JP2005191041A - Wiring board - Google Patents

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JP2005191041A
JP2005191041A JP2003426891A JP2003426891A JP2005191041A JP 2005191041 A JP2005191041 A JP 2005191041A JP 2003426891 A JP2003426891 A JP 2003426891A JP 2003426891 A JP2003426891 A JP 2003426891A JP 2005191041 A JP2005191041 A JP 2005191041A
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conductor
electrode pads
wiring board
wiring
electrode pad
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JP4217151B2 (en
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Kenji Yagimura
健次 柳村
Masahiro Kijima
正広 木島
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Kyocera Corp
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Kyocera Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a wiring board in which an electrode pad can be electrically connected certainly to the terminal pad of an external electrical circuit substrate for a long period of time through a conductor bump, and the connection can be assured particularly even if the stress due to the difference of the thermal expansion coefficients of an insulating substrate and the external electrical circuit substrate become large and which has high electric connection reliability to the external electrical circuit substrate. <P>SOLUTION: The wiring board 9 includes a rectangular plate-like insulating substrate 1 made of ceramics in which a wiring conductor 2 is formed in the interior, a plurality of electrode pads 3 arranged laterally and longitudinally and formed so that the entirety becomes the rectangular shape arraying pattern on the main surface of the insulating substrate 1, and a through conductor 4 formed from each electrode pad to the interior of the insulating substrate 1. The electrode pads formed at the corners of the rectangular shape arraying pattern of the plurality of the electrode pads 3 are formed more in the number of the through conductors 4 than the others. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、絶縁基体の主面に電極パッドが配置され、この電極パッドが外部電気回路基板に導体バンプを介して接続される配線基板に関するものであり、特に電極パッドの外部電気回路基板に対する接続信頼性が良好な配線基板に関するものである。   The present invention relates to a wiring board in which an electrode pad is disposed on a main surface of an insulating base and the electrode pad is connected to an external electric circuit board via a conductor bump, and in particular, connection of the electrode pad to the external electric circuit board. The present invention relates to a wiring board with good reliability.

半導体素子や容量素子,圧電振動子等の電子部品が搭載される配線基板は、一般に、酸化アルミニウム質焼結体等から成り、内部に配線導体が形成された四角板状の絶縁基体と、絶縁基体の一方主面に全体が四角形状の配列パターンとなるように縦横に配列形成された複数の電極パッドと、電極パッドから絶縁基体の内部にかけて形成された貫通導体とを有する構造である。貫通導体は配線導体と電気的に接続され、貫通導体を介して電極パッドと配線導体とが電気的に接続されている。   A wiring board on which electronic components such as a semiconductor element, a capacitive element, and a piezoelectric vibrator are mounted is generally composed of an aluminum oxide sintered body and the like, and a rectangular plate-like insulating base in which a wiring conductor is formed. The structure has a plurality of electrode pads arranged vertically and horizontally so as to form a square array pattern on one main surface of the substrate, and through conductors formed from the electrode pads to the inside of the insulating substrate. The through conductor is electrically connected to the wiring conductor, and the electrode pad and the wiring conductor are electrically connected through the through conductor.

そして、絶縁基体の電極パッドが形成された主面と反対側の主面(他方主面)に電子部品を搭載するとともに、電子部品の電極を配線導体と半田やボンディングワイヤを介して接続し、必要に応じて電子部品を樹脂やキャップで封止することにより電子装置として完成する。   And while mounting an electronic component on the main surface (the other main surface) opposite to the main surface on which the electrode pad of the insulating substrate is formed, the electrode of the electronic component is connected to the wiring conductor via solder or a bonding wire, The electronic device is completed by sealing the electronic component with a resin or a cap as necessary.

その後、絶縁基体の主面に配列形成した多数の電極パッドを、それぞれ対応する外部電気回路基板の回路配線に導体バンプを介して接続することにより、電子装置が外部電気回路基板に実装される。   Thereafter, the electronic device is mounted on the external electric circuit board by connecting a large number of electrode pads arranged on the main surface of the insulating base to the circuit wiring of the corresponding external electric circuit board via conductor bumps.

