JP4711823B2 - Electronic component storage package and electronic device - Google Patents

Electronic component storage package and electronic device Download PDF

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JP4711823B2
JP4711823B2 JP2005370988A JP2005370988A JP4711823B2 JP 4711823 B2 JP4711823 B2 JP 4711823B2 JP 2005370988 A JP2005370988 A JP 2005370988A JP 2005370988 A JP2005370988 A JP 2005370988A JP 4711823 B2 JP4711823 B2 JP 4711823B2
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conductor
electronic component
insulating
insulating base
storage package
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JP2007173629A (en
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一仁 金指
静也 西垣
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Kyocera Corp
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Kyocera Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1517Multilayer substrate
    • H01L2924/15192Resurf arrangement of the internal vias

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Description

本発明は、半導体素子や水晶発振子等の電子部品を収容するための電子部品収納用パッケージおよび電子装置に関するものである。   The present invention relates to an electronic component storage package and an electronic device for storing electronic components such as semiconductor elements and crystal oscillators.

半導体素子や水晶発振子等の電子部品を収容するための電子部品収納用パッケージとして、上面の中央部に電子部品の搭載部を有する四角形状の絶縁基板と、搭載部の周辺から絶縁基体の外周部にかけて導出された配線導体と、配線導体と電気的に接続するようにして絶縁基体の上面および下面の少なくとも一方に配列取着された外部接続用の複数の外部リード端子とを具備したものがある。このような電子部品収納用パッケージにおいて絶縁基体へのリード端子の取着は、絶縁基体の上下面に接続パッドを形成しておき、この接続パッドにリード端子の一端部を銀ろう等のろう材を介して接合することにより行われる。   As an electronic component storage package for storing electronic components such as semiconductor elements and crystal oscillators, a rectangular insulating substrate having an electronic component mounting portion at the center of the upper surface, and an outer periphery of the insulating substrate from the periphery of the mounting portion And a plurality of external lead terminals for external connection arranged and attached to at least one of the upper surface and the lower surface of the insulating base so as to be electrically connected to the wiring conductor. is there. In such an electronic component storage package, the lead terminal is attached to the insulating base by forming connection pads on the upper and lower surfaces of the insulating base, and one end of the lead terminal is connected to the connection pad by a brazing material such as silver solder. It is performed by joining via.

そして、電子部品収納用パッケージは、搭載部に電子部品を搭載するとともに電子部品の電極を配線導体に電気的に接続し、必要に応じて電子部品を蓋体や封止用樹脂等で封止することにより電子装置として完成する。   The electronic component storage package mounts the electronic component on the mounting portion, electrically connects the electrode of the electronic component to the wiring conductor, and seals the electronic component with a lid or a sealing resin as necessary. This completes the electronic device.

また、近年は、電子装置の軽薄短小化が求められてきている。そこで、電子装置の軽薄短小化を実現するために、接続パッドを絶縁基体の側面に形成し、この接続パッドの表面にリード端子の一端部を接合させることが考えられる。これにより、絶縁基体の上面または下面において接続パッドの領域を削除するとともに、リード端子の厚みやろう材の厚み分薄くすることとなり、電子装置の軽薄短小化を実現できるようになる。   In recent years, there has been a demand for light and thin electronic devices. Therefore, in order to realize a lighter, thinner and smaller electronic device, it is conceivable to form a connection pad on the side surface of the insulating base and to join one end of the lead terminal to the surface of the connection pad. As a result, the area of the connection pad is eliminated on the upper surface or the lower surface of the insulating base, and the lead terminal and the brazing material are reduced in thickness, so that the electronic device can be reduced in size and thickness.

このような絶縁基体の側面に形成された接続パッドとしては、スクリーン印刷法等によりメタライズペーストを印刷塗布することで絶縁基体の側面に形成された接続パッドが知られている(特許文献1参照)。また、絶縁基体の側面に形成された接続パッドとなりうるものとしては、絶縁基体の内部に厚み方向に形成された貫通導体を厚み方向に切断することで絶縁基体の側面に露出して形成された外部端子が考えられる(特許文献2参照)。そして、これらの接続パッドや外部端子の表面にリード端子の一端部をろう材を介して接合することで、リード端子が絶縁基体の側面に接合されてなる電子部品収納用パッケージを形成することができ、搭載部に電子部品を搭載するとともに電子部品の電極を配線導体に電気的に接続し、必要に応じて電子部品を蓋体や封止用樹脂等で封止することにより電子装置として完成する。
特開2003−168754号公報 特開2002−198460号公報
As such a connection pad formed on the side surface of the insulating substrate, a connection pad formed on the side surface of the insulating substrate by printing and applying a metallized paste by a screen printing method or the like is known (see Patent Document 1). . Also, as a connection pad formed on the side surface of the insulating base, it is formed to be exposed on the side surface of the insulating base by cutting through conductors formed in the thickness direction inside the insulating base in the thickness direction. An external terminal is conceivable (see Patent Document 2). Then, by joining one end portion of the lead terminal to the surface of these connection pads and external terminals via a brazing material, an electronic component storage package in which the lead terminal is joined to the side surface of the insulating base can be formed. It is possible to mount an electronic component on the mounting part, electrically connect the electrode of the electronic component to the wiring conductor, and seal the electronic component with a lid or a sealing resin as necessary to complete the electronic device. To do.
JP 2003-168754 A JP 2002-198460 A

しかしながら、近年の電子装置は、軽薄短小化に加えて、高集積化が求められており、接続パッドおよびリード端子が高密度に配設されたものとすることが求められてきている。絶縁基体の側面にメタライズペーストを印刷塗布することにより接続パッドを形成する場合、絶縁基体の側面の領域は薄く狭いことから、絶縁基体はがたつきやすく、絶縁基体の側面にメタライズペーストを印刷塗布しにくいので、接続パッドを絶縁基体の側面に精度良くかつ高密度に形成することが困難であった。従って、リード端子が絶縁基体の側面に精度良く、かつ高密度に配設されてなる電子部品収納用パッケージを形成することが困難であった。   However, recent electronic devices are required to be highly integrated in addition to being light and thin, and it is required that the connection pads and the lead terminals be arranged at high density. When connecting pads are formed by printing and applying metallized paste to the side of the insulating substrate, the insulating substrate is easy to rattle because the area on the side of the insulating substrate is thin and narrow, and the metalized paste is printed and applied to the side of the insulating substrate. Therefore, it is difficult to form the connection pads on the side surface of the insulating base with high accuracy and high density. Therefore, it has been difficult to form an electronic component storage package in which the lead terminals are accurately and densely arranged on the side surface of the insulating base.

