JP4698704B2 - 基板の表面処理方法及び微細配線の形成方法 - Google Patents
基板の表面処理方法及び微細配線の形成方法 Download PDFInfo
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- JP4698704B2 JP4698704B2 JP2008148898A JP2008148898A JP4698704B2 JP 4698704 B2 JP4698704 B2 JP 4698704B2 JP 2008148898 A JP2008148898 A JP 2008148898A JP 2008148898 A JP2008148898 A JP 2008148898A JP 4698704 B2 JP4698704 B2 JP 4698704B2
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- surface treatment
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- 239000000758 substrate Substances 0.000 title claims description 65
- 238000000034 method Methods 0.000 title claims description 51
- 238000004381 surface treatment Methods 0.000 title claims description 36
- 230000015572 biosynthetic process Effects 0.000 title description 3
- 230000005660 hydrophilic surface Effects 0.000 claims description 11
- OHMHBGPWCHTMQE-UHFFFAOYSA-N 2,2-dichloro-1,1,1-trifluoroethane Chemical compound FC(F)(F)C(Cl)Cl OHMHBGPWCHTMQE-UHFFFAOYSA-N 0.000 claims description 9
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 229910052736 halogen Inorganic materials 0.000 claims description 3
- 150000002367 halogens Chemical class 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- 238000009832 plasma treatment Methods 0.000 claims description 3
- 238000009835 boiling Methods 0.000 description 29
- 239000007788 liquid Substances 0.000 description 27
- 239000000853 adhesive Substances 0.000 description 12
- 230000001070 adhesive effect Effects 0.000 description 12
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 8
- 229910052731 fluorine Inorganic materials 0.000 description 8
- 239000011737 fluorine Substances 0.000 description 8
- 239000005871 repellent Substances 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 239000004642 Polyimide Substances 0.000 description 5
- 229920001721 polyimide Polymers 0.000 description 5
- 238000007639 printing Methods 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- COAUHYBSXMIJDK-UHFFFAOYSA-N 3,3-dichloro-1,1,1,2,2-pentafluoropropane Chemical compound FC(F)(F)C(F)(F)C(Cl)Cl COAUHYBSXMIJDK-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- RWRIWBAIICGTTQ-UHFFFAOYSA-N difluoromethane Chemical compound FCF RWRIWBAIICGTTQ-UHFFFAOYSA-N 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002082 metal nanoparticle Substances 0.000 description 2
- BGHCVCJVXZWKCC-UHFFFAOYSA-N tetradecane Chemical compound CCCCCCCCCCCCCC BGHCVCJVXZWKCC-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- LVGUZGTVOIAKKC-UHFFFAOYSA-N 1,1,1,2-tetrafluoroethane Chemical compound FCC(F)(F)F LVGUZGTVOIAKKC-UHFFFAOYSA-N 0.000 description 1
- FRCHKSNAZZFGCA-UHFFFAOYSA-N 1,1-dichloro-1-fluoroethane Chemical compound CC(F)(Cl)Cl FRCHKSNAZZFGCA-UHFFFAOYSA-N 0.000 description 1
- NPNPZTNLOVBDOC-UHFFFAOYSA-N 1,1-difluoroethane Chemical compound CC(F)F NPNPZTNLOVBDOC-UHFFFAOYSA-N 0.000 description 1
- BOUGCJDAQLKBQH-UHFFFAOYSA-N 1-chloro-1,2,2,2-tetrafluoroethane Chemical compound FC(Cl)C(F)(F)F BOUGCJDAQLKBQH-UHFFFAOYSA-N 0.000 description 1