なお、この配線基板の電極パッドと外部電気回路基板の端子パッドとの接合時には、通常、導体バンプの電極パッドに対する濡れ性を良好とするために、フラックス等の接着助剤が用いられる。
特開平10−92965号公報
When bonding the electrode pads of the wiring board and the terminal pads of the external electric circuit board, an adhesion aid such as flux is usually used to improve the wettability of the conductor bumps to the electrode pads.
Japanese Patent Laid-Open No. 10-92965

しかしながら、このような配線基板は、絶縁基体と外部電気回路基板との熱膨張係数の違いに起因する熱応力や電子部品を樹脂で封止した場合の封止樹脂の収縮に伴う応力等によって、電極パッドが絶縁基体から剥がれやすく、配線基板の電極パッドを外部電気回路基板の回路配線等に導体バンプを介して接続する際に、電極パッドと外部電気回路基板との接続信頼性が低下するおそれがあるという問題点があった。   However, such a wiring board is caused by thermal stress caused by the difference in thermal expansion coefficient between the insulating base and the external electric circuit board, stress due to shrinkage of the sealing resin when electronic components are sealed with resin, and the like. The electrode pads are easily peeled off from the insulating substrate, and the connection reliability between the electrode pads and the external electric circuit board may be reduced when the electrode pads of the wiring board are connected to the circuit wiring of the external electric circuit board via conductor bumps. There was a problem that there was.

このような応力は、通常、絶縁基体の主面の対角線方向に大きく作用し、各隅部において最も大きく作用する。そのため、上記電極パッドの剥がれは、特に、四角形状の配列パターンに形成された電極パッドのうち応力が最も大きく作用する各隅部に形成されたものにおいて顕著である。   Such stress usually acts largely in the diagonal direction of the main surface of the insulating base, and acts most greatly at each corner. For this reason, the peeling of the electrode pad is particularly noticeable in the electrode pads formed in the square array pattern, which are formed at the corners where the stress acts most.

特に、近年、配線基板の小型化と電極パッドの個数の増加とに応じて電極パッドを小さくする必要があり、電極パッドの絶縁基体に対する接合の面積が小さくなっているため、電極パッドの剥がれの発生が増加する傾向にあり、このような接続信頼性の確保は重要な課題になってきている。   In particular, in recent years, it is necessary to reduce the electrode pad in accordance with the miniaturization of the wiring board and the increase in the number of electrode pads, and the area of the bonding of the electrode pad to the insulating base is reduced, so that the electrode pad is not peeled The occurrence tends to increase, and securing such connection reliability has become an important issue.

本発明は、上記従来の技術の問題点に鑑みて完成されたものであり、その目的は、電極パッドが絶縁基体に強固に接合され、電極パッドを外部電気回路基板の回路配線に導体バンプを介して長期にわたって確実に電気的に接続させておくことが可能で、特に絶縁基体と外部電気回路基板との熱膨張係数の差による応力が大きくなっても、その接続を確保することが可能な、外部電気回路基板に対して高い電気的な接続信頼性を有する配線基板を提供することにある。   The present invention has been completed in view of the above-mentioned problems of the prior art. The purpose of the present invention is to firmly bond an electrode pad to an insulating base, and attach a conductor bump to a circuit wiring of an external electric circuit board. It is possible to ensure electrical connection over a long period of time, and it is possible to ensure the connection even when the stress due to the difference in thermal expansion coefficient between the insulating base and the external electric circuit board increases. Another object of the present invention is to provide a wiring board having high electrical connection reliability with respect to an external electric circuit board.

本発明の配線基板は、内部に配線導体が形成されたセラミックスから成る四角板状の絶縁基体と、絶縁基体の主面に全体が四角形状の配列パターンとなるように縦横に配列形成された複数の電極パッドと、各電極パッドから前記絶縁基体の内部にかけて形成された貫通導体とを具備しており、前記複数の電極パッドのうち前記四角形状の配列パターンの各隅部に形成されたものはその他のものよりも前記貫通導体の数が多いことを特徴とするものである。   A wiring board according to the present invention includes a rectangular plate-like insulating base made of ceramics having wiring conductors formed therein, and a plurality of elements arranged vertically and horizontally so as to form a square-shaped array pattern on the main surface of the insulating base. Electrode pads and through conductors formed from each electrode pad to the inside of the insulating base, and the plurality of electrode pads formed at each corner of the square array pattern are The number of the through conductors is larger than the other ones.