また、絶縁基体の側面にメタライズペーストを印刷塗布することにより接続パッドを形成する場合、接続パッドは、絶縁基体の側面から突出して形成されることとなり、接続パッドにリード端子を接合する際、ろう材は、接続パッドの表面を広がって接続パッドの上面および側面を被覆することとなるので、隣接する接続パッド間の間隔は、ろう材の厚み分狭くなってしまい、隣接する接続パッド同士が電気的に短絡する可能性が高くなり、絶縁基体の側面において複数のリード端子間に距離を狭めることが困難であった。   In addition, when the connection pad is formed by printing and applying metallized paste on the side surface of the insulating substrate, the connection pad is formed to protrude from the side surface of the insulating substrate. Since the material spreads the surface of the connection pad and covers the upper and side surfaces of the connection pad, the distance between the adjacent connection pads is reduced by the thickness of the brazing material, and the adjacent connection pads are electrically connected to each other. Therefore, it is difficult to reduce the distance between the plurality of lead terminals on the side surface of the insulating base.

また、絶縁基体の側面にメタライズペーストをスクリーン印刷法等により印刷塗布することにより接続パッドを形成する場合や貫通導体を切断して絶縁基体の側面に露出することにより接続パッドを形成する場合、絶縁基体の側面の面積は絶縁基体の上面や下面の面積と比較して狭く、接続パッドを絶縁基体の側面の広領域に形成することができないので、接続パッドと絶縁基体との接合面積が小さくなってしまっていた。このため、リード端子をろう材を介して接続パッドに接合した際、ろう材の応力により接続パッドが絶縁基体から剥がれてしまいやすいという問題を有していた。   In addition, when connecting pads are formed by printing and applying metallized paste on the side surfaces of the insulating substrate by screen printing or the like, or when connecting pads are formed by cutting through conductors and exposing the side surfaces of the insulating substrate, insulation The area of the side surface of the substrate is smaller than the area of the upper and lower surfaces of the insulating substrate, and the connection pad cannot be formed in a wide area on the side surface of the insulating substrate, so the bonding area between the connection pad and the insulating substrate is reduced. It was. For this reason, when the lead terminal is joined to the connection pad via the brazing material, there is a problem that the connection pad is easily peeled off from the insulating base due to the stress of the brazing material.

本発明は、上記従来技術の問題点に鑑み案出されたものであり、その目的は、絶縁基体の側面にリード端子を高密度に配設するとともに、接続パッドを絶縁基体に強固に接合してなる電子部品収納用パッケージおよび電子装置を提供することにある。   The present invention has been devised in view of the above-mentioned problems of the prior art, and its purpose is to arrange lead terminals at a high density on the side surface of the insulating base and to firmly bond the connection pads to the insulating base. An electronic component storage package and an electronic device are provided.

本発明の電子部品収納用パッケージは、複数の絶縁層からなり、電子部品の搭載部を有する絶縁基体と、前記複数の絶縁層の層間に形成されており、前記電子部品の電極に電気的に接続される配線導体と、前記複数の絶縁層の少なくとも一層を貫通して充填するように設けられており、前記配線導体に電気的に接続されているとともに、表面の一部が前記絶縁基体の側面に露出され、該露出され部位の幅より前記絶縁基体の内部に埋設された部位の幅の方が広い導体と、該導体の前記絶縁基体の前記側面に露出された部位に接合されたリード端子とを備えことを特徴とするものである。 The electronic component storage package of the present invention includes a plurality of insulating layers, and is formed between an insulating base having a mounting portion for the electronic components and the plurality of insulating layers, and is electrically connected to the electrodes of the electronic components. The wiring conductor to be connected is provided so as to penetrate and fill at least one of the plurality of insulating layers, and is electrically connected to the wiring conductor, and a part of the surface of the insulating base is is exposed on the side surfaces, it joined and it is wider conductor width of the portion which is buried in the insulating base than the width of the site that was issued said exposure, at a site the exposed on the side surface of the insulating substrate of the conductor it is characterized in that a lead terminal.

本発明の電子部品収納用パッケージは、前記配線導体が、前記複数の絶縁層の異なる層間に複数形成されており、前記導体の上端および下端が、前記複数の配線導体に接続されていることを特徴とするものである。   In the electronic component storage package of the present invention, a plurality of the wiring conductors are formed between different layers of the plurality of insulating layers, and upper ends and lower ends of the conductors are connected to the plurality of wiring conductors. It is a feature.

本発明の電子部品収納用パッケージは、前記導体の端部が、上下の前記絶縁層の少なくとも一方に埋設されていることを特徴とするものである。   The electronic component storage package of the present invention is characterized in that an end portion of the conductor is embedded in at least one of the upper and lower insulating layers.

本発明の電子装置は、本発明の電子部品収納用パッケージと、該電子部品収納用パッケージの前記絶縁基体に搭載された電子部品とを備えていることを特徴とするものである。   An electronic device according to the present invention includes the electronic component storage package of the present invention and an electronic component mounted on the insulating base of the electronic component storage package.

本発明の電子部品収納用パッケージは、導体が、絶縁基体の側面に露出された部位の幅より絶縁基体の内部に埋設された部位の幅の方が広いことにより、導体を絶縁基体の内部に埋設して絶縁基体内部に引っかかりやすくさせることができるので、導体と絶縁基体との接合強度を向上させることができ、リード端子を接合部材を介して導体に接合した際、接合部材の応力により導体が絶縁基体から剥がれることを抑制することができる。   In the electronic component storage package according to the present invention, the conductor is placed inside the insulating base because the width of the portion embedded in the insulating base is wider than the width of the portion exposed on the side surface of the insulating base. Since it can be buried and easily caught inside the insulating substrate, the bonding strength between the conductor and the insulating substrate can be improved, and when the lead terminal is bonded to the conductor via the bonding member, the conductor due to the stress of the bonding member Can be prevented from peeling off from the insulating substrate.

