JP4724558B2 - 測定方法及び装置、露光装置 - Google Patents

測定方法及び装置、露光装置 Download PDF

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Publication number
JP4724558B2
JP4724558B2 JP2005375946A JP2005375946A JP4724558B2 JP 4724558 B2 JP4724558 B2 JP 4724558B2 JP 2005375946 A JP2005375946 A JP 2005375946A JP 2005375946 A JP2005375946 A JP 2005375946A JP 4724558 B2 JP4724558 B2 JP 4724558B2
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JP
Japan
Prior art keywords
plane side
slit
wavefront
optical system
image plane
Prior art date
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Expired - Fee Related
Application number
JP2005375946A
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English (en)
Japanese (ja)
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JP2007180209A5 (enExample
JP2007180209A (ja
Inventor
太郎 手塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2005375946A priority Critical patent/JP4724558B2/ja
Priority to US11/563,453 priority patent/US7463365B2/en
Publication of JP2007180209A publication Critical patent/JP2007180209A/ja
Priority to US12/195,658 priority patent/US7518735B2/en
Publication of JP2007180209A5 publication Critical patent/JP2007180209A5/ja
Application granted granted Critical
Publication of JP4724558B2 publication Critical patent/JP4724558B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70591—Testing optical components
    • G03F7/706—Aberration measurement

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2005375946A 2005-12-27 2005-12-27 測定方法及び装置、露光装置 Expired - Fee Related JP4724558B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005375946A JP4724558B2 (ja) 2005-12-27 2005-12-27 測定方法及び装置、露光装置
US11/563,453 US7463365B2 (en) 2005-12-27 2006-11-27 Measurement method and apparatus, exposure apparatus, and device manufacturing method
US12/195,658 US7518735B2 (en) 2005-12-27 2008-08-21 Measurement method and apparatus, exposure apparatus, and device manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005375946A JP4724558B2 (ja) 2005-12-27 2005-12-27 測定方法及び装置、露光装置

Publications (3)

Publication Number Publication Date
JP2007180209A JP2007180209A (ja) 2007-07-12
JP2007180209A5 JP2007180209A5 (enExample) 2009-01-08
JP4724558B2 true JP4724558B2 (ja) 2011-07-13

Family

ID=38224021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005375946A Expired - Fee Related JP4724558B2 (ja) 2005-12-27 2005-12-27 測定方法及び装置、露光装置

Country Status (2)

Country Link
US (2) US7463365B2 (enExample)
JP (1) JP4724558B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4666982B2 (ja) * 2004-09-02 2011-04-06 キヤノン株式会社 光学特性測定装置、露光装置及びデバイス製造方法
JP4724558B2 (ja) * 2005-12-27 2011-07-13 キヤノン株式会社 測定方法及び装置、露光装置
JP2008192855A (ja) * 2007-02-05 2008-08-21 Canon Inc 測定装置、露光装置及びデバイス製造方法
JP2008192936A (ja) * 2007-02-06 2008-08-21 Canon Inc 測定装置、露光装置及びデバイス製造方法
CN103267629B (zh) * 2013-06-25 2015-04-15 中国科学院上海光学精密机械研究所 点衍射干涉波像差测量仪及检测方法
CN103955117B (zh) * 2014-03-11 2016-09-21 中国科学院上海光学精密机械研究所 光刻机投影物镜波像差检测标记和检测方法
CN105022232B (zh) * 2014-04-15 2017-12-29 上海微电子装备（集团）股份有限公司 波像差测量装置的误差校准方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5196350A (en) * 1991-05-29 1993-03-23 Omnigene, Inc. Ligand assay using interference modulation
US6690474B1 (en) * 1996-02-12 2004-02-10 Massachusetts Institute Of Technology Apparatus and methods for surface contour measurement
JP4174660B2 (ja) * 2000-12-28 2008-11-05 株式会社ニコン 露光方法及び装置、プログラム及び情報記録媒体、並びにデバイス製造方法
EP1231514A1 (en) * 2001-02-13 2002-08-14 Asm Lithography B.V. Measurement of wavefront aberrations in a lithographic projection apparatus
JP4280521B2 (ja) * 2003-03-07 2009-06-17 キヤノン株式会社 収差測定装置及び投影露光装置
JP4496708B2 (ja) * 2003-03-10 2010-07-07 三菱電機株式会社 発光素子モジュール
US7230717B2 (en) * 2003-08-28 2007-06-12 4D Technology Corporation Pixelated phase-mask interferometer
JP2005158829A (ja) * 2003-11-20 2005-06-16 Nikon Corp 波面収差計測方法及び装置、並びに露光装置
JP4545155B2 (ja) * 2004-01-16 2010-09-15 カール・ツァイス・エスエムティー・アーゲー 光結像系の波面測定装置及び方法、及びマイクロリソグラフィ投影露光装置
JP4464166B2 (ja) * 2004-02-27 2010-05-19 キヤノン株式会社 測定装置を搭載した露光装置
JP2006019691A (ja) * 2004-05-31 2006-01-19 Nikon Corp 収差計測方法及び装置、露光方法及び装置、並びにマスク
JP2006030057A (ja) * 2004-07-20 2006-02-02 Nikon Corp シアリング干渉測定装置の校正方法、シアリング干渉測定方法、シアリング干渉測定装置、投影光学系の製造方法、投影光学系、投影露光装置の製造方法、投影露光装置、マイクロデバイスの製造方法、及びマイクロデバイス
JP4095598B2 (ja) 2004-09-16 2008-06-04 キヤノン株式会社 二次元波面収差の算出方法
JP4724558B2 (ja) * 2005-12-27 2011-07-13 キヤノン株式会社 測定方法及び装置、露光装置
JP2007180152A (ja) 2005-12-27 2007-07-12 Canon Inc 測定方法及び装置、露光装置、並びに、デバイス製造方法
JP2008233475A (ja) * 2007-03-20 2008-10-02 Konica Minolta Business Technologies Inc トナー供給ローラおよび画像形成装置

Also Published As

Publication number Publication date
US7518735B2 (en) 2009-04-14
US7463365B2 (en) 2008-12-09
US20080309947A1 (en) 2008-12-18
US20070153294A1 (en) 2007-07-05
JP2007180209A (ja) 2007-07-12

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