本発明の配線基板は、好ましくは、前記四角形状の配列パターンの各隅部の前記電極パッドは、前記絶縁基体の主面の対角線に沿って配置された2個の貫通導体が形成されていることを特徴とするものである。   In the wiring board of the present invention, preferably, the electrode pads at each corner of the square array pattern are formed with two through conductors arranged along the diagonal of the main surface of the insulating base. It is characterized by this.

本発明の配線基板によれば、複数の電極パッドのうち四角形状の配列パターンの各隅部に形成されたものはその他のものよりも貫通導体の数を多くしたことから、貫通導体によるアンカー効果で電極パッドと絶縁基体との接合強度が高くなり、配線基板の絶縁基体と外部電気回路基板との熱膨張係数の差により発生する熱応力等の応力が電極パッドに作用したとしても、電極パッドが絶縁基体から剥がれるのを防ぐことができる。そのため、絶縁基体の主面に形成した電極パッドを外部電気回路基板の回路配線に対し導体バンプを介して長期にわたって確実に電気的に接続させておくことができ、高い電気的な接続信頼性を有する配線基板とすることができる。   According to the wiring board of the present invention, the number of through conductors formed in each corner of the square array pattern among the plurality of electrode pads is larger than the others, so that the anchor effect by the through conductors Even if stress such as thermal stress generated due to the difference in thermal expansion coefficient between the insulating base of the wiring board and the external electric circuit board acts on the electrode pad, the electrode pad and the insulating base have a high bonding strength. Can be prevented from peeling off from the insulating substrate. Therefore, the electrode pads formed on the main surface of the insulating base can be reliably electrically connected to the circuit wiring of the external electric circuit board through the conductor bumps over a long period of time, and high electrical connection reliability can be achieved. It can be set as the wiring board which has.

また、本発明の配線基板によれば、好ましくは、四角形状の配列パターンの各隅部の電極パッドは、絶縁基体の主面の対角線に沿って配置された2個の貫通導体が形成されていることから、応力が作用する方向に沿って2個の貫通導体が並ぶので、よりアンカー効果が強くなり、電極パッドと絶縁基体との接合強度をより一層高くして、電極パッドの剥がれがより効果的に防止された、接続信頼性に極めて優れた配線基板とすることができる。   According to the wiring board of the present invention, it is preferable that the electrode pad at each corner of the rectangular array pattern is formed with two through conductors arranged along the diagonal line of the main surface of the insulating base. Therefore, since the two through conductors are arranged along the direction in which the stress acts, the anchor effect becomes stronger, the bonding strength between the electrode pad and the insulating base is further increased, and the electrode pad is more easily peeled off. A wiring board that is effectively prevented and has excellent connection reliability can be obtained.

本発明の配線基板を添付の図面に基づき詳細に説明する。図1(a)は本発明の配線基板の実施の形態の一例を示す平面図であり、(b)は本発明の配線基板の実施の形態の一例を示す断面図である。これらの図において、1は絶縁基体、2は配線導体、3は電極パッド、4は貫通導体である。これら絶縁基体1,配線導体2,電極パッド3および貫通導体4により配線基板9が主に構成される。   The wiring board of the present invention will be described in detail with reference to the accompanying drawings. FIG. 1A is a plan view showing an example of the embodiment of the wiring board of the present invention, and FIG. 1B is a cross-sectional view showing an example of the embodiment of the wiring board of the present invention. In these drawings, 1 is an insulating substrate, 2 is a wiring conductor, 3 is an electrode pad, and 4 is a through conductor. A wiring substrate 9 is mainly constituted by the insulating base 1, the wiring conductor 2, the electrode pad 3, and the through conductor 4.