また、導体は、絶縁基体の側面に面として形成されてなり、絶縁基体の側面に露出した面積を小さくできるので、導体を絶縁基体の側面に高密度に配設することができるとともに、リード端子を接合部材を介して導体に接合した際、接合部材が導体の表面を広がっても導体の幅以上に広がることはなく、隣接する導体同士が電気的に短絡する可能性を低減しやすくなるので、導体を絶縁基体の側面に高密度に配設することができるようになる。   In addition, the conductor is formed as a surface on the side surface of the insulating base, and the area exposed on the side surface of the insulating base can be reduced, so that the conductor can be arranged on the side surface of the insulating base with high density and lead terminals. When joining a conductor to a conductor via a joining member, even if the joining member spreads over the surface of the conductor, it does not spread beyond the width of the conductor, and it is easy to reduce the possibility of adjacent conductors being electrically short-circuited. The conductors can be arranged on the side surface of the insulating base with high density.

従って、リード端子が絶縁基体の側面に高密度に配設され、導体が絶縁基体に強固に接合されてなる電子部品収納用パッケージを提供することができる。   Therefore, it is possible to provide an electronic component storage package in which the lead terminals are arranged at high density on the side surface of the insulating base and the conductor is firmly bonded to the insulating base.

また、好ましくは、配線導体が、複数の絶縁層の異なる層間に複数形成されており、導体の上端および下端が、複数の配線導体に接続されていることにより、上端および下端に接続された配線導体にて導体を上端および下端の方向から保持して絶縁基体内部に強固に接合させることができるので、リード端子を接合部材を介して導体に接合した際、接合部材の応力により導体が絶縁基体から剥がれることをより良好に抑制することができる。   Preferably, a plurality of wiring conductors are formed between different layers of the plurality of insulating layers, and the upper end and the lower end of the conductor are connected to the plurality of wiring conductors, whereby the wiring connected to the upper end and the lower end is connected. Since the conductor can be firmly bonded to the inside of the insulating base by holding the conductor from the top and bottom directions, when the lead terminal is joined to the conductor via the joining member, the conductor is insulated by the stress of the joining member. It can suppress more favorably that it peels from.

また、好ましくは、導体の端部が、導体が形成された絶縁層の上層の絶縁層または下層の絶縁層に埋設されていることにより、導体は、上層または下層の絶縁層に埋設され、導体の上層または下層の絶縁層にて引っかかりやすくなるので、リード端子を接合部材を介して導体に接合した際、接合部材の応力により導体が絶縁基体から剥がれることをより良好に抑制することができる。   Preferably, the end of the conductor is embedded in the upper insulating layer or the lower insulating layer of the insulating layer on which the conductor is formed, so that the conductor is embedded in the upper or lower insulating layer. Since it becomes easy to get caught by the upper layer or the lower insulating layer, it is possible to better suppress the conductor from peeling off from the insulating base due to the stress of the bonding member when the lead terminal is bonded to the conductor via the bonding member.

本発明の電子装置は、電子部品収納用パッケージと、電子部品収納用パッケージの絶縁基体に搭載された電子部品とを備えていることから、リード端子が絶縁基体の側面に高密度に配設され、信頼性の高い電子装置となる。   The electronic device according to the present invention includes the electronic component storage package and the electronic components mounted on the insulating base of the electronic component storage package, so that the lead terminals are arranged on the side surface of the insulating base with high density. It becomes an electronic device with high reliability.

本発明の電子部品収納用パッケージおよび電子装置について添付の図面を参照して詳細に説明する。図1は、本発明の電子部品収納用パッケージの実施の形態の一例を示す断面図である。図1において、1は絶縁基体、2は配線導体、3は導体、4はリード端子、5は電子部品である。   An electronic component storage package and an electronic device according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a cross-sectional view showing an example of an embodiment of an electronic component storage package according to the present invention. In FIG. 1, 1 is an insulating substrate, 2 is a wiring conductor, 3 is a conductor, 4 is a lead terminal, and 5 is an electronic component.

本発明の電子部品収納用パッケージは、複数の絶縁層からなり、電子部品5の搭載部1aを有する絶縁基体1と、複数の絶縁層の層間に形成されており、電子部品5の電極に電気的に接続される配線導体2と、複数の絶縁層の少なくとも一層を貫通しており、配線導体2に電気的に接続されているとともに、表面の一部が絶縁基体1の側面に露出された導体3と、導体の絶縁基体1の側面に露出された部位に接合されたリード端子4とを備えている。   The electronic component storage package of the present invention includes a plurality of insulating layers, and is formed between the insulating base 1 having the mounting portion 1a of the electronic component 5 and the plurality of insulating layers, and the electrodes of the electronic component 5 are electrically connected. Wiring conductor 2 and at least one of the plurality of insulating layers are penetrated, and are electrically connected to wiring conductor 2 and a part of the surface is exposed on the side surface of insulating substrate 1. The conductor 3 and the lead terminal 4 joined to the site | part exposed to the side surface of the insulated base 1 of a conductor are provided.

絶縁基体1は、酸化アルミニウム質焼結体、ムライト質焼結体、窒化アルミニウム質焼結体、炭化珪素質焼結体等の電気絶縁材料から成り、例えば、酸化アルミニウム質焼結体から成る場合には、アルミナ(Al)、シリカ(SiO)、カルシア(CaO)、マグネシア(MgO)等の原料粉末に適当な有機溶剤、溶媒を添加混合して泥漿状となすとともにこれを従来周知のドクターブレード法やカレンダーロール法等を採用し、シート状に成形することによってセラミックグリーンシート(セラミック生シート)を得、次にセラミック生シートに適当な打ち抜き加工を施すとともに複数枚積層し、約1600℃で焼成することによって製作される。 The insulating substrate 1 is made of an electrically insulating material such as an aluminum oxide sintered body, a mullite sintered body, an aluminum nitride sintered body, or a silicon carbide sintered body, for example, an aluminum oxide sintered body. For example, alumina (Al 2 O 3 ), silica (SiO 2 ), calcia (CaO), magnesia (MgO), and other raw material powders are mixed with a suitable organic solvent and solvent to obtain a mud-like shape. A ceramic green sheet (ceramic raw sheet) is obtained by forming a sheet by adopting a well-known doctor blade method, calendar roll method, etc., and then performing a suitable punching process on the ceramic raw sheet, It is manufactured by firing at about 1600 ° C.

