing abrasive grains to the wire. Is called. If the wire is a type that holds abrasive grains such as diamond, no slurry is supplied.

9 and 10 show two

guide rollers

42A and 42B adjacent to each other among a plurality of guide rollers arranged along the wire travel path between the processing roller and each bobbin. A guide groove 42a having a V-shaped cross section is formed on the outer periphery of the

guide rollers

42A and 42B. As a result, the wire 41 is restrained from moving on the

guide rollers

42A and 42B in the axial direction of the respective guide rollers.

However, if the

guide rollers

42A and 42B are displaced relative to each other in the axial direction of the

guide rollers

42A and 42B as shown by the symbol D in FIG. 10, the wire 41 is disengaged from the bottom of the guide groove 42a during traveling. Thus, rolling may occur along a pair of inclined surfaces forming the guide groove 42a. As a result, there is a problem that the wire 41 is twisted between the

guide rollers

42A and 42B, and the wire 41 is easily disconnected. Further, there is a possibility that the wire 41 wears unevenly on the inclined surface of the guide groove 42a.

In order to cope with such a problem, it is conceivable to position the

guide rollers

42A and 42B with high accuracy so that there is no deviation between the positions. However, such highly accurate positioning takes time.

Therefore, an object of the present invention is to provide a wire saw that can suppress the occurrence of twisting that causes disconnection in a wire even when the positions of a plurality of guide rollers are displaced from each other.

In order to achieve the above object, according to one aspect of the present invention, a plurality of processing rollers around which a wire is wound, a pair of bobbins for feeding and winding the wire with respect to the processing roller, and the pair A wire saw provided with at least three guide rollers provided on a wire travel path between one of the bobbins and the processing roller and on a wire travel path between the other bobbin and the processing roller Is provided. Of the three guide rollers on the wire travel path, two guide rollers located on both sides on the wire travel path have a first guide groove. The remaining one guide roller located between the two guide rollers on the wire travel path has a second guide groove. Each of the first guide grooves has a shape that restrains the movement of the wire in the width direction of the first guide groove on the guide roller having the first guide groove. The second guide groove has a shape that allows the wire to move in the width direction of the second guide groove on the guide roller having the second guide groove.

Therefore, in the wire saw of the present invention, the wire traveling between the processing roller and the bobbin is restrained from moving in the width direction of the first guide groove on the guide roller having the first guide groove. The second guide groove is allowed to move in the width direction on the guide roller having the second guide groove. For this reason, even if there is a shift in the position between the guide roller having the first guide groove and the guide roller having the second guide groove, it is possible to prevent the wire from being twisted which causes disconnection. Is done. In addition, since it is not necessary to position these guide rollers with high accuracy so that there is no deviation between the positions, it is easy to assemble these guide rollers.

In the wire saw configured as described above, the guide roller having the second guide groove is preferably disposed adjacent to the guide roller having the first guide groove on the wire travel path.

In the wire saw configured as described above, the first guide groove preferably has a V-shaped cross section. The second guide groove preferably has a flat bottom shape.

As described above, according to the present invention, it is possible to suppress the occurrence of twisting that causes disconnection in the wire even when the positions of the plurality of guide rollers are displaced from each other.

The perspective view which shows schematically the wire saw of 1st Embodiment of this invention. The front view which shows the guide roller row | line | column which consists of some guide rollers of the wire saw of FIG. The top view which shows the guide roller which has a V-shaped cross-section guide groove among the guide rollers shown in FIG. The top view which shows the guide roller which has a flat bottom-shaped guide groove among the guide rollers shown in FIG. The top view for demonstrating the traveling state of the wire guided by the guide roller of FIG. 3, and the guide roller of FIG. The front view which shows the guide roller row | line | column which consists of some guide rollers of the wire saw of 2nd Embodiment of this invention. The front view which shows the guide roller row | line | column which consists of a one part guide roller of the wire saw of 3rd Embodiment of this invention. The front view which shows the guide roller row | line | column which consists of some guide rollers of the wire saw of 4th Embodiment of this invention. The front view which shows the one part guide roller of the conventional wire saw. The top view for demonstrating the traveling state of the wire guided by the guide roller of FIG.

(First embodiment)
A wire saw according to a first embodiment of the present invention will be described below with reference to FIGS.

As shown in FIG. 1, the wire saw according to the first embodiment includes a pair of

bobbins

22A and 22B around which both ends of a workpiece machining wire 21 are wound. The

bobbins

22A and 22B are supported so as to be rotatable with respect to a frame (not shown) at intervals. In addition, a plurality of

processing rollers

23A and 23B (a pair in the first embodiment) are rotatably supported on the frame at intervals. A plurality of annular grooves 23a are formed at a predetermined pitch on the outer peripheral surface of each

processing roller

23A, 23B. Between the

processing rollers

23A and 23B, a portion of the wire 21 between the

bobbins

22A and 22B is wound along each annular groove 23a. A saddle (not shown) is disposed above and below the wire 21 between the

processing rollers

23A and 23B so as to be lifted and lowered. A work W adhered to the support plate is detachably mounted on the lower surface of the saddle.