絶縁基体1は、酸化アルミニウム質焼結体,窒化アルミニウム質焼結体,ムライト質焼結体,窒化珪素質焼結体,炭化珪素質焼結体,ガラスセラミックス焼結体等のセラミックスから成る。絶縁基体1が例えば酸化アルミニウム質焼結体から成る場合、酸化アルミニウム,酸化珪素,酸化マグネシウム,酸化カルシウム等のセラミック原料粉末に適当な有機バインダ,溶剤を添加混合して泥漿状となすとともに、これをドクターブレード法を採用してシート状となすことにより複数枚のセラミックグリーンシートを得て、しかる後、セラミックグリーンシートを切断加工や打ち抜き加工により適当な形状とするとともにこれを複数枚積層し、最後にこの積層されたセラミックグリーンシートを還元雰囲気中、約1600℃の温度で焼成することによって製作される。   The insulating substrate 1 is made of ceramics such as an aluminum oxide sintered body, an aluminum nitride sintered body, a mullite sintered body, a silicon nitride sintered body, a silicon carbide sintered body, and a glass ceramic sintered body. When the insulating substrate 1 is made of, for example, an aluminum oxide sintered body, an appropriate organic binder and solvent are added to and mixed with ceramic raw material powders such as aluminum oxide, silicon oxide, magnesium oxide, and calcium oxide to form a slurry. A plurality of ceramic green sheets are obtained by adopting a doctor blade method to form a sheet, and then the ceramic green sheets are formed into an appropriate shape by cutting or punching, and a plurality of them are laminated, Finally, the laminated ceramic green sheets are manufactured by firing at a temperature of about 1600 ° C. in a reducing atmosphere.

この絶縁基体1は、半導体素子や容量素子,圧電振動子等の電子部品を搭載,支持するための基体として機能し、通常、後述するように電極パッド3が形成される一方主面(図1の例では下面)と対向する他方主面(図1の例では上面)に電子部品が搭載される。   The insulating base 1 functions as a base for mounting and supporting electronic components such as semiconductor elements, capacitive elements, and piezoelectric vibrators, and usually has one main surface on which electrode pads 3 are formed as will be described later (FIG. 1). In this example, an electronic component is mounted on the other main surface (upper surface in the example of FIG. 1) opposite to the lower surface.

また、絶縁基体1の内部には、配線導体2が形成されている。配線導体2は、貫通導体4を介して、絶縁基体1の一方主面に形成された電極パッド3と電気的に接続されている。   A wiring conductor 2 is formed inside the insulating base 1. The wiring conductor 2 is electrically connected to the electrode pad 3 formed on one main surface of the insulating base 1 through the through conductor 4.

そして、配線導体2を絶縁基体1の他方主面に導出し、この導出した露出部分に電子部品の電極を電気的に接続することにより、絶縁基体1に搭載した電子部品の電極が配線導体2および貫通導体4を介して電極パッド3と電気的に接続される。   Then, the wiring conductor 2 is led out to the other main surface of the insulating base 1, and the electrode of the electronic component is electrically connected to the lead-out exposed portion so that the electrode of the electronic component mounted on the insulating base 1 is connected to the wiring conductor 2. In addition, the electrode pad 3 is electrically connected through the through conductor 4.

このような配線導体2は、タングステン,モリブデン,銅,銀等のメタライズ導体により形成されている。配線導体2は、例えば、タングステン,モリブデン,銅,銀等の金属ペーストを絶縁基体1となるセラミックグリーンシートの表面に印刷塗布しておくことにより形成される。   Such a wiring conductor 2 is formed of a metallized conductor such as tungsten, molybdenum, copper, or silver. The wiring conductor 2 is formed, for example, by printing and applying a metal paste such as tungsten, molybdenum, copper, or silver on the surface of a ceramic green sheet that becomes the insulating substrate 1.

絶縁基体1の一方主面(図1(b)の例では下面)には、複数の電極パッド3が四角形状の配列パターンとなるように縦横に配列形成されている。また、各電極パッド3から絶縁基体1の内部にかけて貫通導体4が形成されている。貫通導体4は、電極パッド3と配線導体2とを電気的に接続する機能をなし、その上端等で配線導体2と接して電気的に接続されている。   On one main surface (the lower surface in the example of FIG. 1B) of the insulating base 1, a plurality of electrode pads 3 are arranged vertically and horizontally so as to form a square array pattern. A through conductor 4 is formed from each electrode pad 3 to the inside of the insulating substrate 1. The through conductor 4 has a function of electrically connecting the electrode pad 3 and the wiring conductor 2, and is in contact with and electrically connected to the wiring conductor 2 at its upper end or the like.