配線導体2は、タングステン(W)、モリブデン(Mo)、マンガン(Mn)等の高融点金属粉末の焼結体からなり、高融点金属粉末に必要に応じてガラス成分やセラミック成分の粉末を加えたものに適当な有機溶剤、溶媒を添加混合することによって得た金属ペーストを従来周知のスクリーン印刷法等の厚膜形成法を採用し、絶縁基体1となるセラミック生シートに予め所定パターンに印刷塗布しておき、セラミック生シートとの同時焼成により焼結させることによって絶縁基体1の搭載部周辺から容器の外部に導出するように被着形成されている。配線導体2が絶縁基体1を積層方向に貫通する場合は、上記印刷塗布の前にセラミック生シートに打ち抜き金型やパンチングマシーンにより貫通孔を形成し、この貫通孔に金属ペーストをスクリーン印刷法等の埋め込み手段により充填させることで形成できる。   The wiring conductor 2 is made of a sintered body of a refractory metal powder such as tungsten (W), molybdenum (Mo), manganese (Mn), and a glass component or ceramic component powder is added to the refractory metal powder as necessary. A metal paste obtained by adding and mixing an appropriate organic solvent and solvent into the paste is printed in a predetermined pattern on a ceramic raw sheet to be an insulating substrate 1 by using a conventionally known thick film forming method such as a screen printing method. It is coated and formed so as to be led out from the periphery of the mounting portion of the insulating base 1 to the outside of the container by sintering by simultaneous firing with the ceramic raw sheet. When the wiring conductor 2 penetrates the insulating substrate 1 in the laminating direction, a through hole is formed in the ceramic raw sheet by a punching die or a punching machine before the above-described printing application, and a metal paste is screen-printed in this through hole. It can be formed by filling with a filling means.

配線導体2の絶縁基体1の外部表面に露出する部分は、ニッケル(Ni)等の耐蝕性に優れる金属を下地金属層として1.0〜20.0μm程度の厚みに被着させておくと、配線導体2が酸化腐食するのを有効に防止できるとともに、絶縁基体1への電子部品5の固着および配線導体2とAuワイヤや半田バンプ等の電気的接続手段との接合を強固なものとすることができる。従って、配線導体2の露出表面には、厚み1〜10μm程度のNiめっき層と厚み0.1〜3μm程度の金(Au)めっき層とが電解めっき法や無電解めっき法により順次被着されている。   The portion exposed to the outer surface of the insulating base 1 of the wiring conductor 2 is made by depositing a metal having excellent corrosion resistance such as nickel (Ni) to a thickness of about 1.0 to 20.0 μm as a base metal layer. The wiring conductor 2 can be effectively prevented from being oxidized and corroded, and the electronic component 5 can be firmly fixed to the insulating substrate 1 and the wiring conductor 2 can be firmly joined to an electrical connection means such as an Au wire or a solder bump. be able to. Therefore, an Ni plating layer having a thickness of about 1 to 10 μm and a gold (Au) plating layer having a thickness of about 0.1 to 3 μm are sequentially deposited on the exposed surface of the wiring conductor 2 by an electrolytic plating method or an electroless plating method. ing.

導体3は、タングステン(W)、モリブデン(Mo)、マンガン(Mn)等の高融点金属粉末の焼結体からなり、高融点金属粉末に必要に応じてガラス成分やセラミック成分の粉末を加えたものに適当な有機溶剤、溶媒を添加混合することによって得た導体ペーストを従来周知のスクリーン印刷法等の埋込手段を採用し、絶縁基体1となるセラミック生シートに打ち抜き金型やパンチングマシーンにより形成された貫通孔内に予め充填しておき、セラミック生シートとの同時焼成により焼結させ、絶縁基体1の側面に露出させることにより形成される。導体3は、絶縁基体1より幅広に形成された基板の内部に、絶縁基体1の外縁に沿って形成しておき、スライシング法により基板を切断して絶縁基体1の外縁を形成する際、絶縁基体1の側面に露出させることにより形成することができる。   The conductor 3 is made of a sintered body of a refractory metal powder such as tungsten (W), molybdenum (Mo), manganese (Mn) or the like, and a glass component or ceramic component powder is added to the refractory metal powder as necessary. A conductive paste obtained by adding and mixing an appropriate organic solvent and solvent is used to embed means such as a well-known screen printing method, and is punched into a ceramic raw sheet to be an insulating substrate 1 by a punching die or a punching machine. The formed through-holes are filled in advance, sintered by co-firing with the ceramic raw sheet, and exposed to the side surface of the insulating substrate 1. The conductor 3 is formed along the outer edge of the insulating base 1 inside the substrate formed wider than the insulating base 1, and when the outer edge of the insulating base 1 is formed by cutting the substrate by a slicing method, the conductor 3 is insulated. It can be formed by being exposed on the side surface of the substrate 1.

また、導体3は、絶縁基体1より幅広に形成された基板の内部に、絶縁基体1の外縁に沿って形成しておき、基板の側面を研磨加工することにより絶縁基体1の側面に露出させて形成することもできるし、絶縁基体1の外縁および導体3の位置に分割溝を形成しておき、基板を分割溝に沿って撓折することにより絶縁基体1の側面に露出させて形成することもできる。また、導体3は、切断加工により絶縁基体1となるセラミック生シートの側面に導体ペーストを露出させた後、セラミック生シートとの同時焼成により焼結させて絶縁基体1の側面に露出させて形成することもできる。   The conductor 3 is formed inside the substrate formed wider than the insulating base 1 along the outer edge of the insulating base 1, and is exposed on the side of the insulating base 1 by polishing the side of the substrate. Alternatively, a dividing groove is formed at the outer edge of the insulating substrate 1 and the position of the conductor 3, and the substrate is bent along the dividing groove so as to be exposed on the side surface of the insulating substrate 1. You can also The conductor 3 is formed by exposing the conductive paste to the side surface of the ceramic raw sheet to be the insulating base 1 by cutting and then sintering it by simultaneous firing with the ceramic raw sheet to expose the side surface of the insulating base 1. You can also

また、導体3の絶縁基体1の側面に露出する部分は、ニッケル(Ni)等の耐蝕性に優れる金属を下地金属層として1.0〜20.0μm程度の厚みに被着させておくと、導体3が酸化腐食するのを有効に防止できるとともに、導体3とリード端子4との接合を強固なものとすることができる。従って、導体3の露出表面には、厚み1〜10μm程度のNiめっき層と厚み0.1〜3μm程度の金(Au)めっき層とが電解めっき法や無電解めっき法により順次被着されている。   Further, the portion of the conductor 3 exposed on the side surface of the insulating base 1 is made by depositing a metal having excellent corrosion resistance such as nickel (Ni) to a thickness of about 1.0 to 20.0 μm as a base metal layer. The conductor 3 can be effectively prevented from being oxidized and corroded, and the conductor 3 and the lead terminal 4 can be firmly joined. Therefore, a Ni plating layer having a thickness of about 1 to 10 μm and a gold (Au) plating layer having a thickness of about 0.1 to 3 μm are sequentially deposited on the exposed surface of the conductor 3 by an electrolytic plating method or an electroless plating method. Yes.