A plurality of (six in the first embodiment) guide rollers for guiding the travel of the wire 21 are disposed on the wire travel path between the

processing rollers

23A and 23B and the

bobbins

22A and 22B. More specifically, the first guide roller 24A, the second guide roller 25A, the third guide roller 26A, and the fourth guide roller are arranged on the wire travel path between the bobbin 22A and the

processing rollers

23A and 23B. 27A, a fifth guide roller 28A, and a sixth guide roller 29A are disposed, and the first guide roller 24B and the second guide roller 24A are disposed in the wire travel path between the bobbin 22B and the

processing rollers

23A and 23B. A guide roller 25B, a third guide roller 26B, a fourth guide roller 27B, a fifth guide roller 28B, and a sixth guide roller 29B are arranged. The guide rollers 24A to 29A and 24B to 29B are supported so as to be rotatable with respect to the frame at intervals. The

first guide rollers

24A and 24B are adjacent to the

bobbins

22A and 22B. The

first guide rollers

24A and 24B can reciprocate along the axial direction of the

bobbins

22A and 22B, and function as traverse rollers for winding and unwinding the wire 21 with respect to the

bobbins

22A and 22B. Of the six guide rollers arranged on each wire travel path, the

third guide rollers

26A and 26B located third from the

bobbins

22A and 22B function as dancer rollers for adjusting the tension of the wire 21. . The

third guide rollers

26A and 26B are rotatably supported at the tip of a dancer arm 30 that can be swung by driving of a driving means (not shown).

In the wire saw according to the first embodiment, the three guide rollers 27A to 29A and 27B to 29B located at the fourth to sixth positions from the

bobbins

22A and 22B among the guide rollers on each wire travel path are included in the main part of the present invention. The structure which becomes becomes concrete. FIG. 2 shows a guide roller row composed of three guide rollers 27A to 29A or 27B to 29B on each wire travel path. The

fifth guide rollers

28A and 28B are located in the center of the three guide rollers in the guide roller row on the wire travel path, and the

fourth guide rollers

27A and 27B and the

sixth guide rollers

29A and 29B are It is located on both sides of the

fifth guide rollers

28A and 28B on the wire travel path. As shown in FIGS. 3 and 5, first guide grooves 31 having a V-shaped cross section are formed on the outer peripheral surfaces of the fourth and

sixth guide rollers

27A, 29A, 27B, and 29B. The first guide groove 31 moves the wire 21 on the

fourth guide rollers

27A and 27B in the width direction of the first guide groove 31, in other words, in the axial direction of the

fourth guide rollers

27A and 27B. The

sixth guide rollers

29A and 29B are restrained from moving in the width direction of the first guide groove 31, in other words, in the axial direction of the

sixth guide rollers

29A and 29B. On the other hand, as shown in FIGS. 4 and 5, the second guide groove 32 having a flat bottom shape, in other words, a rectangular cross section, is formed on the outer peripheral surfaces of the

fifth guide rollers

28A and 28B. . The second guide groove 32 allows the wire 21 to move on the

fifth guide rollers

28A and 28B in the width direction of the second guide groove 32, in other words, in the axial direction of the

fifth guide rollers

28A and 28B. Permissible. The width of the second guide groove 32 is larger than the diameter of the wire 21.

Next, the operation of the wire saw configured as described above will be described.

When the wire saw shown in FIG. 1 is operated, the wire 21 is fed out from one of the

bobbins

22A and 22B, and onto the

processing rollers

23A and 23B via the guide rollers 24A to 29A or 24B to 29B on the corresponding wire travel path. After being guided, the wire 21 circulates between the

processing rollers

23A and 23B. At the same time, the wire 21 fed from the

processing rollers

23A and 23B is wound around the

other bobbin

22B or 22A via the guide rollers 24B to 29B or 24A to 29A on the other wire travel path.