電極パッド3は、配線基板9の外部接続用のパッドとして機能し、この電極パッド3は導体バンプ(図示せず)を介して外部電気回路基板の例えば回路配線(図示せず)に接合されることにより、配線基板9が外部電気回路基板に対して電気的、機械的に接続され、電子部品が外部電気回路と電気的に接続される。   The electrode pad 3 functions as a pad for external connection of the wiring board 9, and this electrode pad 3 is bonded to, for example, circuit wiring (not shown) of the external electric circuit board via a conductor bump (not shown). Thus, the wiring board 9 is electrically and mechanically connected to the external electric circuit board, and the electronic component is electrically connected to the external electric circuit.

この電極パッド3および貫通導体4は、通常、配線導体2と同様のメタライズ金属から成り、例えば、予め絶縁基体1となるセラミックグリーンシートのうち電極パッドが形成される部位に貫通孔を形成しておき、このセラミックグリーンシートの表面および貫通孔内に、配線導体2と同様の金属ペーストを従来周知のスクリーン印刷法により所定のパターンに印刷塗布し、充填しておくことにより形成される。   The electrode pad 3 and the through conductor 4 are usually made of the same metallized metal as that of the wiring conductor 2. For example, a through hole is previously formed in a portion of the ceramic green sheet to be the insulating base 1 where the electrode pad is formed. In addition, a metal paste similar to that of the wiring conductor 2 is printed and applied in a predetermined pattern on the surface and through-holes of the ceramic green sheet by a well-known screen printing method and filled.

なお、電極パッド3は、配線基板9の小型化や高密度化に対応するために、絶縁基体1の主面のほぼ全域にわたって全体が四角形状の配列パターンとなるように縦横に配列形成されており、絶縁基体1の主面の四角形状の配列パターンの各隅部にも電極パッド3aが形成されている。   The electrode pads 3 are arranged vertically and horizontally so as to form a rectangular array pattern over almost the entire main surface of the insulating base 1 in order to cope with the downsizing and high density of the wiring board 9. In addition, electrode pads 3 a are also formed at each corner of the square array pattern on the main surface of the insulating substrate 1.

本発明の配線基板9においては、電極パッド3のうち四角形状の配列パターンの各隅部に形成された電極パッド3aは、その他の電極パッド3よりも多くの貫通導体4が形成されている。これにより、貫通導体4によるアンカー効果で、電極パッド3aと絶縁基体1との接合強度が高くなり、配線基板9の絶縁基体1と外部電気回路基板(図示せず)との熱膨張係数の差により発生する熱応力等の応力が電極パッド3,3aに作用しても、電極パッド3,3aが絶縁基体1から剥がれるのを効果的に防ぐことができる。そのため、絶縁基体1の主面に形成した電極パッド3,3aを外部電気回路基板の回路配線(図示せず)に対し導体バンプ(図示せず)を介して長期にわたって確実に電気的に接続させておくことができ、高い電気的な接続信頼性を有する配線基板9とすることができる。   In the wiring board 9 of the present invention, the electrode pads 3 a formed at the corners of the square array pattern of the electrode pads 3 are formed with more through conductors 4 than the other electrode pads 3. Thereby, due to the anchor effect by the through conductor 4, the bonding strength between the electrode pad 3a and the insulating base 1 is increased, and the difference in thermal expansion coefficient between the insulating base 1 of the wiring board 9 and the external electric circuit board (not shown). Even if stress such as thermal stress generated by the above acts on the electrode pads 3, 3 a, it is possible to effectively prevent the electrode pads 3, 3 a from peeling off from the insulating substrate 1. Therefore, the electrode pads 3 and 3a formed on the main surface of the insulating base 1 are reliably electrically connected over a long period to the circuit wiring (not shown) of the external electric circuit board via the conductor bumps (not shown). Therefore, the wiring board 9 having high electrical connection reliability can be obtained.