リード端子4は、鉄ーニッケル合金、鉄ーニッケルーコバルト合金等の鉄を主成分とする合金や、銅、または銅を主成分とする合金等の金属材料により形成されている。そして、銀ろう等の接合部材6を介して導体3に接続される。   The lead terminal 4 is formed of a metal material such as an iron-based alloy such as iron-nickel alloy or iron-nickel-cobalt alloy, copper, or an alloy mainly composed of copper. Then, it is connected to the conductor 3 through a joining member 6 such as silver solder.

また、リード端子4の露出する部分は、ニッケル(Ni)等の耐蝕性に優れる金属を下地金属層として1.0〜20.0μm程度の厚みに被着させておくと、リード端子4が酸化腐食するのを有効に防止できるとともに、リード端子4と外部回路基板の配線導体との接合を強固なものとすることができる。従って、リード端子4の露出表面には、厚み1〜10μm程度のNiめっき層と厚み0.1〜3μm程度の金(Au)めっき層とが電解めっき法や無電解めっき法により順次被着されている。   Further, the exposed portion of the lead terminal 4 is oxidized when a metal having excellent corrosion resistance such as nickel (Ni) is deposited as a base metal layer to a thickness of about 1.0 to 20.0 μm. Corrosion can be effectively prevented, and the bonding between the lead terminal 4 and the wiring conductor of the external circuit board can be strengthened. Therefore, an Ni plating layer having a thickness of about 1 to 10 μm and a gold (Au) plating layer having a thickness of about 0.1 to 3 μm are sequentially deposited on the exposed surface of the lead terminal 4 by an electrolytic plating method or an electroless plating method. ing.

そして、本発明においては、図2(a)〜図2(d)に示すように、導体3は、絶縁基体1の側面に露出された部位の幅W1より絶縁基体1の内部に埋設された部位W2の方が広くなっている。これにより、導体3を絶縁基体1の内部に埋設して、絶縁基体1内部に引っかかりやすくすることができるので、導体3と絶縁基体1との接合強度を向上させることができ、リード端子4を接合部材6を介して導体3に接合した際、接合部材6の応力により導体3が絶縁基体1から剥がれることを抑制することができる。   In the present invention, as shown in FIGS. 2 (a) to 2 (d), the conductor 3 is embedded in the insulating base 1 from the width W 1 of the portion exposed on the side surface of the insulating base 1. The part W2 is wider. As a result, the conductor 3 can be embedded in the insulating base 1 and can be easily caught inside the insulating base 1, so that the bonding strength between the conductor 3 and the insulating base 1 can be improved, and the lead terminal 4 can be When the conductor 3 is joined via the joining member 6, the conductor 3 can be prevented from being peeled off from the insulating base 1 due to the stress of the joining member 6.

また、導体3は、絶縁基体1の側面に面として形成されてなり、絶縁基体1の側面に露出した面積を小さくできるので、導体3を絶縁基体1の側面に高密度に配設することができるとともに、外部リード4を接合部材6を介して導体3に接合した際、接合部材6が広がっても導体3の幅以上に広がることはなく、隣接する導体3同士が電気的に短絡する可能性を低減しやすくなるので、導体3を絶縁基体1の側面に高密度に配設することができるようになる。   In addition, the conductor 3 is formed as a surface on the side surface of the insulating base 1, and the area exposed on the side surface of the insulating base 1 can be reduced. Therefore, the conductor 3 can be arranged on the side surface of the insulating base 1 with high density. In addition, when the external lead 4 is joined to the conductor 3 via the joining member 6, even if the joining member 6 spreads, it does not spread beyond the width of the conductor 3, and adjacent conductors 3 can be electrically short-circuited. Therefore, the conductor 3 can be disposed on the side surface of the insulating base 1 with high density.

従って、リード端子4が絶縁基体1の側面に高密度に配設され、導体3が絶縁基体1に強固に接合されてなる電子部品収納用パッケージを提供することができる。   Therefore, it is possible to provide an electronic component storage package in which the lead terminals 4 are arranged on the side surface of the insulating base 1 with high density and the conductor 3 is firmly bonded to the insulating base 1.

このような導体3は、絶縁基体1の側面に露出させる際、絶縁基体1の側面に露出した幅W1と比べて絶縁基体1の内部に配設した部位の幅W2が広くなるように切断加工、研磨加工、分割溝に沿った撓折等の加工等を行うことにより形成することができる。また、導体3は、絶縁基体1より幅広に形成された基板を絶縁基体1の外縁に沿って切断等の加工を施すことにより露出させて形成しても良いし、切断等の加工を施して絶縁基体1となるセラミック生シートの側面に導体ペーストを露出させた後、絶縁基体1となるセラミック生シートとの同時焼成を行うことにより絶縁基体1の側面に露出させて形成しても構わない。   When such a conductor 3 is exposed on the side surface of the insulating base 1, it is cut so that the width W2 of the portion disposed inside the insulating base 1 is larger than the width W1 exposed on the side of the insulating base 1. It can be formed by performing processing such as polishing and bending along the dividing grooves. The conductor 3 may be formed by exposing a substrate formed wider than the insulating base 1 by cutting or the like along the outer edge of the insulating base 1, or performing the cutting or the like. After the conductive paste is exposed on the side surface of the ceramic raw sheet to be the insulating substrate 1, it may be formed so as to be exposed on the side surface of the insulating substrate 1 by co-firing with the ceramic raw sheet to be the insulating substrate 1. .

なお、このような導体3は、図2(a)〜図2(d)に示すように、平面視で円形状、四角形状、三角形状、多角形状の一部が切断された形状や絶縁基体1の側面側が狭くなるような凸形状等、絶縁基体1の側面に露出した部位の幅W1より絶縁基体1の内部に埋設された部位の幅W2が広くなるように形成しておけば良い。なお、導体3の絶縁基体1への充填性を良好なものとし、導体3と絶縁基体1との接合強度を良好なものとするため、導体3は図2(a)に示すような円形状の一部が切断された形状であることが好ましい。   In addition, as shown in FIGS. 2 (a) to 2 (d), such a conductor 3 has a circular shape, a square shape, a triangular shape, or a shape obtained by partially cutting a polygonal shape in a plan view. The width W2 of the portion embedded in the insulating substrate 1 may be wider than the width W1 of the portion exposed on the side surface of the insulating substrate 1, such as a convex shape that makes the side surface of 1 narrow. In addition, in order to make the filling property of the conductor 3 into the insulating base 1 good and to make the bonding strength between the conductor 3 and the insulating base 1 good, the conductor 3 has a circular shape as shown in FIG. It is preferable that a part of is cut.