- VOPWNXZWBYDODV-UHFFFAOYSA-N Chlorodifluoromethane Chemical compound FC(F)Cl VOPWNXZWBYDODV-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- GTLACDSXYULKMZ-UHFFFAOYSA-N pentafluoroethane Chemical compound FC(F)C(F)(F)F GTLACDSXYULKMZ-UHFFFAOYSA-N 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000002940 repellent Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/381—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the substrate
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/032—Organic insulating material consisting of one material
- H05K1/0346—Organic insulating material consisting of one material containing N
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
- H05K2203/013—Inkjet printing, e.g. for printing insulating material or resist
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/09—Treatments involving charged particles
- H05K2203/095—Plasma, e.g. for treating a substrate to improve adhesion with a conductor or for cleaning holes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/12—Using specific substances
- H05K2203/122—Organic non-polymeric compounds, e.g. oil, wax, thiol
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1241—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing
- H05K3/125—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing by ink-jet printing
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing Of Printed Wiring (AREA)
Description
いかなる表面処理もしていない、厚さ51μmのポリイミド基板上に、実施例1で使用された銀ナノインクを室温で35マイクロリットルピペットを用いて実施例1と同じ方法で落とした。図2は、吐出されたインク液滴の写真であって、インク液滴のサイズは、直径が8mmであった。
Claims (4)
- 微細配線が形成される基板を準備する工程と、
前記基板の表面を、クロロフルオロカーボン(CFC)、ハイドロクロロフルオロカーボン(HCFC)、及びハイドロフルオロカーボン(HFC)からなる群より選択される少なくとも一つで処理する工程
とを含む、基板の表面処理方法。 - 前記基板の表面を、クロロフルオロカーボン(CFC)、ハイドロクロロフルオロカーボン(HCFC)、及びハイドロフルオロカーボン(HFC)からなる群より選択される少なくとも一つで処理する工程の前に、親水性表面処理をする工程をさらに含む、請求項1に記載の基板の表面処理方法。
- 前記親水性表面処理が、酸素またはハロゲンガス雰囲気下でのプラズマ処理である、請求項2に記載の基板の表面処理方法。
- 請求項1〜請求項3の何れか1項に記載の方法により基板の表面処理をする工程と、
前記クロロフルオロカーボン(CFC)、ハイドロクロロフルオロカーボン(HCFC)、及びハイドロフルオロカーボン(HFC)からなる群より選択される少なくとも一つが蒸発する前に、前記表面処理された基板上にインクを吐出させて金属配線を形成する工程
とを含む、微細配線の形成方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2007-0058313 | 2007-06-14 | ||
KR1020070058313A KR100850757B1 (ko) | 2007-06-14 | 2007-06-14 | 기판의 표면처리방법 및 미세배선 형성방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008311648A JP2008311648A (ja) | 2008-12-25 |
JP4698704B2 true JP4698704B2 (ja) | 2011-06-08 |
Family
ID=39881291
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008148898A Expired - Fee Related JP4698704B2 (ja) | 2007-06-14 | 2008-06-06 | 基板の表面処理方法及び微細配線の形成方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7776407B2 (ja) |
JP (1) | JP4698704B2 (ja) |
KR (1) | KR100850757B1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2669974C (en) * | 2006-11-20 | 2014-07-08 | Atlantic Zeiser Gmbh | Security document/card for identification and method for producing a security document/card |
KR100999506B1 (ko) * | 2008-09-09 | 2010-12-09 | 삼성전기주식회사 | 인쇄회로기판 및 그 제조 방법 |
KR100999921B1 (ko) * | 2008-09-26 | 2010-12-13 | 삼성전기주식회사 | 기판의 이중 표면 처리 방법 및 상기 방법에 의해 표면 처리된 기판 |
KR101023405B1 (ko) | 2008-10-22 | 2011-03-25 | 한국기계연구원 | 초발수 유연기판의 회로 배선 방법 |