各隅部の電極パッド3aの貫通導体4の数を、他の電極パッド3の貫通導体4の数よりも多くするに際して、他の電極パッド3と配線導体2との間の電気的な接続が一つの貫通導体4で確保できるときには、他の電極パッド3に接続される貫通導体4の数をそれぞれ1個とし、各隅部の電極パッド3aに接続される貫通導体4の数を2個乃至4個とすることが好ましい。   When the number of through conductors 4 in each corner electrode pad 3a is made larger than the number of through conductors 4 in other electrode pads 3, the electrical connection between the other electrode pads 3 and the wiring conductor 2 is reduced. When one through conductor 4 can be secured, the number of through conductors 4 connected to the other electrode pads 3 is one, and the number of through conductors 4 connected to the electrode pads 3a at each corner is two or more. It is preferable to use four.

各隅部の電極パッド3aに5個以上の貫通導体4をそれぞれ形成した場合、電極パッド3aの絶縁基体1に対する接合面積そのものが小さくなってしまうため、かえって電極パッド3aの絶縁基体1に対する接合強度が低くなり、配線基板9の外部電気回路基板に対する接続信頼性が低下するおそれがある。   When five or more through conductors 4 are formed in the electrode pads 3a at each corner, the bonding area of the electrode pads 3a to the insulating substrate 1 itself becomes small, so that the bonding strength of the electrode pads 3a to the insulating substrate 1 is instead. And the connection reliability of the wiring board 9 to the external electric circuit board may be reduced.

なお、電極パッド3,3aおよび貫通導体4は、平面視で円形状または楕円形状等の角部のない形状であることが好ましい。角部があると、その角部に、貫通導体4と絶縁基体1との熱膨張係数の差に起因する熱応力等の応力が集中し、角部から貫通導体4、絶縁基体1、または貫通導体4と絶縁基体1との接合界面等に、亀裂等の機械的な破壊が生じやすくなり、配線基板9の外部接続等の長期信頼性が劣化するおそれがある。   In addition, it is preferable that the electrode pads 3 and 3a and the penetration conductor 4 are shapes without a corner | angular part, such as circular shape or ellipse shape by planar view. If there is a corner, stress such as thermal stress due to the difference in thermal expansion coefficient between the through conductor 4 and the insulating base 1 is concentrated on the corner, and the through conductor 4, the insulating base 1, or the through passes from the corner. Mechanical damage such as cracks is likely to occur at the bonding interface between the conductor 4 and the insulating base 1, and long-term reliability such as external connection of the wiring board 9 may be deteriorated.

電極パッド3,3aおよび貫通導体4を平面視で円形状、楕円形状とする場合、その直径または長軸,短軸の長さは、配線基板9の小型化や、電極パッド3,3aの外部電気回路基板に対する接続の信頼性、電極パッド3,3aと配線導体2との貫通導体4を介しての電気的接続の信頼性等を確保するために、例えば200〜1000μmの範囲で形成するのがよい。   When the electrode pads 3 and 3a and the through conductors 4 are circular or elliptical in plan view, the diameter, the major axis, and the length of the minor axis depend on the size of the wiring board 9 and the outside of the electrode pads 3 and 3a. In order to ensure the reliability of the connection to the electric circuit board, the reliability of the electrical connection through the through conductor 4 between the electrode pads 3 and 3a and the wiring conductor 2, etc., it is formed in the range of 200 to 1000 μm, for example. Is good.

また、本発明において、四角形状の配列パターンの各隅部の電極パッド3aは、絶縁基体1の主面の対角線に沿って配置された2個の貫通導体4が形成されていることが好ましい。この構成により、熱応力等の応力が作用する方向に沿って2個の貫通導体4が並ぶので、よりアンカー効果の影響が強くなり、電極パッド3aと絶縁基体1との接合強度が高くなり、配線基板9の絶縁基体1と外部電気回路基板との熱膨張係数の差により発生する熱応力等の応力による剥離、破損、接続性の劣化等をより効果的に防止できる。   In the present invention, it is preferable that the electrode pads 3a at each corner of the square array pattern are formed with two through conductors 4 arranged along the diagonal of the main surface of the insulating substrate 1. With this configuration, since the two through conductors 4 are arranged along the direction in which the stress such as thermal stress acts, the influence of the anchor effect becomes stronger, and the bonding strength between the electrode pad 3a and the insulating substrate 1 becomes higher. It is possible to more effectively prevent peeling, breakage, deterioration of connectivity, and the like due to stress such as thermal stress generated by the difference in thermal expansion coefficient between the insulating base 1 of the wiring board 9 and the external electric circuit board.