The wire 21 traveling between the

processing rollers

23A, 23B and the

bobbins

22A, 22B is moved on the fourth and

sixth guide rollers

27A, 29A, 27B, 29B in the axial direction of these guide rollers. On the other hand, the movement of each of these guide rollers in the axial direction is allowed on the

fifth guide rollers

28A and 28B. Therefore, as shown in FIG. 5, between the

fourth guide rollers

27A and 27B and the

fifth guide rollers

28A and 28B or between the

fifth guide rollers

28A and 28B and the

sixth guide rollers

29A and 29B. Even if there is a shift as indicated by the symbol D in FIG. 5 at the positions of these guide rollers in the axial direction, the guide rollers 32 in the flat bottom shape are formed on the

fifth guide rollers

28A and 28B. When the wire 21 moves in the axial direction of each of these guide rollers, the wires 21 on the fourth and

sixth guide rollers

27A, 29A, 27B, 29B move toward the bottom of the guide groove 31 having a V-shaped cross section. You will be guided. Therefore, there is no possibility that the wire 21 is rolled on the pair of inclined surfaces forming the guide groove 31 having a V-shaped cross section. Therefore, it is possible to prevent the wire 21 from being twisted causing disconnection. Further, since the wire 21 can move in the axial direction of each of these

guide rollers

28A and 28B, the first of the fourth and

sixth guide rollers

27A, 29A, 27B and 29B can be moved. The occurrence of uneven wear on the inclined surface of the guide groove 31 can also be suppressed.

When the wire 21 is traveling between the

processing rollers

23A and 23B, a saddle (not shown) is supplied to the wire 21 between the

processing rollers

23A and 23B while supplying slurry containing abrasive grains from a slurry supply device (not shown). The workpiece W is cut and processed by lowering and pressing the workpiece W mounted on the workpiece. If the wire 21 is a type that holds abrasive grains, it is not necessary to supply slurry.

According to the first embodiment described above, the following effects can be obtained.

(1) In the wire saw of FIG. 1, the wire 21 is arranged on the outer peripheral surfaces of the

fourth guide rollers

27A and 27B and the

sixth guide rollers

29A and 29B on the guide rollers in the axial direction of the guide rollers. A first guide groove 31 is provided to restrain the movement of the first guide groove 31. Further, second guide grooves 32 are provided on the outer peripheral surfaces of the

fifth guide rollers

28A and 28B to allow the wire 21 to move on the guide rollers in the axial direction of the guide rollers. Yes. For this reason, the wire 21 traveling between the

processing rollers

23A, 23B and the

bobbins

22A, 22B is moved in the axial direction of the respective guide rollers on the fourth and

sixth guide rollers

27A, 29A, 27B, 29B. The movement of each guide roller is allowed to move in the axial direction on the

fifth guide rollers

28A and 28B. Therefore, each of these guide rollers is arranged between the

fourth guide rollers

27A and 27B and the

fifth guide rollers

28A and 28B or between the

fifth guide rollers

28A and 28B and the

sixth guide rollers

29A and 29B. Even if there is a shift in the position in the axial direction, the wire 21 is prevented from being twisted causing disconnection.

(2) In addition, since it is not necessary to position the fourth to sixth guide rollers 27A to 29A, 27B to 29B of each wire travel path with high accuracy so that there is no displacement between them, Easy to assemble.

(3) Moreover, since the wire 21 is movable on the

fifth guide rollers

28A and 28B in the axial direction of these guide rollers, the fourth and sixth guide rollers 27B to 29B, 27A to 29A Thus, it is possible to avoid the wire 21 from hitting a part of the guide groove 31, and to prevent uneven wear on the inclined surface of the guide groove 31.

(4) The

fifth guide rollers

28A and 28B in each wire travel path are arranged adjacent to the

fourth guide rollers

27A and 27B and the

sixth guide rollers

29A and 29B in the same wire travel path on the wire travel path. Has been. For this reason, it is possible to prevent the wire 21 from moving in the second guide groove 32 on the

fifth guide rollers

28A and 28B. As a result, the traveling position of the wire 11 is stabilized, so that the workpiece machining accuracy of the wire saw is improved.

(5) In the first embodiment, as a means for solving the problems of the present invention, it is adopted that the shape of the guide groove 32 of the

fifth guide rollers

28A, 28B is a flat bottom. Since this is not accompanied by an increase in the number of parts, the configuration of the wire saw is not complicated.

(Second Embodiment)
Next, a second embodiment of a wire saw embodying the present invention will be described with a focus on differences from the wire saw of the first embodiment.

In the wire saw according to the second embodiment, three guide rollers 26A to 28A, 26B to 28B (functioning as dancer rollers) located third to fifth from the

bobbins

22A and 22B among the guide rollers on each wire travel path. A configuration that is a main part of the present invention is embodied in the

guide rollers

26A and 26B). FIG. 6 shows a guide roller row composed of three guide rollers 26A to 28A and 26B to 28B on each wire travel path. The

fourth guide rollers

27A and 27B are located in the center on the wire travel path among the three guide rollers of the guide roller row, and the

third guide rollers

26A and 26B and the

fifth guide rollers

28A and 28B are Located on both sides of the

fourth guide rollers

27A and 27B on the wire travel path. As shown in FIG. 3, a first guide groove 31 having a V-shaped cross section is formed on the outer peripheral surfaces of the third and

fifth guide rollers

26A, 28A, 26B, and 28B. On the other hand, as shown in FIG. 4, a flat bottom-shaped second guide groove 32 is formed on the outer peripheral surfaces of the

fourth guide rollers

27A and 27B.