US20130319275A1 (en) | 2012-05-30 | 2013-12-05 | Elsie A. Fohrenkamm | Method for providing a printed pattern |
JP6482057B2 (ja) * | 2014-08-26 | 2019-03-13 | セイコーインスツル株式会社 | 油滴吐出器検査装置、及び油滴供給装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2006140437A (ja) * | 2004-09-27 | 2006-06-01 | Seiko Epson Corp | 多層構造形成方法、配線基板の製造方法、および電子機器の製造方法 |
JP2006165574A (ja) * | 2004-12-07 | 2006-06-22 | Samsung Sdi Co Ltd | 表示装置用基板の製造方法および表示装置用基板 |
Family Cites Families (14)
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JPH0212954A (ja) * | 1988-06-30 | 1990-01-17 | Fujitsu Ltd | 半導体装置 |
US5397397A (en) * | 1992-09-18 | 1995-03-14 | Crestek, Inc. | Method for cleaning and drying of metallic and nonmetallic surfaces |
US5327920A (en) * | 1993-02-23 | 1994-07-12 | Detrex Corporation | Automated apparatus and vapor/immersion cleaning method for soiled parts |
KR0168486B1 (ko) * | 1993-05-17 | 1999-01-15 | 야마다 시게아키 | 세정제, 세정방법 및 세정장치 |
JPH06347637A (ja) * | 1993-06-14 | 1994-12-22 | Dainippon Ink & Chem Inc | 印刷方法 |
JPH07134288A (ja) * | 1993-11-10 | 1995-05-23 | Dainippon Printing Co Ltd | 液晶光学素子及びその製造方法 |
US6106659A (en) * | 1997-07-14 | 2000-08-22 | The University Of Tennessee Research Corporation | Treater systems and methods for generating moderate-to-high-pressure plasma discharges for treating materials and related treated materials |
EP1113885A4 (en) * | 1998-08-21 | 2004-08-04 | Stanford Res Inst Int | PRINTING ELECTRONIC BOARDS AND COMPONENTS |
JP3865106B2 (ja) | 2000-03-31 | 2007-01-10 | セイコーエプソン株式会社 | シリコン膜パターンの形成方法 |
JP4170049B2 (ja) * | 2002-08-30 | 2008-10-22 | シャープ株式会社 | パターン形成基材およびパターン形成方法 |
JP2004146796A (ja) * | 2002-09-30 | 2004-05-20 | Seiko Epson Corp | 膜パターンの形成方法、薄膜製造装置、導電膜配線、電気光学装置、電子機器、並びに非接触型カード媒体 |
US20060228533A1 (en) * | 2003-04-16 | 2006-10-12 | Matsushita Electric Industrial Co., Ltd. | Discharging solution, method for producing patterns and method for producing for producing an electronic device using the discharging solution, and electronic device |
US20060174993A1 (en) * | 2005-02-04 | 2006-08-10 | Appleton Coated, Llc | Display with self-illuminatable image and method for making the display substrate and for making the image |
JP2006269599A (ja) * | 2005-03-23 | 2006-10-05 | Sony Corp | パターン形成方法、有機電界効果型トランジスタの製造方法、及び、フレキシブルプリント回路板の製造方法 |
-
2007
- 2007-06-14 KR KR1020070058313A patent/KR100850757B1/ko not_active IP Right Cessation
-
2008
- 2008-04-16 US US12/081,429 patent/US7776407B2/en not_active Expired - Fee Related
- 2008-06-06 JP JP2008148898A patent/JP4698704B2/ja not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2006140437A (ja) * | 2004-09-27 | 2006-06-01 | Seiko Epson Corp | 多層構造形成方法、配線基板の製造方法、および電子機器の製造方法 |
JP2006165574A (ja) * | 2004-12-07 | 2006-06-22 | Samsung Sdi Co Ltd | 表示装置用基板の製造方法および表示装置用基板 |
Also Published As
Publication number | Publication date |
---|---|
US20080311312A1 (en) | 2008-12-18 |
US7776407B2 (en) | 2010-08-17 |
JP2008311648A (ja) | 2008-12-25 |
KR100850757B1 (ko) | 2008-08-06 |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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LAPS | Cancellation because of no payment of annual fees |