そのため、絶縁基体1の主面に形成した電極パッド3を外部電気回路基板の端子パッドに対し導体バンプを介して長期にわたって確実に電気的接続させておくことができ、高い電気的な接続信頼性を有する配線基板9とすることができる。   Therefore, the electrode pad 3 formed on the main surface of the insulating base 1 can be reliably electrically connected to the terminal pad of the external electric circuit board through the conductor bump for a long period of time, and high electrical connection reliability. A wiring board 9 having

各隅部の電極パッド3aについて、2個の貫通導体4を絶縁基体1の主面の対角線に沿って配置する場合、貫通導体4の断面形状を、対角線に沿った方向に長軸が位置するような楕円形状としておくとよく、この場合応力が作用する方向における貫通導体4と電極パッド3aとの接合の面積が増えるので、より効果的にアンカー効果を得ることができ、外部接続の信頼性をさらに向上させることができる。   When the two through conductors 4 are arranged along the diagonal line of the main surface of the insulating base 1 with respect to the electrode pad 3a at each corner, the long axis of the cross-sectional shape of the through conductor 4 is positioned in the direction along the diagonal line. In this case, since the area of the junction between the through conductor 4 and the electrode pad 3a in the direction in which the stress acts increases, the anchor effect can be obtained more effectively, and the reliability of the external connection Can be further improved.

ただし、各隅部の電極パッド3aに形成される貫通導体4の断面形状を楕円形状として2個形成する場合、楕円形状のものを長手方向に2個接続して配置し、電極パッド3aを直径方向等に横断してしまうと、電極パッド3aが貫通導体4で分断されたようになるので、電極パッド3aの絶縁基体1に対する接合の強度が低下するおそれがある。そのため、各隅部の電極パッド3aに、絶縁基体1の主面の対角線に沿って2個の貫通導体4を形成する場合、貫通導体4同士の間の間隔、および貫通導体4と電極パッド3aの外周縁との間の間隔は、20μm以上とすることが好ましい。   However, when two cross-sectional shapes of the through conductors 4 formed on the electrode pads 3a at each corner are formed in an elliptical shape, two elliptical ones are connected in the longitudinal direction, and the electrode pad 3a has a diameter. If the electrode pad 3a is crossed in the direction or the like, the electrode pad 3a appears to be divided by the through conductor 4, so that the bonding strength of the electrode pad 3a to the insulating substrate 1 may be reduced. Therefore, when the two through conductors 4 are formed on the electrode pads 3a at the corners along the diagonal line of the main surface of the insulating base 1, the distance between the through conductors 4 and the through conductors 4 and the electrode pads 3a. It is preferable that the space | interval between the outer periphery of this is 20 micrometers or more.

また、各隅部の電極パッド3aに2個の貫通導体4を対角線に沿って配置する場合、各電極パッド3aにおいて、より大きな熱応力等の作用する外側に位置する貫通導体4の方を、内側に位置する貫通導体4よりも平面視で大きな形状(断面形状)としておくことが好ましい。   Further, when the two through conductors 4 are arranged along the diagonal lines in the electrode pads 3a at the respective corners, the through conductors 4 positioned on the outer side where a larger thermal stress acts on each electrode pad 3a, It is preferable to have a larger shape (cross-sectional shape) in plan view than the through conductor 4 located inside.

電極パッド3,3aおよび配線導体2は、その露出表面にニッケル,金等のめっき層を被着させておくことが好ましい。例えば、厚さが1〜10μm程度のニッケルめっき層と、厚さが0.05〜2μm程度の金めっき層とを順次被着させておくと、電極パッド3,3aおよび配線導体2の酸化腐食を効果的に防止することができるとともに、電極パッド3,3aに対する導体バンプの濡れ性を良好とすることができる。   The electrode pads 3 and 3a and the wiring conductor 2 are preferably coated with a plating layer such as nickel or gold on the exposed surfaces. For example, if a nickel plating layer having a thickness of about 1 to 10 μm and a gold plating layer having a thickness of about 0.05 to 2 μm are sequentially deposited, the oxidative corrosion of the electrode pads 3 and 3a and the wiring conductor 2 is caused. Can be effectively prevented, and the wettability of the conductor bumps with respect to the electrode pads 3 and 3a can be improved.