また、導体3は、図3に示すように、複数の絶縁層に跨って形成され、絶縁基体1の側面に露出されたものであっても良い。これにより、導体3の側面に露出する面積を絶縁基体1の厚み方向に広領域に形成することができ、導体3とリード端子4との接合強度を強固なものとすることができる。また、図4に示すように、導体3は、絶縁基体1の厚み方向の異なる絶縁層に複数形成されるものであっても良く、複数の導体3のそれぞれにリード端子4が接続されるものであっても良い。これにより、絶縁基体1の側面の厚み方向に複数のリード端子4を配設することができるので、より小型で高密度な電子部品収納用パッケージとすることができる。また、図5に示すように、リード端子4は、導体3側の部位を幅広に形成させても良い。これにより、導体3とリード端子4との接合面積を広領域に形成することができ、導体3とリード端子4との接合強度を強固なものとすることができる。また、リード端子4は、導体3に接合される部位の表面に凹みや溝を形成させても構わない。これにより、導体3とリード端子4との接合面積を広領域にすることができ、導体3とリード端子4との接合強度をより強固なものとすることができる。   Further, as shown in FIG. 3, the conductor 3 may be formed across a plurality of insulating layers and exposed on the side surface of the insulating substrate 1. Thereby, the area exposed on the side surface of the conductor 3 can be formed in a wide region in the thickness direction of the insulating base 1, and the bonding strength between the conductor 3 and the lead terminal 4 can be strengthened. Further, as shown in FIG. 4, a plurality of conductors 3 may be formed in insulating layers having different thickness directions of the insulating base 1, and lead terminals 4 are connected to each of the plurality of conductors 3. It may be. Thereby, since the several lead terminal 4 can be arrange | positioned in the thickness direction of the side surface of the insulation base | substrate 1, it can be set as a smaller and high-density electronic component accommodation package. Further, as shown in FIG. 5, the lead terminal 4 may be formed with a wide portion on the conductor 3 side. Thereby, the joining area of the conductor 3 and the lead terminal 4 can be formed in a wide area | region, and the joining strength of the conductor 3 and the lead terminal 4 can be strengthened. Further, the lead terminal 4 may be formed with a dent or a groove on the surface of the portion to be joined to the conductor 3. Thereby, the joining area of the conductor 3 and the lead terminal 4 can be made into a wide area | region, and the joining strength of the conductor 3 and the lead terminal 4 can be made stronger.

また、図6に示すように、配線導体2が、複数の絶縁層の異なる層間に複数形成されており、導体3の上端および下端が、複数の配線導体2に接続されていることが好ましい。これにより、上端および下端に接続された配線導体2にて導体3を上端および下端の方向から保持して絶縁基体1内部に導体3を強固に接合させることができるので、リード端子4を接合部材6を介して導体3に接合した際、接合部材6の応力により導体3が絶縁基体1から剥がれることをより良好に抑制することができる。   In addition, as shown in FIG. 6, it is preferable that a plurality of wiring conductors 2 are formed between different layers of a plurality of insulating layers, and the upper ends and lower ends of the conductors 3 are connected to the plurality of wiring conductors 2. As a result, the conductor 3 can be held firmly in the direction of the upper end and the lower end by the wiring conductor 2 connected to the upper end and the lower end, and the conductor 3 can be firmly joined to the inside of the insulating base 1, so that the lead terminal 4 can be joined to the joining member. When the conductor 3 is joined to the conductor 3 via 6, it is possible to better suppress the conductor 3 from being peeled off from the insulating substrate 1 due to the stress of the joining member 6.

このような導体3は、次のようにして形成することができる。例えば、セラミック生シートの貫通孔に導体ペーストを充填した後、スクリーン印刷法等の厚膜形成法により導体ペーストの少なくとも一部を被覆するように配線導体2となる金属ペーストをセラミック生シートの上面および下面に印刷塗布し、他のセラミック生シートと積層することにより導体ペーストの上端および下端が金属ペーストに接続されることとなる。そして、絶縁基体1となるセラミック生シートとの同時焼成により、導体3の上端および下端が、複数の配線導体2に接続されることとなる。また、導体ペーストが充填されるセラミック生シートの上層となるセラミック生シートの下面や下層となるセラミック生シートの上面に金属ペーストを印刷塗布しておき、これらのセラミック生シートと導体ペーストが充填されたセラミック生シートとを積層した際、金属ペーストと導体ペーストとが接続されるようにしても構わない。また、金属ペーストは、導体ペーストが充填されたセラミック生シートの上面または下面のいずれか一方に印塗布し、他方を他のセラミックグリーンシートに印刷塗布し、積層した際に金属ペーストと導体ペーストとが接続されるようにしても構わない。また、導体3の上端および下端に接続されるそれぞれの配線導体2は、図6に示すように、絶縁基体1の厚み方向に貫通して形成された配線導体2により直接接続されているものであっても構わないし、それぞれの配線導体2が独立して導体3の上端または下端に接続されるものであっても構わない。   Such a conductor 3 can be formed as follows. For example, after filling a through hole of a ceramic raw sheet with a conductor paste, a metal paste to be a wiring conductor 2 is coated on the upper surface of the ceramic raw sheet so as to cover at least a part of the conductor paste by a thick film forming method such as a screen printing method. Then, the upper and lower ends of the conductive paste are connected to the metal paste by printing and coating on the lower surface and laminating with other ceramic raw sheets. And the upper end and lower end of the conductor 3 will be connected to the some wiring conductor 2 by simultaneous baking with the ceramic raw sheet used as the insulation base | substrate 1. FIG. Also, the metal paste is printed on the lower surface of the ceramic raw sheet that is the upper layer of the ceramic raw sheet that is filled with the conductive paste and the upper surface of the ceramic raw sheet that is the lower layer, and the ceramic raw sheet and the conductive paste are filled. When the ceramic raw sheets are laminated, the metal paste and the conductor paste may be connected. In addition, the metal paste is applied to either the upper surface or the lower surface of the ceramic raw sheet filled with the conductor paste, and the other is printed and applied to another ceramic green sheet. May be connected. Further, the respective wiring conductors 2 connected to the upper end and the lower end of the conductor 3 are directly connected by the wiring conductors 2 formed penetrating in the thickness direction of the insulating base 1 as shown in FIG. Each wiring conductor 2 may be independently connected to the upper end or the lower end of the conductor 3.