Therefore, in the wire saw of the second embodiment, the same effects as those described in (1) to (5) in the first embodiment can be obtained.

(Third embodiment)
Next, a third embodiment of a wire saw embodying the present invention will be described with a focus on differences from the wire saw of the first embodiment.

In the wire saw according to the third embodiment, three guide rollers 25A to 27A, 25B to 27B (functioning as dancer rollers) positioned second to fourth from the

bobbins

22A and 22B among the guide rollers on the travel route of each wire. (Including the

guide rollers

26A and 26B), a configuration that is a main part of the present invention is embodied. FIG. 7 shows a guide roller row composed of three guide rollers 25A to 27A and 25B to 27B on each wire travel path. The

third guide rollers

26A and 26B are located at the center on the wire travel path among the three guide rollers in the guide roller row, and the

second guide rollers

25A and 25B and the

fourth guide rollers

27A and 27B are Located on both sides of the

third guide rollers

26A and 26B on the wire travel path. A first guide groove 31 having a V-shaped cross section is formed on the outer peripheral surfaces of the second and

fourth guide rollers

25A, 27A, 25B, and 27B. On the other hand, a flat bottom-shaped second guide groove 32 is formed on the outer peripheral surfaces of the

third guide rollers

26A and 26B.

Therefore, in the wire saw of the third embodiment, the same effects as those described in (1) to (5) in the first embodiment can be obtained.

(Fourth embodiment)
Next, a description will be given of a fourth embodiment of the wire saw embodying the present invention, centering on differences from the wire saw of the first embodiment.

In the wire saw of the fourth embodiment, three guide rollers 24A to 26A, 24B to 26B (functioning as traverse rollers) that are positioned first to third among the guide rollers on each wire travel path from the

bobbin

22A, 22B side. (Including the

guide rollers

26A and 26B functioning as dancer rollers) and the

guide rollers

24A and 24B. FIG. 8 shows a guide roller row composed of three guide rollers 24A to 26A and 24B to 26B on each wire travel path. The

second guide rollers

25A and 25B are located at the center on the wire travel path among the three guide rollers of the guide roller row, and the

first guide rollers

24A and 24B and the

third guide rollers

26A and 26B are It is located on both sides of the

second guide rollers

25A and 25B on the wire travel path. A first guide groove 31 having a V-shaped cross section is formed on the outer peripheral surfaces of the first and

third guide rollers

24A, 26A, 24B, and 26B. On the other hand, a flat bottom-shaped second guide groove 32 is formed on the outer peripheral surfaces of the

second guide rollers

25A and 25B.

Therefore, in the wire saw of the fourth embodiment, the same effects as those described in (1) to (5) in the first embodiment can be obtained.

(Example of change)
The first to fourth embodiments can be modified and embodied as follows.

-The first embodiment and the third embodiment may be combined.

-The second embodiment and the fourth embodiment may be combined.

The first guide groove 31 is not limited to the V-shaped cross section, and may be a U-shaped cross section having the same width as the diameter of the wire 21.

The second guide groove 32 is not limited to a flat bottom shape, and may be a U-shaped cross section having a width larger than the diameter of the wire 21.

Claims

A plurality of processing rollers around which a workpiece processing wire is wound;
A pair of bobbins for feeding and winding the wire with respect to the processing roller;
At least three wires are provided on the wire travel path between one of the pair of bobbins and the processing roller and on the wire travel path between the other bobbin and the processing roller. And a guide roller for guiding
A wire saw that cuts a workpiece with a wire that circulates between the processing rollers as the processing roller and the bobbin rotate;
Of the three guide rollers on the wire travel path, two guide rollers located on both sides of the wire travel path have a first guide groove and are positioned between the two guide rollers on the wire travel path. The remaining one guide roller has a second guide groove, and each of the first guide grooves moves on the guide roller having the first guide groove in the width direction of the first guide groove. The second guide groove has a shape that allows the wire to move in the width direction of the second guide groove on the guide roller having the second guide groove. A wire saw characterized by that.
The wire saw according to claim 1, wherein the guide roller having the second guide groove is adjacent to the guide roller having the first guide groove on a wire travel path.
The wire saw according to claim 1 or 2, wherein the first guide groove has a V-shaped cross section, and the second guide groove has a flat bottom shape.