この場合、電極パッド3,3aに被着させるめっき層と、配線導体2に被着させるめっき層とは、同じ層構成、同じ厚みとする必要はなく、各部位の使用目的等に応じて、層構成や厚みを変えるようにしてもよい。例えば、電極パッド3,3aには金めっき層を薄く被着させて、導体バンプの成分と金成分との間で脆い金属間化合物が多量に生成されることを防止し、外部接続の信頼性をより一層優れたものとするようにしてもよい。   In this case, the plating layer to be applied to the electrode pads 3 and 3a and the plating layer to be applied to the wiring conductor 2 do not have to have the same layer configuration and the same thickness, depending on the purpose of use of each part, The layer configuration and thickness may be changed. For example, a thin gold plating layer is applied to the electrode pads 3 and 3a to prevent the formation of a large amount of brittle intermetallic compounds between the conductive bump component and the gold component, and the reliability of external connection May be made even more excellent.

なお、本発明は上述の実施の形態の例に限定されるものではなく、本発明の要旨を逸脱しない範囲であれば種々の変更は可能である。   Note that the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the present invention.

(a),(b)は本発明の配線基板の実施の形態の一例を示す平面図,断面図である。(A), (b) is the top view and sectional drawing which show an example of embodiment of the wiring board of this invention.

符号の説明Explanation of symbols

1・・・絶縁基体
2・・・配線導体
3・・・電極パッド
3a・・・配列パターンの各隅部に形成された電極パッド
4・・・貫通導体
9・・・配線基板
DESCRIPTION OF SYMBOLS 1 ... Insulation base | substrate 2 ... Wiring conductor 3 ... Electrode pad 3a ... Electrode pad formed in each corner of arrangement pattern 4 ... Penetration conductor 9 ... Wiring board

Claims (2)

内部に配線導体が形成されたセラミックスから成る四角板状の絶縁基体と、該絶縁基体の主面に全体が四角形状の配列パターンとなるように縦横に配列形成された複数の電極パッドと、該各電極パッドから前記絶縁基体の内部にかけて形成された貫通導体とを具備しており、前記複数の電極パッドのうち前記四角形状の配列パターンの各隅部に形成されたものはその他のものよりも前記貫通導体の数が多いことを特徴とする配線基板。 A rectangular plate-like insulating base made of ceramics with wiring conductors formed therein, a plurality of electrode pads arranged vertically and horizontally so as to form a square-shaped array pattern on the main surface of the insulating base; A through conductor formed from each electrode pad to the inside of the insulating substrate, and the plurality of electrode pads formed at each corner of the square array pattern than the others A wiring board having a large number of through conductors. 前記四角形状の配列パターンの各隅部の前記電極パッドは、前記絶縁基体の主面の対角線に沿って配置された2個の貫通導体が形成されていることを特徴とする請求項1記載の配線基板。 The electrode pad at each corner of the square array pattern is formed with two through conductors arranged along a diagonal of the main surface of the insulating base. Wiring board.
JP2003426891A 2003-12-24 2003-12-24 Wiring board Expired - Fee Related JP4217151B2 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012176402A1 (en) * 2011-06-21 2012-12-27 株式会社村田製作所 Circuit module
US10707388B2 (en) 2017-09-27 2020-07-07 Nichia Corporation Semiconductor device, and method for manufacturing semiconductor device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012176402A1 (en) * 2011-06-21 2012-12-27 株式会社村田製作所 Circuit module
CN103608915A (en) * 2011-06-21 2014-02-26 株式会社村田制作所 Circuit module
JPWO2012176402A1 (en) * 2011-06-21 2015-02-23 株式会社村田製作所 Circuit module
US9961764B2 (en) 2011-06-21 2018-05-01 Murata Manufacturing Co., Ltd. Circuit module
US10707388B2 (en) 2017-09-27 2020-07-07 Nichia Corporation Semiconductor device, and method for manufacturing semiconductor device

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