また、図7、8に示すように、導体3の端部が、導体3が形成された絶縁層の上層または下層の絶縁層に埋設されていることが好ましい。これにより、導体3は、上層または下層の絶縁層に埋設され方、導体3の上層または下層の絶縁層に引っかかりやすくなるので、導体3と絶縁基体1との接合強度を向上させることができ、リード端子4を接合部材6を介して導体3に接合した際、接合部材6の応力により導体3が絶縁基体1から剥がれることをより良好に抑制することができる。   Moreover, as shown in FIGS. 7 and 8, it is preferable that the end portion of the conductor 3 is embedded in the upper insulating layer or the lower insulating layer on which the conductor 3 is formed. Thereby, since the conductor 3 is embedded in the upper or lower insulating layer, and easily caught by the upper or lower insulating layer of the conductor 3, the bonding strength between the conductor 3 and the insulating base 1 can be improved. When the lead terminal 4 is joined to the conductor 3 via the joining member 6, the conductor 3 can be better suppressed from being peeled off from the insulating base 1 due to the stress of the joining member 6.

このような導体3は、次のようにして形成することができる。例えば、セラミック生シートの貫通孔に導体ペーストを充填する際、導体ペーストがセラミック生シートの上面または下面の少なくとも一方から突出されるように形成しておくことで、他のセラミック生シートと積層した際、導体ペーストは絶縁基体1となるセラミック生シートの少なくとも一方に埋設されることとなる。そして、絶縁基体1となるセラミック生シートとの同時焼成により、導体3の端部が、導体3が形成された絶縁層の上層の絶縁層または下層の絶縁層に埋設される。   Such a conductor 3 can be formed as follows. For example, when the conductive paste is filled in the through holes of the ceramic raw sheet, the conductive paste is formed so as to protrude from at least one of the upper surface or the lower surface of the ceramic raw sheet, and thus laminated with other ceramic raw sheets. At this time, the conductor paste is embedded in at least one of the ceramic raw sheets to be the insulating base 1. And the end part of the conductor 3 is embed | buried under the insulating layer of the upper layer of the insulating layer in which the conductor 3 was formed, or the lower insulating layer by simultaneous baking with the ceramic raw sheet used as the insulating base | substrate 1. FIG.

また、スクリーン印刷法等の埋込手段によってセラミック生シートの貫通孔に充填された導体ペーストがセラミック生シートの上面または下面から突出するように形成しても良いし、スクリーン印刷法等の埋込手段によってセラミック生シートの貫通孔に第1の導体ペーストを充填した後、スクリーン印刷法等の印刷手段によって第1の導体ペースト表面を第2の導体ペーストにより印刷塗布することによって第2の導体ペーストがセラミック生シートの上面または下面から突出するようにしても構わない。   Further, the conductive paste filled in the through holes of the ceramic raw sheet by an embedding means such as a screen printing method may be formed so as to protrude from the upper surface or the lower surface of the ceramic raw sheet. After the first conductor paste is filled in the through holes of the ceramic raw sheet by means, the surface of the first conductor paste is printed and applied with the second conductor paste by printing means such as a screen printing method. May protrude from the upper or lower surface of the ceramic raw sheet.

なお、第1の導体ペースト表面に第2の導体ペーストを印刷塗布する場合、第2の導体ペーストは、貫通孔と同形状ではなく、貫通孔の領域よりも狭領域や広領域に印刷塗布しても良いし、セラミック生シートの貫通孔に充填した第1の導体ペーストとは含有率等の成分の異なる導体ペーストを用いて印刷塗布しても構わない。これにより、貫通孔に導体ペーストが充填されたセラミック生シートと他のセラミック生シートとを積層した際、導体ペーストは絶縁基体1となるセラミック生シートの少なくとも一方に埋設することとなり、導体3の端部が、導体3が形成された絶縁層の上層の絶縁層または下層の絶縁層埋設される。   When the second conductor paste is printed and applied to the surface of the first conductor paste, the second conductor paste is not applied in the same shape as the through hole, but is applied to a narrower area or a wider area than the area of the through hole. Alternatively, the first conductive paste filled in the through holes of the ceramic raw sheet may be printed and applied using a conductive paste having a different component such as content. As a result, when the ceramic raw sheet filled with the conductive paste in the through holes and the other ceramic raw sheet are laminated, the conductive paste is embedded in at least one of the ceramic raw sheets serving as the insulating base 1. The end portion is embedded in the upper insulating layer or the lower insulating layer in which the conductor 3 is formed.

また、導体3の端部は、導体3が形成された絶縁層の上層の絶縁層および下層の絶縁層の両方に埋設されていることがより好ましい。これにより、導体3の端部は、上層の絶縁層および下層の絶縁層のの両方に広く埋設され、絶縁基体1により引っかかりやすくなるので、導体3と絶縁基体1との接合強度をより良好に向上させることができる。   More preferably, the end portion of the conductor 3 is embedded in both the upper insulating layer and the lower insulating layer where the conductor 3 is formed. As a result, the end portion of the conductor 3 is widely embedded in both the upper insulating layer and the lower insulating layer, and is easily caught by the insulating base 1, so that the bonding strength between the conductor 3 and the insulating base 1 is improved. Can be improved.

本発明の電子装置は、上記のような電子部品収納用パッケージの搭載部に半導体素子や水晶振動子等の電子部品5が搭載される。この構成により、リード端子4が絶縁基体1の側面に高密度に配設された信頼性の高い電子装置となる。   In the electronic device of the present invention, the electronic component 5 such as a semiconductor element or a crystal resonator is mounted on the mounting portion of the electronic component storage package as described above. With this configuration, a highly reliable electronic device in which the lead terminals 4 are arranged on the side surface of the insulating substrate 1 with high density is obtained.

電子部品5は、ICチップやLSIチップ等の半導体素子、水晶振動子や圧電振動子等の圧電素子、各種センサ等である。電子部品5がフリップチップ型の半導体素子である場合には、はんだバンプや金バンプ、または導電性樹脂(異方性導電樹脂等)を介して、半導体素子の電極と配線層2とが電気的に接続される。また、電子部品5がワイヤボンディング型の半導体素子である場合には、ガラス、樹脂、ろう材を介して半導体素子の基板面(裏面)と基体1とが接合され、ボンディングワイヤを介して半導体素子の電極と配線導体2とが電気的に接続される。また、電子部品5が圧電素子である場合には、導電性樹脂を介して、圧電素子の電極と配線導体2とが電気的に接続される。   The electronic component 5 is a semiconductor element such as an IC chip or an LSI chip, a piezoelectric element such as a crystal vibrator or a piezoelectric vibrator, or various sensors. When the electronic component 5 is a flip chip type semiconductor element, the electrode of the semiconductor element and the wiring layer 2 are electrically connected via a solder bump, a gold bump, or a conductive resin (anisotropic conductive resin or the like). Connected to. When the electronic component 5 is a wire bonding type semiconductor element, the substrate surface (back surface) of the semiconductor element and the substrate 1 are bonded via glass, resin, brazing material, and the semiconductor element is bonded via a bonding wire. These electrodes and the wiring conductor 2 are electrically connected. When the electronic component 5 is a piezoelectric element, the electrode of the piezoelectric element and the wiring conductor 2 are electrically connected via a conductive resin.

なお、本発明は上述の実施の形態に限定されず、本発明の要旨を逸脱しない範囲内で種々の変更を施すことは何ら差し支えない。例えば、上述の例では、電子部品5が搭載される搭載部1aは、絶縁基体1の上面に形成されているが、搭載部1aは、絶縁基体1の下面等の絶縁基体1の上面以外に形成されているものであっても構わない。また、上述の例では、リード端子4は、絶縁基体1の一側面に形成された導体3に接合されているが、絶縁基体1の二側面や四側面のように、絶縁基体1の複数の側面に導体3を形成し、リード端子4がこれらの導体3に接合されてなるものであっても構わない。また、電子部品5が搭載される搭載部1aは、絶縁基体1の上面または下面に形成された凹部の底面に形成されるものであっても良いし、平板形状の絶縁基体1の上面または下面に形成されるものであっても良い。   Note that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the present invention. For example, in the above-described example, the mounting portion 1 a on which the electronic component 5 is mounted is formed on the upper surface of the insulating base 1, but the mounting portion 1 a is not on the upper surface of the insulating base 1 such as the lower surface of the insulating base 1. It may be formed. In the above-described example, the lead terminal 4 is joined to the conductor 3 formed on one side surface of the insulating base 1, but a plurality of the insulating base body 1 such as the two side surfaces and the four side surfaces of the insulating base 1 are used. The conductor 3 may be formed on the side surface, and the lead terminal 4 may be bonded to the conductor 3. The mounting portion 1a on which the electronic component 5 is mounted may be formed on the bottom surface of the recess formed on the upper surface or the lower surface of the insulating substrate 1, or the upper surface or the lower surface of the flat insulating substrate 1. It may be formed.

本発明の電子部品収納用パッケージの実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the electronic component storage package of this invention. (a)〜(d)は、本発明の電子部品収納用パッケージの接続パッドとリード端子との接続部における実施の形態の一例を示す拡大平面図である。(A)-(d) is an enlarged plan view which shows an example of embodiment in the connection part of a connection pad and lead terminal of the electronic component storage package of this invention. 本発明の電子部品収納用パッケージの実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the electronic component storage package of this invention. 本発明の電子部品収納用パッケージの実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the electronic component storage package of this invention. 本発明の電子部品収納用パッケージの実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the electronic component storage package of this invention. 本発明の電子部品収納用パッケージの実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the electronic component storage package of this invention. 本発明の電子部品収納用パッケージの実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the electronic component storage package of this invention. 図7における電子部品収納用パッケージの要部拡大断面図である。FIG. 8 is an enlarged sectional view of a main part of the electronic component storage package in FIG.

符号の説明Explanation of symbols

1・・・・・・絶縁基体
2・・・・・・配線導体
3・・・・・・接続パッド
4・・・・・・リード端子
5・・・・・・電子部品
6・・・・・・接合部材
1 .... Insulating substrate 2 .... Wiring conductor 3 .... Connecting pad 4 .... Lead terminal 5 .... Electronic component 6 .... ..Joint members

Claims (4)

複数の絶縁層からなり、電子部品の搭載部を有する絶縁基体と、前記複数の絶縁層の層間に形成されており、前記電子部品の電極に電気的に接続される配線導体と、前記複数の絶縁層の少なくとも一層を貫通して充填するように設けられており、前記配線導体に電気的に接続されているとともに、表面の一部が前記絶縁基体の側面に露出され、該露出され部位の幅より前記絶縁基体の内部に埋設された部位の幅の方が広い導体と、該導体の前記絶縁基体の前記側面に露出された部位に接合されたリード端子とを備えことを特徴とする電子部品収納用パッケージ。 An insulating base comprising a plurality of insulating layers and having an electronic component mounting portion; a wiring conductor formed between the plurality of insulating layers and electrically connected to the electrodes of the electronic components; site is provided to fill through at least one insulating layer, which together are electrically connected to the wiring conductor, a part of the surface is exposed to the side surface of the insulating substrate, issued said exposure and a wide conductor towards the width than the width the portion that is embedded in the insulating base, and further comprising a lead terminal joined at a site exposed to the side surface of the insulating base of the conductor Electronic component storage package. 前記配線導体が、前記複数の絶縁層の異なる層間に複数形成されており、前記導体の上端および下端が、前記複数の配線導体に接続されていることを特徴とする請求項1記載の電子部品収納用パッケージ。 2. The electronic component according to claim 1, wherein a plurality of the wiring conductors are formed between different layers of the plurality of insulating layers, and upper ends and lower ends of the conductors are connected to the plurality of wiring conductors. Storage package. 前記導体の端部が、前記導体が形成された前記絶縁層の上層の絶縁層または下層の絶縁層に埋設されていることを特徴とする請求項1記載の電子部品収納用パッケージ。 2. The electronic component storing package according to claim 1, wherein an end portion of the conductor is embedded in an upper insulating layer or a lower insulating layer of the insulating layer on which the conductor is formed. 請求項1乃至請求項3のいずれかに記載された電子部品収納用パッケージと、該電子部品収納用パッケージの前記絶縁基体に搭載された電子部品とを備えていることを特徴とする電子装置。
An electronic device comprising: the electronic component storage package according to any one of claims 1 to 3; and an electronic component mounted on the insulating base of the electronic component storage package.
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